TWI508261B - 半導體裝置和其製造方法 - Google Patents

半導體裝置和其製造方法 Download PDF

Info

Publication number
TWI508261B
TWI508261B TW098131933A TW98131933A TWI508261B TW I508261 B TWI508261 B TW I508261B TW 098131933 A TW098131933 A TW 098131933A TW 98131933 A TW98131933 A TW 98131933A TW I508261 B TWI508261 B TW I508261B
Authority
TW
Taiwan
Prior art keywords
integrated circuit
semiconductor
insulator
layer
semiconductor integrated
Prior art date
Application number
TW098131933A
Other languages
English (en)
Chinese (zh)
Other versions
TW201027710A (en
Inventor
及川欣聰
江口晉吾
Original Assignee
半導體能源研究所股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 半導體能源研究所股份有限公司 filed Critical 半導體能源研究所股份有限公司
Publication of TW201027710A publication Critical patent/TW201027710A/zh
Application granted granted Critical
Publication of TWI508261B publication Critical patent/TWI508261B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/60Protection against electrostatic charges or discharges, e.g. Faraday shields
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/66High-frequency adaptations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6661High-frequency adaptations for passive devices
    • H01L2223/6677High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

Landscapes

  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Memories (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Non-Volatile Memory (AREA)
  • Recrystallisation Techniques (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW098131933A 2008-09-25 2009-09-22 半導體裝置和其製造方法 TWI508261B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008246083 2008-09-25

Publications (2)

Publication Number Publication Date
TW201027710A TW201027710A (en) 2010-07-16
TWI508261B true TWI508261B (zh) 2015-11-11

Family

ID=42036777

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098131933A TWI508261B (zh) 2008-09-25 2009-09-22 半導體裝置和其製造方法

Country Status (4)

Country Link
US (2) US8102034B2 (enExample)
JP (4) JP5395591B2 (enExample)
TW (1) TWI508261B (enExample)
WO (1) WO2010035627A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010035625A1 (en) * 2008-09-25 2010-04-01 Semiconductor Energy Laboratory Co., Ltd. Semi conductor device
JP5491833B2 (ja) 2008-12-05 2014-05-14 株式会社半導体エネルギー研究所 半導体装置
JP5501174B2 (ja) * 2009-09-17 2014-05-21 株式会社半導体エネルギー研究所 半導体装置
WO2011040213A1 (en) 2009-10-01 2011-04-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
US20120001179A1 (en) * 2010-07-02 2012-01-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8748964B2 (en) * 2010-10-22 2014-06-10 Micron Technology, Inc. Gettering agents in memory charge storage structures
WO2012090799A1 (en) * 2010-12-28 2012-07-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
KR101981808B1 (ko) * 2010-12-28 2019-08-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제조 방법
TWI570809B (zh) 2011-01-12 2017-02-11 半導體能源研究所股份有限公司 半導體裝置及其製造方法
JP5626010B2 (ja) * 2011-02-25 2014-11-19 富士通株式会社 半導体装置及びその製造方法、電源装置
US9012905B2 (en) 2011-04-08 2015-04-21 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device including transistor comprising oxide semiconductor and method for manufacturing the same
KR20140019699A (ko) * 2012-08-07 2014-02-17 삼성디스플레이 주식회사 플렉시블 유기 발광 표시 장치 및 그 제조방법
CN203305887U (zh) * 2013-01-17 2013-11-27 欧司朗有限公司 车载照明装置以及具有该照明装置的车辆
DE102013103268B4 (de) 2013-04-02 2016-06-02 Vacuumschmelze Gmbh & Co. Kg Abschirmfolie und Verfahren zum Herstellen einer Abschirmfolie
US10128177B2 (en) 2014-05-06 2018-11-13 Intel Corporation Multi-layer package with integrated antenna
US20180054077A1 (en) * 2016-08-17 2018-02-22 Apple Inc. Shield for a wirelessly charged electronic device
US10811334B2 (en) * 2016-11-26 2020-10-20 Texas Instruments Incorporated Integrated circuit nanoparticle thermal routing structure in interconnect region
US10529641B2 (en) * 2016-11-26 2020-01-07 Texas Instruments Incorporated Integrated circuit nanoparticle thermal routing structure over interconnect region
CN111727502B (zh) * 2018-02-15 2024-07-12 株式会社村田制作所 高频模块
US11724459B2 (en) 2018-04-06 2023-08-15 Hewlett-Packard Development Company, L.P. Configuring an additive manufacturing system
US11126002B2 (en) * 2018-05-14 2021-09-21 Tomoegawa Co., Ltd. Head-mounted display
JP7464400B2 (ja) * 2019-06-14 2024-04-09 Tianma Japan株式会社 薄膜デバイス

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020129957A1 (en) * 2001-03-19 2002-09-19 Kolb Lowell Edward Low profile non-electrically-conductive component cover for encasing circuit board components to prevent direct contact of a conformal EMI shield
US20050127443A1 (en) * 2002-03-26 2005-06-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for preparing the same
JP2007241999A (ja) * 2006-02-08 2007-09-20 Semiconductor Energy Lab Co Ltd 半導体装置
US20080224941A1 (en) * 2007-03-13 2008-09-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0483692A (ja) * 1990-07-26 1992-03-17 Sony Corp Icカード
US5879502A (en) 1994-05-27 1999-03-09 Gustafson; Ake Method for making an electronic module and electronic module obtained according to the method
JPH1092980A (ja) 1996-09-13 1998-04-10 Toshiba Corp 無線カードおよびその製造方法
JP3302293B2 (ja) * 1997-04-07 2002-07-15 キヤノン株式会社 画像形成装置
JPH11250209A (ja) * 1998-03-04 1999-09-17 Dainippon Printing Co Ltd 非接触型icカード
TW484101B (en) 1998-12-17 2002-04-21 Hitachi Ltd Semiconductor device and its manufacturing method
US6224965B1 (en) 1999-06-25 2001-05-01 Honeywell International Inc. Microfiber dielectrics which facilitate laser via drilling
JP4423779B2 (ja) 1999-10-13 2010-03-03 味の素株式会社 エポキシ樹脂組成物並びに該組成物を用いた接着フィルム及びプリプレグ、及びこれらを用いた多層プリント配線板及びその製造法
US7244890B2 (en) * 2001-02-15 2007-07-17 Integral Technologies Inc Low cost shielded cable manufactured from conductive loaded resin-based materials
JP4802398B2 (ja) * 2001-06-08 2011-10-26 凸版印刷株式会社 非接触icカード
JP2003101222A (ja) * 2001-09-21 2003-04-04 Sony Corp 薄膜回路基板装置及びその製造方法
KR100430001B1 (ko) * 2001-12-18 2004-05-03 엘지전자 주식회사 다층기판의 제조방법, 그 다층기판의 패드 형성방법 및 그다층기판을 이용한 반도체 패키지의 제조방법
JP2003228695A (ja) * 2002-02-04 2003-08-15 Hitachi Cable Ltd 非接触icカード及びその製造方法
US7485489B2 (en) * 2002-06-19 2009-02-03 Bjoersell Sten Electronics circuit manufacture
EP1514307A1 (en) 2002-06-19 2005-03-16 Sten Bjorsell Electronics circuit manufacture
JP2005284352A (ja) * 2004-03-26 2005-10-13 Toshiba Corp 携帯可能電子装置
US20050233122A1 (en) * 2004-04-19 2005-10-20 Mikio Nishimura Manufacturing method of laminated substrate, and manufacturing apparatus of semiconductor device for module and laminated substrate for use therein
KR101187403B1 (ko) 2004-06-02 2012-10-02 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체장치 제조방법
TWI372413B (en) * 2004-09-24 2012-09-11 Semiconductor Energy Lab Semiconductor device and method for manufacturing the same, and electric appliance
US7566633B2 (en) 2005-02-25 2009-07-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP4860343B2 (ja) * 2005-05-13 2012-01-25 株式会社半導体エネルギー研究所 表示装置の作製方法
US7485511B2 (en) * 2005-06-01 2009-02-03 Semiconductor Energy Laboratory Co., Ltd. Integrated circuit device and method for manufacturing integrated circuit device
US7727859B2 (en) * 2005-06-30 2010-06-01 Semiconductor Energy Laboratory Co., Ltd Semiconductor device and manufacturing method thereof
WO2007043285A1 (en) 2005-09-30 2007-04-19 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device
JP5063066B2 (ja) * 2005-09-30 2012-10-31 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP5008299B2 (ja) * 2005-11-30 2012-08-22 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4848758B2 (ja) * 2005-12-19 2011-12-28 大日本印刷株式会社 絶縁性金属層付き非接触icタグ
EP2259213B1 (en) 2006-02-08 2015-12-23 Semiconductor Energy Laboratory Co., Ltd. RFID device
EP1837304A3 (en) * 2006-03-20 2012-04-18 Semiconductor Energy Laboratory Co., Ltd. Micromachine including a mechanical structure connected to an electrical circuit and method for manufacturing the same
EP2038818B1 (en) 2006-06-26 2014-10-15 Semiconductor Energy Laboratory Co., Ltd. Paper including semiconductor device and manufacturing method thereof
JP2008041422A (ja) * 2006-08-07 2008-02-21 Sony Corp 平面型表示装置及びスペーサ
US7952100B2 (en) 2006-09-22 2011-05-31 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP5350616B2 (ja) * 2006-09-22 2013-11-27 株式会社半導体エネルギー研究所 半導体装置
JP5111094B2 (ja) * 2006-12-27 2012-12-26 株式会社半導体エネルギー研究所 半導体装置
US8816484B2 (en) * 2007-02-09 2014-08-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
EP2372756A1 (en) 2007-03-13 2011-10-05 Semiconductor Energy Laboratory Co, Ltd. Semiconductor device and manufacturing method thereof
EP1976001A3 (en) 2007-03-26 2012-08-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
EP1976000A3 (en) * 2007-03-26 2009-05-13 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP5248240B2 (ja) * 2007-08-30 2013-07-31 株式会社半導体エネルギー研究所 半導体装置
CN101803008B (zh) * 2007-09-07 2012-11-28 株式会社半导体能源研究所 半导体装置及其制造方法
KR101582503B1 (ko) * 2008-05-12 2016-01-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 반도체 장치의 제작 방법
WO2009142310A1 (en) * 2008-05-23 2009-11-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
WO2009142309A1 (en) * 2008-05-23 2009-11-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
JP5248412B2 (ja) 2008-06-06 2013-07-31 株式会社半導体エネルギー研究所 半導体装置の作製方法
US8053253B2 (en) 2008-06-06 2011-11-08 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
KR20110027760A (ko) * 2008-06-06 2011-03-16 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치의 제작 방법
WO2010032602A1 (en) * 2008-09-18 2010-03-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
CN102160179B (zh) * 2008-09-19 2014-05-14 株式会社半导体能源研究所 半导体装置及其制造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020129957A1 (en) * 2001-03-19 2002-09-19 Kolb Lowell Edward Low profile non-electrically-conductive component cover for encasing circuit board components to prevent direct contact of a conformal EMI shield
US20050127443A1 (en) * 2002-03-26 2005-06-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for preparing the same
JP2007241999A (ja) * 2006-02-08 2007-09-20 Semiconductor Energy Lab Co Ltd 半導体装置
US20080224941A1 (en) * 2007-03-13 2008-09-18 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof

Also Published As

Publication number Publication date
JP5395591B2 (ja) 2014-01-22
JP5829744B2 (ja) 2015-12-09
JP2016076226A (ja) 2016-05-12
TW201027710A (en) 2010-07-16
US20100072583A1 (en) 2010-03-25
US20120119339A1 (en) 2012-05-17
WO2010035627A1 (en) 2010-04-01
JP2015084228A (ja) 2015-04-30
JP2010102698A (ja) 2010-05-06
US8102034B2 (en) 2012-01-24
US8803298B2 (en) 2014-08-12
JP6140244B2 (ja) 2017-05-31
JP2014067423A (ja) 2014-04-17

Similar Documents

Publication Publication Date Title
TWI508261B (zh) 半導體裝置和其製造方法
JP5380154B2 (ja) 半導体装置
TWI452675B (zh) 半導體裝置和其製造方法
JP5380156B2 (ja) 半導体装置
JP5315134B2 (ja) 半導体装置
JP2014123375A (ja) 半導体装置
JP5306705B2 (ja) 半導体装置
JP5415713B2 (ja) 半導体装置
CN1940977B (zh) 半导体装置
JP5268459B2 (ja) 半導体装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees