TWI482248B - 覆晶封裝件及其製造方法 - Google Patents
覆晶封裝件及其製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000000758 substrate Substances 0.000 claims description 97
- 229920005989 resin Polymers 0.000 claims description 94
- 239000011347 resin Substances 0.000 claims description 94
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- 229920002120 photoresistant polymer Polymers 0.000 claims description 12
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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Description
本申請案主張韓國申請案No. 10-2009-0103000之優先權,其於2009年10月28日於韓國智慧財產局提出申請,其揭露內容於此處併入參考。
本發明係關於一種覆晶封裝件及其製造方法,特別是,關於一種具有較低封裝缺陷率之覆晶封裝件及藉由防止底層充填材料的洩漏以達成更可靠的連接。
由於近來電子裝置更薄更小具具有更高性能的發展,對於裝配電子裝置至基板上之高密度裝配技術的需求增加。晶片級(chip-scale)封裝技術因此已展露頭角。
當電子裝置裝配至印刷電路板上時,印刷電路板及電子裝置間之間隙係以底層充填材料(underfill)填充,以加強印刷電路板及電子裝置之間的連接。以此方式,可確保其間之可靠連接。然而,當將一定量之底層充填材料(利用液體樹脂)注入到基板及電子裝置的間隙中時,會發生不想要地洩漏至周圍區域。
至於根據相關技術的封裝,半導體晶片係裝配於印刷電路板的中心部位以及與外部裝置電性連接之連接墊係緊密地安排於半導體晶片的周圍。此外,底層充填材料係注入至半導體晶片及印刷電路板之間的間隙。此底層充填材料係利用液體樹脂,而會有某些量之底層充填材料不想要地洩漏至外面。
然而,由於根據當前趨勢發展電子裝置及電路圖案係緊密地裝配於基板上,該底層充填材料在洩漏後,也許會跑到相鄰之連接墊或電路圖案處。如此便會污染相鄰之連接墊或電路圖案,造成產品的缺陷。
本發明之主要目的,係在於提供一種具有較低封裝缺陷率以及藉由使用形成於處理過樹脂層上的屏障元件(dam member)來防止底層充填材料的洩漏,以確保更可靠地連接之覆晶封裝件,以及在於提供一種其製造之方法。
根據本發明之目的,提供一種覆晶封裝件,包括:電子裝置;基板,包括設置於該基板之裝配區域內之導電焊墊而該基板之裝配區域上係裝配有該電子裝置,及設置於該裝配區域外之連接墊;樹脂層,係形成於該基板上及包括藉由移除一部份該樹脂層形成溝槽;以及屏障元件,係提供於該溝槽上及防止該裝配區域及該連接墊間之底層充填材料的洩漏。
該溝槽係可藉由使用雷射加工該樹脂層形成。
該溝槽係可藉由曝光及顯影該樹脂層形成。
該樹脂層可形成光阻樹脂。
該樹脂層可進一步包括溝槽周圍之表面的不規則部分。
該屏障元件係可沿者該裝配區域之周圍形成。
該覆晶封裝件可進一步包括形成於該連接墊上且與該電子裝置電性連接之凸塊。
該覆晶封裝件可進一步包括介於該電子裝置及該基板之間的該底層充填材料。
根據本發明另一目的,係提供覆晶封裝件,包括電子裝置;基板,包括設置於該基板之裝配區域內之導電焊墊而該基板之裝配區域上係裝配有該電子裝置,及設置於該裝配區域外之連接墊;樹脂層,係形成於該基板上及包括於該樹脂層表面之一部分的不規則部分;以及屏障元件,係提供於該不規則部分上及防止該裝配區域及該連接墊間之底層充填材料的洩漏。
該不規則部分可藉由在該樹脂層上完成鑄造步驟形成。
該不規則部分可藉由曝光及顯影該樹脂層形成。
該樹脂層可形成光阻樹脂。
該屏障元件係可沿者該裝配區域之周圍形成。
該覆晶封裝件可進一步包括形成於該連接墊上且與該電子裝置電性連接之凸塊。
該覆晶封裝件可進一步包括介於該電子裝置及該基板之間的該底層充填材料。
根據本發明之另一目的,係提供一種製造覆晶封裝件之方法,該方法包括:提供一基板,包括設置於該基板之裝配區域內之導電焊墊而該電子裝置係將裝配於該基板之裝配區域上,及設置於該裝配區域外之連接墊;於該基板上形成樹脂層;藉由移除一部份該樹脂層形成溝槽;於該溝槽上形成屏障元件,該屏障元件防止該裝配區域及該連接墊間之底層充填材料的洩漏;以及於該裝配區域上裝配該電子裝置。
該溝槽之形成係藉由使用雷射加工該樹脂層。
該溝槽之形成係藉由完成曝光及顯影該樹脂層形成。
該樹脂層係形成光阻樹脂。
不規則部分可進一步於該溝槽周圍之該樹脂層的表面形成。
該屏障元件可沿者該裝配區域之周圍形成。
該方法更包括形成於該連接墊上之凸塊,該凸塊係與該電子裝置電性連接。
該方法更包括於該電子裝置及該基板之間注入該底層充填材料。
根據本發明之另一目的,係提供一種製造覆晶封裝件之方法,該方法包括:提供一基板,包括設置於該基板之裝配區域內之導電焊墊,其中,該電子裝置係將裝配於該基板之裝配區域上,及設置於該裝配區域外之連接墊;於該基板上形成樹脂層;於該樹脂層表面之一部分形成不規則部分;於該不規則部分上形成屏障元件,該屏障元件防止該裝配區域及該連接墊間之底層充填材料的洩漏;以及於該裝配區域上裝配該電子裝置。
該不規則部分之形成係藉由於該樹脂層上完成鑄造步驟形成。
該不規則部分之形成係藉由曝光及顯影該樹脂層完成。
該樹脂層係形成光阻樹脂。
該屏障元件係沿者該裝配區域之周圍形成。
該方法更包含於該連接墊上形成凸塊,該凸塊係與該電子裝置電性連接。
該方法更包含於該電子裝置及該基板之間注入該底層充填材料。
本發明之具體實施例現將參考圖示以詳細細節描述。
然而,上述實施例係用以例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施例進行修改。圖示中的參考編號標示為類似元件。
根據本發明之具體實施例,覆晶封裝件現將參照第1和第2圖詳細描述。
第1圖係為根據本發明具體實施例覆晶封裝件之上視圖的示意圖。第2圖係為第1圖沿者A-A’線之剖視圖。
如第1圖和第2圖所示,根據本發明具體實施例之覆晶封裝件1,其包括:電子裝置16;基板12,其上有導電焊墊22形成於裝配區域之且該電子裝置16係裝配於該裝配區域中,而連接墊14則係形成於該裝配區域之外;形成於基板12上及具有溝槽T之樹脂層R係藉由移除一部份樹脂層R所形成;以及屏障元件18,其係提供於該連接墊14與裝配有該電子裝置16的該裝配區域之間;該屏障元件18防止底層充填材料的洩漏;以及凸塊28,係形成於該連接墊22上以及與該電子裝置16電性連接。
根據此具體實施例,覆晶封裝件1包括裝配於該基板12上之電子裝置16,達成加強介於電子裝置16及基板12之連接,其由於底層充填材料20注入至由電子裝置16及基板12間產生之間隙。
該連接墊14係形成於其上裝配有電子裝置16之該基板12的裝配區域外部。此裝配區域亦可稱為電子裝置裝配區域。當該電子裝置16係裝配於該基板12上時,該電子裝置裝配區域係指被該電子裝置16所覆蓋之該基板12的區域。該電子裝置16係裝配於該電子裝置裝配區域。當該基板12及該電子裝置16係彼此電性連接時,該間隙係產生於該基板12及該電子裝置16之間。
該電子裝置16係為一種涵蓋像是半導體晶片或類似物等的主動元件以及像是電容、電感、電阻以及類似物等的被動元件之概念。關於此具體實施例,將以半導體晶片單單作為電子裝置之一個例子來描述。
液體底層充填材料20係注入至該基板12及該電子裝置16之間,以確保電盤12及該電子裝置16之間的可靠連接。
由於此底層充填材料20係為液體樹脂,當底層充填材料20係注入至介於該基板12及該電子裝置16之間的間隙時,一部份底層充填材料20會洩漏至周圍部分。
填入該基板12及該電子裝置16間的間隙之底層充填材料20可利用具有低黏度的環氧樹脂。由於具更高密度之電子裝置愈來愈小的發展,所以需使用高密度裝配,即使是在裝配電子裝置16的封裝技術中。此造成了基板12及電子裝置16間形成之間隙寬度下降,也因此液體底層充填材料20可藉由毛細現象注入。這是因為當底層充填材料具低度之黏度時,其促進了底層充填材料的注入。
當底層充填材料20具有低度之黏度時,可容易填入該基板12及該電子裝置16間所形成的間隙,然而其容易不想要地洩漏至周圍部分。基於此理由,屏障元件18a係形成於該電子裝置裝配區域及該連接墊14之間,使得底層充填材料20具低度的黏度,可防止其流動至該連接墊14。
樹脂層R,設置於該基板12上,係具備藉由移除一部份樹脂層R所形成的溝槽T。
此處,溝槽T可藉由使用雷射加工該樹脂層形成。或者,溝槽T可藉由曝光及顯影由光阻樹脂製成的該樹脂層形成。然而,形成該溝槽的方法並非僅限於所述之方法。
於此例中,屏障元件18a係形成於溝槽T上。此處,屏障元件18a係形成該電子裝置裝配區域及該連接墊14之間以防止具低黏度的底層充填材料20流動至連接墊14之上。
此外,根據本發明第4圖所示之另一具體實施例的覆晶封裝件2,樹脂層R設置於該基板12上,可具有在一部份其表面上之不規則部分U。
此處,不規則部分U可藉由在樹脂層R上完成鑄造步驟形成。或者,樹脂層R,形成光阻樹脂,可被曝光及顯影從而形成不規則部分U。然而,形成不規則部分U並非僅限於所述之方法。
在此例中,屏障元件18b(見第4圖)係形成於不規則部分U上。此處,屏障元件18b係形成於該電子裝置裝配區域及該連接墊14之間以防止具低黏度之底層充填材料20流動至連接墊14之上。
此外,根據本發明第5圖所示之另一具體實施例的覆晶封裝件3,樹脂層R設置於該基板12上,可具有在樹脂層R上一部份表面之不規則部分U及溝槽T。此處,溝槽T係藉由移除一部份樹脂層R形成。
在此例中,屏障元件18c(見第5圖),係形成於不規則部分U及溝槽T上。此處,屏障元件18c係形成於該電子裝置裝配區域及該連接墊14之間,以防止具低黏度之底層充填材料20流動至連接墊14之上。
於上述各實施例中,由於屏障元件18(18a至18c)及樹脂層R之間的接觸面積增加,所以屏障元件18便不容易藉由外部衝擊而自樹脂層R分開或也不會排列不當。據此,藉由損害屏障元件18引起的缺陷可被減低,封裝件1的製造良率可被改善,而導致洩漏底層充填材料20至周圍部分的缺陷亦可被減小。此外,關於可能由於不完備屏障元件18而自封裝件1洩漏之揮發性有機物的問題,亦可被解決。
此處,屏障元件18可藉由使用噴墨印刷方法釋放絕緣油墨形成。或者,先前形成的屏障元件18可藉由黏合劑固定至樹脂層R,或可使用微影方法或網版印刷方法形成。然而,形成屏障元件18之方法並非僅限於所述方法。
參閱第1圖,屏障元件18係以連續方式沿者電子裝置裝配區域之周圍形成。然而,屏障元件18的形狀並非限於闡述中的描述。例如,屏障元件18可為不規則不連續。或者,屏障元件18可以預定區間安排的複數個點的形式提供。
即使當底層充填材料20係使用具有低度的黏度時,此屏障元件18可防止底層充填材料20洩漏至周圍部分。因此,屏障元件18有助於防止發生在封裝件1內導因於底層充填材料20之洩漏的缺陷。
在下文中,根據本發明之具體實施例,製造覆晶封裝件的步驟將參照第3A至3F圖詳細描述。
第3A至3F圖係為根據本發明之具體實施例闡釋製造覆晶封裝件步驟的示意剖視圖。
如第3A至3F圖所示,根據本發明之具體實施例製造覆晶封裝件的步驟包括:提供基板12,其中,電子裝置16係裝配於裝配區域上,導電墊22係形成於基板12上之裝配區域內,當連接墊14係形成於裝配區域外部時;形成樹脂層R於基板12上;藉由移除一部份樹脂層R形成溝槽T;形成屏障元件18(18a至18c)於溝槽T上,屏障元件18防止自電子裝置16的裝配區域至連接墊14之底層充填材料20的洩漏;以及裝配電子裝置16於電子裝置16(在下文中亦稱為「電子裝置裝配區域」)的裝配區域上。
首先,如第3A圖所示,提供基板12,其包括設置於電子裝置裝配區域內之導電墊22以及設置於電子裝置裝配區域外部之連接墊14。之後樹脂層R,曝光導電墊22及連接墊14,係形成於基板12上。
連接墊14係形成於電子裝置16裝配之基板的裝配區域外部的基板12上,以及導電墊22係形成於裝配區域內。此處,導電墊22提供介於電子裝置16及基板12之間的電性連接。
當電子裝置16裝配置於基板12上時,電子裝置裝配區域係指被電子裝置16覆蓋之基板12的區域。電子裝置16係裝配於電子裝置裝配區域上。當基板12及電子裝置16係彼此電性連接時,就於基板12及電子裝置16之間產生間隙。
該電子裝置16係為一種涵蓋了像是半導體晶片或類似物等的主動元件以及像是電容、電感、電阻以及類似物等的被動元件之概念。關於此具體實施例,將以半導體晶片單單作為電子裝置的一個範例來描述。
其它主動或被動元件可被裝配於連接墊14上。電子裝置16可經由連接墊14與外部裝置電性連接。連接墊14上之異物可能損害與主動元件、被動元件及外部元件之電連通性。例如,若介於電子裝置16及基板12之間加強連接之底層充填材料20洩漏及覆蓋連接墊14,電性連接的可靠度會衰退。
之後,如第3B圖所示,與電子裝置16電性連接之凸塊28係形成於各自的導電墊22上。網版印刷方法可用以形成放置於電子裝置裝配區域上之導電墊22上的凸塊28。
然而,凸塊28的形成並非限於所述之方法。顯然地凸塊28可利用該技術領域中具有通常者所習知的各種方法來形成。電子裝置16及基板12係藉由那些凸塊28彼此電性連接。
之後,如第3c圖所示,溝槽T係藉由移除設置於基板12上一部份的樹脂層R形成。
此處,溝槽T可使用雷射加工樹脂層R形成。或者,溝槽T可藉由曝光及顯影由光阻樹脂製成的該樹脂層形成。然而,形成該溝槽T的方法並非僅限於所述之方法。
之後,如第3D圖所示,屏障元件18a係形成於溝槽T上。此處,屏障元件18a係形成於電子裝置裝配區域及連接墊14之間以防止具低黏度之底層充填材料20朝向連接墊14洩漏。
在此實施例中,闡釋的屏障元件18a係形成於所提供的樹脂層R之溝槽T上。然而,屏障元件18a之形狀並非限於圖示。
根據本發明第4圖所示之另一具體實施例的覆晶封裝件2,樹脂層R,設置於基板12上,可具有不規則部分U於一部份其表面上。
此處,不規則部分U可藉由完成在樹脂層R上的鑄造步驟(coining process)形成。或者,不規則部分U可藉由曝光及顯影形成光阻樹脂之該樹脂層形成。然而,形成不規則部分U的方法並非限於所述方法。
於此例中,屏障元件18b(見第4圖)係形成於不規則部分U上。此處,屏障元件18b係形成於電子裝置裝配區域及連接墊14之間以防止具低黏度之底層充填材料20流動至連接墊14之上。
此外,根據本發明第5圖所示之另一具體實施例的覆晶封裝件3,樹脂層R,設置於基板12上,可具有不規則部分U及溝槽T於樹脂層R之一部份表面上。此處,溝槽T係藉由移除一部分樹脂層R形成。
在此例中,屏障元件18c(見第5圖)係形成於不規則部分U及溝槽T上。此處,屏障元件18c係形成於電子裝置裝配區域及連接墊14之間以防止具低黏度之底層充填材料20流動至連接墊14之上。
