JP2002177848A - Apparatus and method for cleaning coating die, and apparatus and method for manufacturing color filter using them - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating die cleaning means high in productivity, reducing the abrasion of a cleaning member to a large extent in a cleaning method for removing the excess coating solution bonded to the periphery of the discharge port of a coating die by bringing the cleaning member into slide contact with the die and preventing the generation of the quality flaw of a coating film caused by an abrasion powder. SOLUTION: In the coating die cleaning apparatus for cleaning a coating film forming surface consisting of the discharge port surface of the coating die for discharging the coating solution and the surface adjacent thereto, the cleaning member, which comes into slide contact with the coating film forming surface to remove the coating solution adhering to the coating film forming surface, and a suction opening part for sucking the removed coating solution are separately provided to the respective surfaces constituting the coating film forming surface and the suction opening part is arranged in the vicinity of the slide contact part of the cleaning member with the coating film forming surface and a mechanism for moving the cleaning member and the suction opening part in the longitudinal direction of the coating die is provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used, for example, in the field of manufacturing color filters for liquid crystal displays, and more particularly, it is suitably used when a color filter coating is applied to the surface of a member to be coated such as a glass substrate. The present invention relates to an apparatus for cleaning a discharge port of a die of a die coater and a peripheral area thereof and a coating method using the same, and further relates to an apparatus and a method for manufacturing a color filter using these apparatuses and methods.

[0002]

2. Description of the Related Art As a method for coating a member to be coated such as a glass substrate, there is a die coating method.

As disclosed in Japanese Patent Application Laid-Open No. 5-208154, a die coater discharges a coating liquid from an elongated discharge port of a die as an applicator to a member to be coated while moving the member to be coated such as a film and a substrate. Then, a coating film surface having a predetermined thickness is formed on the member to be coated.

When this die coater is used for coating a sheet-like object to be coated such as a glass substrate, once the coating liquid is applied, the coating liquid discharge port surface of the die and its adjacent surface (hereinafter referred to as coating film formation) are used. Part of the coating liquid remains on the surface)
It adheres in the form of drops. If the droplet-shaped coating liquid is left unattended when the coating is performed again, the coating liquid remaining in the form of droplets will be applied to the substrate together with the coating liquid discharged from the die, so that the coating liquid is uniformly applied. It is not possible to obtain a coating surface having a large thickness. Therefore, each time one application is completed,
It is necessary to clean the coating surface of the die to remove the applied coating liquid.

As means for solving the above-mentioned problems, for example, Japanese Patent Application Laid-Open No. 9-192566 discloses a cleaning member made of a synthetic resin such as silicone rubber having a notch that matches the shape of a coating surface of a die. An apparatus and a method for cleaning by sliding contact with a coating film forming surface are disclosed.

[0006]

However, in the above-described coating apparatus and method, the cleaning member and the die are in sliding contact with each other, so that wear of the cleaning member cannot be avoided.

In particular, since the twill line portion where the discharge port surface of the die and the adjacent surface contact each other has a sharp edge, the contact portion between the twill line portion and the cleaning member wears remarkably. There is a problem that the abrasion powder that mixes into the coating film and causes a defect in the quality of the coating film. In addition, since a single cleaning member is used to simultaneously clean all surfaces constituting the coating film forming surface of the die, since the coating film forming surface of the die and the cleaning member cannot contact evenly due to mechanical precision, Each surface cannot be pressed with an optimal force, and in some places, it is pressed with an excessive force, causing an increase in wear of the cleaning member. Furthermore, since the position of the suction port for sucking and discharging the coating liquid scraped off by the cleaning member is away from the sliding portion between the cleaning member and the coating film forming surface, the scraped coating liquid is completely removed. There was also a problem that the material could not be discharged and overflowed from the cleaning member, which adhered to the die and caused secondary contamination.

The present invention has been made in view of the above-mentioned circumstances, and an object of the present invention is to significantly reduce wear of a cleaning member so that a coating surface of a die can be cleaned. Another object of the present invention is to provide a coating die cleaning apparatus and a cleaning method capable of reducing the occurrence of quality defects and increasing the productivity, and a color filter manufacturing apparatus and a manufacturing method using the same.

[0009]

The object of the present invention is achieved by the following means.

The coating die cleaning apparatus according to claim 1, wherein the coating liquid is discharged from a discharge port of the coating die forming surface of the coating die. A cleaning member for removing the coating solution adhering to the forming surface, and a suction opening for sucking the removed coating solution for each of the surfaces forming the coating film forming surface; Is provided near the sliding contact portion of the cleaning member with the coating film forming surface, and further includes a mechanism for moving the cleaning member and the suction opening in the longitudinal direction of the coating die.

Here, it is preferable that the suction opening is opened at a position of 5 mm or less from the coating film forming surface.
Further, it is desirable to have a means for moving the cleaning member in the direction of contacting and separating from the coating die, and a mechanism for pressing the cleaning member along the coating film forming surface. Preferably, the cleaning member is made of synthetic resin or rubber.

According to a fifth aspect of the present invention, there is provided an apparatus for manufacturing a color filter, comprising the apparatus for cleaning a coating die according to any one of the first to fourth aspects.

According to a sixth aspect of the present invention, there is provided a method of cleaning a coating die for cleaning a coating film forming surface of a coating die for discharging a coating liquid from a discharge port. A separate cleaning member is slid in the coating die longitudinal direction for each of the constituent surfaces to remove the coating liquid adhering to the coating film forming surface, and the removed coating liquid is applied to the coating film forming surface. Each of the constituent surfaces is suctioned through a separately provided suction opening.

Here, it is preferable that the suction opening is opened at a position of 5 mm or less from the coating film forming surface.
Further, it is preferable that the cleaning member is further movable in the direction of contact and separation with respect to the coating die, and the cleaning member is pressed against the coating film forming surface.

According to a ninth aspect of the present invention, a color filter is manufactured by using the coating die cleaning method according to any one of the sixth to eighth aspects.

According to the apparatus and method for cleaning the coating die according to the first and sixth aspects, the cleaning member is provided separately for each of the surfaces constituting the coating film forming surface. It is possible to avoid being pressed against the twill line portion where the discharge port surface and its adjacent surface are in contact with each other, and it is possible to optimize the force for pressing the cleaning member against the surface constituting the coating film forming surface, Wear can be significantly reduced. Further, since the suction opening is provided separately for each surface constituting the coating film forming surface, the removed coating liquid can be efficiently collected, and recontamination due to insufficient collection can be prevented.

According to the apparatus or method for manufacturing a color filter according to the fifth or ninth aspect, since the color filter is manufactured using the above-described apparatus and method for cleaning a coating die, there is no quality defect. High quality color filters can be obtained with high productivity.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic perspective view showing an example in which a coating die cleaning apparatus 10 of the present invention is applied to a die coater 1 which is a coating apparatus. FIG. FIG. 3 is a cross-sectional side view showing a cleaning state.
FIG. 4 is an enlarged perspective view of the cleaning head unit 105 of FIG. 1, FIG. 4 is a schematic view showing a cleaning state by the coating die cleaning device 10, and FIG.
5 is an enlarged view of a portion A in FIG.

Referring to FIG. 1, there is a die coater 1 which has a die 2 for discharging a coating liquid and a glass substrate 6.
And a coating die cleaning device 10 for cleaning the die 2 before or after coating. Here, the die 2 is attached to the column 5 via an elevating mechanism (not shown) so as to be able to move up and down.
The table 4 is attached to the base 3 via a reciprocating mechanism (not shown) so that the lower part of the die 2 can move straight in the directions of arrows 4A and 4B. The glass substrate 6 is sucked through suction holes (not shown) on the surface of the table 4 and is sucked and held on the table 4.

Next, the cross section of the die 2 viewed from the longitudinal direction is as shown in FIG. 2, and the doctor lip 13 and the backup lip 14 face each other via the shim 15.
By connecting with a plurality of connecting bolts (not shown), a discharge port 7 for the application liquid having the same width as the thickness of the shim 15 is formed below the die 2. The discharge port 7 is connected to the manifold 16 at the center of the die 2 through the slit 9, and the coating liquid is supplied from the discharge port 7 by supplying the coating liquid to the coating liquid supply port 17 connected to the manifold 16. Discharged uniformly.

Next, the configuration of the coating die cleaning apparatus 10 will be described.

Referring again to FIG. 1, the coating die cleaning apparatus 1
Reference numeral 0 denotes a cleaning unit 100, a waste liquid unit 200, and a cleaning unit 300.

The cleaning unit 100 includes a cleaning head 10
5, a tray 15 for receiving the liquid falling from the discharge port 7
0, a driving device 160 for freely moving the cleaning head unit 105 and the tray 150 in the longitudinal direction of the die 2 is provided.

When the cleaning head 105 is viewed from the longitudinal direction of the die 2 as shown in FIG.
A and independent cleaning heads 110A, 110B, 110C for cleaning the A and lip slopes 8B, 8C, respectively, are fixed to the tray 150.

The independent cleaning heads 110A, 110
Although the detailed configuration of B and 110C is shown in FIG. 3, since the cleaning heads 110A, 110B and 110C have exactly the same structure, the components constituting the cleaning head 110A will be described in detail.

Now, the cleaning head 110A has the lip surface 8
Cleaning tool 120 that actually removes the coating solution in line contact with A
A and the rotary support shaft 141A holding the cleaning tool 120A.
A cleaning tool holding member 130A rotatable around and a mechanism for rotatably engaging the cleaning tool holding member 130A via a rotation support shaft 141A and allowing the cleaning tool holding member 130A to move vertically. And a lower plate 144A of the copying mechanism 140A.
Is fixed to the tray 150, positioning on the tray 150 is performed.

Here, it is preferable that the edge portion 121A of the cleaning tool 120A, which is in contact with the lip surface 8A, has a sharp edge shape so as to enhance the ability to remove the coating liquid.

The cleaning tool holding member 130A is provided with a notch 131A, and the notch 131A is attached to the cleaning tool 120A so that the suction opening 132A is formed.
To form The suction opening 132A is connected to the waste liquid unit 200 via a pipe 201 as shown in FIG. 4, so that the coating liquid around the suction opening 132A can be removed by suction.

Returning again to FIG. 1, the copying mechanism 140A includes a holding portion 145 for holding the rotation support shaft 141A.
A, a linear guide 142A that guides the holding portion 145A freely in the vertical direction, and an elastic body 143A that elastically supports the holding portion 145A. Cleaning tool 120
A can be given rotation and elevating movement. Then, by the effect of the elastic body 143A, it becomes possible to move the cleaning tool 120A in the longitudinal direction of the die 2 by the driving device 160 while pressing the cleaning tool 120A against the lip surface 8A with a substantially uniform pressure corresponding to the contraction amount.

With the above-described device configuration, the cleaning tool 120A
The cleaning tool 120A is moved in the longitudinal direction of the die 2 by uniformly contacting the edge portion 121A of the die 2 with the lip surface 8A of the die 2, so that the coating liquid adhering to the lip surface 8A can be wiped clean. . Note that the rotatable angle range of the cleaning tool holding member 130A is preferably limited to 5 degrees or less, and a spring, rubber, air, or the like is preferably used for the elastic support 143A. Further, the linear motion guide portion 142A
For this, a ball spline, a linear guide, two or more cylindrical shafts and a sliding bearing can be preferably used.

Further, the coating solution scraped off by the cleaning tool 120A and accumulated in the tray 150 is sucked and discharged by the waste liquid unit 200 from the suction port 151 through the pipe 201 as shown in FIG.

The driving device 160 includes an air cylinder,
A hydraulic cylinder, a single-axis industrial robot, or the like can be suitably used.

Turning now to FIG. 4, details of the waste liquid unit 200 and the cleaning unit 300 are shown. First, the waste liquid unit 200 includes a waste liquid pump 210 which is a vacuum pump.
And a waste liquid tank 220 for storing waste liquid. Since the waste liquid unit 200 is connected to the cleaning tool holding members 130A, 130B, 130C and the suction opening 151 of the tray 150 via the pipe 201,
The application liquid scraped off by the cleaning tools 120A, 120B, 120C can be sucked by the waste liquid pump 210 from the suction openings 132A, 132B, 132C and the suction port 151, and can be accumulated in the waste liquid tank 220.
In addition, as the waste liquid pump 210, a vacuum pump such as a roots pump, a diaphragm pump, a rotary blade pump, or an aspirator can be used.

On the other hand, the cleaning unit 300 comprises a nozzle 310 for discharging a solvent, an on-off valve 320 connected to the nozzle 310 via a pipe 301, a solvent tank 330, a compressed air line 302 for applying pressure thereto, and a pressure regulating valve 340. It is configured. The upstream side of the pressure regulating valve 340 is connected to an air source 350. Here, the solvent nozzle 310
The discharge and stop of the solvent from the solvent are controlled by opening and closing the on-off valve 320, and the amount of the solvent discharged from the solvent nozzle 310 is controlled by the pressure setting by the pressure regulating valve 340.

The solvent nozzle 310 is used for cleaning the cleaning tools 120A and 120A when the cleaning head 105 is at the standby position 400.
B, mounted directly above 120C, solvent nozzle 310
The solvent discharged from each cleaning tool 120A, 12
It is preferable to adjust the position so as to cover 0B and 120C and to arrange a plurality of solvent nozzles according to the number of cleaning tools. Then, after the cleaning unit 100 cleans the die 2 by discharging the solvent from the solvent nozzle 310, the coating liquid adhered to the cleaning tools 120A, 120B, and 120C can be washed away.
It is possible to prevent the coating liquid remaining on A, 120B, and 120C from re-adhering to the die 2. The solvent used at this time is preferably the same as the solvent component contained in the coating solution.

Further, a protective cover may be provided around the standby position 400 of the cleaning head unit 105 in order to prevent the solvent from scattering when the solvent is discharged from the solvent nozzle 310 and contaminating the surroundings.

Next, a cleaning method using the above cleaning unit 100 will be described.

First, the drive unit 160 moves the cleaning head unit 105 to a preset sliding contact start unit 401 position. Next, the die 2 is lowered and the cleaning tool 12
0A, 120B, 120C follow the mechanism 140A, 1
The functions of 40B and 140C are used to ensure close contact with the lip surface 8A and the lip slopes 8B and 8C. At this time, the force for pressing the cleaning tools 120A, 120B, 120C against the die 2 is determined by the amount of contraction of the elastic members 143A, 143B, 143C, so that the descending position of the die 2 is determined so as to obtain an appropriate pressing force. The pressing force is preferably 0.1N to 10N, more preferably 2N to 4N.

Next, the cleaning head 105 is moved toward the sliding end portion 402 of the die 2 by the driving device 160, and the lip surface 8A around the discharge port 7 and the lip slope are cleaned by the cleaning tools 120A, 120B and 120C. Excess coating liquid adhering to 8B and 8C is scraped off. At this time, the waste liquid pump 210 is simultaneously operated, and the scraped coating liquid is sucked through the suction openings 132A, 132B, 132C and the suction port 151 of the tray 150, and is discharged to the waste liquid tank 220. At this time, the suction pressure is changed to the suction openings 132A and 132A.
B, preferably at 1500C to 95000P at 132C
a, more preferably 15,000 Pa to 80,000 Pa.

When the cleaning head 105 reaches the sliding end portion 402, the die 2 is raised to separate the cleaning head 105 from the die 2, and the cleaning head 105 returns to the standby position 400.

When the cleaning head 105 stops at the standby position 400, the cleaning unit 300 is operated and the nozzle 31
The solvent is discharged from the cleaning tools 120A, 120B, 1
Wash 20C and prepare for subsequent cleaning work.

Next, preferable conditions for cleaning will be described with reference to the cleaning head 110A and the lip surface 8A of the die 2 to be cleaned by the cleaning head 110A.

First, in order to enhance the suction capability of the removed coating solution, the suction opening 132A and the lip surface 8A shown in FIG.
Is preferably 5 mm or less, more preferably 0.5 mm to 1.5 mm. In this way, the suction force can be increased by bringing the suction opening 132A closer to the lip surface 8A so as not to come into contact with the lip surface 8A. Can be collected without flooding,
It is possible to prevent the re-adhesion of the scraped coating liquid and the contamination due to the movement of the coating liquid to the adjacent surface where the cleaning liquid is not removed by the cleaning tool 120A.

In order to reduce the wear of the cleaning tool 120A, when the cleaning tool 120A is in sliding contact with the lip surface 8A,
Front surface 122A and lip surface 8A of moving direction of cleaning tool 120A
Is preferably 90 degrees or less, more preferably in the range of 30 degrees to 60 degrees. This is because when the angle θ is in this range, the cleaning tool 120A slides on the lip surface 8A in the so-called direction with respect to the moving direction 11 and moves, and in particular, the angle θ exceeds 90 degrees. As compared with the case where the cleaning tool 120A slides on the lip surface 8A in the direction in which the cleaning tool 120A moves, the wear can be reduced much.

The preferred conditions have been described above with reference to the cleaning tool 120A and the lip surface 8A to be cleaned by the cleaning tool 120A. However, the same conditions apply to the cleaning tool 120B and the lip slope 8B, and the cleaning tool 120C and the lip slope 8C. Is preferred.

Next, an example of a coating method using the coating die cleaning apparatus of the present invention will be described with reference to FIGS.

First, before applying the coating liquid on the glass substrate 6, the inside of the die 2 is filled with the coating liquid by using a liquid feeding means such as a pressure feed or a pump (not shown). At this time, since the excess application liquid is discharged from the discharge port 7, the driving device 16
With 0, the tray 150 is moved below the discharge port 7 of the die 2 to receive the discharged coating liquid, and the coating liquid stored in the tray 150 is discharged from the suction port 151.

After the filling of the die 2 with the coating solution is completed, the coating surface of the die 2 is cleaned by the above-described cleaning method.

When the above preparation work is completed, the glass substrate 6 is transferred onto the table 4 by a loader (not shown), and the glass substrate 6 is suction-held on the table 4 while being positioned by a positioning device (not shown). next,
When the table 4 moves straight from the origin position in the 4A direction and the application start portion of the glass substrate 6 reaches directly below the discharge port 7 of the die 2, the table 4 is stopped. And the discharge port 7 of the die 2
Is a predetermined gap (clearance) with the glass substrate 6
The die 2 is moved down until the is provided. Next, a predetermined amount of the coating liquid is supplied to the die 2 so as to obtain a predetermined film thickness, and the coating liquid is discharged from the discharge port 7.
The film is moved at a constant speed in the direction to form a coating film on the substrate. When the application end portion of the glass substrate 6 reaches just below the discharge port 7 of the die 2, the discharge of the coating liquid is stopped, and the die 2 is raised.
Further, the table 4 is moved to the end position, and when stopped, the suction of the glass substrate 6 on the table 4 is released, and the glass substrate 6 is taken out by an unloader (not shown) and transported to the next step. After the removal of the glass substrate 6, the table 4 is moved in the 4B direction and returned to the origin position. Next, a cleaning operation for scraping off the coating liquid adhering to the coating film forming surface of the die 2 is performed by the above-described cleaning method, and a series of coating steps is thereafter repeated.

In this embodiment, the tray 150 and the cleaning head 105 are moved at the same time, but they may be moved separately.

The cleaning tools 120A, 120B, 120
As the material of C, lip surface 8A and lip slope 8
A polymer resin that does not damage B and 8C is preferable. As the polymer resin, a fluororesin, a urethane resin, an acrylic resin,
Polyester resin, polypropylene resin, silicone rubber, ethylene propylene rubber, fluorine rubber, or the like can be used, but those having elasticity so as to be able to adhere to the die 2 and having resistance to the used coating solution are preferable. Further, conductive powder may be mixed into the polymer resin in order to remove static electricity generated in the cleaning tool 120A and prevent dust from adhering. As the conductive powder, conductive carbon, platinum, nickel, silver, copper and the like are preferable, and the mixing ratio is preferably 40% by weight to 100% by weight.

The suction openings 132A, 132B, 1
Cleaning tool holding members 130A, 130B forming 32C;
Various metals, polymer resins, and the like can be used as the material of 130C.
It is preferable to use a polymer resin so as not to damage the lip surface 8A and the lip slope surfaces 8B, 8C when the die 2 comes into contact with 0A, 130B, 130C. As the polymer resin, various engineering plastics such as fluororesin, polyethylene, polypropylene, polyetheretherketone, and MC nylon, as well as rubbers such as silicone rubber, ethylene propylene rubber, and fluororubber can be used.

The coating die cleaning apparatus of the present invention is effective for cleaning around the discharge port of a die for coating a liquid on a substrate surface.
In particular, a low-viscosity coating solution having a viscosity of 100 cP or less, such as a coating solution for forming a light-shielding layer, a coating solution for each color pixel of R, G, and B, a resist solution, an overcoat material, etc. in a color filter manufacturing process. It can be suitably used for cleaning a die for applying leaves.

[0055]

EXAMPLE In the color filter manufacturing process, a coating liquid for R, G, and B pixels was applied using a die having a discharge port width of 100 μm, a length of 620 mm, and a lip surface 8A width of 3.4 mm. The coating die cleaning device 10 shown in FIG. 1 was applied to the die coater.

Cleaning tools 120A, 120B and 120C made of silicone rubber having a JIS hardness of 70 are provided corresponding to the lip surface 8A and lip slopes 8B and 8C, respectively, and cleaning tool holding members 130A, 130B made of polyethylene terephthalate. It was held at 130C and attached so that the angle θ shown in FIG. 5 was 45 degrees. Further, in order to follow the movement of the cleaning tools 120A, 120B, and 120C, the cleaning tool holding members 130A, 130B, and 130C are elastically supported in the vertical direction by four springs each having a spring constant of 0.2 N / mm. 5 with the longitudinal direction of
It was held by a ball bearing so that it could rotate freely within a range of degrees. Further, 5 mm square suction openings 132A, 132B, 13 are provided on the upper surfaces of the cleaning tool holding members 130A, 130B, 130C.
2C was provided, and suction was performed at 80,000 Pa at the opening. Suction openings 132A, 132B, 132
The distance L between C and the lip surface 8A and the lip slopes 8B and 8C was 1 mm. Using N-methyl-2-pyrrolidone as the cleaning liquid, three nozzles 310 having an inner diameter of 0.5 mm were used.
At a discharge pressure of 0.02 MPa, 1 cc of cleaning liquid is supplied to the cleaning tool 12.
0A, 120B, and 120C were applied. Also,
The moving speed at the time of cleaning of the cleaning tools 120A, 120B, and 120C was 18 m / min.

The production of a color filter using a die coater provided with the above cleaning unit was performed in the following procedure.

First, on a glass substrate of 620 mm × 750 mm size, 100 μm in the horizontal direction and 300 μm in the vertical direction.
A 1 μm-thick resin light-shielding layer having openings with a horizontal width of 60 μm and a vertical width of 260 μm was formed in a grid pattern at intervals of m. A thermosetting paint to which an R colorant was added was applied on the light-shielding layer by a die coater and dried at a temperature of 120 ° C. to form a thermosetting coating film. Subsequently, a positive photoresist was applied on the thermosetting coating film, mask exposure was performed using an ultra-high pressure mercury lamp or the like, and then the positive photoresist was developed and etched to form a relief pattern. Subsequently, after peeling off the positive photoresist, the coating was thermally cured by heating and baking at 300 ° C. to obtain R pixels. The above steps were repeated for each of the G and B pixels to obtain a color filter.

When the production of the color filter according to the above procedure was performed continuously for 10,000 sheets, in the die coater to which the coating die cleaning apparatus according to the present invention was applied, the coating liquid could remain around the discharge port of the die and solidify. There was no wiping residue. Also, no coating defects such as vertical stripes were observed on the coating surface on the glass substrate. In addition, as a result of observing the tip of the cleaning tool with a microscope, there was no problematic wear on the ridge line between the lip surface and the lip side of the die and the contact area of the cleaning tool. And a high quality color filter was obtained.

[0060]

As described above, if the coating die cleaning apparatus of the present invention is used for cleaning the discharge port of the coating die, the cleaning member is separately provided on each surface constituting the coating film forming surface of the die. Since it is provided, it is possible to optimize the pressing of each cleaning member against the coating film forming surface, prevent the cleaning tool from excessively pressing against the ridgeline between the lip surface and the lip side surface of the die, Dust generation can be greatly reduced. As a result, it is possible to prevent contamination of the coating material and the coating film by the abrasion powder of the cleaning member, which greatly contributes to improving the quality of the coating film.

Further, suction openings for sucking the coating liquid scraped off by the cleaning member are separately provided on each surface constituting the coating film forming surface of the die, and are arranged at positions 5 mm or less from the coating film forming surface of the die. As a result, the removed coating liquid can be completely recovered, the coating liquid can be prevented from moving out of the contact area between the cleaning member and the coating film forming surface, and the liquid remaining around the discharge port of the die can be eliminated. Can be eliminated, so that secondary contamination due to the remaining coating liquid can be prevented.

Further, since the cleaning member is always brought into close contact with the coating film forming surface by the copying mechanism, even if the coating film forming surface is long and wide, a sufficient cleaning effect can be obtained even during a long operation. , Contributing to improved productivity.

Further, since the color filter is manufactured using the above-described excellent coating die cleaning apparatus and cleaning method, even if the coating is performed repeatedly, the cleaning tool has little wear and the material to be coated by the abrasion powder is small. It is possible to form a good coating surface free from defects and without defects, and to produce a high quality color filter with high productivity.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing an example in which a coating die cleaning device of the present invention is applied to a die coater as a coating device.

FIG. 2 is a side sectional view showing a state of cleaning a die by a cleaning head unit.

FIG. 3 is an enlarged perspective view of the cleaning head unit of FIG.

FIG. 4 is a schematic diagram showing a cleaning state by a coating die cleaning device.

FIG. 5 is an enlarged view of a portion A in FIG. 4;

[Explanation of symbols]

 1: Die coater 2: Die 3: Base 4: Table 4A: Table feed direction 4B: Table return direction 5: Post 6: Glass substrate 7: Discharge port 8A: Lip surface 8B, 8C: Lip slope 9: Slit portion 10: Coating die cleaning device 11: Moving direction 12: Cleaning tool contact angle 13: Doctor lip 14: Backup lip 15: Shim 16: Manifold 17: Coating liquid supply port 100: Cleaning unit 105: Cleaning head 110A: For lip surface cleaning Cleaning head 110B, 110C: Cleaning head for lip slope cleaning 120A: Cleaning tool for lip surface cleaning 120B, 120C: Cleaning tool for lip slope cleaning 121A: Edge portion 130A, 130B, 130C: Cleaning tool holding member 131A: Groove 132A, 132B , 132C: suction openings 140A, 140B, 140 : Tracing mechanism section 141A: Rotation support shaft 142A: Linear guide section 143A, 143B, 143C: Elastic body 144A: Lower plate 145A: Holding section 150: Tray 151: Suction port 160: Driving unit 200: Waste liquid unit 210: Waste liquid pump 220: Waste liquid tank 300: Cleaning unit 301: Pipe 302: Compressed air line 310: Nozzle 320: Open / close valve 330: Solvent tank 340: Pressure regulating valve 350: Air source 400: Standby position 401: Sliding contact start part 402: Sliding contact end part L: distance between the suction opening and the lip surface θ: angle between the front surface and the lip surface in the moving direction of the cleaning tool

Continued on front page F term (reference) 2H048 BA02 BA11 BA45 BB02 BB24 BB42 4D073 AA01 BB03 CC04 CC09 DC08 DC25 4D075 AC02 AC49 AC73 AC84 BB65X CA47 DA06 DB13 DC24 EA07 EA45 4F041 BA13 BA60 CA03

Claims (9)

[Claims] 1. A coating die cleaning apparatus for cleaning a coating film forming surface composed of a discharge port surface of a coating die for discharging a coating liquid from a discharge port and an adjacent surface thereof, wherein the coating film forming surface is slid on the coating film forming surface. A cleaning member that removes the coating liquid that is in contact with and adheres to the coating film forming surface, and a suction opening that suctions the removed coating liquid separately for each surface constituting the coating film forming surface; In addition, the suction opening is disposed in the vicinity of a sliding contact portion of the cleaning member with the coating film forming surface, and further includes a mechanism for moving the cleaning member and the suction opening in a coating die longitudinal direction. Cleaning device for coating die. 2. The suction opening is 5 m from the coating film forming surface.
2. An opening at a position of not more than m.
2. The cleaning device for an application die according to claim 1. 3. The apparatus according to claim 1, further comprising: means for moving said cleaning member in the direction of contacting and separating from said coating die, and a tracing mechanism for pressing said cleaning member along said coating film forming surface. 3. The cleaning device for an application die according to 1 or 2. 4. The cleaning device for an application die according to claim 1, wherein said cleaning member is made of synthetic resin or rubber. 5. An apparatus for manufacturing a color filter comprising a coating die and a cleaning device for the coating die, wherein the cleaning device for the coating die is a coating die according to claim 1. An apparatus for manufacturing a color filter, wherein the apparatus is a cleaning apparatus. 6. A method for cleaning a coating die formed by discharging a coating liquid from a discharge port of a coating die and an adjacent surface thereof, wherein the coating film forming surface is formed. A separate cleaning member is slid in the coating die longitudinal direction for each surface to remove the coating liquid adhering to the coating film forming surface, and the removed coating liquid constitutes the coating film forming surface. A method of cleaning a coating die, wherein suction is performed through suction openings provided separately for each surface to be coated. 7. The suction opening is 5 m from the coating film forming surface.
7. An opening at a position of not more than m.
3. The method for cleaning a coating die according to 1. 8. The apparatus according to claim 6, wherein said cleaning member is movable in a direction of contact and separation with respect to said coating die, and said cleaning member is pressed against said coating film forming surface.
Or the cleaning method of the coating die according to 7. 9. A method of manufacturing a color filter which includes a step of cleaning a coating die, wherein the cleaning step of the coating die uses the cleaning method of a coating die according to claim 6. A method for producing a color filter, comprising: