TW201105954A - Array test apparatus having cleaner for optic chuck - Google Patents

Array test apparatus having cleaner for optic chuck Download PDF

Info

Publication number
TW201105954A
TW201105954A TW098141793A TW98141793A TW201105954A TW 201105954 A TW201105954 A TW 201105954A TW 098141793 A TW098141793 A TW 098141793A TW 98141793 A TW98141793 A TW 98141793A TW 201105954 A TW201105954 A TW 201105954A
Authority
TW
Taiwan
Prior art keywords
module
detecting device
light source
optical
optical chuck
Prior art date
Application number
TW098141793A
Other languages
English (en)
Chinese (zh)
Inventor
Jung-Hee Park
Original Assignee
Top Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Top Eng Co Ltd filed Critical Top Eng Co Ltd
Publication of TW201105954A publication Critical patent/TW201105954A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/003—Environmental or reliability tests
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
TW098141793A 2009-08-03 2009-12-07 Array test apparatus having cleaner for optic chuck TW201105954A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090071428A KR101089059B1 (ko) 2009-08-03 2009-08-03 옵틱척 클리너를 구비한 어레이 테스트 장치

Publications (1)

Publication Number Publication Date
TW201105954A true TW201105954A (en) 2011-02-16

Family

ID=43745561

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098141793A TW201105954A (en) 2009-08-03 2009-12-07 Array test apparatus having cleaner for optic chuck

Country Status (3)

Country Link
KR (1) KR101089059B1 (ko)
CN (1) CN101988903A (ko)
TW (1) TW201105954A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI567382B (zh) * 2015-12-30 2017-01-21 致茂電子股份有限公司 光學檢測機
TWI630600B (zh) * 2017-05-03 2018-07-21 佳世達科技股份有限公司 色彩校正裝置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI458958B (zh) * 2013-04-03 2014-11-01 All Ring Tech Co Ltd Detection device and its inspection window cleaning method
KR101626496B1 (ko) * 2014-04-23 2016-06-02 세메스 주식회사 기판 처리 장치 및 방법
KR20170055064A (ko) 2015-11-10 2017-05-19 삼성전자주식회사 기판 제조 방법
KR102129023B1 (ko) * 2020-05-20 2020-07-01 손명훈 인쇄회로기판용 표면세척장치 및 표면세척방법
CN112859400B (zh) * 2021-02-26 2023-05-30 深圳市华星光电半导体显示技术有限公司 检测系统及检测方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3434977B2 (ja) * 1996-07-09 2003-08-11 シャープ株式会社 液晶ディスプレイ基板の検査装置
KR100756229B1 (ko) * 2006-10-26 2007-09-07 주식회사 탑 엔지니어링 어레이 테스트 장비
KR100883280B1 (ko) * 2007-10-04 2009-02-12 아프로시스템 주식회사 평판 디스플레이 글라스의 표면에 부착된 이물질을제거하기 위한 공진을 이용한 초음파 세정장치 및 세정방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI567382B (zh) * 2015-12-30 2017-01-21 致茂電子股份有限公司 光學檢測機
TWI630600B (zh) * 2017-05-03 2018-07-21 佳世達科技股份有限公司 色彩校正裝置

Also Published As

Publication number Publication date
KR20110013794A (ko) 2011-02-10
CN101988903A (zh) 2011-03-23
KR101089059B1 (ko) 2011-12-05

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