TWI338335B - Semiconductor devices and methods of manufacturing the same - Google Patents

Semiconductor devices and methods of manufacturing the same Download PDF

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Publication number
TWI338335B
TWI338335B TW095141118A TW95141118A TWI338335B TW I338335 B TWI338335 B TW I338335B TW 095141118 A TW095141118 A TW 095141118A TW 95141118 A TW95141118 A TW 95141118A TW I338335 B TWI338335 B TW I338335B
Authority
TW
Taiwan
Prior art keywords
dielectric layer
interlayer dielectric
layer
transistor
semiconductor device
Prior art date
Application number
TW095141118A
Other languages
English (en)
Chinese (zh)
Other versions
TW200729353A (en
Inventor
Yong-Kuk Jeong
Andrewtae Kim
Dong-Suk Shin
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020050106096A external-priority patent/KR100678636B1/ko
Priority claimed from KR1020060073912A external-priority patent/KR100834737B1/ko
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of TW200729353A publication Critical patent/TW200729353A/zh
Application granted granted Critical
Publication of TWI338335B publication Critical patent/TWI338335B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
    • H01L21/76825—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by exposing the layer to particle radiation, e.g. ion implantation, irradiation with UV light or electrons etc.
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
    • H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
    • H01L21/76828—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. thermal treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H10D30/792—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions comprising applied insulating layers, e.g. stress liners
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0167—Manufacturing their channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0184—Manufacturing their gate sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW095141118A 2005-11-07 2006-11-07 Semiconductor devices and methods of manufacturing the same TWI338335B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050106096A KR100678636B1 (ko) 2005-11-07 2005-11-07 반도체 집적 회로 장치의 제조 방법 및 그에 의해 제조된반도체 집적 회로 장치
KR1020060073912A KR100834737B1 (ko) 2006-08-04 2006-08-04 반도체 집적 회로 장치의 제조 방법 및 그에 의해 제조된반도체 집적 회로 장치

Publications (2)

Publication Number Publication Date
TW200729353A TW200729353A (en) 2007-08-01
TWI338335B true TWI338335B (en) 2011-03-01

Family

ID=38004288

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095141118A TWI338335B (en) 2005-11-07 2006-11-07 Semiconductor devices and methods of manufacturing the same

Country Status (3)

Country Link
US (2) US7867867B2 (enExample)
JP (1) JP5209196B2 (enExample)
TW (1) TWI338335B (enExample)

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JP2007324391A (ja) * 2006-06-01 2007-12-13 Matsushita Electric Ind Co Ltd 半導体装置及びその製造方法
DE102006030264B4 (de) * 2006-06-30 2008-08-28 Advanced Micro Devices, Inc., Sunnyvale Verfahren zur Herstellung von Transistoren mit einem Kanal mit biaxialer Verformung, die durch Silizium/Germanium in der Gateelektrode hervorgerufen wird
US20080138983A1 (en) * 2006-12-06 2008-06-12 Taiwan Semiconductor Manufacturing Co., Ltd. Method of forming tensile stress films for NFET performance enhancement
US20080206943A1 (en) * 2007-02-26 2008-08-28 Jei-Ming Chen Method of forming strained cmos transistor
JP2008235636A (ja) * 2007-03-22 2008-10-02 Elpida Memory Inc 半導体装置の製造方法及び半導体装置
US7741171B2 (en) * 2007-05-15 2010-06-22 Taiwan Semiconductor Manufacturing Company, Ltd. Oxygen-rich layers underlying BPSG
US8072035B2 (en) 2007-06-11 2011-12-06 Renesas Electronics Corporation Semiconductor device and method of manufacturing the same
JP5280716B2 (ja) * 2007-06-11 2013-09-04 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US7911001B2 (en) 2007-07-15 2011-03-22 Samsung Electronics Co., Ltd. Methods for forming self-aligned dual stress liners for CMOS semiconductor devices
US7858532B2 (en) 2007-08-06 2010-12-28 United Microelectronics Corp. Dielectric layer structure and manufacturing method thereof
US8466508B2 (en) * 2007-10-03 2013-06-18 Macronix International Co., Ltd. Non-volatile memory structure including stress material between stacked patterns
DE102007057686B4 (de) * 2007-11-30 2011-07-28 GLOBALFOUNDRIES Dresden Module One Ltd. Liability Company & Co. KG, 01109 Verfahren und Halbleiterbauelement mit einer Schutzschicht zum Reduzieren der Verspannungsrelaxation in einer Doppelverspannungsbeschichtungstechnik
US8211784B2 (en) * 2009-10-26 2012-07-03 Advanced Ion Beam Technology, Inc. Method for manufacturing a semiconductor device with less leakage current induced by carbon implant
JP5652939B2 (ja) * 2010-07-07 2015-01-14 ルネサスエレクトロニクス株式会社 半導体装置及び半導体装置の製造方法
CN102569083B (zh) * 2010-12-23 2014-12-24 中芯国际集成电路制造(上海)有限公司 具有高k金属栅极的金属氧化物半导体的形成方法
US8853862B2 (en) * 2011-12-20 2014-10-07 International Business Machines Corporation Contact structures for semiconductor transistors
US9177803B2 (en) * 2013-03-14 2015-11-03 Globalfoundries Inc. HK/MG process flows for P-type semiconductor devices
US9252271B2 (en) * 2013-11-27 2016-02-02 Taiwan Semiconductor Manufacturing Company Limited Semiconductor device and method of making
KR102292813B1 (ko) * 2015-10-14 2021-08-23 삼성전자주식회사 반도체 장치 및 이의 제조 방법
US10020401B2 (en) 2016-11-29 2018-07-10 Taiwan Semiconductor Manufacturing Company, Ltd. Methods for straining a transistor gate through interlayer dielectric (ILD) doping schemes
FR3076077B1 (fr) * 2017-12-22 2020-02-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives Realisation de transistors a canaux contraints
JP7355752B2 (ja) * 2018-10-05 2023-10-03 株式会社半導体エネルギー研究所 半導体装置の作製方法
CN109686663A (zh) * 2018-12-27 2019-04-26 上海华力微电子有限公司 一种半导体结构及其制造方法
KR102793906B1 (ko) 2020-06-10 2025-04-08 삼성전자주식회사 집적회로 장치

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Also Published As

Publication number Publication date
JP2007134712A (ja) 2007-05-31
US8237202B2 (en) 2012-08-07
TW200729353A (en) 2007-08-01
JP5209196B2 (ja) 2013-06-12
US20110163386A1 (en) 2011-07-07
US20070105297A1 (en) 2007-05-10
US7867867B2 (en) 2011-01-11

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KR100678636B1 (ko) 반도체 집적 회로 장치의 제조 방법 및 그에 의해 제조된반도체 집적 회로 장치