TWI268192B - Diamond film-coated tool and method of manufacturing the same diamond film coated tool excels in cutting performance, wear and abrasion resistance, welding resistance and wrought surface roughness - Google Patents

Diamond film-coated tool and method of manufacturing the same diamond film coated tool excels in cutting performance, wear and abrasion resistance, welding resistance and wrought surface roughness

Info

Publication number
TWI268192B
TWI268192B TW092131808A TW92131808A TWI268192B TW I268192 B TWI268192 B TW I268192B TW 092131808 A TW092131808 A TW 092131808A TW 92131808 A TW92131808 A TW 92131808A TW I268192 B TWI268192 B TW I268192B
Authority
TW
Taiwan
Prior art keywords
diamond film
coated tool
surface roughness
diamond
excels
Prior art date
Application number
TW092131808A
Other languages
English (en)
Other versions
TW200503873A (en
Inventor
Katsuo Kazahaya
Shigetaka Kawai
Yasushi Matsumoto
Keiji Ishibashi
Takahiro Imai Imai
Original Assignee
Almt Corp
Sumitomo Electric Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Almt Corp, Sumitomo Electric Industries filed Critical Almt Corp
Publication of TW200503873A publication Critical patent/TW200503873A/zh
Application granted granted Critical
Publication of TWI268192B publication Critical patent/TWI268192B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/18—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
    • B23B27/20—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G5/00—Thread-cutting tools; Die-heads
    • B23G5/02—Thread-cutting tools; Die-heads without means for adjustment
    • B23G5/06—Taps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G2200/00—Details of threading tools
    • B23G2200/26—Coatings of tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G2225/00—Materials of threading tools, workpieces or other structural elements
    • B23G2225/08—Cermets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G2225/00—Materials of threading tools, workpieces or other structural elements
    • B23G2225/16—Diamond
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23G—THREAD CUTTING; WORKING OF SCREWS, BOLT HEADS, OR NUTS, IN CONJUNCTION THEREWITH
    • B23G2225/00—Materials of threading tools, workpieces or other structural elements
    • B23G2225/28—Hard metal, i.e. cemented carbides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW092131808A 2003-07-31 2003-11-13 Diamond film-coated tool and method of manufacturing the same diamond film coated tool excels in cutting performance, wear and abrasion resistance, welding resistance and wrought surface roughness TWI268192B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003283835 2003-07-31

Publications (2)

Publication Number Publication Date
TW200503873A TW200503873A (en) 2005-02-01
TWI268192B true TWI268192B (en) 2006-12-11

Family

ID=34113820

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092131808A TWI268192B (en) 2003-07-31 2003-11-13 Diamond film-coated tool and method of manufacturing the same diamond film coated tool excels in cutting performance, wear and abrasion resistance, welding resistance and wrought surface roughness

Country Status (10)

Country Link
US (1) US7883775B2 (zh)
EP (1) EP1649955B1 (zh)
JP (1) JP4420901B2 (zh)
KR (1) KR101065572B1 (zh)
CN (1) CN100387385C (zh)
AU (1) AU2003280758A1 (zh)
HK (1) HK1091435A1 (zh)
MY (1) MY138872A (zh)
TW (1) TWI268192B (zh)
WO (1) WO2005011902A1 (zh)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006088315A (ja) * 2004-08-24 2006-04-06 Shapton Kk 砥石修正器、砥石の製造方法および砥石修正器、砥石
JP4825490B2 (ja) * 2004-10-14 2011-11-30 住友電気工業株式会社 ダイヤモンド膜被覆部材の製造方法
GB2434771B (en) * 2006-02-02 2011-11-30 Bencere Ltd A Cutting Insert
US8404313B1 (en) * 2006-03-22 2013-03-26 University Of South Florida Synthesis of nanocrystalline diamond fibers
EP1944110B1 (de) * 2007-01-15 2012-11-07 Fraisa Holding AG Verfahren zur Behandlung und Bearbeitung von Werkzeugen zur spanabhebenden Bearbeitung von Werkstücken
GB0700984D0 (en) 2007-01-18 2007-02-28 Element Six Ltd Polycrystalline diamond elements having convex surfaces
JP2010524710A (ja) * 2007-04-27 2010-07-22 デグテック エルティーディー コーティングされた超硬合金切削工具とその製造のための前処理及びコーティング方法
US20090214826A1 (en) * 2008-01-04 2009-08-27 Charles West Controlling diamond film surfaces
FR2930423B1 (fr) * 2008-04-25 2010-05-07 Gerard Scortecci Dispositif pour la regeneration osseuse
JP5488873B2 (ja) * 2009-07-13 2014-05-14 三菱マテリアル株式会社 耐欠損性と耐摩耗性にすぐれたダイヤモンド被覆工具
US8715789B2 (en) * 2009-12-18 2014-05-06 Sub-One Technology, Inc. Chemical vapor deposition for an interior of a hollow article with high aspect ratio
JP5459504B2 (ja) * 2010-07-16 2014-04-02 三菱マテリアル株式会社 ダイヤモンド被覆切削工具
GB2482151A (en) * 2010-07-21 2012-01-25 Element Six Production Pty Ltd Method of making a superhard construction
JP5553013B2 (ja) * 2010-11-25 2014-07-16 三菱マテリアル株式会社 硬質難削材の高速高送り切削加工で硬質被覆層がすぐれた耐剥離性とすぐれた耐チッピング性を発揮する表面被覆切削工具
US20120251256A1 (en) * 2011-04-04 2012-10-04 GM Global Technology Operations LLC Cutting tool for control of surface roughness
JP5966564B2 (ja) * 2011-06-08 2016-08-10 三星ダイヤモンド工業株式会社 スクライビングホイール及びスクライブ方法
CN103765330B (zh) * 2011-07-21 2019-01-29 斯沃奇集团研究和开发有限公司 功能性微机械组件
JP5915346B2 (ja) * 2012-04-13 2016-05-11 三星ダイヤモンド工業株式会社 スクライビングホイール
JP2013233793A (ja) * 2012-04-13 2013-11-21 Mitsuboshi Diamond Industrial Co Ltd スクライビングホイール及びその製造方法
JP5536143B2 (ja) * 2012-06-07 2014-07-02 ユニオンツール株式会社 切削工具用ダイヤモンド皮膜
JP6040698B2 (ja) * 2012-10-17 2016-12-07 三菱マテリアル株式会社 ダイヤモンド被覆超硬合金製ドリル
TWI490064B (zh) * 2012-12-11 2015-07-01 Nat Univ Tsing Hua 微型鑽頭及其製備方法
KR101519339B1 (ko) * 2012-12-24 2015-05-12 홍성필 표면조도가 우수한 다이아몬드가 코팅된 절삭공구 및 절삭공구의 다이아몬드 코팅법
JP6102613B2 (ja) * 2013-07-31 2017-03-29 三菱マテリアル株式会社 刃先強度を向上させたダイヤモンド被覆超硬合金製切削工具
KR101995284B1 (ko) * 2013-09-30 2019-07-02 쿄세라 코포레이션 절삭 공구 및 절삭 가공물의 제조 방법
GB201322837D0 (en) * 2013-12-23 2014-02-12 Element Six Ltd Polycrystalline chemical vapour deposited diamond tool parts and methods of fabricating mounting and using the same
US9421611B2 (en) 2014-03-07 2016-08-23 Kennametal Inc. Composite cutting insert and method of making same
US10118229B2 (en) 2014-04-24 2018-11-06 Kyocera Corporation Coated tool
CN106795619B (zh) * 2014-09-17 2019-10-01 日本Itf株式会社 被覆膜及其制造方法以及pvd装置
US10457885B2 (en) * 2014-09-17 2019-10-29 Nippon Itf, Inc. Coating film, manufacturing method for same, and PVD device
US10494713B2 (en) * 2015-04-16 2019-12-03 Ii-Vi Incorporated Method of forming an optically-finished thin diamond film, diamond substrate, or diamond window of high aspect ratio
CN105057717A (zh) * 2015-08-07 2015-11-18 江苏塞维斯数控科技有限公司 机床切割用尖状双面刃具
EP3144412A1 (de) * 2015-09-15 2017-03-22 HILTI Aktiengesellschaft Schneidplatte und herstellungsverfahren
CN105385983B (zh) * 2015-11-09 2017-10-24 中国矿业大学 一种以纳米碳材料的热扩散为预处理的硬质涂层制备方法
US11554421B2 (en) 2017-08-22 2023-01-17 Sumitomo Electric Hardmetal Corp. Cutting tool and method of manufacturing the same
CN110318032A (zh) * 2018-03-29 2019-10-11 中国科学院宁波材料技术与工程研究所 一种超细纳米晶金刚石精密刀具及其制造方法
CN112384318B (zh) * 2018-07-02 2024-05-17 住友电工硬质合金株式会社 金刚石被覆工具
CN109397549B (zh) * 2018-09-26 2020-08-28 广东工业大学 金刚石涂层氮化硅陶瓷整体刀具及其制备方法与刀具在石墨中的应用
US20230249262A1 (en) * 2020-07-09 2023-08-10 Sumitomo Electric Hardmetal Corp. Diamond-coated tool and method for manufacturing the same
US20220127721A1 (en) * 2020-10-23 2022-04-28 Applied Materials, Inc. Depositing Low Roughness Diamond Films

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4769070A (en) 1986-09-05 1988-09-06 Sumitomo Electric Industries, Ltd. High toughness cermet and a process for the production of the same
JP2502322B2 (ja) 1986-10-09 1996-05-29 住友電気工業株式会社 高靭性サ―メット
JPH0328373A (ja) * 1989-06-23 1991-02-06 Idemitsu Petrochem Co Ltd ダイヤモンド被覆部材およびその製造方法
JPH0819522B2 (ja) 1989-09-28 1996-02-28 東芝タンガロイ株式会社 付着性にすぐれたダイヤモンド被覆焼結合金及びその製造方法
JP2813077B2 (ja) 1991-05-30 1998-10-22 京セラ株式会社 摺動部材
JP2842720B2 (ja) 1991-11-29 1999-01-06 京セラ株式会社 伸線用ダイスおよびその製造方法
JP3044944B2 (ja) 1992-08-18 2000-05-22 正夫 村川 気相合成ダイヤモンド膜形成用基体の製造法
DE69330052T2 (de) 1992-12-08 2001-11-15 Osaka Diamond Ind Ultrahartes folienbeschichtetes material und dessen herstellung
JPH0711444A (ja) * 1993-06-28 1995-01-13 Kobe Steel Ltd 炭素膜被覆部材およびその製造方法並びに炭素膜被覆部材を応用した工具
US5571615A (en) * 1995-05-16 1996-11-05 Xrystallume Ultrasmooth adherent diamond film coated article and method for making same
JPH08158051A (ja) * 1994-11-30 1996-06-18 Kyocera Corp 硬質炭素膜
JPH08239297A (ja) 1995-03-01 1996-09-17 Showa Denko Kk ダイヤモンド被覆超硬切削工具及びその製造方法
JP3245320B2 (ja) 1995-03-20 2002-01-15 京セラ株式会社 硬質炭素膜及び硬質炭素膜被覆部材
US5803967A (en) * 1995-05-31 1998-09-08 Kobe Steel Usa Inc. Method of forming diamond devices having textured and highly oriented diamond layers therein
JPH09104943A (ja) 1995-10-09 1997-04-22 Sumitomo Electric Ind Ltd 焼結硬質合金
JP3826453B2 (ja) 1996-09-10 2006-09-27 住友電気工業株式会社 硬質炭素膜
JPH10287491A (ja) * 1997-04-10 1998-10-27 Toshiba Tungaloy Co Ltd 表面粗さを調整したダイヤモンド被覆硬質部材
JP3690626B2 (ja) 1997-08-19 2005-08-31 株式会社アライドマテリアル ダイヤモンドコーティングドリルおよびエンドミル及びその製造方法
JP2001179504A (ja) 1999-12-27 2001-07-03 Hitachi Tool Engineering Ltd 硬質炭素膜被覆工具
JP3477162B2 (ja) * 2000-06-29 2003-12-10 オーエスジー株式会社 ダイヤモンド被覆工具およびその製造方法
HUP0302074A2 (hu) 2001-05-16 2003-09-29 Widia Gmbh Kompozit anyag és eljárás annak elżállítására
DE10130590B4 (de) 2001-05-16 2011-06-30 Widia GmbH, 45145 Verbundwerkstoff und Verfahren zu dessen Herstellung
JP4133150B2 (ja) 2001-09-13 2008-08-13 株式会社アライドマテリアル ダイヤモンド膜被覆部材の製造方法
JP2003247006A (ja) 2002-02-20 2003-09-05 Allied Material Corp 超硬質膜被覆部材及びその製造方法
US7250069B2 (en) * 2002-09-27 2007-07-31 Smith International, Inc. High-strength, high-toughness matrix bit bodies

