JP7023190B2 - 基板処理装置および基板処理方法 - Google Patents
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/06—Silver salts
- G03F7/063—Additives or means to improve the lithographic properties; Processing solutions characterised by such additives; Treatment after development or transfer, e.g. finishing, washing; Correction or deletion fluids
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- G—PHYSICS
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants
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- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- Condensed Matter Physics & Semiconductors (AREA)
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Description
実施形態に係る基板処理装置1について図1を参照し説明する。図1は、実施形態に係る基板処理装置1の概略構成を示す模式図である。
次に、現像ユニット40について、図3を参照し説明する。図3は、実施形態に係る現像ユニット40の概略構成を示す模式図である。図3では、コロ搬送機構44などの一部構成は省略する。以下では、基板Sの搬送方向に対して直交する基板Sの面方向を、幅方向として説明する。なお、幅方向は、コロ搬送機構44のコロ44aの回転軸に対して平行である。
実施形態に係る現像液槽60によるディップ処理を行わずに現像を行う比較例に係る基板処理装置は、露光されたフォトレジスト膜が表面に形成された基板に供給ノズルから現像液を吐出し、基板に現像液を液盛りし、現像処理を開始する。基板に対する現像は、基板に現像液が付着した直後に大きく進行することが知られている。
次に、本実施形態の変形例について説明する。
基板処理装置1は、露光されたフォトレジスト膜が表面に形成された基板Sを平流し搬送するコロ搬送機構44(搬送機構の一例)と、コロ搬送機構44によって搬送される基板Sが現像液に浸漬される現像液槽60と、現像液槽60内の現像液から外へ搬送された基板Sに現像液を液盛りする第2供給ノズル62(供給ノズルの一例)とを備える。
40 現像ユニット
44 コロ搬送機構(搬送機構)
50 現像処理部
51 リンス処理部
52 乾燥処理部
60 現像液槽
61 第1供給ノズル(供給ノズル)
62 第2供給ノズル(調整ノズル)
63 第3供給ノズル
64 エアナイフ(空気吐出部)
75 リンス液供給ノズル
75a リンス液受部
76 液溜まり形成部
Claims (8)
- 露光されたフォトレジスト膜が表面に形成された基板を平流し搬送する搬送機構と、
前記搬送機構によって搬送される前記基板が現像液に浸漬される現像液槽と、
前記現像液槽内の前記現像液から外へ搬送された前記基板に現像液を液盛りする供給ノズルと、
前記現像液槽内の前記現像液に前記基板が浸漬される場合に形成される、前記現像液の液面と前記基板との境界に向けて現像液を吐出する調整ノズルと、
を備える基板処理装置。 - 前記供給ノズルは、
前記現像液槽の上方に設けられる
請求項1に記載の基板処理装置。 - 前記搬送機構は、
前記基板を前下がりの状態で前記現像液槽内の前記現像液に浸漬させる
請求項1または2に記載の基板処理装置。 - 前記搬送機構は、
前記基板を前上がりの状態で前記現像液槽内の前記現像液から外へ搬送する
請求項1~3のいずれか一つに記載の基板処理装置。 - 前記搬送機構は、
前記供給ノズルによって前記現像液が前記基板に液盛りされる場合の搬送速度と、前記液盛りされた後の搬送速度とを同一の搬送速度とする
請求項1~4のいずれか一つに記載の基板処理装置。 - 前記基板に液盛りされた前記現像液に向けて空気を吹き出し、前記基板に液盛りされた前記現像液を液切りする空気吐出部と、
前記基板の搬送方向において前記空気吐出部よりも下流側にリンス液の液溜まりを形成する液溜まり形成部と
を備える請求項1~5のいずれか一つに記載の基板処理装置。 - 前記液溜まり形成部は、
液切り直後に前記基板が進入するように前記液溜まりを形成する
請求項6に記載の基板処理装置。 - 露光されたフォトレジスト膜が表面に形成され、平流し搬送される基板を現像液槽内の現像液に浸漬させる工程と、
前記現像液槽内の前記現像液から外へ搬送された前記基板に現像液を液盛りする工程と、
前記現像液槽内の前記現像液に前記基板が浸漬される場合に形成される、前記現像液の液面と前記基板との境界に向けて現像液を吐出する工程と
を有する基板処理方法。
Priority Applications (3)
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JP2018114962A JP7023190B2 (ja) | 2018-06-15 | 2018-06-15 | 基板処理装置および基板処理方法 |
KR1020190068050A KR20190142218A (ko) | 2018-06-15 | 2019-06-10 | 기판 처리 장치 및 기판 처리 방법 |
CN201910509871.9A CN110610853A (zh) | 2018-06-15 | 2019-06-13 | 基片处理装置和基片处理方法 |
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JP2019220517A JP2019220517A (ja) | 2019-12-26 |
JP7023190B2 true JP7023190B2 (ja) | 2022-02-21 |
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WO2022019104A1 (ja) * | 2020-07-20 | 2022-01-27 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法およびプログラム |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003031478A (ja) | 2001-07-17 | 2003-01-31 | Tokyo Electron Ltd | 現像処理装置 |
JP2010093162A (ja) | 2008-10-10 | 2010-04-22 | Sharp Corp | 液処理装置および液処理方法 |
CN201654456U (zh) | 2010-04-13 | 2010-11-24 | 汕头超声显示器(二厂)有限公司 | 制作tft高精密线路的图形显影装置 |
JP2012130834A (ja) | 2010-12-20 | 2012-07-12 | Tokyo Electron Ltd | 塗布処理装置及び塗布処理方法 |
Family Cites Families (8)
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JPH08262877A (ja) * | 1995-03-20 | 1996-10-11 | Minolta Co Ltd | 液体現像装置 |
JPH11242341A (ja) * | 1998-02-25 | 1999-09-07 | Hitachi Ltd | 現像方法および現像装置ならびに半導体装置の製造方法 |
JP4652250B2 (ja) * | 2006-02-24 | 2011-03-16 | 東京エレクトロン株式会社 | 現像処理装置、現像処理方法、コンピュータ読取可能な記憶媒体 |
JP4947711B2 (ja) * | 2006-04-26 | 2012-06-06 | 東京エレクトロン株式会社 | 現像処理方法、現像処理プログラム、及びそのプログラムを記録したコンピュータ読み取り可能な記録媒体 |
JP5449116B2 (ja) * | 2010-12-08 | 2014-03-19 | 東京エレクトロン株式会社 | 現像装置、これを備える現像塗布システム、および現像方法 |
JP2012124309A (ja) * | 2010-12-08 | 2012-06-28 | Tokyo Electron Ltd | 現像方法、現像装置、およびこれを備える塗布現像処理システム |
JP5797532B2 (ja) * | 2011-02-24 | 2015-10-21 | 東京エレクトロン株式会社 | 有機溶剤を含有する現像液を用いた現像処理方法及び現像処理装置 |
JP6148210B2 (ja) * | 2014-06-17 | 2017-06-14 | 東京エレクトロン株式会社 | 現像方法及びコンピュータ読み取り可能な記録媒体 |
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- 2018-06-15 JP JP2018114962A patent/JP7023190B2/ja active Active
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2019
- 2019-06-10 KR KR1020190068050A patent/KR20190142218A/ko not_active Application Discontinuation
- 2019-06-13 CN CN201910509871.9A patent/CN110610853A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003031478A (ja) | 2001-07-17 | 2003-01-31 | Tokyo Electron Ltd | 現像処理装置 |
JP2010093162A (ja) | 2008-10-10 | 2010-04-22 | Sharp Corp | 液処理装置および液処理方法 |
CN201654456U (zh) | 2010-04-13 | 2010-11-24 | 汕头超声显示器(二厂)有限公司 | 制作tft高精密线路的图形显影装置 |
JP2012130834A (ja) | 2010-12-20 | 2012-07-12 | Tokyo Electron Ltd | 塗布処理装置及び塗布処理方法 |
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CN110610853A (zh) | 2019-12-24 |
JP2019220517A (ja) | 2019-12-26 |
KR20190142218A (ko) | 2019-12-26 |
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