TW200518849A - Coating method and coating apparatus - Google Patents

Coating method and coating apparatus

Info

Publication number
TW200518849A
TW200518849A TW093127298A TW93127298A TW200518849A TW 200518849 A TW200518849 A TW 200518849A TW 093127298 A TW093127298 A TW 093127298A TW 93127298 A TW93127298 A TW 93127298A TW 200518849 A TW200518849 A TW 200518849A
Authority
TW
Taiwan
Prior art keywords
coating
nozzle
resist
pad
going
Prior art date
Application number
TW093127298A
Other languages
Chinese (zh)
Other versions
TWI299286B (en
Inventor
Yukihiro Kawano
Shinobu Tanaka
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200518849A publication Critical patent/TW200518849A/en
Application granted granted Critical
Publication of TWI299286B publication Critical patent/TWI299286B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

As stability always obtains a wet line good for a long-type coating nozzle, on a processed substrate, a film thickness is fixed and a coating film without coating unevenness is formed. The wet line ground processing part 125 supplying resist liquid or dilution resist liquid to the coating pad 162 constituted so that resist .liquid might ooze from the front from the resist liquid supply part in the utility unit 172. Pushing the coating pad 162 against the bottom half part of the nozzle part back 160 by predetermined pressure by pushing parts in the utility unit 172. The application pad 162 is made to move in the direction of nozzle longitudinal (the direction of Y) by the going-straight drive of the going-straight drive part 176 at linear from the end of the resist nozzle 120 to other ends, and a breath.
TW093127298A 2003-09-12 2004-09-09 Coating method and coating apparatus TWI299286B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003320845A JP4071183B2 (en) 2003-09-12 2003-09-12 Coating method and coating apparatus

Publications (2)

Publication Number Publication Date
TW200518849A true TW200518849A (en) 2005-06-16
TWI299286B TWI299286B (en) 2008-08-01

Family

ID=34452686

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093127298A TWI299286B (en) 2003-09-12 2004-09-09 Coating method and coating apparatus

Country Status (4)

Country Link
JP (1) JP4071183B2 (en)
KR (1) KR101065876B1 (en)
CN (1) CN100542685C (en)
TW (1) TWI299286B (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4980644B2 (en) * 2005-05-30 2012-07-18 東京エレクトロン株式会社 Coating method and coating apparatus
KR101097519B1 (en) 2005-06-25 2011-12-22 엘지디스플레이 주식회사 Coating apparatus and method of forming coating layer
JP4799390B2 (en) * 2006-12-15 2011-10-26 中外炉工業株式会社 Application method
KR100834145B1 (en) 2006-12-27 2008-06-02 세메스 주식회사 Apparatus for coating photoresist including a weight supporter
JP5121778B2 (en) * 2009-06-26 2013-01-16 東京エレクトロン株式会社 Priming processing method and priming processing apparatus
CN102221784B (en) * 2010-04-19 2013-07-24 北京京东方光电科技有限公司 Glue coating device and glue coating method
JP5841449B2 (en) * 2012-02-10 2016-01-13 東京エレクトロン株式会社 Wiping pad, nozzle maintenance device using the pad, and coating treatment device
JP6310179B2 (en) * 2013-01-31 2018-04-11 積水化学工業株式会社 Gel coating machine and lithium ion secondary battery manufacturing device
CN103223396B (en) * 2013-05-10 2016-02-03 深圳市华星光电技术有限公司 A kind of contact immersion slot for light blockage coating equipment
CN104338706B (en) * 2013-08-02 2018-04-13 盛美半导体设备（上海）有限公司 Cleaning device
CN105728256A (en) * 2016-04-29 2016-07-06 玖龙纸业（太仓）有限公司 Production device and production method for coated duplex board with grey back
CN105880104B (en) * 2016-05-25 2020-03-31 成都国珈星际固态锂电科技有限公司 Coating mechanism, slit coating device and film preparation method
CN106125178A (en) * 2016-08-19 2016-11-16 武汉华星光电技术有限公司 Colored filter and the apparatus for coating of acquisition thereof and acquisition methods
JP6794473B2 (en) 2017-02-03 2020-12-02 ビークルエナジージャパン株式会社 Coating die, coating equipment, coating method and manufacturing method of secondary battery
CN107282371A (en) * 2017-08-17 2017-10-24 京东方科技集团股份有限公司 A kind of coating head and its apparatus for coating
CN213315692U (en) * 2020-06-30 2021-06-01 东莞宇宙电路板设备有限公司 Vertical spraying device and surface treatment equipment
CN113262930A (en) * 2021-04-07 2021-08-17 李来旺 Steel pipe anticorrosion painting device
CN115025935B (en) * 2022-07-28 2023-02-28 深圳市三维机电设备有限公司 Automatic heating, wiping, dispensing and curing all-in-one machine for liquid crystal workpieces

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3604987B2 (en) 1994-04-21 2004-12-22 大日本スクリーン製造株式会社 Coating device and coating method
JPH10216598A (en) 1997-02-04 1998-08-18 Toray Ind Inc Method and device for coating and method and device for manufacture of color filter
US6275309B1 (en) * 1998-09-16 2001-08-14 Syscan, Inc. Lightweight mobile scanners
JP2002177848A (en) 2000-12-15 2002-06-25 Toray Ind Inc Apparatus and method for cleaning coating die, and apparatus and method for manufacturing color filter using them

Also Published As

Publication number Publication date
CN100542685C (en) 2009-09-23
TWI299286B (en) 2008-08-01
CN1593787A (en) 2005-03-16
JP2005087777A (en) 2005-04-07
KR20050027076A (en) 2005-03-17
JP4071183B2 (en) 2008-04-02
KR101065876B1 (en) 2011-09-19

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees