JP2018043178A - Nozzle cleaning member, nozzle cleaning device and coating applying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nozzle cleaning member that allows cleaning that meets stable discharge of coating liquid from a nozzle and suppresses running cost required in replacing the nozzle cleaning member.SOLUTION: A nozzle cleaning member moves relatively to a nozzle for discharging coating liquid from a discharge port provided at a tip to scrape the coating liquid adhering to the nozzle. The nozzle cleaning member includes: a resin opposite part opposite to both side faces of the nozzle; and a rubber abutment part provided between respective tips of both side faces of the nozzle and abutting on a tip face of the nozzle where the discharge port opens.SELECTED DRAWING: Figure 7

Description

  The present invention relates to a glass substrate for a liquid crystal display device, a semiconductor wafer, a glass substrate for a PDP, a glass substrate for a photomask, a glass substrate for supporting a polyimide precursor thin film, a substrate for a color filter, a substrate for a recording disk, and a substrate for a solar cell. , A coating apparatus for discharging a coating liquid from a nozzle discharge port to a substrate for precision electronic devices (hereinafter simply referred to as “substrate”) such as an electronic paper substrate, and a coating adhering to the nozzle discharge port. The present invention relates to a nozzle cleaning member that removes liquid, and a nozzle cleaning device that cleans nozzles using a nozzle cleaning member.

  2. Description of the Related Art Conventionally, there has been known a coating apparatus that applies a coating liquid to a substrate using a slit nozzle that discharges the coating liquid from a discharge port provided at the tip. Moreover, in the coating device of patent document 1, the wiping unit which removes the coating liquid adhering to the slit nozzle is provided. This wiping unit cleans the slit nozzle using a cleaning member having a V-shaped groove corresponding to the shape of the tip of the slit nozzle. More specifically, the cleaning member is moved along the slit nozzle while the tip of the slit nozzle is brought into contact with the V-shaped groove of the cleaning member. Thus, the coating liquid adhering to the slit nozzle can be scraped off by sliding the cleaning member on the slit nozzle.

JP 2012-200694 A

  Such removal of the coating liquid from the slit nozzle is executed in order to stably discharge the coating liquid from the discharge port of the slit nozzle. In particular, if the coating liquid adheres unnecessarily to the tip surface of the slit nozzle where the discharge port opens, the discharge of the coating liquid from the discharge port tends to be affected. Therefore, in order to stably discharge the coating liquid, it is important to firmly fit the cleaning member to the tip surface of the slit nozzle. However, if the cleaning member is firmly fitted to the nozzle, the cleaning member is heavily worn, and the cleaning member may need to be frequently replaced. That is, if the application liquid is surely removed for stable discharge of the application liquid, there arises a problem that the cleaning member is frequently replaced and the running cost increases.

  The present invention has been made in view of the above problems, and enables the nozzle cleaning member to execute cleaning suitable for stable discharge of the coating liquid from the nozzle while suppressing the running cost associated with the replacement of the nozzle cleaning member. With the goal.

  The nozzle cleaning member according to the present invention is a nozzle cleaning member that scrapes off the coating liquid adhering to the nozzle by moving relative to the nozzle that discharges the coating liquid from the discharge port provided at the tip, A resin-made facing portion that faces both side surfaces of the nozzle, and a rubber contact portion that is provided between the tip ends of both side surfaces of the nozzle and contacts the tip surface of the nozzle that opens the discharge port.

  A nozzle cleaning device according to the present invention is a nozzle cleaning device that removes coating liquid adhering to a nozzle that discharges coating liquid from a discharge port provided at a tip, and supports the nozzle cleaning member and the nozzle cleaning member. And a drive unit that moves the nozzle cleaning member relative to the nozzle by driving the support unit.

  A coating apparatus according to the present invention includes a nozzle that discharges a coating liquid from a discharge port provided at a tip, and the nozzle cleaning device described above.

  The nozzle that is the object of cleaning of the present invention (nozzle cleaning member, nozzle cleaning device, coating device) configured as described above is provided on both side surfaces and the front end that is provided between the front ends of both side surfaces and the discharge port opens. And having a surface. On the other hand, a nozzle cleaning member is provided with the opposing part which opposes the both sides | surfaces of a nozzle, and the contact part contact | abutted to the front end surface of a nozzle. Therefore, by sliding the nozzle cleaning member with respect to the nozzle, the coating liquid adhering to both side surfaces of the nozzle is scraped off at the opposing portion of the nozzle cleaning member, and the coating liquid adhering to the tip surface of the nozzle is removed. It can be scraped off at the contact portion.

  Further, since the facing portion of the nozzle cleaning member is made of resin, the wear associated with the cleaning of the nozzle hardly occurs. In addition, since such a resin facing portion does not elastically deform, it does not fit exactly on both side surfaces of the nozzle. However, the coating liquid on both sides of the nozzle may be removed to the extent that it does not sag to the tip surface of the nozzle in addition to the small amount of adhesion. For this reason, if the coating liquid adhering to both side surfaces of the nozzle is removed at the resin facing portion, the influence on the ejection of the coating liquid from the nozzle can be suppressed. In contrast, the contact portion of the nozzle cleaning member is made of rubber. Therefore, it fits snugly on the tip surface of the nozzle, reliably removes the coating liquid adhering to the tip surface of the nozzle, and enables stable discharge of the coating liquid from the nozzle. Note that such a rubber contact portion can be worn as the nozzle is cleaned. However, a large amount of the coating liquid tends to adhere to the tip surface of the nozzle with which the abutting portion abuts, and since this coating liquid functions as a lubricant, wear of the abutting portion proceeds gradually. Further, when the abutting portion is worn out to withstand use, only this abutting portion needs to be replaced, and there is no need to replace the nozzle cleaning member itself. In this way, it is possible to suppress the running cost associated with the replacement of the nozzle cleaning member while enabling the nozzle cleaning member to perform cleaning suitable for stable discharge of the coating liquid from the nozzle.

  Moreover, you may comprise a nozzle cleaning member so that the opposing part may further be equipped with the resin-made main body which has the groove | channel formed in the side part, and the contact part is attached to the bottom part of the groove | channel. In such a configuration, when the contact portion is worn, it is sufficient to replace the contact portion with respect to the main body, and the main body itself can be used continuously. Therefore, running cost can be effectively suppressed.

  At this time, the nozzle cleaning member may be configured so that the contact portion can be attached to and detached from the bottom of the groove. As a result, the replacement operation of the abutting portion with respect to the main body can be easily performed.

  Moreover, you may comprise a nozzle cleaning member so that a main body may have liquid repellency with respect to a coating liquid. Thereby, since the amount of the coating liquid adhering to the main body can be suppressed, the cleaning frequency of the nozzle cleaning member can be suppressed.

  Specifically, the nozzle cleaning member may be configured such that the main body is formed of polytetrafluoroethylene or a resin having a contact angle with respect to the coating liquid larger than that of polytetrafluoroethylene. Thereby, the main body of a nozzle cleaning member can be formed so that it may have liquid repellency with respect to a coating liquid.

  Further, when scraping off the coating liquid adhering to the nozzle having a regulating member that regulates the range in which the coating liquid is ejected by partially closing the ejection opening, the contact portion contacts the regulating member. Thus, you may comprise a nozzle cleaning member. Thereby, the coating liquid adhering to the regulating member can be reliably removed.

  Moreover, you may comprise a nozzle cleaning member so that the coating liquid adhering to the nozzle which discharges the coating liquid containing a polyimide precursor and a solvent may be scraped off. Since the coating liquid containing such a polyimide precursor has a higher viscosity than, for example, a coating liquid for photoresist, it is particularly required to be surely removed from the tip surface of the nozzle. On the other hand, according to the present invention, the coating liquid can be reliably removed from the tip surface of the nozzle by the rubber contact portion that fits the tip surface of the nozzle. On the other hand, since the coating liquid has a high viscosity, it is difficult for the coating liquid to drip from the both side surfaces of the nozzle to the tip surface. Therefore, it is sufficient to remove the coating liquid from the both side surfaces of the nozzle if it is executed at the resin facing portion.

  As described above, according to the present invention, cleaning suitable for stable discharge of the coating liquid from the nozzle can be performed by the nozzle cleaning member, and the running cost associated with replacement of the nozzle cleaning member can be suppressed.

The perspective view which shows typically the coating device which concerns on this invention. The side view which shows the coating device shown in FIG. 1 typically. The top view which shows roughly arrangement | positioning of each part of the coating device shown in FIG. The perspective view which shows a slit nozzle typically. The perspective view which shows typically the decomposition | disassembly structure of the slit nozzle of FIG. The perspective view which shows an example of a nozzle cleaning apparatus typically. The figure which shows typically an example of the scraper which a nozzle cleaning apparatus uses as a nozzle cleaning member. The figure which shows typically the relationship between the scraper of FIG. 7, and a slit nozzle.

  FIG. 1 is a perspective view schematically showing a coating apparatus according to the present invention. FIG. 2 is a side view schematically showing the coating apparatus shown in FIG. Further, FIG. 3 is a top view schematically showing the arrangement of each part of the coating apparatus shown in FIG. 1, 2, 3, and the subsequent drawings, an XYZ orthogonal coordinate system in which the Z direction is the vertical direction and the XY plane is the horizontal plane is appropriately attached and necessary to clarify the directional relationship. Accordingly, the dimensions and number of each part are exaggerated or simplified. Moreover, in FIG. 2 and FIG. 3, some structures, such as a nozzle support body, are abbreviate | omitted.

  The coating device 1 is a coating device called a slit coater that applies a coating solution to the surface 31 of the substrate 3 using the slit nozzle 2. The coating solution contains polyamic acid (polyamic acid) which is a polyimide precursor as a solute and NMP (N-Methyl-2-Pyrrolidone) as a solvent. The substrate 3 is a glass substrate having a rectangular shape in plan view. In the present specification, the “surface 31 of the substrate 3” means a main surface of the main surface of the substrate 3 on which the coating liquid is applied.

  The coating apparatus 1 includes a stage 4 that can hold the substrate 3 by suction in a horizontal posture, a coating processing unit 5 that applies a coating process to the substrate 3 held on the stage 4 using the slit nozzle 2, and the slit nozzle 2. A nozzle cleaning device 6 that performs a cleaning process and a control unit 100 that controls these units are provided.

  The stage 4 is made of a stone material such as granite having a substantially rectangular parallelepiped shape, and a holding surface 41 that holds the substrate 3 by processing it into a substantially horizontal flat surface on the −Y side of its upper surface (+ Z side). Have A large number of vacuum suction ports (not shown) are formed on the holding surface 41 in a dispersed manner. By adsorbing the substrate 3 through these vacuum suction ports, the substrate 3 is held horizontally at a predetermined position during the coating process. In addition, the holding | maintenance aspect of the board | substrate 3 is not limited to this, For example, you may comprise so that the board | substrate 3 may be hold | maintained mechanically. Further, a nozzle adjustment area RA is provided on the + Y side of the area occupied by the holding surface 41 in the stage 4, and a nozzle cleaning device 6 described in detail later is disposed in the nozzle adjustment area RA.

  The coating processing unit 5 includes a nozzle support 51 that supports the slit nozzle 2. The nozzle support 51 includes a support member 51a that extends parallel to the X direction above the stage 4, and two lifting mechanisms 51b that support the support member 51a from both sides in the X direction and lift the support member 51a. Have The support member 51a is a bar member made of carbon fiber reinforced resin or the like and having a rectangular cross section. The lower surface of the support member 51 a is a mounting location 510 for the slit nozzle 2, and the support member 51 a supports the slit nozzle 2 in a detachable manner at the mounting location 510. As a mechanism for attaching / detaching the slit nozzle 2 to / from the mounting location 510 of the support member 51a, various fastening mechanisms such as a latch or a screw can be used as appropriate.

  The two lifting mechanisms 51b are connected to both ends in the longitudinal direction of the support member 51a, and each has an AC servo motor, a ball screw, and the like. By these elevating mechanisms 51b, the support member 51a and the slit nozzle 2 fixed thereto are moved up and down in the vertical direction (Z direction), and the interval between the discharge port 21 opened at the lower end of the slit nozzle 2 and the substrate 3, that is, the substrate The relative height of the discharge port 21 with respect to 3 is adjusted. The vertical position of the support member 51a is not shown, for example, but is provided on the scale portion provided on the side surface of the lifting mechanism 51b and the side surface of the slit nozzle 2 facing the scale portion. It can detect with the linear encoder comprised with the detected sensor.

  As shown in FIG. 1, the nozzle support 51 configured in this manner has a bridge structure that straddles the holding surface 41 spanning the left and right ends of the stage 4 along the X direction. The coating processing unit 5 includes a slit nozzle moving unit 53 that moves the nozzle support 51 in the Y direction. The slit nozzle moving unit 53 moves the nozzle support 51 as a bridging structure and the slit nozzle 2 supported thereby relative to the substrate 3 held on the stage 4 along the Y direction. Functions as a means. Specifically, the slit nozzle moving unit 53 includes a guide rail 52 that guides the movement of the slit nozzle 2 in the Y direction, a linear motor 54 that is a driving source, and a discharge port of the slit nozzle 2 on each of the ± X sides. And a linear encoder 55 for detecting the position 21.

  Each of the two guide rails 52 is provided at both ends in the X direction of the stage 4 and extends in the Y direction so as to include a section in which the nozzle adjustment region RA and the holding surface 41 are provided. The two guide rails 52 guide the movement of the two lifting mechanisms 51b in the Y direction, respectively. The two linear motors 54 are AC coreless linear motors provided on both sides of the stage 4 and having a stator 54a and a mover 54b. The stator 54a is provided on the side surface in the X direction of the stage 4 along the Y direction. On the other hand, the moving element 54b is fixed to the outside of the elevating mechanism 51b. Each of the two linear motors 54 drives the two lifting mechanisms 51b in the Y direction by a magnetic force generated between the stator 54a and the mover 54b.

  Each linear encoder 55 has a scale portion 55a and a detection portion 55b. The scale portion 55 a is provided along the Y direction below the stator 54 a of the linear motor 54 fixed to the stage 4. On the other hand, the detection unit 55b is fixed to the outer side of the moving element 54b of the linear motor 54 fixed to the elevating mechanism 51b, and is arranged to face the scale unit 55a. The linear encoder 55 detects the position of the discharge port 21 of the slit nozzle 2 in the Y direction based on the relative positional relationship between the scale unit 55a and the detection unit 55b.

  The slit nozzle moving unit 53 configured in this manner drives the nozzle support 51 in the Y direction so that the slit nozzle moves between above the nozzle adjustment region RA and above the substrate 3 held on the stage 4. 2 can be moved. The coating apparatus 1 forms a coating layer on the surface 31 of the substrate 3 by moving the slit nozzle 2 relative to the substrate 3 while discharging the coating liquid from the discharge port 21 of the slit nozzle 2. The application of the coating liquid is not performed on the entire surface of the substrate 3, but the coating liquid is selectively applied to a predetermined application region RT in the substrate 3, as shown in FIG. . Therefore, the coating liquid is discharged from the discharge port 21 that moves in the upper section of the coating region RT of the substrate 3 in the moving section of the slit nozzle 2. In addition, two coating regions RT divided from each other are set for the substrate 3. Therefore, as will be described later, in the discharge port 21 of the slit nozzle 2, the range in which the coating liquid is discharged is limited to the range corresponding to each coating region RT.

  In addition, the slit nozzle 2 holds the substrate 3 during a period when the coating process is not performed on the stage 4 such as a delivery period of the substrate 3 between the coating apparatus 1 and the external transport mechanism (carrying-in / out period of the substrate 3). Retreat to the nozzle adjustment area RA deviated from the surface 41 to the + Y side (state shown in FIG. 1). And the nozzle cleaning apparatus 6 performs a cleaning process with respect to the slit nozzle 2 located in the nozzle adjustment area | region RA. The details of the nozzle cleaning device 6 will be described later following the description of the slit nozzle 2.

  FIG. 4 is a perspective view schematically showing the slit nozzle, and FIG. 5 is a perspective view schematically showing an exploded structure of the slit nozzle of FIG. The slit nozzle 2 includes two nozzle bodies 23 and 25 and a nozzle shim 27 sandwiched between the nozzle bodies 23 and 25 from the Y direction. The nozzle bodies 23 and 25 are each extended with the same width in the X direction, and have trapezoidal lower end portions 23a and 25a and rectangular upper end portions 23b and 25b in the YZ section. The inner surfaces (nozzle shim 27 side) surfaces of the nozzle bodies 23 and 25 are each a plane parallel to the ZX plane. On the other hand, the side surfaces 23c and 25c outside the lower end portions 23a and 25a of the nozzle bodies 23 and 25 (the opposite side of the nozzle shim 27) are inclined surfaces that are inclined so as to approach the nozzle shim 27 as they go downward. Therefore, the front end portion 2a (nozzle lip portion) of the slit nozzle 2 constituted by the lower end portions 23a and 25a of the nozzle bodies 23 and 25 has a tapered shape downward.

  In each nozzle body 23, 25, bottom surfaces 23d, 25d extend horizontally from the tip (lower end) of each of the side surface 23c and side surface 25c toward the inside (nozzle shim 27 side). The bottom surfaces 23 d and 25 d of these nozzle bodies 23 and 25 are aligned and constitute the tip surface 2 d of the slit nozzle 2. A slit-like discharge port 21 parallel to the X direction opens between the bottom surfaces 23d and 25d of the nozzle bodies 23 and 25. Thus, each of the side surface 23c and the side surface 25c corresponds to the “side surface of the nozzle” of the present invention, and is a front end surface that extends horizontally between the front end of the side surface 23c and the front end of the side surface 25c and opens the discharge port 21. 2d corresponds to the “tip surface of the nozzle” of the present invention.

  A flow path F for the coating liquid is formed on the inner surface of the nozzle body 25. The flow path F has a horizontal hole portion Fa extending in parallel with the X direction and a vertical hole portion Fb extending in parallel with the Z direction from the center of the horizontal hole Fa. Then, both ends in the X direction of the lateral hole portion Fa open on both side surfaces of the nozzle body 25 to form side surface openings A1 and A2, respectively, and the upper end of the vertical hole portion Fb opens on the upper surface of the nozzle body 25 to open the upper surface. Configure A3.

  The nozzle shim 27 has a flat plate-shaped upper side portion 271 that extends in the X direction with the same width as the nozzle bodies 23 and 25. Further, the nozzle shim 27 includes a flat plate side portion 272 extending downward from both ends of the upper side portion 271 and a flat plate shape extending downward from the upper side portion 271 between the both side portions 272. Partition part 273. The side portions 272, the partition portion 273, and the nozzle bodies 23, 25 have the same height in the Z direction. The bottom surface 272d of each side portion 272, the bottom surface 273d of the partition portion 273, and the tip surface of the slit nozzle 2 Lined up with 2d.

  A region below each upper side portion 271 and between each side portion 272 and the partition portion 273 functions as a cavity CV of the slit nozzle 2. The upper side portion 271 that defines the upper end of each cavity CV is located above the horizontal hole portion Fa of the flow path F, and each cavity CV communicates with the horizontal hole portion Fa of the flow path F. Therefore, the coating liquid supplied from one or both of the side openings A1 and A2 spreads in each cavity CV. And a coating liquid is discharged from the lower end of each cavity CV opened outside. These two cavities CV are provided corresponding to the two coating regions RT, and each cavity CV has the same width in the X direction as the corresponding coating region RT (FIG. 3). Thus, the nozzle shim 27 functions as a regulating member that regulates the range of the ejection port 21 where the coating liquid is ejected by partially closing the ejection port 21.

  Then, the nozzle cleaning device 6 performs a cleaning process on the slit nozzle 2 in order to remove unnecessary coating liquid from the slit nozzle 2 having such a configuration. Next, the configuration and operation of the nozzle cleaning device 6 will be described in detail with reference to FIGS. 6, 7 and 8 together.

  FIG. 6 is a perspective view schematically showing an example of a nozzle cleaning device. FIG. 7 is a diagram schematically illustrating an example of a scraper used as a nozzle cleaning member by the nozzle cleaning device. Further, FIG. 8 is a diagram schematically showing the relationship between the scraper and the slit nozzle of FIG. The nozzle cleaning device 6 cleans the removal unit 6A and the removal unit 6A by removing the coating liquid adhering to the tip 2a by moving with the scraper 61 in the cleaning direction Dc along the tip 2a of the slit nozzle 2. And a drive unit 6B for driving in the direction Dc. Here, the cleaning direction Dc is a direction parallel to the X direction facing one direction opposite to the arrow in the X direction, and the drive unit 6B can reciprocate the removal unit 6A in the X direction.

  The nozzle cleaning device 6 includes a cleaning unit 6C (FIG. 3) that cleans the scraper 61 inside a sealed space formed by sealing the scraper 61. The cleaning unit 6C is a unit for washing out the coating liquid adhering to the scraper 61 by supplying the cleaning liquid in the sealed space to the scraper 61 from which the coating liquid adhering to the tip 2a of the slit nozzle 2 has been wiped off and removed. It is. As the cleaning liquid, a solvent of the coating liquid (NMP in this example) is used. As this washing | cleaning unit 6C, what was described in Unexamined-Japanese-Patent No. 2014-176812 can be used, for example.

  The removal unit 6 </ b> A mainly includes a scraper 61 that is slid on the tip 2 a of the slit nozzle 2 and a support portion 62 that supports the scraper 61. FIG. 6 shows the configuration of the slit nozzle 2 and the removal unit 6A when the removal unit 6A is positioned further upstream from the upstream end of the slit nozzle 2 in the cleaning direction Dc. ing.

  As shown in FIG. 7, the scraper 61 has a main body 611 that can be supported by a support portion 62. The main body 611 of the scraper 61 is a hard body integrally formed of a resin such as polytetrafluoroethylene (PTFE). The resin main body 611 has liquid repellency with respect to the coating liquid. The central portion of the main body 611 is a supported portion 612 supported by the support portion 62. The main body 611 has an extended portion 613 extending from the supported portion 612, and a V-shaped groove 614 that is a V-shaped groove is formed at the upper end of the extended portion 613. The V-shaped groove 614 has a shape corresponding to the distal end portion 2a of the slit nozzle 2, and an opposing portion 615 that is inclined along the side surface 23c and an opposing portion 616 that is inclined along the side surface 25c are V-shaped grooves. 614 is formed on each side portion of 614. Furthermore, the scraper 61 has a contact portion 618 attached to the bottom of the V-shaped groove 614 of the main body 611. The contact portion 618 is an elastic body made of rubber, and is finished in a flat shape along the tip surface 2d of the slit nozzle 2. Note that the attachment of the contact portion 618 to the main body 611 is realized by bonding the contact portion 618 to the main body 611 with an adhesive.

  As shown in FIG. 6, the scraper 61 configured as described above is detachably fixed to the support portion 62 by two fasteners, for example, bolts 64. The support part 62 includes an elevating part 621 that can be raised and lowered in the Z direction, and a pillar part 622 that is erected on the upper surface of the elevating part 621 in the Z direction. Then, the scraper 61 is fastened to the upper end of the column portion 622. More specifically, the supported portion 612 of the scraper 61 is finished in a shape that can be engaged with the upper end portion of the column portion 622. The scraper 61 is inclined at a predetermined inclination angle θ (for example, 50 degrees) with respect to the slit nozzle 2 extending in the X direction, with the V-shaped groove 614 facing the slit nozzle 2 side. Fastened to the upper end of the column 622.

  Moreover, the support part 62 has the base part 623 below the raising / lowering part 621 to which the scraper 61 is fixed. And the raising / lowering part 621 is supported by the base part 623 so that raising / lowering is possible. That is, in the support portion 62, a guide rail 624 erected in the Z direction from the upper surface of the base portion 623, and an urging member 625 (for example, a compression spring) provided between the base portion 623 and the elevating portion 621, Is provided. The urging member 625 urges the elevating part 621 upward against the base part 623 while the guide rail 624 guides the movement of the elevating part 621 in the Z direction. Therefore, the scraper 61 fixed to the elevating part 621 is urged upward by the urging force of the urging member 625.

  Further, the base portion 623 of the support portion 62 is attached to the drive unit 6B. The drive unit 6B has a pair of rollers 651 and 651 disposed on both outer sides of the slit nozzle 2 in the X direction, and an endless belt 652 stretched over the rollers 651 and 651. A base portion 623 of the support portion 62 is attached. The drive unit 6B rotates the rollers 651 and 651 to drive the upper surface of the endless belt 652 in the X direction, and moves the scraper 61 in the X direction along with the support portion 62.

  The nozzle cleaning device 6 configured in this manner scrapes the coating liquid from the tip 2a of the slit nozzle 2 by sliding the scraper 61 in the cleaning direction Dc with respect to the tip 2a of the slit nozzle 2 (cleaning). processing). This cleaning process is executed, for example, for the purpose of simply removing unnecessary coating liquid adhering to the slit nozzle 2 or for the purpose of adjusting the state of the coating liquid at the discharge port 21 of the slit nozzle 2 before the start of the coating process. When performing the cleaning process for the latter purpose, the cleaning process is performed after slightly discharging the coating liquid from the discharge port 21 of the slit nozzle 2.

  In the cleaning process, the abutting portion 618 of the scraper 61 is pressed by the urging force of the urging member 625 against the front end surface 2d of the slit nozzle 2 and the nozzle shim 27 (the bottom surface thereof). At this time, even if there is a slight step between the tip surface 2d of the slit nozzle 2 and the nozzle shim 27 due to the assembly accuracy of the slit nozzle 2, the contact portion 618 of the scraper 61 is elastically deformed. Thus, the slit nozzle 2 is in close contact with the tip surface 2d and the nozzle shim 27. Thereby, the coating liquid adhering to these can be reliably scraped off by the contact portion 618. Further, the facing portions 615 and 616 of the scraper 61 are opposed to the side surfaces 23c and 25c of the slit nozzle 2 with contact or some clearance. Therefore, the coating liquid adhering to the side surfaces 23c and 25c of the slit nozzle 2 can be scraped off by the facing portions 615 and 616.

  As described above, in this embodiment, the slit nozzle 2 nozzle to be cleaned is provided between the side surfaces 23c and 25c and the tips of the both side surfaces 23c and 25c, and the tip opening the discharge port 21. Surface 2d. On the other hand, the scraper 61 includes opposing portions 615 and 616 that face both side surfaces 23c and 25c of the nozzle, and a contact portion 618 that contacts the tip surface 2d of the slit nozzle 2. Therefore, by sliding the scraper 61 with respect to the slit nozzle 2, the coating liquid adhering to the both side surfaces 23 c and 25 c of the slit nozzle 2 is scraped off by the facing portions 615 and 616 of the scraper 61 and the tip of the slit nozzle 2. The coating liquid adhering to the surface 2d can be scraped off by the contact portion 618 of the scraper 61.

  In addition, since the facing portions 615 and 616 of the scraper 61 are made of resin, wear due to the cleaning of the slit nozzle 2 hardly occurs. Note that such resin facing portions 615 and 616 do not elastically deform, and thus do not fit exactly on both side surfaces 23c and 25c of the slit nozzle 2. However, the coating liquid on both side surfaces 23c and 25c of the slit nozzle 2 may be removed to the extent that it does not sag to the tip surface 2d of the slit nozzle 2 in addition to the small amount of adhesion. Therefore, if the coating liquid adhering to both side surfaces 23c and 25c of the slit nozzle 2 is removed by the resin facing portions 615 and 616, the influence on the ejection of the coating liquid from the slit nozzle 2 can be suppressed. In contrast, the contact portion 618 of the scraper 61 is made of rubber. Therefore, it fits snugly to the tip surface 2d of the slit nozzle 2 and reliably removes the coating solution adhering to the tip surface 2d of the slit nozzle 2, thereby enabling stable discharge of the coating solution from the slit nozzle 2. . Such a rubber contact portion 618 is worn as the slit nozzle 2 is cleaned. However, a large amount of coating liquid tends to adhere to the tip surface 2d of the slit nozzle 2 with which the abutting portion 618 abuts. Since this coating liquid functions as a lubricant, wear of the abutting portion 618 is moderate. proceed. Further, when the contact portion 618 is worn out to withstand use, only the contact portion 618 needs to be replaced, and the scraper 61 itself does not need to be replaced. In this way, cleaning suitable for the stable discharge of the coating liquid from the slit nozzle 2 can be performed by the scraper 61, and the running cost associated with replacement of the scraper 61 can be suppressed.

  The contact portion 618 may be replaced by removing the worn contact portion 618 from the main body 611 and bonding a new contact portion 618 to the main body 611 with an adhesive. In addition, this replacement operation may be performed by the user of the coating apparatus 1 or by the service of the manufacturer of the coating apparatus 1.

  Incidentally, with respect to the problem of wear of the scraper 61, it may be possible to suppress wear of the scraper 61 by supplying a rinse liquid or the like as a lubricant between the slit nozzle 2 and the scraper 61. However, when the rinsing liquid is mixed with the coating liquid discharged from the discharge port 21 of the slit nozzle 2, the viscosity of the coating liquid changes, the coating state of the coating liquid on the substrate 3 becomes unstable, or the rinsing liquid is consumed. The amount may increase. On the other hand, according to the present embodiment, there is an advantage in that such a problem does not occur.

  In addition, a resin facing portion 616 having a V-shaped groove 614 formed on the side portion of the facing portions 615 and 616 is provided, and the scraper 61 is attached so that the contact portion 618 is attached to the bottom of the V-shaped groove 614. It is configured. In such a configuration, when the contact portion 618 is worn, it is sufficient to replace the contact portion 618 with respect to the main body 611, and the main body 611 itself can be used continuously. Therefore, running cost can be effectively suppressed.

  The main body 611 has liquid repellency with respect to the coating solution. Therefore, since the amount of the coating liquid adhering to the main body 611 can be suppressed, the cleaning frequency of the scraper 61 in the cleaning unit 6C can be suppressed.

  Further, the slit nozzle 2 has a nozzle shim 27 that partially blocks the discharge port 21 to restrict a range of the discharge port 21 where the coating liquid is discharged. On the other hand, the contact portion 618 of the scraper 61 contacts the nozzle shim 27 of the slit nozzle 2 in the cleaning process. As a result, the coating liquid adhering to the nozzle shim 27 can also be reliably removed.

  By the way, the coating liquid of the slit nozzle 2 contains a polyimide precursor and a solvent. Since the coating liquid containing such a polyimide precursor has a higher viscosity than, for example, a coating liquid for photoresist, it is particularly required to be surely removed from the tip surface 2d of the slit nozzle 2. On the other hand, according to the present embodiment, the coating liquid can be reliably removed from the tip surface 2d of the slit nozzle 2 by the rubber contact portion 618 that fits the tip surface 2d of the slit nozzle 2. Become. On the other hand, since the coating liquid has a high viscosity, the coating liquid does not easily sag from the both side surfaces 23c and 25c of the slit nozzle 2 to the tip surface 2d. Therefore, it is sufficient to remove the coating liquid from the both side surfaces 23c and 25c of the slit nozzle 2 with the resin facing portions 615 and 616.

  As described above, in the above embodiment, the coating device 1 corresponds to an example of the “coating device” of the present invention, the nozzle cleaning device 6 corresponds to an example of the “nozzle cleaning device” of the present invention, and the scraper 61 corresponds to the present invention. , The support portion 62 corresponds to an example of the “support portion” of the present invention, the drive unit 6B corresponds to an example of the “drive portion” of the present invention, the facing portion 615, 616 corresponds to an example of the “facing portion” of the present invention, the contact portion 618 corresponds to an example of the “contact portion” of the present invention, the main body 611 corresponds to an example of the “main body” of the present invention, and the slit The nozzle 2 corresponds to an example of the “nozzle” of the present invention, the discharge port 21 corresponds to an example of the “discharge port” of the present invention, the side surfaces 23c and 25c correspond to an example of “both side surfaces” of the present invention, The tip surface 2d corresponds to an example of the “tip surface” of the present invention, and the nozzle shim 27 corresponds to the “tip surface” of the present invention. It corresponds to an example of the braking member. "

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the contact portion 618 is bonded to the main body 611 of the scraper 61 with an adhesive. However, the contact portion 618 may be configured to be detachable from the main body 611 of the scraper 61, specifically, the bottom of the V-shaped groove 614. As a result, the replacement work of the contact portion 618 with respect to the main body 611 can be easily performed. Various specific mechanisms for allowing the contact portion 618 to be attached to and detached from the main body 611 are conceivable. For example, the main body 611 is provided with an engagement protrusion, while the contact portion 618 is provided with an engagement hole, and the engagement protrusion and the engagement hole are engaged with each other, whereby the contact portion 618 with respect to the main body 611 is provided. Can be made removable. Alternatively, a fastening mechanism such as a screw may be used.

  Moreover, the kind of resin which comprises the main body 611 is not restricted to polytetrafluoroethylene. Therefore, for example, the main body 611 may be made of another type of resin having a contact angle with respect to the coating liquid larger than that of polytetrafluoroethylene. In this case, since the main body 611 has liquid repellency with respect to the coating liquid, the cleaning frequency of the main body 611 of the scraper 61 in the cleaning unit 6C can be suppressed.

  Further, it is not essential that the main body 611 has liquid repellency with respect to the coating liquid. Therefore, the main body 611 may be made of another type of resin that does not have liquid repellency with respect to the coating liquid.

  Further, the front end surface 2d of the slit nozzle 2 does not have to be a flat surface, and may have a minute step. In particular, in the above-described embodiment, the contact portion 618 of the scraper 61 that contacts the tip surface 2d of the slit nozzle 2 is made of rubber. Therefore, even if there is a step on the tip surface 2d of the slit nozzle 2, this contact portion 618. Can be brought into close contact with the distal end surface 2d by elastic deformation. Therefore, the coating liquid can be reliably removed from the front end surface 2d of the slit nozzle 2.

  In the above-described embodiment, the case where the coating liquid is applied to the two divided coating regions RT is exemplified. However, the scraper 61 can also effectively perform the cleaning process on the slit nozzle 2 that applies the application liquid to the single application region RT.

  Further, the facing portions 615 and 616 are integrally formed with the resin main body 611. However, the scraper 61 may be configured to attach the resin facing portions 615 and 616 and the rubber contact portion 618 to a main body made of a material different from the resin.

  Further, the shape of the contact portion 618 is not limited to a flat shape. For example, the contact portion 618 may be extended in the Y direction so that both ends of the contact portion 618 extend to the side portion of the V-shaped groove 614. In this case, the contact portion 618 is brought into close contact with the tip portion of the side surfaces 23c and 25c of the slit nozzle 2, that is, the portion adjacent to the tip surface 2d, and the coating liquid can be reliably removed from the tip portion.

  Moreover, the liquid which can be utilized as a coating liquid is not restricted to the thing containing a polyimide precursor and NMP. Therefore, it is possible to use various coating liquids such as a photoresist liquid that forms an etching resistant coating, a photoresist liquid for color filters, a slurry (paste) containing silicon, nanometal ink, or a conductive material.

  Further, for the substrate 3 to be coated, a glass substrate for a liquid crystal display device, a semiconductor substrate, a glass substrate for a PDP, a glass substrate for a photomask, a substrate for a color filter, a substrate for a recording disk, a substrate for a solar cell, and an electronic paper Various substrates such as a substrate for precision electronic devices such as a substrate, a rectangular glass substrate, a flexible substrate for film liquid crystal, and a substrate for organic EL can be used.

  The present invention can be applied to all nozzle cleaning techniques for cleaning a nozzle that discharges a coating liquid from a discharge port.

  DESCRIPTION OF SYMBOLS 1 ... Coating device, 2 ... Slit nozzle 2 (nozzle), 2d ... Front end surface, 21 ... Discharge port, 23c, 25c ... Side surface (both sides), 27 ... Nozzle shim (regulation member), 6 ... Nozzle cleaning device, 6B ... Drive unit (drive unit), 61 ... scraper (nozzle cleaning member), 611 ... main body, 615, 616 ... facing part, 618 ... contact part, 62 ... support part,

Claims (9)

A nozzle cleaning member that scrapes off the coating liquid adhering to the nozzle by moving relative to the nozzle that discharges the coating liquid from a discharge port provided at the tip,
Resin facing portions facing both side surfaces of the nozzle;
A nozzle cleaning member comprising: a rubber contact portion that is provided between the front ends of the both side surfaces of the nozzle and that contacts the front end surface of the nozzle that opens the discharge port. Further comprising a resin main body having a groove formed on the side portion of the facing portion
The nozzle cleaning member according to claim 1, wherein the contact portion is attached to a bottom portion of the groove.   The nozzle cleaning member according to claim 2, wherein the contact portion is detachable from a bottom portion of the groove.   The nozzle cleaning member according to claim 2, wherein the main body has liquid repellency with respect to the coating liquid.   The nozzle cleaning member according to claim 4, wherein the main body is made of polytetrafluoroethylene or a resin having a contact angle with respect to the coating liquid larger than that of polytetrafluoroethylene. 6. The coating liquid attached to the nozzle having a regulating member that regulates a range in which the coating liquid is ejected in the ejection opening by partially blocking the ejection opening. 6. The nozzle cleaning member according to claim 1,
The contact portion is a nozzle cleaning member that contacts the restriction member.   The nozzle cleaning member as described in any one of Claim 1 thru | or 6 which scrapes off the said coating liquid adhering to the said nozzle which discharges the said coating liquid containing a polyimide precursor and a solvent. A nozzle cleaning device that removes a coating liquid adhering to a nozzle that discharges a coating liquid from a discharge port provided at a tip,
A nozzle cleaning member according to any one of claims 1 to 7,
A support portion for supporting the nozzle cleaning member;
A nozzle cleaning device comprising: a drive unit that moves the nozzle cleaning member relative to the nozzle by driving the support unit. A nozzle for discharging the coating liquid from a discharge port provided at the tip;
A coating device comprising the nozzle cleaning device according to claim 8.

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