TW201243906A - Developing method and developing apparatus and coating and developing apparatus with it - Google Patents

Developing method and developing apparatus and coating and developing apparatus with it Download PDF

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Publication number
TW201243906A
TW201243906A TW100144861A TW100144861A TW201243906A TW 201243906 A TW201243906 A TW 201243906A TW 100144861 A TW100144861 A TW 100144861A TW 100144861 A TW100144861 A TW 100144861A TW 201243906 A TW201243906 A TW 201243906A
Authority
TW
Taiwan
Prior art keywords
substrate
developing
liquid
unit
speed
Prior art date
Application number
TW100144861A
Other languages
English (en)
Chinese (zh)
Inventor
Tetsuya Sada
Hideaki Gotoh
Atsushi Nagata
Masaki Fujiwara
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW201243906A publication Critical patent/TW201243906A/zh

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3042—Imagewise removal using liquid means from printing plates transported horizontally through the processing stations
    • G03F7/3064—Imagewise removal using liquid means from printing plates transported horizontally through the processing stations characterised by the transport means or means for confining the different units, e.g. to avoid the overflow
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Health & Medical Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Environmental & Geological Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW100144861A 2010-12-08 2011-12-06 Developing method and developing apparatus and coating and developing apparatus with it TW201243906A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010273530A JP2012124309A (ja) 2010-12-08 2010-12-08 現像方法、現像装置、およびこれを備える塗布現像処理システム

Publications (1)

Publication Number Publication Date
TW201243906A true TW201243906A (en) 2012-11-01

Family

ID=46347934

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100144861A TW201243906A (en) 2010-12-08 2011-12-06 Developing method and developing apparatus and coating and developing apparatus with it

Country Status (4)

Country Link
JP (1) JP2012124309A (ko)
KR (1) KR20120064039A (ko)
CN (1) CN102540770B (ko)
TW (1) TW201243906A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109923643A (zh) * 2016-11-11 2019-06-21 株式会社斯库林集团 显影装置、衬底处理装置、显影方法及衬底处理方法
TWI750267B (zh) * 2016-12-02 2021-12-21 日商東京威力科創股份有限公司 基板處理裝置、基板處理方法及記錄媒體

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6360404B2 (ja) * 2014-09-30 2018-07-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6418531B2 (ja) * 2015-03-05 2018-11-07 新電元工業株式会社 レジスト現像装置、レジスト現像方法及び半導体装置の製造方法
CN110088879B (zh) * 2016-12-19 2024-02-06 东京毅力科创株式会社 显影处理方法、计算机存储介质和显影处理装置
WO2018216612A1 (ja) * 2017-05-26 2018-11-29 シャープ株式会社 基板処理装置
CN108469719A (zh) * 2018-04-28 2018-08-31 武汉华星光电技术有限公司 显影装置及方法
JP7023190B2 (ja) * 2018-06-15 2022-02-21 東京エレクトロン株式会社 基板処理装置および基板処理方法
JP2021093396A (ja) * 2019-12-06 2021-06-17 東京エレクトロン株式会社 基板処理装置、および基板処理方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2824031B2 (ja) * 1987-10-31 1998-11-11 大日本スクリーン製造株式会社 基板の表面処理装置
JP4022288B2 (ja) * 1997-09-02 2007-12-12 大日本スクリーン製造株式会社 基板処理装置
JP3930278B2 (ja) * 2001-09-20 2007-06-13 東京エレクトロン株式会社 液処理装置および液処理方法
US7566181B2 (en) * 2004-09-01 2009-07-28 Tokyo Electron Limited Controlling critical dimensions of structures formed on a wafer in semiconductor processing
JP4654119B2 (ja) * 2005-11-29 2011-03-16 東京エレクトロン株式会社 塗布・現像装置及び塗布・現像方法
TW200919117A (en) * 2007-08-28 2009-05-01 Tokyo Electron Ltd Coating-developing apparatus, coating-developing method and storage medium
JP4824723B2 (ja) * 2008-06-17 2011-11-30 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP2010093162A (ja) * 2008-10-10 2010-04-22 Sharp Corp 液処理装置および液処理方法
JP4812847B2 (ja) * 2009-02-23 2011-11-09 東京エレクトロン株式会社 基板処理装置及び基板処理方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109923643A (zh) * 2016-11-11 2019-06-21 株式会社斯库林集团 显影装置、衬底处理装置、显影方法及衬底处理方法
CN109923643B (zh) * 2016-11-11 2023-09-22 株式会社斯库林集团 显影装置、衬底处理装置、显影方法及衬底处理方法
TWI750267B (zh) * 2016-12-02 2021-12-21 日商東京威力科創股份有限公司 基板處理裝置、基板處理方法及記錄媒體

Also Published As

Publication number Publication date
KR20120064039A (ko) 2012-06-18
CN102540770A (zh) 2012-07-04
CN102540770B (zh) 2015-07-22
JP2012124309A (ja) 2012-06-28

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