Also Published As

Publication number Publication date
JPWO2005011902A1 (ja) 2006-09-14
CN1819885A (zh) 2006-08-16
US7883775B2 (en) 2011-02-08
MY138872A (en) 2009-08-28
EP1649955B1 (en) 2013-08-14
AU2003280758A1 (en) 2005-02-15
CN100387385C (zh) 2008-05-14
KR20060109868A (ko) 2006-10-23
EP1649955A4 (en) 2009-10-21
JP4420901B2 (ja) 2010-02-24
TW200503873A (en) 2005-02-01
EP1649955A1 (en) 2006-04-26
KR101065572B1 (ko) 2011-09-19
HK1091435A1 (en) 2007-01-19
US20060216515A1 (en) 2006-09-28
WO2005011902A1 (ja) 2005-02-10

Similar Documents

Publication Publication Date Title
TWI268192B (en) Diamond film-coated tool and method of manufacturing the same diamond film coated tool excels in cutting performance, wear and abrasion resistance, welding resistance and wrought surface roughness
US6063149A (en) Graded grain size diamond layer
JP3137982B2 (ja) ダイヤモンドコーティング切削ツール
WO2005035818A3 (en) Diamond coated article and method of its production
US7476437B2 (en) Cutting tool insert
EP1988190A3 (en) Coated cutting tool
CN102528104B (zh) 表面包覆立方晶氮化硼基超高压烧结材料制切削工具
GB2386909B (en) Self-sharpening cutting tool with hard coating
JP5111379B2 (ja) 切削工具及びその製造方法並びに切削方法
WO2004072357A3 (en) Fiber and sheet equipment wear surfaces of extended resistance and methods for their manufacture
CA2451825A1 (en) Polycrystalline diamond with improved abrasion resistance
ZA200605820B (en) Coated abrasives
Almeida et al. Nanocrystalline CVD diamond coatings for drilling of WC-Co parts
RU2008137609A (ru) Размалывающий инструмент с покрытием
SE0602815L (sv) Belagt hårdmetallskär speciellt användbart för tunga grovbearbetningsoperationer
CN102883840B (zh) 表面被覆切削工具
Song et al. Fabrication and evaluation of diamond thick film-Si3N4 brazed cutting tool by microwave plasma chemical vapor deposition method
DE59906460D1 (de) Polykristalline diamantschicht mit (100)-textur
JP2012144766A (ja) 被覆部材
CA2403236A1 (en) Adhesive composite coating for diamond and diamond-containing materials and method for producing said coating
KR102399559B1 (ko) 내박리성이 향상된 절삭 공구용 피막
CN202344616U (zh) 耐磨锯片
CN2659606Y (zh) 铣刨机刀具用复合涂层刀头
CN101870003B (zh) 用于钢材铣削的硬质合金涂层刀片
TWI358335B (en) Mold and method for manufacturing the same

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees