JP5077718B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP5077718B2
JP5077718B2 JP2010091539A JP2010091539A JP5077718B2 JP 5077718 B2 JP5077718 B2 JP 5077718B2 JP 2010091539 A JP2010091539 A JP 2010091539A JP 2010091539 A JP2010091539 A JP 2010091539A JP 5077718 B2 JP5077718 B2 JP 5077718B2
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JP
Japan
Prior art keywords
holding
posture
unit
transport
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010091539A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011219238A (ja
Inventor
多通夫 中尾
大介 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2010091539A priority Critical patent/JP5077718B2/ja
Priority to TW100109105A priority patent/TWI491548B/zh
Priority to KR1020110029407A priority patent/KR101331106B1/ko
Priority to CN201110100033.XA priority patent/CN102211712B/zh
Publication of JP2011219238A publication Critical patent/JP2011219238A/ja
Application granted granted Critical
Publication of JP5077718B2 publication Critical patent/JP5077718B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H01L21/67787—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks with angular orientation of the workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Specific Conveyance Elements (AREA)
JP2010091539A 2010-04-12 2010-04-12 搬送装置 Expired - Fee Related JP5077718B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010091539A JP5077718B2 (ja) 2010-04-12 2010-04-12 搬送装置
TW100109105A TWI491548B (zh) 2010-04-12 2011-03-17 搬送裝置及搬送方法
KR1020110029407A KR101331106B1 (ko) 2010-04-12 2011-03-31 반송 장치 및 반송 방법
CN201110100033.XA CN102211712B (zh) 2010-04-12 2011-04-11 搬送装置和搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010091539A JP5077718B2 (ja) 2010-04-12 2010-04-12 搬送装置

Publications (2)

Publication Number Publication Date
JP2011219238A JP2011219238A (ja) 2011-11-04
JP5077718B2 true JP5077718B2 (ja) 2012-11-21

Family

ID=44743291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010091539A Expired - Fee Related JP5077718B2 (ja) 2010-04-12 2010-04-12 搬送装置

Country Status (4)

Country Link
JP (1) JP5077718B2 (ko)
KR (1) KR101331106B1 (ko)
CN (1) CN102211712B (ko)
TW (1) TWI491548B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6013080B2 (ja) * 2012-08-20 2016-10-25 株式会社東京自働機械製作所 物品搬送装置
CN104779189B (zh) * 2014-01-13 2017-09-01 上海和辉光电有限公司 切割后玻璃面板搬送装置与搬送方法
JP6368508B2 (ja) * 2014-03-17 2018-08-01 東レエンジニアリング株式会社 基材浮上装置
JP6598820B2 (ja) * 2017-06-07 2019-10-30 株式会社Ｓｃｒｅｅｎホールディングス 搬送装置、搬送方法および検査システム
CN109484857A (zh) * 2018-12-25 2019-03-19 深圳市高美福电子有限公司 一种大尺寸导光板传送系统
CN111977140B (zh) * 2020-08-31 2022-02-11 安徽艺云玻璃有限公司 一种玻璃运输用存放设备及其使用方法
CN114506649B (zh) * 2022-02-21 2023-12-08 上海世禹精密设备股份有限公司 半导体元件翻转设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680242A (ja) * 1992-09-04 1994-03-22 Hitachi Electron Eng Co Ltd ワーク搬送処理ライン
JP3804134B2 (ja) * 1996-12-03 2006-08-02 凸版印刷株式会社 物品の移送装置
JP4030654B2 (ja) * 1998-06-02 2008-01-09 大日本スクリーン製造株式会社 基板搬送装置
JP4190065B2 (ja) * 1998-10-23 2008-12-03 日立造船株式会社 薄板の保持搬送方法
TWI226303B (en) * 2002-04-18 2005-01-11 Olympus Corp Substrate carrying device
JP2003341828A (ja) * 2002-05-27 2003-12-03 Shiraitekku:Kk 供給装置
TWI327985B (en) * 2003-04-14 2010-08-01 Daifuku Kk Apparatus for transporting plate-shaped work piece
JP2005075499A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4244007B2 (ja) * 2003-11-14 2009-03-25 株式会社ダイフク 搬送装置
ITTO20030927A1 (it) * 2003-11-21 2004-02-20 Forvet S R L Trasportatore a nastro sotto vuoto per lastre.
JP2006206218A (ja) * 2005-01-26 2006-08-10 Maruyasu Kikai Kk ガラス基板等の搬送システム
JP4633581B2 (ja) 2005-09-02 2011-02-16 株式会社ダイワ 物品搬送装置
CN201203729Y (zh) * 2008-06-06 2009-03-04 泰山光电(苏州)有限公司 液晶面板检测安装装置

Also Published As

Publication number Publication date
CN102211712A (zh) 2011-10-12
TW201144195A (en) 2011-12-16
KR101331106B1 (ko) 2013-11-19
JP2011219238A (ja) 2011-11-04
CN102211712B (zh) 2015-03-25
TWI491548B (zh) 2015-07-11
KR20110114447A (ko) 2011-10-19

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