介於屏障元件18(18a至18c)及樹脂層R之間的接觸面積增加遍及上述實施例,屏障元件18係不容易藉由外部衝擊自樹脂層R分開或不會排列不當。據此,藉由損害屏障元件18引起的缺陷可被減小,封裝件1的製造良率可被改善,以及導致洩漏底層充填材料20至周圍部分的缺陷亦可被減小。此外,關於揮發性有機物的問題,其可能由於自不完備屏障元件18的封裝件1洩漏,亦可被解決。
此處,屏障元件18可藉由使用噴墨印刷方法釋放絕緣油墨形成。或者,先前形成的屏障元件18可藉由黏合劑固定至樹脂層R,或可使用微影方法或網版印刷方法形成。然而,形成屏障元件18之方法並非僅限於所述方法。
參閱第1圖,屏障元件18係以連續方式沿者電子裝置裝配區域之周圍形成。然而,屏障元件18的形狀並非限於闡述中的描述。例如,屏障元件18可為不規則不連續。或者,屏障元件18可以預定區間安排的複數個點的形式提供。
即使當底層充填材料20係使用具有低度的黏度時,此屏障元件18可防止底層充填材料20洩漏至周圍部分。因此,屏障元件18有助於防止發生在封裝件1內導因於底層充填材料20之洩漏的缺陷。
之後,如第3E圖所示,電子裝置16係裝配置基板12上之電子裝置裝配區域。當電子裝置16係裝配於基板12上時,電子裝置裝配區域係為藉由電子裝置16覆蓋基板之區域。電子裝置16係裝配於電子裝置裝配區域上。當基板12及電子裝置16係彼此電性連接時,介於基板12及電子裝置16之間的間隙係建立。
在裝配電子裝置16於基板12上的步驟中,基板12及電子裝置16間的電性連接係為必須的。因此,裝配電子裝置16的步驟可包括藉由使用覆晶黏合方法電性連接電子裝置16及凸塊28的步驟。亦即,根據上述步驟,導電墊22(相對應於電子裝置16的終端)係形成於電子裝置裝配區域,以及凸塊28,係形成於各自的導電墊22上。因此,凸塊28及電子裝置16之終端係藉由使用覆晶黏合方法彼此電性連接。覆晶黏合步驟係藉由添加回流用之助熔劑(flux)至凸塊28,透過回流加熱來熔融凸塊28完成凸塊28與電子裝置16之電性連接。,添至基板12之回流用助熔劑,隨後藉由沖洗步驟移除。
之後,如第3F圖所示,底層充填材料20係注入至電子裝置16及基板12之間。如上所述,間隙係建立於電性連接電子裝置16與凸塊28之步驟中的基板12及電子裝置16之間。此間隙可能帶來關於在電子裝置16及基板12之間連接可靠度的問題。
分配器30之噴嘴係放置於屏障元件18及電子裝置16外側之間,藉以注入液體底層充填材料20。隨後,注入的底層充填材料20於電子裝置16底下流動。在此步驟中,液體底層充填材料20可能洩漏至周圍部分。然而,屏障元件18,係形成於電子裝置區域及連接墊14之間,其阻擋了底層充填材料20洩漏至連接墊14。藉由此方式,連接墊14得到保護不受洩漏的底層充填材料20影響。
底層充填材料20填入由基板12及電子裝置16之間所產生的間隙,而其可由具有低黏度的環氧樹脂所形成。即使裝配電子裝置16的封裝技術亦需要根據目前朝向薄型化、具有高密度小型電子裝置的趨勢進行高密度裝配。基於此原因,基板12及電子裝置16之間的間隙具有一縮減的寬度。因此,當注入液體底層充填材料20時,可藉由毛細現象填入間隙。當底層充填材料20具有低黏度時可更容易地施作。
然而,具有此種低黏度之底層充填材料20,或可容易地藉由基板12及電子裝置16將產生的間隙填滿,但其也容易洩漏至周圍部分。向連接墊14洩漏的底層充填材料20可藉由形成於電子裝置裝配區域及連接墊14之間的屏障元件18來防止。
之後,如第2圖所示,銲錫球32係形成於基板12之底部表面,由此完成覆晶封裝件1。
根據本發明覆晶封裝件及其製造方法之具體實施例,屏障元件係形成於處理過的樹脂層上以由此防止底層充填材料的洩漏。此可降低封裝缺陷率以及改善連接的可靠度。
根據本發明覆晶封裝件及其製造方法之具體實施例,可達成高程度的設計自由度以及減少步驟,從而降低製造成本。
再者,關於揮發性有機物的問題,其可能由於不完備屏障元件的封裝件洩漏,亦可被解決。
如上所述,根據本發明之具體實施例,可提供覆晶封裝件,藉由於處理過的樹脂層上形成屏障元件以防止底層充填材料的洩漏以及可提供製造覆晶封裝件的方法,以具有較低的封裝缺陷率以及改善連接可靠度。
再者,可提供覆晶封裝件,具有達成高設計自由度及減少步驟以從而降低製造成本以及製造覆晶封裝件的方法。
再者,關於揮發性有機物的問題,其可能由於不完備屏障元件的封裝件洩漏,亦可被解決。
上述實施型態僅例示性說明本發明之原理及其功效,而非用於限制本發明。任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述實施型態進行修飾與改變。因此,本發明之權利保護範圍,應如後述之申請專利範圍所列。
1...覆晶封裝件
2...覆晶封裝件
3...覆晶封裝件
12...基板
14...連接墊
16...電子裝置
18、18a、18b、18c...屏障元件
20...底層充填材料
22...導電焊墊
28...凸塊
30...分配器
32...銲錫球
R...樹脂層
T...溝槽
U...不規則部分
本發明上述及其它目的、特徵及其它優點將更詳細地自以下結合圖示的詳細描述了解,其中:
第1圖係為闡釋根據本發明典型實施例之覆晶封裝件的頂部示意圖;
第2圖係為沿者第1圖A-A’線之剖視圖;
第3A至3F圖係為闡釋根據本發明另一典型實施例之製造覆晶封裝件步驟的示意剖視圖;
第4圖係為闡釋根據本發明另一典型實施例之覆晶封裝件的示意剖視圖;以及
第5圖係為闡釋根據本發明另一典型實施例之覆晶封裝件的示意剖視圖。
1...覆晶封裝件
12...基板
14...連接墊
16...電子裝置
18...屏障元件
20...底層充填材料
Claims (22)
- 一種覆晶封裝件,包含:電子裝置;基板,包括設置於該基板之裝配區域內的導電焊墊而該基板之裝配區域上裝配有該電子裝置,及設置於該裝配區域外之連接墊;樹脂層,係設置於該基板上且包括藉由移除一部份該樹脂層所形成之溝槽;以及屏障元件,係提供於該溝槽上而防止該裝配區域及該連接墊間之底層充填材料的洩漏,其中,該溝槽係藉由曝光及顯影該樹脂層形成,以及該樹脂層係以光阻樹脂形成。
- 如申請專利範圍第1項所述之覆晶封裝件,其中,該溝槽係使用雷射加工該樹脂層形成。
- 如申請專利範圍第1項所述之覆晶封裝件,其中,該樹脂層更包括該溝槽周圍之表面上的不規則部分。
- 如申請專利範圍第1項所述之覆晶封裝件,其中,該屏障元件係沿者該裝配區域之周圍形成。
- 如申請專利範圍第1項所述之覆晶封裝件,更包括形成於該連接墊上且與該電子裝置電性連接之凸塊。
- 如申請專利範圍第1項所述之覆晶封裝件,更包括介於該電子裝置及該基板之間的該底層充填材料。
- 一種覆晶封裝件,包含: 電子裝置;基板,其包括設置於該基板之裝配區域內的導電焊墊而該基板之裝配區域上裝配有該電子裝置,及設置於該裝配區域外之連接墊;樹脂層,係形成於該基板上及包括於該樹脂層表面上之一部分的不規則部分;以及屏障元件,係提供於該溝槽上及防止該裝配區域及該連接墊間之底層充填材料的洩漏,其中,該不規則部分係藉由曝光及顯影該樹脂層形成,以及該樹脂層係以光阻樹脂形成。
- 如申請專利範圍第7項所述之覆晶封裝件,其中,該不規則部分係藉由在該樹脂層上施行鑄造步驟形成。
- 如申請專利範圍第7項所述之覆晶封裝件,其中,該屏障元件係沿者該裝配區域之周圍形成。
- 如申請專利範圍第7項所述之覆晶封裝件,更包括形成於該連接墊上且與該電子裝置電性連接之凸塊。
- 如申請專利範圍第7項所述之覆晶封裝件,更包括介於該電子裝置及該基板之間的該底層充填材料。
- 一種製造覆晶封裝件之方法,該方法包括:提供一基板,包括設置於該基板之裝配區域內之導電焊墊而該電子裝置係將裝配於該基板之裝配區域上,及設置於該裝配區域外之連接墊;於該基板上形成樹脂層; 藉由移除一部份該樹脂層形成溝槽;於該溝槽上形成屏障元件,該屏障元件防止該裝配區域及該連接墊間之底層充填材料的洩漏;以及於該裝配區域上裝配該電子裝置,其中,該形成溝槽係藉由完成曝光及顯影該樹脂層形成,以及該樹脂層係以光阻樹脂形成。
- 如申請專利範圍第12項所述之方法,其中,該形成溝槽係使用雷射加工該樹脂層。
- 如申請專利範圍第12項所述之方法,其中,不規則部分係進一步於該溝槽周圍之該樹脂層的表面上形成。
- 如申請專利範圍第12項所述之方法,其中,該屏障元件係沿者該裝配區域之周圍形成。
- 如申請專利範圍第12項所述之方法,更包含形成於該連接墊上之凸塊,該凸塊係與該電子裝置電性連接。
- 如申請專利範圍第12項所述之方法,更包含於該電子裝置及該基板之間注入該底層充填材料。
- 一種製造覆晶封裝件之方法,該方法包括:提供基板,其包括設置於該基板之裝配區域內的導電焊墊而該電子裝置係將裝配於該基板之裝配區域上,及設置於該裝配區域外之連接墊;於該基板上形成樹脂層;於該樹脂層表面之一部分形成不規則部分;於該不規則部分上形成屏障元件,該屏障元件防止 該裝配區域及該連接墊間之底層充填材料的洩漏;以及於該裝配區域上裝配該電子裝置,其中,該形成不規則部分係藉由曝光及顯影該樹脂層完成,以及該樹脂層係以光阻樹脂形成。
- 如申請專利範圍第18項所述之方法,其中,該形成不規則部分係藉由於該樹脂層上施行鑄造步驟來完成。
- 如申請專利範圍第18項所述之方法,其中,該屏障元件係沿者該裝配區域之周圍形成。
- 如申請專利範圍第18項所述之方法,更包含於該連接墊上形成凸塊,該凸塊係與該電子裝置電性連接。
- 如申請專利範圍第18項所述之方法,更包含於該電子裝置及該基板之間注入該底層充填材料。
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- 2010-10-27 JP JP2010241168A patent/JP5240625B2/ja not_active Expired - Fee Related
- 2010-10-27 US US12/926,137 patent/US8558360B2/en not_active Expired - Fee Related
- 2010-10-28 CN CN2010105297711A patent/CN102054795A/zh active Pending
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2013
- 2013-09-27 US US14/039,392 patent/US8809122B2/en not_active Expired - Fee Related
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US8809122B2 (en) | 2014-08-19 |
TW201125084A (en) | 2011-07-16 |
US8558360B2 (en) | 2013-10-15 |
US20110095421A1 (en) | 2011-04-28 |
KR20110046142A (ko) | 2011-05-04 |
JP5240625B2 (ja) | 2013-07-17 |
JP2011097060A (ja) | 2011-05-12 |
CN102054795A (zh) | 2011-05-11 |
KR101089956B1 (ko) | 2011-12-05 |
US20140030855A1 (en) | 2014-01-30 |
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