TWI508261B - 半導體裝置和其製造方法 - Google Patents
半導體裝置和其製造方法 Download PDFInfo
- Publication number
- TWI508261B TWI508261B TW098131933A TW98131933A TWI508261B TW I508261 B TWI508261 B TW I508261B TW 098131933 A TW098131933 A TW 098131933A TW 98131933 A TW98131933 A TW 98131933A TW I508261 B TWI508261 B TW I508261B
- Authority
- TW
- Taiwan
- Prior art keywords
- integrated circuit
- semiconductor
- insulator
- layer
- semiconductor integrated
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/60—Protection against electrostatic charges or discharges, e.g. Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/58—Structural electrical arrangements for semiconductor devices not otherwise provided for
- H01L2223/64—Impedance arrangements
- H01L2223/66—High-frequency adaptations
- H01L2223/6661—High-frequency adaptations for passive devices
- H01L2223/6677—High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
Landscapes
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
- Recrystallisation Techniques (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008246083 | 2008-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201027710A TW201027710A (en) | 2010-07-16 |
| TWI508261B true TWI508261B (zh) | 2015-11-11 |
Family
ID=42036777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098131933A TWI508261B (zh) | 2008-09-25 | 2009-09-22 | 半導體裝置和其製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8102034B2 (enExample) |
| JP (4) | JP5395591B2 (enExample) |
| TW (1) | TWI508261B (enExample) |
| WO (1) | WO2010035627A1 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010035625A1 (en) * | 2008-09-25 | 2010-04-01 | Semiconductor Energy Laboratory Co., Ltd. | Semi conductor device |
| JP5491833B2 (ja) | 2008-12-05 | 2014-05-14 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP5501174B2 (ja) * | 2009-09-17 | 2014-05-21 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| WO2011040213A1 (en) | 2009-10-01 | 2011-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| US20120001179A1 (en) * | 2010-07-02 | 2012-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US8748964B2 (en) * | 2010-10-22 | 2014-06-10 | Micron Technology, Inc. | Gettering agents in memory charge storage structures |
| WO2012090799A1 (en) * | 2010-12-28 | 2012-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| KR101981808B1 (ko) * | 2010-12-28 | 2019-08-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 그 제조 방법 |
| TWI570809B (zh) | 2011-01-12 | 2017-02-11 | 半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| JP5626010B2 (ja) * | 2011-02-25 | 2014-11-19 | 富士通株式会社 | 半導体装置及びその製造方法、電源装置 |
| US9012905B2 (en) | 2011-04-08 | 2015-04-21 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including transistor comprising oxide semiconductor and method for manufacturing the same |
| KR20140019699A (ko) * | 2012-08-07 | 2014-02-17 | 삼성디스플레이 주식회사 | 플렉시블 유기 발광 표시 장치 및 그 제조방법 |
| CN203305887U (zh) * | 2013-01-17 | 2013-11-27 | 欧司朗有限公司 | 车载照明装置以及具有该照明装置的车辆 |
| DE102013103268B4 (de) | 2013-04-02 | 2016-06-02 | Vacuumschmelze Gmbh & Co. Kg | Abschirmfolie und Verfahren zum Herstellen einer Abschirmfolie |
| US10128177B2 (en) | 2014-05-06 | 2018-11-13 | Intel Corporation | Multi-layer package with integrated antenna |
| US20180054077A1 (en) * | 2016-08-17 | 2018-02-22 | Apple Inc. | Shield for a wirelessly charged electronic device |
| US10811334B2 (en) * | 2016-11-26 | 2020-10-20 | Texas Instruments Incorporated | Integrated circuit nanoparticle thermal routing structure in interconnect region |
| US10529641B2 (en) * | 2016-11-26 | 2020-01-07 | Texas Instruments Incorporated | Integrated circuit nanoparticle thermal routing structure over interconnect region |
| CN111727502B (zh) * | 2018-02-15 | 2024-07-12 | 株式会社村田制作所 | 高频模块 |
| US11724459B2 (en) | 2018-04-06 | 2023-08-15 | Hewlett-Packard Development Company, L.P. | Configuring an additive manufacturing system |
| US11126002B2 (en) * | 2018-05-14 | 2021-09-21 | Tomoegawa Co., Ltd. | Head-mounted display |
| JP7464400B2 (ja) * | 2019-06-14 | 2024-04-09 | Tianma Japan株式会社 | 薄膜デバイス |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020129957A1 (en) * | 2001-03-19 | 2002-09-19 | Kolb Lowell Edward | Low profile non-electrically-conductive component cover for encasing circuit board components to prevent direct contact of a conformal EMI shield |
| US20050127443A1 (en) * | 2002-03-26 | 2005-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for preparing the same |
| JP2007241999A (ja) * | 2006-02-08 | 2007-09-20 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| US20080224941A1 (en) * | 2007-03-13 | 2008-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
Family Cites Families (48)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0483692A (ja) * | 1990-07-26 | 1992-03-17 | Sony Corp | Icカード |
| US5879502A (en) | 1994-05-27 | 1999-03-09 | Gustafson; Ake | Method for making an electronic module and electronic module obtained according to the method |
| JPH1092980A (ja) | 1996-09-13 | 1998-04-10 | Toshiba Corp | 無線カードおよびその製造方法 |
| JP3302293B2 (ja) * | 1997-04-07 | 2002-07-15 | キヤノン株式会社 | 画像形成装置 |
| JPH11250209A (ja) * | 1998-03-04 | 1999-09-17 | Dainippon Printing Co Ltd | 非接触型icカード |
| TW484101B (en) | 1998-12-17 | 2002-04-21 | Hitachi Ltd | Semiconductor device and its manufacturing method |
| US6224965B1 (en) | 1999-06-25 | 2001-05-01 | Honeywell International Inc. | Microfiber dielectrics which facilitate laser via drilling |
| JP4423779B2 (ja) | 1999-10-13 | 2010-03-03 | 味の素株式会社 | エポキシ樹脂組成物並びに該組成物を用いた接着フィルム及びプリプレグ、及びこれらを用いた多層プリント配線板及びその製造法 |
| US7244890B2 (en) * | 2001-02-15 | 2007-07-17 | Integral Technologies Inc | Low cost shielded cable manufactured from conductive loaded resin-based materials |
| JP4802398B2 (ja) * | 2001-06-08 | 2011-10-26 | 凸版印刷株式会社 | 非接触icカード |
| JP2003101222A (ja) * | 2001-09-21 | 2003-04-04 | Sony Corp | 薄膜回路基板装置及びその製造方法 |
| KR100430001B1 (ko) * | 2001-12-18 | 2004-05-03 | 엘지전자 주식회사 | 다층기판의 제조방법, 그 다층기판의 패드 형성방법 및 그다층기판을 이용한 반도체 패키지의 제조방법 |
| JP2003228695A (ja) * | 2002-02-04 | 2003-08-15 | Hitachi Cable Ltd | 非接触icカード及びその製造方法 |
| US7485489B2 (en) * | 2002-06-19 | 2009-02-03 | Bjoersell Sten | Electronics circuit manufacture |
| EP1514307A1 (en) | 2002-06-19 | 2005-03-16 | Sten Bjorsell | Electronics circuit manufacture |
| JP2005284352A (ja) * | 2004-03-26 | 2005-10-13 | Toshiba Corp | 携帯可能電子装置 |
| US20050233122A1 (en) * | 2004-04-19 | 2005-10-20 | Mikio Nishimura | Manufacturing method of laminated substrate, and manufacturing apparatus of semiconductor device for module and laminated substrate for use therein |
| KR101187403B1 (ko) | 2004-06-02 | 2012-10-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체장치 제조방법 |
| TWI372413B (en) * | 2004-09-24 | 2012-09-11 | Semiconductor Energy Lab | Semiconductor device and method for manufacturing the same, and electric appliance |
| US7566633B2 (en) | 2005-02-25 | 2009-07-28 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| JP4860343B2 (ja) * | 2005-05-13 | 2012-01-25 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
| US7485511B2 (en) * | 2005-06-01 | 2009-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Integrated circuit device and method for manufacturing integrated circuit device |
| US7727859B2 (en) * | 2005-06-30 | 2010-06-01 | Semiconductor Energy Laboratory Co., Ltd | Semiconductor device and manufacturing method thereof |
| WO2007043285A1 (en) | 2005-09-30 | 2007-04-19 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
| JP5063066B2 (ja) * | 2005-09-30 | 2012-10-31 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP5008299B2 (ja) * | 2005-11-30 | 2012-08-22 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP4848758B2 (ja) * | 2005-12-19 | 2011-12-28 | 大日本印刷株式会社 | 絶縁性金属層付き非接触icタグ |
| EP2259213B1 (en) | 2006-02-08 | 2015-12-23 | Semiconductor Energy Laboratory Co., Ltd. | RFID device |
| EP1837304A3 (en) * | 2006-03-20 | 2012-04-18 | Semiconductor Energy Laboratory Co., Ltd. | Micromachine including a mechanical structure connected to an electrical circuit and method for manufacturing the same |
| EP2038818B1 (en) | 2006-06-26 | 2014-10-15 | Semiconductor Energy Laboratory Co., Ltd. | Paper including semiconductor device and manufacturing method thereof |
| JP2008041422A (ja) * | 2006-08-07 | 2008-02-21 | Sony Corp | 平面型表示装置及びスペーサ |
| US7952100B2 (en) | 2006-09-22 | 2011-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| JP5350616B2 (ja) * | 2006-09-22 | 2013-11-27 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP5111094B2 (ja) * | 2006-12-27 | 2012-12-26 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| US8816484B2 (en) * | 2007-02-09 | 2014-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| EP2372756A1 (en) | 2007-03-13 | 2011-10-05 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and manufacturing method thereof |
| EP1976001A3 (en) | 2007-03-26 | 2012-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| EP1976000A3 (en) * | 2007-03-26 | 2009-05-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP5248240B2 (ja) * | 2007-08-30 | 2013-07-31 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| CN101803008B (zh) * | 2007-09-07 | 2012-11-28 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
| KR101582503B1 (ko) * | 2008-05-12 | 2016-01-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
| WO2009142310A1 (en) * | 2008-05-23 | 2009-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| WO2009142309A1 (en) * | 2008-05-23 | 2009-11-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| JP5248412B2 (ja) | 2008-06-06 | 2013-07-31 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US8053253B2 (en) | 2008-06-06 | 2011-11-08 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| KR20110027760A (ko) * | 2008-06-06 | 2011-03-16 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 제작 방법 |
| WO2010032602A1 (en) * | 2008-09-18 | 2010-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| CN102160179B (zh) * | 2008-09-19 | 2014-05-14 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
-
2009
- 2009-09-01 WO PCT/JP2009/065558 patent/WO2010035627A1/en not_active Ceased
- 2009-09-17 JP JP2009216124A patent/JP5395591B2/ja not_active Expired - Fee Related
- 2009-09-22 TW TW098131933A patent/TWI508261B/zh not_active IP Right Cessation
- 2009-09-22 US US12/564,603 patent/US8102034B2/en not_active Expired - Fee Related
-
2012
- 2012-01-20 US US13/354,635 patent/US8803298B2/en not_active Expired - Fee Related
-
2013
- 2013-10-18 JP JP2013216935A patent/JP2014067423A/ja not_active Withdrawn
-
2014
- 2014-10-31 JP JP2014222346A patent/JP5829744B2/ja not_active Expired - Fee Related
-
2015
- 2015-10-28 JP JP2015211420A patent/JP6140244B2/ja not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020129957A1 (en) * | 2001-03-19 | 2002-09-19 | Kolb Lowell Edward | Low profile non-electrically-conductive component cover for encasing circuit board components to prevent direct contact of a conformal EMI shield |
| US20050127443A1 (en) * | 2002-03-26 | 2005-06-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for preparing the same |
| JP2007241999A (ja) * | 2006-02-08 | 2007-09-20 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| US20080224941A1 (en) * | 2007-03-13 | 2008-09-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5395591B2 (ja) | 2014-01-22 |
| JP5829744B2 (ja) | 2015-12-09 |
| JP2016076226A (ja) | 2016-05-12 |
| TW201027710A (en) | 2010-07-16 |
| US20100072583A1 (en) | 2010-03-25 |
| US20120119339A1 (en) | 2012-05-17 |
| WO2010035627A1 (en) | 2010-04-01 |
| JP2015084228A (ja) | 2015-04-30 |
| JP2010102698A (ja) | 2010-05-06 |
| US8102034B2 (en) | 2012-01-24 |
| US8803298B2 (en) | 2014-08-12 |
| JP6140244B2 (ja) | 2017-05-31 |
| JP2014067423A (ja) | 2014-04-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |