JPH07168015A - Method for cleaning mouthpiece of curtain flow coated and manufacture of coating film for color filter - Google Patents

Method for cleaning mouthpiece of curtain flow coated and manufacture of coating film for color filter

Info

Publication number
JPH07168015A
JPH07168015A JP31350593A JP31350593A JPH07168015A JP H07168015 A JPH07168015 A JP H07168015A JP 31350593 A JP31350593 A JP 31350593A JP 31350593 A JP31350593 A JP 31350593A JP H07168015 A JPH07168015 A JP H07168015A
Authority
JP
Japan
Prior art keywords
paint
cleaning
coating
cleaning member
coating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31350593A
Other languages
Japanese (ja)
Other versions
JP3306838B2 (en
Inventor
Osamu Wada
修 和田
Shinji Tomimatsu
伸二 富松
Sadao Kobashi
貞夫 小橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP31350593A priority Critical patent/JP3306838B2/en
Publication of JPH07168015A publication Critical patent/JPH07168015A/en
Application granted granted Critical
Publication of JP3306838B2 publication Critical patent/JP3306838B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To easily clean paint off the end of the lip of a mouthpiece to prevent formation of stripes in the paint applied and uneven application of paint for enhanced quality and profitability by using a cleaning member whose surface is made from a high polymer resin to clean the lip of the mouthpiece. CONSTITUTION:A cleaning member 4 is used to clean the lip 10 of a mouthpiece 3 just before applying paint. Preferably, the upper part of the cleaning member 4, though not in a particular form, is shaped to fit the end of the lip 10, and the cleaning member 4 can be manufactured into a sheet-shaped member by cutting a sheet-shaped material into the proper shape. The surface of the cleaning member 4 is made from high polymer resin, which is not restricted to particular ones but is preferably one kind or a mixture of two or more kinds selected from Teflon resin, urethane resin, acrylic resin, polyester resin, polypropylene resin, fluororesin, polybutadiene resin, nitrile rubber, silicone rubber, and an ethylene vinyl acetate copolymer.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、液晶を用いたカラーデ
ィスプレイや固体撮像素子などに用いられるカラーフィ
ルタ用塗膜の塗布時などに特に好適に用いられるカーテ
ンフローコータの口金のリップ部清掃方法およびそれを
利用したカラーフィルタ用塗膜の製造方法に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning a lip portion of a die of a curtain flow coater which is particularly suitable for applying a coating film for a color filter used for a color display using a liquid crystal or a solid-state image pickup device. And a method for producing a coating film for a color filter using the same.

【0002】[0002]

【従来の技術】一般に液晶を用いたディスプレイ等に利
用されるカラーフィルタは、ガラス板等の透明基板上
に、赤、緑、青の3原色パターンがある一定の位置関係
を保って配列されている。このガラス基板等への薄膜塗
布方式の一つとして、カーテンフローコータがある。こ
の塗布方法としては、例えば特開平5−11105号公
報に開示されおり,スリットダイ、ダイヘッド、Tダイ
と呼ばれる口金のリップ部先端から塗料をカーテン状に
吐出し、基板に非接触で塗布する方式のものである。こ
の方式は、吐出されるまでの塗料供給経路が密閉されて
いるために異物の混入がなく、更に塗料の粘度変化が少
ないために塗布膜厚が均一であるなどの特徴を有してい
る。
2. Description of the Related Art Generally, a color filter used for a display using liquid crystal is arranged on a transparent substrate such as a glass plate so that three primary color patterns of red, green and blue are arranged in a fixed positional relationship. There is. There is a curtain flow coater as one of the thin film coating methods for the glass substrate and the like. This coating method is disclosed in, for example, Japanese Patent Application Laid-Open No. 5-11105, and a method in which a coating material is discharged in a curtain shape from the tip of a lip portion of a die called a slit die, a die head, and a T die, and is applied in a non-contact manner to a substrate. belongs to. This system is characterized in that the paint supply path until it is discharged is sealed, so that no foreign matter is mixed in, and the change in the viscosity of the paint is small, so that the coating film thickness is uniform.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、この塗
布方法の欠点は、口金のリップ部先端から吐出された後
の塗料が除々にリップ部の先端に付着しやすいことであ
る。この付着した塗料は、塗料中の溶剤が蒸発して固形
物となり、ガラス板上に塗布した塗膜に塗布方向の縦状
の塗布スジとなって発生する。更には、この固形物がリ
ップ部から脱離して、塗布した塗膜に異物として持ち込
まれる。以上の理由で口金のリップ部先端の清掃は、連
続生産において欠かせない課題である。
However, a drawback of this coating method is that the paint after being discharged from the lip end of the mouthpiece tends to gradually adhere to the lip end. The adhered coating material is generated by evaporation of the solvent in the coating material to form a solid material, which forms vertical coating stripes in the coating direction on the coating film coated on the glass plate. Further, the solid matter is detached from the lip portion and brought into the applied coating film as a foreign matter. For the above reasons, cleaning of the lip end of the die is an essential issue in continuous production.

【0004】現状の口金リップ部先端の清掃方法として
は、溶剤を含浸させた不織布などを用いて手拭き清掃を
したり、あるいはリップ部先端を溶剤で洗浄する方法な
どがある。しかしこれらの方法は、不織布から発生した
埃りにより基板が汚染されたり、口金のリップ部から吐
出された塗料が汚染されて塗膜の縦スジの発生原因にな
るなどの問題がある。一方、溶剤洗浄法では、口金のリ
ップ部に付着した塗料が洗浄溶剤と共に飛散して塗布基
板に付着し、汚染および塗布ムラを生じるなどの問題が
ある。
As a current method of cleaning the tip of the lip portion of the mouthpiece, there is a method of hand-wiping using a non-woven fabric impregnated with a solvent, or a method of cleaning the tip of the lip portion with a solvent. However, these methods have a problem that the substrate is contaminated by dust generated from the non-woven fabric, or the paint discharged from the lip portion of the die is contaminated, which causes vertical streaks in the coating film. On the other hand, the solvent cleaning method has a problem that the coating material attached to the lip portion of the die scatters together with the cleaning solvent and adheres to the coated substrate, resulting in contamination and uneven coating.

【0005】したがって、本発明の目的は、塗料粘度の
変化が少なく、塗布膜厚が均一であるなどの従来のカー
テンフローコータの特徴を保持したままで、これまでの
課題である口金のリップ部先端に付着した塗料を容易に
清掃して、塗布スジ、塗布ムラがなく、品質および経済
性に優れたカラーフィルタ用塗膜を提供することにあ
る。
Therefore, the object of the present invention is to keep the characteristics of the conventional curtain flow coater such as the change in the viscosity of the paint being small and the coating film thickness being uniform, and the lip portion of the mouthpiece, which has been a problem to date. An object of the present invention is to provide a coating film for a color filter, which is free from coating streaks and coating unevenness and which is excellent in quality and economical efficiency by easily cleaning the paint attached to the tip.

【0006】[0006]

【課題を解決するための手段】本発明は、次の構成を有
するものである。
The present invention has the following configuration.

【0007】平板上に塗料を塗布する際に用いられる
カーテンフローコータの口金の清掃方法において、該口
金のリップ部を表面が高分子樹脂からなる清掃部材を用
いて清掃することを特徴とするカーテンフローコータの
口金の清掃方法。
In a method for cleaning a die of a curtain flow coater used for applying a coating material on a flat plate, a curtain characterized in that a lip portion of the die is cleaned by using a cleaning member having a surface made of a polymer resin. How to clean the base of the flow coater.

【0008】平板上にカラーフィルタ用塗膜形成用塗
料を塗布、乾燥する工程を含むカラーフィルタ用塗膜の
製造方法において、該塗料を塗布する直前に該カーテン
フローコータの口金のリップ部を表面が高分子樹脂から
なる清掃部材を用いて清掃することを特徴とするカラー
フィルタ用塗膜の製造方法。
In a method for producing a coating for a color filter, which comprises a step of coating a coating for forming a coating for a color filter on a flat plate and drying the coating, the lip portion of the die of the curtain flow coater is surfaced immediately before the coating. A method for producing a coating film for a color filter, which comprises cleaning with a cleaning member made of a polymer resin.

【0009】次に本発明におけるカーテンフローコータ
の口金の清掃方法を図面に従って説明する。
Next, a method of cleaning the die of the curtain flow coater according to the present invention will be described with reference to the drawings.

【0010】第1図および第2図は、本発明にかかるカ
ーテンフローコータによる塗布(スリットダイコータ)
の一例を示す概略図である。すなわち、第1図は、塗料
を塗布する直前に清掃部材4によって口金3のリップ部
10を清掃している状態を示す。第2図は、口金3のリ
ップ部10の清掃が終了し、塗料の塗布を開始した状態
を示す。
1 and 2 show coating by a curtain flow coater according to the present invention (slit die coater).
It is a schematic diagram showing an example. That is, FIG. 1 shows a state in which the cleaning member 4 is cleaning the lip portion 10 of the base 3 immediately before the coating material is applied. FIG. 2 shows a state in which the cleaning of the lip portion 10 of the mouthpiece 3 is completed and the application of the paint is started.

【0011】すなわち、塗料9はポンプ8によって配管
7から口金3の内部に供給される。この状態で、口金3
のリップ部10の先端部から吐出されてリップ部10の
表面に付着した余分の塗料を清掃装置5によって清掃す
る。つづいて平板1の搬送(矢印A方向)に従い、口金
3のリップ部10からカーテン状態で吸着ステージ2上
に吸着固定された平板1上に塗料が塗布され、塗膜11
が形成される。塗膜の均一性は、カーテン状に吐出され
る塗料を口金先端部にあるリップ部10の間隔や平板1
とリップ部10の間隔を調整してコントロールされる。
That is, the paint 9 is supplied from the pipe 7 into the base 3 by the pump 8. In this state, the base 3
The excess paint discharged from the tip of the lip portion 10 and attached to the surface of the lip portion 10 is cleaned by the cleaning device 5. Then, as the flat plate 1 is conveyed (in the direction of arrow A), the coating material is applied from the lip portion 10 of the die 3 onto the flat plate 1 which is suction-fixed on the suction stage 2 in a curtain state, and the coating film 11
Is formed. The uniformity of the coating film is determined by applying the curtain-shaped discharge paint to the gap between the lip portions 10 at the tip of the die and the flat plate 1.
It is controlled by adjusting the distance between the lip portion 10 and the lip portion 10.

【0012】清掃装置5は、表面が高分子樹脂からなる
清掃部材4、それを保持する容器5および清掃した塗料
を排出する排出配管6から構成されており、支持体12
により支持されている。清掃手順は次の通りである。ま
ず、清掃部材4および容器5が口金3のリップ部10の
真下で停止し上昇する。この動作で清掃部材4の上部が
口金3のリップ部10に密着する。この密着した状態で
清掃部材4がリップ部10に沿って移動し、リップ部に
付着した塗料をこすり落とす、あるいはかき落とす等し
て除去し、清掃を完了する。清掃後は、清掃装置5が下
降して塗布が開始される。なお、清掃部材4によってリ
ップ部10から清掃された不要塗料は、容器5に溜まり
排出配管6から排出される。
The cleaning device 5 comprises a cleaning member 4 whose surface is made of polymer resin, a container 5 for holding the cleaning member 4, and a discharge pipe 6 for discharging the cleaned paint.
It is supported by. The cleaning procedure is as follows. First, the cleaning member 4 and the container 5 stop and rise just below the lip portion 10 of the base 3. By this operation, the upper portion of the cleaning member 4 comes into close contact with the lip portion 10 of the base 3. In this closely contacted state, the cleaning member 4 moves along the lip portion 10 to remove the paint adhering to the lip portion by scraping off or scraping it off, thereby completing the cleaning. After cleaning, the cleaning device 5 descends and the application is started. The unnecessary paint cleaned from the lip portion 10 by the cleaning member 4 collects in the container 5 and is discharged from the discharge pipe 6.

【0013】第3図に清掃部材4の一例を示す。清掃部
材4の上部の形状は特に限定されるものでないが、リッ
プ部10の先端に密着する形状であることが好ましい。
清掃部材4は、例えばシート状のものを適宜の形状に切
り取ることによってシート状部材として製造することが
できるが、シートの厚み(清掃部材の幅)としては、
0.5mm〜10mmの範囲が好ましく、より好ましく
は2mm〜5mmの範囲である。0.5mm未満の厚さ
では、シートの弾性が劣り清掃効果が少ない。10mm
厚をこえる場合は、リップ先端部からかきとった塗料が
シート状の清掃部材とリップ先端間に溜まり、汚染の原
因になりやすい。また、清掃部材4としては、このよう
なシート状部材が、リップ部からかきとった塗料が容器
5の中に流出しやすい程度の間隔(1mm〜10mm程
度)をおいて2シート以上配列されているものが好まし
く用いられる。配列するシート数が多いほど清掃効果が
大きくなるからである。ただし、カーテンフローコータ
の幅が限られており、清掃部材はカーテンフローコータ
の端部から端部までスライドするものであるので、シー
ト状部材の幅と間隔を決定すれば、自ずとシート数は決
定される。例えば、カーテンフローコータの幅が300
mm、シート状部材の幅が5mm、間隔が2mmであれ
ば、シート数は2〜7個程度が適当である。第3図に
は、3シート配列した例を示す。
FIG. 3 shows an example of the cleaning member 4. The shape of the upper portion of the cleaning member 4 is not particularly limited, but it is preferably a shape that is in close contact with the tip of the lip portion 10.
The cleaning member 4 can be manufactured as a sheet-shaped member, for example, by cutting a sheet-shaped member into an appropriate shape, and the sheet thickness (width of the cleaning member) is
The range of 0.5 mm to 10 mm is preferable, and the range of 2 mm to 5 mm is more preferable. When the thickness is less than 0.5 mm, the elasticity of the sheet is poor and the cleaning effect is small. 10 mm
If the thickness is exceeded, the paint scraped from the tip of the lip may be accumulated between the sheet-shaped cleaning member and the tip of the lip, which may cause contamination. As the cleaning member 4, two or more such sheet-like members are arranged with an interval (about 1 mm to 10 mm) such that the paint scraped from the lip portion easily flows into the container 5. Those that are present are preferably used. This is because the cleaning effect increases as the number of arranged sheets increases. However, since the width of the curtain flow coater is limited and the cleaning member slides from one end of the curtain flow coater to the other, the number of sheets is automatically determined by determining the width and spacing of the sheet-shaped members. To be done. For example, the width of the curtain flow coater is 300
mm, the width of the sheet-shaped member is 5 mm, and the interval is 2 mm, the number of sheets is appropriately about 2 to 7. FIG. 3 shows an example in which three sheets are arranged.

【0014】清掃部材4の表面は高分子樹脂からなるも
のであり、高分子樹脂としては、特に限定されるもので
ないが、テフロン樹脂、ウレタン樹脂、アクリル樹脂、
ポリエステル樹脂、ポリプロピレン樹脂、フッ素樹脂、
ポリブタジエン樹脂、ニトリルゴム、シリコーンゴム、
エチレン・酢酸ビニル共重合体などの一種または二種以
上を混合したものが好ましく用いられる。これらの中で
も、リップ部の先端に良好に密着するためにはゴム弾性
を有するものが好ましく、また、塗料に含まれる溶剤
(N−メチル−2−ピロリドンなど)に対する耐性の大
きいものが好ましく、さらに耐久性を有するものが好ま
しい。以上の点から、最も好ましいのはシリコーンゴム
である。表面以外の部分は、表面と同様の高分子樹脂で
あってもよいし、全く異なる材質のものであってもよ
い。
The surface of the cleaning member 4 is made of a polymer resin, and the polymer resin is not particularly limited, but Teflon resin, urethane resin, acrylic resin,
Polyester resin, polypropylene resin, fluororesin,
Polybutadiene resin, nitrile rubber, silicone rubber,
One type or a mixture of two or more types such as ethylene / vinyl acetate copolymer is preferably used. Among these, those having rubber elasticity are preferable for good adhesion to the tip of the lip portion, and those having large resistance to the solvent (N-methyl-2-pyrrolidone etc.) contained in the paint are preferable, and Those having durability are preferable. From the above points, silicone rubber is most preferable. The part other than the surface may be made of the same polymer resin as the surface, or may be made of a completely different material.

【0015】また、これらの清掃部材の表面を構成する
樹脂中に発生した静電気を除去し、埃の付着を防止する
ために導電性粉末を混入することも好ましく行われる。
導電性粉末としては、特に限定されるものではないが、
それ自身が導通性に優れた粉末であるものが好ましく用
いられる。このような導電性粉末としては、導電性カー
ボン、白金、金、ニッケル、銀、銅、コバルト、錫、ア
ルミニュウムおよびパラジウムなどの一種または二種以
上の混合物が好適に用いられる。これらの導電性粉末
は、樹脂に対して40重量%〜100重量%程度混合す
ればよい。導電性粉末の量が多すぎると、樹脂が脆くな
り耐久性の劣ったものとなる。
It is also preferable to mix conductive powder in order to remove static electricity generated in the resin constituting the surface of these cleaning members and prevent dust from adhering.
The conductive powder is not particularly limited,
A powder which itself has excellent conductivity is preferably used. As such a conductive powder, one kind or a mixture of two or more kinds of conductive carbon, platinum, gold, nickel, silver, copper, cobalt, tin, aluminum and palladium is preferably used. These conductive powders may be mixed in the resin in an amount of about 40% to 100% by weight. If the amount of the conductive powder is too large, the resin becomes brittle and the durability becomes poor.

【0016】清掃部材による清掃は、塗料を塗布する直
前に行うと、口金リップ部に付着した塗料がほとんど除
去されるので最も効果的であるが、これに限定されず、
適宜行うことができる。
The cleaning by the cleaning member is most effective if it is carried out immediately before the coating of the paint, since most of the paint attached to the lip portion of the mouthpiece is removed, but the present invention is not limited to this.
It can be performed appropriately.

【0017】本発明のカーテンフローコータによる塗布
は、スリットダイコータによる方法に限定されず、ダイ
ヘッド、Tダイなどによる方法でも良い。また塗料の供
給手段は、ポンプに限定されず、圧空などの方式による
ものでも良い。
The coating by the curtain flow coater of the present invention is not limited to the method using the slit die coater, but may be a method using a die head, a T-die or the like. Further, the paint supply means is not limited to the pump, and may be a method such as compressed air.

【0018】塗料がカラーフィルタ用塗膜形成用塗料で
ある場合には、特に外観が良好であることが要求される
ので、本発明のカーテンフローコータの口金の清掃方法
は特に好適に用いられる。
When the paint is a paint for forming a coating film for a color filter, it is required that the paint has a particularly good appearance. Therefore, the method for cleaning the die of the curtain flow coater of the present invention is particularly preferably used.

【0019】以下、カラーフィルタ用塗膜形成に本発明
の清掃方法を適用した場合について説明する。
The case where the cleaning method of the present invention is applied to the formation of a color filter coating film will be described below.

【0020】カラーフィルタ用塗膜形成の場合、平板と
して透明平板を用いる。透明平板としては、特に限定さ
れるものでないが、ポリカーボネート、ポリメチルメタ
クリレート等のプラスチック平板やプラスチックフイル
ムおよびガラス板等全光線透過率が70%以上の透明平
板が好ましく用いられる。なおこれらの中ではガラス板
がより好ましく用いられる。
When forming a coating film for a color filter, a transparent flat plate is used. The transparent flat plate is not particularly limited, but a transparent flat plate having a total light transmittance of 70% or more, such as a plastic flat plate made of polycarbonate, polymethylmethacrylate or the like, a plastic film or a glass plate is preferably used. Of these, a glass plate is more preferably used.

【0021】塗料の種類としては、特に限定されるもの
でないが、アクリル樹脂、ポリエステル樹脂、ポリビニ
ルアルコール樹脂、ポリアミド酸樹脂、ポリイミド樹脂
等の一種または二種以上の混合物およびこれらの感光性
樹脂等が好ましく用いられる。なお、これらの樹脂に染
料または顔料等の着色剤を分散混合して使用することも
できる。
The type of coating material is not particularly limited, but one or a mixture of two or more of acrylic resin, polyester resin, polyvinyl alcohol resin, polyamic acid resin, polyimide resin and the like, and photosensitive resins thereof and the like are used. It is preferably used. In addition, a colorant such as a dye or a pigment may be dispersed and mixed with these resins before use.

【0022】透明平板への塗布後の膜厚は、特に限定さ
れるものでないが、乾燥塗膜の状態で0.1μm〜5μ
mの範囲が好ましく、より好ましくは、0.2μm〜3
μmの範囲が好適に用いられる。乾燥後の塗膜が0.1
μm未満では、乾燥塗膜に縦状のスジが発生し、品質上
問題である。一方5μmをこえる場合は、塗料の使用量
が多くなり、経済性に欠ける。
The film thickness after coating on a transparent flat plate is not particularly limited, but is 0.1 μm to 5 μm in the state of a dry coating film.
The range of m is preferable, and more preferably 0.2 μm to 3
The range of μm is preferably used. The coating film after drying is 0.1
If it is less than μm, vertical streaks are generated in the dried coating film, which is a quality problem. On the other hand, if it exceeds 5 μm, the amount of paint used increases, and the economy is poor.

【0023】カラーフィルタの製造方法については、例
えば、以下の方法が挙げられるが、これらに限定される
ものでない。まず透明平板上に微細パターンからなる遮
光層を形成する。この遮光層上に着色剤を添加した熱硬
化性の塗料を塗布し、50℃〜150℃の温度で乾燥し
て、熱硬化性塗膜を形成する。続いて該熱硬化性塗膜上
にポジ型フォトレジストを塗布し、超高圧水銀灯等を用
いてマスク露光を行い、次いで該ポジ型フォトレジスト
を現像・エッチングし、レリーフパターンを形成した
後、該レリーフパターンをマスクとして、該熱硬化性塗
膜をエッチングする。続いて該ポジ型フォトレジストを
剥離した後、200℃〜350℃に加熱焼成し、塗膜を
熱硬化する。以上の工程を赤色、緑色および青色につい
てくり返し、所定の赤色、緑色および青色の微細パター
ンを形成し、カラーフィルタとする。
The method of manufacturing the color filter includes, for example, the following methods, but is not limited to these. First, a light shielding layer having a fine pattern is formed on a transparent flat plate. A thermosetting paint containing a colorant is applied onto the light-shielding layer and dried at a temperature of 50 ° C. to 150 ° C. to form a thermosetting coating film. Subsequently, a positive photoresist is applied on the thermosetting coating film, mask exposure is performed using an ultrahigh pressure mercury lamp or the like, and then the positive photoresist is developed and etched to form a relief pattern, The thermosetting coating film is etched using the relief pattern as a mask. Then, after peeling off the positive photoresist, the coating film is heat-baked at 200 ° C. to 350 ° C. to thermally cure the coating film. The above steps are repeated for red, green, and blue to form predetermined red, green, and blue fine patterns to form a color filter.

【0024】塗料の乾燥温度は、50℃〜160℃の範
囲が好ましく、より好ましくは、80℃〜130℃の範
囲が好適である。50℃未満では、乾燥時間が長く生産
効率が悪くなる。一方160℃をこえる場合は、熱硬化
が進行してしまい現像液に不溶化してしまう。
The drying temperature of the paint is preferably in the range of 50 ° C to 160 ° C, more preferably in the range of 80 ° C to 130 ° C. If the temperature is lower than 50 ° C, the drying time will be long and the production efficiency will be poor. On the other hand, when the temperature exceeds 160 ° C., thermosetting proceeds and becomes insoluble in the developing solution.

【0025】一方着色剤を添加した感光性塗料の場合
は、透明平板上に微細パターンからなる遮光層を形成
し、該遮光層上に着色剤を添加した感光性塗料を塗布し
て、50℃〜150℃の温度で乾燥して、感光性塗膜を
形成する。続いて超高圧水銀灯等を用いてマスク露光を
行い、感光性塗膜を光硬化する。その後遮光層上の未硬
化感光性塗膜を現像・エッチングする。以上の工程を赤
色、緑色および青色についてくり返し、所定の赤色、緑
色および青色の微細パターンを形成し、カラーフィルタ
とする。
On the other hand, in the case of a photosensitive coating containing a colorant, a light-shielding layer having a fine pattern is formed on a transparent flat plate, the photosensitive coating containing a colorant is applied on the light-shielding layer, and the temperature is 50 ° C. Dry at a temperature of ~ 150 ° C to form a photosensitive coating. Subsequently, mask exposure is performed using an ultra-high pressure mercury lamp or the like to photo-cur the photosensitive coating film. Then, the uncured photosensitive coating film on the light shielding layer is developed and etched. The above steps are repeated for red, green, and blue to form predetermined red, green, and blue fine patterns to form a color filter.

【0026】なお必要に応じて、該赤色、緑色および青
色の微細パターン上に保護膜および平滑性を高める目的
で着色剤を含まない塗料を塗布して、カラーフィルタと
してもよい。
If necessary, a colorant-free paint may be applied to the red, green and blue fine patterns to form a protective film and a colorant-containing paint for the purpose of improving smoothness.

【0027】本発明によるカーテンフローコータの口金
の清掃方法は、以上のカラーフィルタ製造工程における
各種カラーフィルタ用塗膜形成用塗料の塗布に有効であ
る。すなわち、赤色、緑色、青色の微細パターン形成用
塗料、遮光層形成用塗料、保護膜形成用塗料などであ
る。
The method for cleaning the die of the curtain flow coater according to the present invention is effective for applying the coating material for forming a coating film for various color filters in the above color filter manufacturing process. That is, a red, green, and blue fine pattern forming paint, a light shielding layer forming paint, a protective film forming paint, and the like.

【0028】[0028]

【実施例】以下に、実施例を挙げて本発明を詳細に説明
するが、これらに限定されるものでない。
The present invention will be described in detail below with reference to examples, but the invention is not limited thereto.

【0029】実施例1、比較例1 第1図および第2図に示す塗布装置を用いて、ガラス基
板上に塗料を塗布した。ガラス基板は、大きさ300m
m×350mm、厚さ1.1mmのものを使用し、塗布
する直前に清掃部材4を用いて口金3のリップ部10の
先端を清掃した。その後にN−メチル−2−ピロリドン
溶剤と塩臭素化フタルシアニングリーン(C.I.ピグ
メントグリーン36)とジスアゾイエローHR(C.
I.ピグメントイエロー83)顔料を添加・分散したポ
リアミド酸塗料を固形分8wt%、粘度100cpの状
態で2m/分の速度で塗布し、120℃で10分乾燥し
た。清掃部材4としては、5mm厚のシリコーンゴムシ
ート(タイガースポリマ(株)製)を上面が口金のリッ
プ先端部に密着する形状に作成し、ピッチ10mmで3
シート配列して使用した(実施例1)。
Example 1 and Comparative Example 1 A coating material was applied onto a glass substrate using the coating apparatus shown in FIGS. 1 and 2. The glass substrate is 300m in size
The tip of the lip portion 10 of the mouthpiece 3 was cleaned by using the cleaning member 4 immediately before the application, using an m × 350 mm, 1.1 mm thick one. Then, N-methyl-2-pyrrolidone solvent, chlorobrominated phthalcyanine green (CI Pigment Green 36) and disazo yellow HR (C.I.
I. Pigment Yellow 83) A polyamic acid coating containing a pigment added and dispersed was applied at a rate of 2 m / min at a solid content of 8 wt% and a viscosity of 100 cp, and dried at 120 ° C. for 10 minutes. As the cleaning member 4, a 5 mm-thick silicone rubber sheet (manufactured by Tigers Polymer Co., Ltd.) is formed in a shape in which the upper surface is in close contact with the lip tip of the die, and the pitch is 3 mm.
The sheets were arranged and used (Example 1).

【0030】以上の方法でガラス基板100枚に連続塗
布した結果、清掃後のリップ部先端部には、塗料の付着
が非常に少なく、得られたいずれの塗布基板も縦状のス
ジ、ムラおよび埃などによる汚染がなく、良好な塗膜が
得られた。
As a result of continuous coating on 100 glass substrates by the above method, the coating material was very little adhered to the tip of the lip portion after cleaning, and any of the coating substrates obtained had vertical stripes, unevenness, and A good coating film was obtained without contamination by dust or the like.

【0031】一方、本発明の清掃部材を使用しないで実
施例1と同様の方法で塗布を行った(比較例1)。第1
表に実施例1で得られた塗布基板と比較例1で得られた
塗布基板の塗膜の外観を目視評価した結果を比較して示
した。
On the other hand, coating was performed in the same manner as in Example 1 without using the cleaning member of the present invention (Comparative Example 1). First
In the table, the results of visual evaluation of the appearance of the coating films of the coated substrate obtained in Example 1 and the coated substrate obtained in Comparative Example 1 are shown in comparison.

【0032】[0032]

【表1】 比較例1では、塗布枚数が多くなるにつれて、口金のリ
ップ先端部が付着した塗料で汚れてくる。その結果、縦
状スジの発生、塗布ムラの発生および塗料起因の異物が
増大する。一方実施例1では、この様な現象が発生せ
ず、外観上問題のない良好な塗布基板が得られた。
[Table 1] In Comparative Example 1, as the number of coatings increases, the lip tip portion of the die becomes soiled with the adhered paint. As a result, the generation of vertical stripes, the occurrence of coating unevenness, and the amount of foreign matter caused by the coating material increase. On the other hand, in Example 1, such a phenomenon did not occur, and a good coated substrate having no problem in appearance was obtained.

【0033】実施例2 口金清掃部材として3mm厚のテフロンシートを3シー
ト用い、実施例1と同様の方法で塗布した。なお塗料と
しては、エチルセロソルブアセテート溶剤とジアントラ
キノンニルレッド(C.I.ピグメントレッド177)
顔料を添加・分散したアクリル樹脂(コータックス、東
レ製)を用い、この塗料を固形分20wt%、粘度25
cpの状態で塗布、130℃で15分乾燥した。その結
果、実施例1と同様に縦状スジ、塗布ムラ、顔料起因の
異物などの発生がなく良好な塗膜が得られた。
Example 2 Three Teflon sheets each having a thickness of 3 mm were used as a cleaning member for the spinneret and coated in the same manner as in Example 1. The paint used was ethyl cellosolve acetate solvent and dianthraquinone nil red (CI Pigment Red 177).
An acrylic resin (Cotax, manufactured by Toray) in which a pigment is added and dispersed is used, and this coating material has a solid content of 20 wt% and a viscosity of 25.
It was applied in the state of cp and dried at 130 ° C. for 15 minutes. As a result, as in Example 1, a good coating film was obtained without generation of vertical stripes, coating unevenness, foreign matter due to pigment, and the like.

【0034】実施例3 シリコーン“SE6720”(東レ・ダウコーニング・
シリコーン(株)製)と、該シリコーンに対して70重
量%の導電性カーボン“デンカブラック”(電子化学工
業(株)製)を混合し、ニーダーで均一分散させた。こ
の分散液を用いて3mm厚のシートを形成し、150
℃、30分、さらに200℃、1hr硬化させて引裂強
度の強いシリコーンゴムシートを作製した。
Example 3 Silicone "SE6720" (Toray Dow Corning
Silicone Co., Ltd.) and 70% by weight of conductive carbon “Denka Black” (manufactured by Denki Kagaku Kogyo Co., Ltd.) with respect to the silicone were mixed and uniformly dispersed with a kneader. A sheet having a thickness of 3 mm is formed using this dispersion liquid,
C., 30 minutes, and then 200.degree. C. for 1 hour to obtain a silicone rubber sheet having a high tear strength.

【0035】口金清掃部材として上記の導電性カーボン
を含有するシリコーンゴムシートを3シート用い、実施
例1と同様の方法で塗布した。その結果、実施例1と比
べて、リップ部に埃の付着がほとんどなく、この結果、
縦状スジ、塗布ムラ、顔料起因の異物などの発生がなく
より良好な塗膜が得られた。
As the mouthpiece cleaning member, three silicone rubber sheets containing the above-mentioned conductive carbon were used and coated in the same manner as in Example 1. As a result, as compared with Example 1, almost no dust adhered to the lip portion, and as a result,
A better coating film was obtained without generation of vertical stripes, coating unevenness, foreign matter due to pigment, and the like.

【0036】[0036]

【発明の効果】本発明によると、カーテンフローコータ
の口金先端部であるリップ部に付着した余分の塗料を容
易に清掃することが可能となった。このために平板上の
塗膜に縦状の塗布スジ、塗布ムラおよび顔料起因の汚
染、口金清掃部材による汚染などの外観不良が発生せ
ず、生産性を著しく向上させることができる。
According to the present invention, it becomes possible to easily clean the excess paint attached to the lip portion which is the tip of the die of the curtain flow coater. Therefore, the coating film on the flat plate is free from vertical appearance of streaks, coating unevenness, stains due to pigments, stains due to the die cleaning member, and the like, and the productivity is remarkably improved.

【0037】清掃部材の表面の高分子樹脂としてシリコ
ーンゴムを用いることにより、リップ部の先端に良好に
密着することが可能となり、またN−メチル−2−ピロ
リドンなどの溶剤に対しても耐性があり、さらに耐久性
もあるので、清掃の効果をより一層高めることができ
る。
By using silicone rubber as the polymer resin on the surface of the cleaning member, it becomes possible to adhere well to the tip of the lip portion, and it is also resistant to solvents such as N-methyl-2-pyrrolidone. Since it is also durable, the cleaning effect can be further enhanced.

【0038】また、清掃を塗料を塗布する直前に行うこ
とにより、口金リップ部に付着した塗料がほとんど除去
されるので、塗布スジや塗布ムラ、顔料起因の汚染を効
果的に防止することができる。
Further, by performing the cleaning just before applying the paint, most of the paint adhering to the lip portion of the mouthpiece is removed, so that it is possible to effectively prevent coating stripes, coating unevenness, and contamination due to the pigment. .

【0039】なお、カラーフィルタ用塗膜には特に外観
が良好であることが要求されるので、カラーフィルタ用
塗膜をカーテンフローコータで形成する場合にこの清掃
方法を用いることは非常に有効である。
Since the color filter coating film is required to have a particularly good appearance, it is very effective to use this cleaning method when the color filter coating film is formed by a curtain flow coater. is there.

【0040】したがって、高品質で価格の安い経済性に
優れたカラーフィルタの連続生産が可能となる。
Therefore, it is possible to continuously produce a color filter which is of high quality, low price and excellent in economical efficiency.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明にかかるカーテンフローコータによる塗
布(スリットダイコータ)の一例を示す概略図であり、
塗料を塗布する直前に清掃部材によって口金のリップ部
を清掃している状態を示すものである。
FIG. 1 is a schematic view showing an example of coating (slit die coater) by a curtain flow coater according to the present invention,
It shows a state in which the lip portion of the mouthpiece is being cleaned by the cleaning member immediately before applying the paint.

【図2】本発明にかかるカーテンフローコータによる塗
布(スリットダイコータ)の一例を示す概略図であり、
口金のリップ部の清掃が終了し、塗料の塗布を開始した
状態を示すものである。
FIG. 2 is a schematic view showing an example of coating (slit die coater) by a curtain flow coater according to the present invention,
It shows a state in which the cleaning of the lip portion of the mouthpiece is completed and the application of the paint is started.

【図3】カーテンフローコータの口金のリップ部を清掃
する清掃部材の一例を示す概略図である。
FIG. 3 is a schematic view showing an example of a cleaning member for cleaning a lip portion of a die of a curtain flow coater.

【符号の説明】[Explanation of symbols]

1:平板 2:吸着ステージ 3:口金 4:清掃部材 5:容器 6:塗料排出配管 7:塗料供給配管 8:ポンプ 9:塗料 10:リップ部 11:塗膜 12:支持体 1: Flat plate 2: Adsorption stage 3: Dipstick 4: Cleaning member 5: Container 6: Paint discharge pipe 7: Paint supply pipe 8: Pump 9: Paint 10: Lip part 11: Coating film 12: Support

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 平板上に塗料を塗布する際に用いられる
カーテンフローコータの口金の清掃方法において、該口
金のリップ部を表面が高分子樹脂からなる清掃部材を用
いて清掃することを特徴とするカーテンフローコータの
口金の清掃方法。
1. A method for cleaning a die of a curtain flow coater used for applying a coating material on a flat plate, wherein a lip portion of the die is cleaned by using a cleaning member whose surface is made of a polymer resin. How to clean the base of the curtain flow coater.
【請求項2】 高分子樹脂がシリコーンゴムであること
を特徴とする請求項1記載のカーテンフローコータの口
金の清掃方法。
2. The method for cleaning a die of a curtain flow coater according to claim 1, wherein the polymer resin is silicone rubber.
【請求項3】 平板上にカーテンフローコータで塗料を
塗布する直前に該カーテンフローコータの口金のリップ
部を清掃することを特徴とする請求項1記載のカーテン
フローコータの清掃方法。
3. The method for cleaning a curtain flow coater according to claim 1, wherein the lip portion of the die of the curtain flow coater is cleaned immediately before the coating of the paint on the flat plate with the curtain flow coater.
【請求項4】 塗料がカラーフィルタ用塗膜形成用塗料
であることを特徴とする請求項1記載のカーテンフロー
コータの口金の清掃方法。
4. The method for cleaning a die of a curtain flow coater according to claim 1, wherein the paint is a paint for forming a coating film for a color filter.
【請求項5】 平板上にカラーフィルタ用塗膜形成用塗
料を塗布、乾燥する工程を含むカラーフィルタ用塗膜の
製造方法において、該塗料を塗布する直前に該カーテン
フローコータの口金のリップ部を表面が高分子樹脂から
なる清掃部材を用いて清掃することを特徴とするカラー
フィルタ用塗膜の製造方法。
5. A method for producing a color filter coating film, which comprises the steps of applying a coating material for forming a color filter coating film onto a flat plate and drying the coating material, and immediately before applying the coating material, the lip portion of the die of the curtain flow coater. A method for producing a coating film for a color filter, characterized in that the surface is cleaned using a cleaning member having a surface made of a polymer resin.
【請求項6】 高分子樹脂がシリコーンゴムであること
を特徴とする請求項5記載のカラーフィルタ用塗膜の製
造方法。
6. The method for producing a coating film for a color filter according to claim 5, wherein the polymer resin is silicone rubber.
JP31350593A 1993-12-14 1993-12-14 CLEANING METHOD FOR CURTAIN FLOW COATER AND METHOD FOR PRODUCING COATING FILM FOR COLOR FILTER Expired - Lifetime JP3306838B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31350593A JP3306838B2 (en) 1993-12-14 1993-12-14 CLEANING METHOD FOR CURTAIN FLOW COATER AND METHOD FOR PRODUCING COATING FILM FOR COLOR FILTER

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31350593A JP3306838B2 (en) 1993-12-14 1993-12-14 CLEANING METHOD FOR CURTAIN FLOW COATER AND METHOD FOR PRODUCING COATING FILM FOR COLOR FILTER

Publications (2)

Publication Number Publication Date
JPH07168015A true JPH07168015A (en) 1995-07-04
JP3306838B2 JP3306838B2 (en) 2002-07-24

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ID=18042122

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Country Link
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