TWI491548B - 搬送裝置及搬送方法 - Google Patents

搬送裝置及搬送方法 Download PDF

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Publication number
TWI491548B
TWI491548B TW100109105A TW100109105A TWI491548B TW I491548 B TWI491548 B TW I491548B TW 100109105 A TW100109105 A TW 100109105A TW 100109105 A TW100109105 A TW 100109105A TW I491548 B TWI491548 B TW I491548B
Authority
TW
Taiwan
Prior art keywords
holding
tool
conveyance
transport
posture
Prior art date
Application number
TW100109105A
Other languages
English (en)
Chinese (zh)
Other versions
TW201144195A (en
Inventor
Tatsuo Nakao
Daisuke Ikeda
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of TW201144195A publication Critical patent/TW201144195A/zh
Application granted granted Critical
Publication of TWI491548B publication Critical patent/TWI491548B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/67787—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks with angular orientation of the workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
TW100109105A 2010-04-12 2011-03-17 搬送裝置及搬送方法 TWI491548B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010091539A JP5077718B2 (ja) 2010-04-12 2010-04-12 搬送装置

Publications (2)

Publication Number Publication Date
TW201144195A TW201144195A (en) 2011-12-16
TWI491548B true TWI491548B (zh) 2015-07-11

Family

ID=44743291

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100109105A TWI491548B (zh) 2010-04-12 2011-03-17 搬送裝置及搬送方法

Country Status (4)

Country Link
JP (1) JP5077718B2 (ko)
KR (1) KR101331106B1 (ko)
CN (1) CN102211712B (ko)
TW (1) TWI491548B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6013080B2 (ja) * 2012-08-20 2016-10-25 株式会社東京自働機械製作所 物品搬送装置
CN104779189B (zh) * 2014-01-13 2017-09-01 上海和辉光电有限公司 切割后玻璃面板搬送装置与搬送方法
JP6368508B2 (ja) * 2014-03-17 2018-08-01 東レエンジニアリング株式会社 基材浮上装置
JP6598820B2 (ja) * 2017-06-07 2019-10-30 株式会社Ｓｃｒｅｅｎホールディングス 搬送装置、搬送方法および検査システム
CN109484857A (zh) * 2018-12-25 2019-03-19 深圳市高美福电子有限公司 一种大尺寸导光板传送系统
CN111977140B (zh) * 2020-08-31 2022-02-11 安徽艺云玻璃有限公司 一种玻璃运输用存放设备及其使用方法
CN114506649B (zh) * 2022-02-21 2023-12-08 上海世禹精密设备股份有限公司 半导体元件翻转设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680242A (ja) * 1992-09-04 1994-03-22 Hitachi Electron Eng Co Ltd ワーク搬送処理ライン
JP2000128344A (ja) * 1998-10-23 2000-05-09 Hitachi Zosen Corp 薄板の保持搬送装置および薄板の保持搬送方法
JP2003341828A (ja) * 2002-05-27 2003-12-03 Shiraitekku:Kk 供給装置
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP2005075499A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
TWI295269B (ko) * 2005-01-26 2008-04-01 Maruyasu Kikai Kk

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3804134B2 (ja) * 1996-12-03 2006-08-02 凸版印刷株式会社 物品の移送装置
JP4030654B2 (ja) * 1998-06-02 2008-01-09 大日本スクリーン製造株式会社 基板搬送装置
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
JP4244007B2 (ja) * 2003-11-14 2009-03-25 株式会社ダイフク 搬送装置
ITTO20030927A1 (it) * 2003-11-21 2004-02-20 Forvet S R L Trasportatore a nastro sotto vuoto per lastre.
JP4633581B2 (ja) 2005-09-02 2011-02-16 株式会社ダイワ 物品搬送装置
CN201203729Y (zh) * 2008-06-06 2009-03-04 泰山光电(苏州)有限公司 液晶面板检测安装装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680242A (ja) * 1992-09-04 1994-03-22 Hitachi Electron Eng Co Ltd ワーク搬送処理ライン
JP2000128344A (ja) * 1998-10-23 2000-05-09 Hitachi Zosen Corp 薄板の保持搬送装置および薄板の保持搬送方法
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP2003341828A (ja) * 2002-05-27 2003-12-03 Shiraitekku:Kk 供給装置
JP2005075499A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
TWI295269B (ko) * 2005-01-26 2008-04-01 Maruyasu Kikai Kk

Also Published As

Publication number Publication date
CN102211712A (zh) 2011-10-12
JP5077718B2 (ja) 2012-11-21
TW201144195A (en) 2011-12-16
KR101331106B1 (ko) 2013-11-19
JP2011219238A (ja) 2011-11-04
CN102211712B (zh) 2015-03-25
KR20110114447A (ko) 2011-10-19

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