JP4322687B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4322687B2 JP4322687B2 JP2004003632A JP2004003632A JP4322687B2 JP 4322687 B2 JP4322687 B2 JP 4322687B2 JP 2004003632 A JP2004003632 A JP 2004003632A JP 2004003632 A JP2004003632 A JP 2004003632A JP 4322687 B2 JP4322687 B2 JP 4322687B2
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- 239000004065 semiconductor Substances 0.000 title claims description 82
- 238000004519 manufacturing process Methods 0.000 title claims description 54
- 239000000758 substrate Substances 0.000 claims description 52
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 36
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 29
- 229910052805 deuterium Inorganic materials 0.000 claims description 29
- 229910052739 hydrogen Inorganic materials 0.000 claims description 26
- 239000001257 hydrogen Substances 0.000 claims description 26
- 238000009792 diffusion process Methods 0.000 claims description 24
- 238000005984 hydrogenation reaction Methods 0.000 claims description 24
- 238000006356 dehydrogenation reaction Methods 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 11
- 239000011261 inert gas Substances 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 46
- 239000011229 interlayer Substances 0.000 description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 24
- 229910052814 silicon oxide Inorganic materials 0.000 description 24
- 230000006866 deterioration Effects 0.000 description 18
- 230000001133 acceleration Effects 0.000 description 14
- 230000005684 electric field Effects 0.000 description 12
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 11
- 230000007547 defect Effects 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 11
- 238000002513 implantation Methods 0.000 description 11
- 229910052698 phosphorus Inorganic materials 0.000 description 11
- 239000011574 phosphorus Substances 0.000 description 11
- 125000006850 spacer group Chemical group 0.000 description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910001873 dinitrogen Inorganic materials 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 7
- 229910021342 tungsten silicide Inorganic materials 0.000 description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 6
- 229910052796 boron Inorganic materials 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 6
- 230000002950 deficient Effects 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000000059 patterning Methods 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 108091006146 Channels Proteins 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 230000002040 relaxant effect Effects 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/3003—Hydrogenation or deuterisation, e.g. using atomic hydrogen from a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/05—Making the transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
- H10B12/315—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor with the capacitor higher than a bit line
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
半導体基板上にソース・ドレイン拡散層を形成する工程と、
前記ソース・ドレイン拡散層を含む基板表面を水素化処理する工程と、
前記水素化処理された基板表面を脱水素処理する工程とを有することを特徴としている。
半導体基板上にソース・ドレイン拡散層を形成する工程と、
前記ソース・ドレイン拡散層を含む基板表面を、重水素の含有率が自然界に存在する水素ガス中の重水素の含有率よりも低い水素ガス雰囲気中で水素化処理する工程とを有することを特徴としている。
2:シリコン酸化膜
3:シリコン酸化膜
4:p型ウエル層
6:p型チャネルドープ層
7:ゲート絶縁膜
8:絶縁膜
9:ゲート電極
9a:多結晶シリコン膜
9b:タングステンシリサイド膜
10:絶縁膜
11:ソース・ドレイン拡散層
12:サイドスペーサ
13:電界緩和層
14:層間絶縁膜
15:プラグ
15a:コンタクト穴
17:ビット線
17a:コンタクト穴
18:キャパシタ
19:層間絶縁膜
20:層間絶縁膜
21:プラグ
21a:コンタクト穴
22:下部電極
23:容量膜
24:上部電極
25:冶金的接合位置
Claims (8)
- MOSトランジスタを有する半導体装置の製造方法において、
半導体基板上にソース・ドレイン拡散層を形成する工程と、
前記ソース・ドレイン拡散層を含む基板表面を水素化処理する工程と、
前記水素化処理された基板表面を350℃から300℃の温度に維持してダングリングボンドと結合した水素のうち、安定状態の水素よりも結合エネルギーの低い水素を離脱させる脱水素処理する工程とを有することを特徴とする半導体装置の製造方法。 - 前記水素化処理工程は、前記半導体基板を350℃以上の温度に維持して水素ガス雰囲気中で行われる、請求項1に記載の半導体装置の製造方法。
- 前記水素化処理工程において、前記水素ガス雰囲気中の重水素の含有率が自然界に存在する水素ガス中の重水素の含有率よりも低い前記水素ガス雰囲気を供給する、請求項2に記載の半導体装置の製造方法。
- 前記水素ガス雰囲気中の重水素の含有率が70ppm以下である、請求項1に記載の半導体装置の製造方法。
- 前記脱水素処理工程は、前記半導体基板を350℃未満の温度に維持して不活性ガス雰囲気中で行われる、請求項1〜4の何れか一に記載の半導体装置の製造方法。
- 前記不活性ガス雰囲気が、窒素又はアルゴンを含む、請求項5に記載の半導体装置の製造方法。
- MOSトランジスタを有する半導体装置の製造方法において、
半導体基板上にソース・ドレイン拡散層を形成する工程と、
前記ソース・ドレイン拡散層を含む基板表面を、重水素の含有率が70ppm以下の水素ガス雰囲気中で水素化処理する工程とを有することを特徴とする半導体装置の製造方法。 - 前記水素化処理工程は、前記半導体基板を350℃以上の温度に維持して行われる、請求項7に記載の半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004003632A JP4322687B2 (ja) | 2004-01-09 | 2004-01-09 | 半導体装置の製造方法 |
US11/029,343 US7151033B2 (en) | 2004-01-09 | 2005-01-06 | Method for manufacturing a semiconductor device having a low junction leakage current |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004003632A JP4322687B2 (ja) | 2004-01-09 | 2004-01-09 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005197546A JP2005197546A (ja) | 2005-07-21 |
JP4322687B2 true JP4322687B2 (ja) | 2009-09-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004003632A Expired - Fee Related JP4322687B2 (ja) | 2004-01-09 | 2004-01-09 | 半導体装置の製造方法 |
Country Status (2)
Country | Link |
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US (1) | US7151033B2 (ja) |
JP (1) | JP4322687B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5209196B2 (ja) * | 2005-11-07 | 2013-06-12 | 三星電子株式会社 | 半導体装置の製造方法 |
US10679847B2 (en) | 2018-03-01 | 2020-06-09 | International Business Machines Corporation | Self-aligned spacerless thin film transistor |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3212150B2 (ja) | 1992-08-07 | 2001-09-25 | 株式会社日立製作所 | 半導体装置 |
US6590230B1 (en) * | 1996-10-15 | 2003-07-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR100900404B1 (ko) * | 2003-12-22 | 2009-06-02 | 엘지디스플레이 주식회사 | 액정표시소자의 제조 방법 |
-
2004
- 2004-01-09 JP JP2004003632A patent/JP4322687B2/ja not_active Expired - Fee Related
-
2005
- 2005-01-06 US US11/029,343 patent/US7151033B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20050153526A1 (en) | 2005-07-14 |
US7151033B2 (en) | 2006-12-19 |
JP2005197546A (ja) | 2005-07-21 |
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