TW200729291A - Handling apparatus of substrate - Google Patents
Handling apparatus of substrateInfo
- Publication number
- TW200729291A TW200729291A TW095142791A TW95142791A TW200729291A TW 200729291 A TW200729291 A TW 200729291A TW 095142791 A TW095142791 A TW 095142791A TW 95142791 A TW95142791 A TW 95142791A TW 200729291 A TW200729291 A TW 200729291A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- transporting
- spray nozzle
- handling
- posture
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005377670A JP4472630B2 (ja) | 2005-12-28 | 2005-12-28 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200729291A true TW200729291A (en) | 2007-08-01 |
TWI317144B TWI317144B (zh) | 2009-11-11 |
Family
ID=38214316
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095142791A TW200729291A (en) | 2005-12-28 | 2006-11-20 | Handling apparatus of substrate |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4472630B2 (zh) |
KR (1) | KR100857635B1 (zh) |
CN (1) | CN100483618C (zh) |
TW (1) | TW200729291A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI407270B (zh) * | 2009-12-30 | 2013-09-01 | Au Optronics Corp | 顯影設備 |
TWI681454B (zh) * | 2018-03-12 | 2020-01-01 | 日商斯庫林集團股份有限公司 | 基板處理裝置及基板處理方法 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008277556A (ja) * | 2007-04-27 | 2008-11-13 | Shibaura Mechatronics Corp | 基板の処理装置 |
KR100935474B1 (ko) * | 2008-02-27 | 2010-01-06 | 주식회사 케이씨텍 | 기판 처리장치 |
KR100935473B1 (ko) * | 2008-02-27 | 2010-01-06 | 주식회사 케이씨텍 | 기판 처리장치 |
KR100934777B1 (ko) | 2008-02-27 | 2009-12-31 | 주식회사 케이씨텍 | 기판 처리장치 |
JP5270263B2 (ja) * | 2008-08-29 | 2013-08-21 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
JP2010240550A (ja) * | 2009-04-03 | 2010-10-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2012186188A (ja) * | 2009-07-08 | 2012-09-27 | Sharp Corp | エッチング装置および基板処理方法 |
JP5437134B2 (ja) * | 2010-03-31 | 2014-03-12 | 大日本スクリーン製造株式会社 | 塗布装置 |
CN103801536B (zh) * | 2012-11-13 | 2016-02-17 | 沈阳芯源微电子设备有限公司 | 一种晶片清洗装置 |
CN103207543A (zh) * | 2013-04-19 | 2013-07-17 | 京东方科技集团股份有限公司 | 一种显影方法 |
CN103324038A (zh) * | 2013-06-25 | 2013-09-25 | 京东方科技集团股份有限公司 | 一种显影装置及显影方法 |
KR102134439B1 (ko) * | 2013-08-30 | 2020-07-15 | 세메스 주식회사 | 기판 처리 장치, 그리고 기판 처리 장치를 이용한 기판 처리 방법 |
CN103913959B (zh) * | 2014-03-27 | 2017-09-26 | 京东方科技集团股份有限公司 | 一种光刻胶的剥离装置及剥离方法 |
KR102125793B1 (ko) * | 2018-04-20 | 2020-06-25 | 세메스 주식회사 | 기판 처리 장치 |
JP7370884B2 (ja) | 2020-01-31 | 2023-10-30 | 株式会社Screenホールディングス | 基板処理装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0654306B1 (en) * | 1993-05-27 | 2001-08-16 | Dai Nippon Printing Co., Ltd. | Method of and apparatus for application of liquid |
TW334359B (en) | 1995-12-04 | 1998-06-21 | Dai Nippon Scolin Seizo Kk | Apparatus and method for treating substrates |
KR100343044B1 (ko) * | 1997-08-28 | 2002-10-25 | 다이닛뽕스크린 세이조오 가부시키가이샤 | 기판처리장치및처리방법 |
TWI226077B (en) * | 2001-07-05 | 2005-01-01 | Tokyo Electron Ltd | Liquid processing apparatus and liquid processing method |
-
2005
- 2005-12-28 JP JP2005377670A patent/JP4472630B2/ja not_active Expired - Fee Related
-
2006
- 2006-11-20 TW TW095142791A patent/TW200729291A/zh not_active IP Right Cessation
- 2006-12-15 CN CNB2006101646806A patent/CN100483618C/zh not_active Expired - Fee Related
- 2006-12-28 KR KR1020060136484A patent/KR100857635B1/ko active IP Right Grant
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI407270B (zh) * | 2009-12-30 | 2013-09-01 | Au Optronics Corp | 顯影設備 |
TWI681454B (zh) * | 2018-03-12 | 2020-01-01 | 日商斯庫林集團股份有限公司 | 基板處理裝置及基板處理方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20070070118A (ko) | 2007-07-03 |
TWI317144B (zh) | 2009-11-11 |
JP4472630B2 (ja) | 2010-06-02 |
JP2007180299A (ja) | 2007-07-12 |
KR100857635B1 (ko) | 2008-09-08 |
CN100483618C (zh) | 2009-04-29 |
CN1992158A (zh) | 2007-07-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200729291A (en) | Handling apparatus of substrate | |
TW200746230A (en) | Developing treatment apparatus and developing treatment method | |
TW200802579A (en) | Liquid processing apparatus | |
ATE495278T1 (de) | Thermische spritzvorrichtung, sowie ein thermisches spritzverfahren | |
TW200633032A (en) | Apparatus for electroless deposition of metals onto semiconductor substrates | |
TW200739674A (en) | Coating and developing apparatus, and coating and developing method | |
TW200627575A (en) | Substrate processing apparatus and substrate processing method | |
TW200711749A (en) | Coating method and coating apparatus | |
ZA200608298B (en) | Improvements In or relating to products | |
TW200642933A (en) | Substrate carrying device | |
EP1354635A3 (en) | Apparatus for spray coating a continuously advancing article | |
CN107433240B (zh) | 喷嘴清扫装置、涂覆装置及喷嘴清扫方法 | |
ATE389460T1 (de) | Vorrichtung zum vorerwärmen eines trägerfluids für das spritzlackieren | |
TW200603252A (en) | Coating apparatus and coating method using the same | |
TW200618699A (en) | Thin-film pattern forming method, semiconductor device, electro-optic device, and electronic apparatus | |
TW200518849A (en) | Coating method and coating apparatus | |
TW200802572A (en) | Substrate cleaning apparatus and method | |
TW200705063A (en) | Printing bead spacers on LCD substrates | |
TW200641985A (en) | Treatment apparatus for substrate and method thereof | |
TW200618045A (en) | A method and apparatus for cleaning semiconductor substrates | |
UA99751C2 (uk) | Пристрій для нанесення покриттів (варіанти) | |
JP2006245125A (ja) | 基板の処理装置及び処理方法 | |
JP6060140B2 (ja) | 乾式指紋洗浄装置 | |
ATE325666T1 (de) | Vorrichtung zum reinigen der oberfläche von zylindrischen körpern, wie walzen oder rollen | |
JP2006239503A (ja) | 基板の処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |