JP2021063963A - Glass substrate - Google Patents

Abstract

To provide a glass substrate for color filter that is less likely to cause a resist to remain on front and rear surfaces and a side face in a peripheral edge part of a substrate.SOLUTION: A glass substrate is used for a display device color filter and is a glass substrate 1-1 that comprises a water-repellent layer 4 on peripheral edge parts 7, outside an effective area 3 on which a color filter 2 is formed, and a substrate side face 8 of a glass substrate 1. Preferably, the water-repellent layer contains one or more selected from a fluorine-based compound and a siloxane compound.SELECTED DRAWING: Figure 1

Description

The present invention relates to a glass substrate for a color filter used in a liquid crystal display device or the like.

Color filters are generally manufactured by mounting a plurality of color filters on a large glass substrate on multiple surfaces.
By repeating the photolithography process consisting of application of a photosensitive colored resist, exposure using a photomask, development process, drying, etc. using such a glass substrate, a black matrix and each colored pixel such as red, green, and blue are formed. By forming a photospacer, a multi-faceted color filter (hereinafter, also referred to as a color filter substrate) is manufactured.

After each processing step, the colored resist used for forming the black matrix and the colored pixels may remain on the peripheral edge portion and the side surface of the color filter substrate manufactured through such a series of processing steps.

If resist remains on the front and back surfaces of the peripheral edge of the multi-sided color filter substrate or on the side surface of the substrate after development, transfer failure may occur when the transfer roll in the photolithography process comes into contact with the peripheral edge of the color filter substrate. is there. In addition, vacuum leakage may occur due to the resist remaining when the substrate is vacuum-adsorbed to the stage in the exposure process, and it may take time to complete the vacuum adsorption, or in the worst case, the exposure process may not be possible due to poor adsorption. there were.

In order to eliminate such troubles, a method of removing the residual resist by lengthening the developing time has been considered. However, if an attempt is made to remove the resist remaining on the peripheral edge of the glass substrate by extending the developing time, there is a problem that the resist in the internal region of the effective screen is overdeveloped and a predetermined shape cannot be obtained.

Further, Patent Document 1 discloses a resist removing device that accurately removes excess resist remaining on the peripheral edge of a glass substrate. This device is a device that removes the remaining excess resist by moving along the peripheral edge of the glass substrate while discharging thinner that can be dissolved from the nozzle. However, although this device can remove the excess resist on the front surface of the peripheral edge of the glass substrate, the excess resist that wraps around the back surface of the peripheral edge and the excess resist on the side surface of the edge of the substrate are removed. Cannot be removed. When removing the excess resist on the back surface, the substrate must be turned inside out for processing. In addition, since a complicated mechanism and control device are required, it becomes an expensive dedicated device.

Further, Patent Document 2 discloses an end face treatment device for a glass substrate capable of reliably removing unnecessary substances generated by chamfering. This device is an end face processing device for a glass substrate provided with a chamfering device for chamfering the end face of the glass substrate. The edge of the glass substrate generated by polishing the upper surface and the side surface of the peripheral edge of the glass substrate is polished. The end face treatment device is provided with an unnecessary substance removing device for removing unnecessary substances adhering to the surface of the portion.
In this device, there is no description about the treatment of the back surface of the peripheral portion of the glass substrate, and it seems that the treatment is difficult.
Further, it is considered that the resist residue on the surface of the peripheral portion of the glass substrate and the side surface of the substrate can be removed by this apparatus, but it is necessary to remove fine particles of glass generated by polishing, and the process becomes long at the same time. Since a complicated mechanism and control device are required, it becomes an expensive dedicated device.

Therefore, there has been a long-awaited technology that does not generate resist residue on the front and back surfaces of the peripheral edge of the color filter substrate and the side surface of the substrate without using an expensive dedicated device.

Japanese Unexamined Patent Publication No. 2003-158066 Japanese Unexamined Patent Publication No. 2014-69248

In view of the above circumstances, it is an object of the present invention to provide a glass substrate for a color filter in which resist does not easily remain on the front and back surfaces and side surfaces of the peripheral edge of the substrate.

As a means for solving the above problems, the invention according to claim 1 of the present invention is a glass substrate used for a color filter for a display device.
It is a glass substrate characterized in that a water-repellent layer is provided on an outer peripheral edge portion of an effective area on which a color filter of the glass substrate is formed and a side surface of the substrate.

The invention according to claim 2 is the glass substrate according to claim 1, wherein the water-repellent layer contains any one or more selected from a fluorine-based compound and a siloxane compound.

The invention according to claim 3 is the glass substrate according to claim 1 or 2, wherein the thickness of the water-repellent layer is 100 μm or less.

According to the glass substrate of the present invention, since the water-repellent layer is provided on the outer peripheral edge portion of the effective area where the black matrix of the glass substrate is formed and the side surface of the substrate, the peripheral edge portion of the glass substrate and the side surface of the substrate are provided. Residual coloring resist is unlikely to occur.

It is explanatory drawing which illustrates the color filter substrate manufactured using the glass substrate of this invention, (a) is a top view, (b) is a sectional view. It is explanatory drawing which shows an example of the manufacturing method of the glass substrate of this invention, (a) is the front sectional view in the state which one side of the peripheral part of the glass substrate is immersed in the processing tank, (b) is the side surface of (a). The cross-sectional view (c) shows a state in which a water-repellent layer is formed on one side of the glass substrate in a state where the glass substrate is taken out from the processing tank. It is sectional drawing which shows the Example of the glass substrate of this invention.

FIG. 1A is an explanatory diagram illustrating a color filter substrate 10 for a display device using the glass substrate 1 of the present invention. The color filter substrate 10 is a glass substrate 1 provided with one or more color filters 2.
FIG. 1B is a cross-sectional view taken along the cutting line AA'of FIG. 1A.
FIG. 1C is a cross-sectional view of the glass substrate 1 of the present invention. As described above, the glass substrate 1 of the present invention has the water-repellent layer 4 formed on the peripheral edge portion (front and back surfaces) and the side surface thereof.

<Glass substrate>
The glass substrate 1 of the present invention will be described.
The glass substrate 1 of the present invention is a glass substrate used for a color filter for a display device.
The glass substrate 1 of the present invention has an effective area 3 in which the color filter 2 of the glass substrate 1 is formed.
A water-repellent layer 4 is provided on the outer peripheral edge portion 7 and the side surface 8 of the above.
The effective area 3 in which the color filter 2 is formed is an area in which the black matrix and the colored pixels are formed. Since the water-repellent layer 4 is formed on the front and back surfaces of the outer peripheral edge portion 7 of the effective area 3 and the side surface 8 of the glass substrate, the colored resist applied in the resist coating step of the photolithography step is the colored resist of the glass substrate 1. Even if it reaches the peripheral edge portion 7 and further reverses to the back surface of the peripheral edge portion 7 via the side surface 8, it is repelled by the water repellent layer 4. Therefore, the colored resist or the like does not remain on the water-repellent layer 4.

Further, in the glass substrate 1 of the present invention, it is preferable that the water-repellent layer 4 contains any one or more selected from a fluorine-based compound and a siloxane compound.

Further, in the glass substrate 1 of the present invention, the thickness of the water-repellent layer 4 is preferably 100 μm or less.

(Glass substrate material)
The material of the glass substrate 1 of the present invention is not particularly limited as long as it is a material conventionally used as a glass substrate for a display device. For example, non-alkali glass that has been conventionally used can be preferably used.

(Water repellent layer)
As the water-repellent layer 4 used in the glass substrate of the present invention, any material having good water repellency and resist resistance with good adhesion to the glass substrate 1 can be preferably used. The repellent property refers to the property of repelling a photosensitive colored resist for forming a black matrix or colored pixels, which are components of a color filter. A material that does not necessarily have good adhesion to the glass substrate may be used. In that case, it suffices if the glass substrate such as a silane coupling material has a good affinity with a material having good adhesion.

The water-repellent material for forming the water-repellent layer 4 may be any material such as a fluorine-based compound and a siloxane compound that can make the surface of the glass substrate 1 water-repellent. Any one or both of these may be included.

The fluoropolymer is not particularly limited, but for example, PTFE (polytetrafluoroethylene), FEP (fluoroethylene polypropylene copolymer), PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer), ETFE (ethylene / tetrafluoroethylene). Fluororesin such as copolymer), PCTFE (polychlorotrifluoroethylene), PVDF (polyfluorovinylidene), E-CTFE (ethylene trifluoride-ethylene copolymer) and the like can be preferably used.

Specific fluorine-based water-repellent materials include perfluorosulfonic acid resins, solvent-soluble fluororesins (central) that have been imparted with carboxyl groups or hydroxyl groups, or have been grafted to impart solubility in organic solvents. Glass Co., Ltd. "Cefral Coat A101E", "Cefral Coat A202B", "Cefral Coat A402B", "Cefral Coat A610X", "Cefral Coat A670X", "Cefral Coat A680XS", "Cefral Coat WS250" (water-based), "Cefral Coat FG700X" ), Solvent-soluble fluororesin such as "Lumiflon LF100", "Lumiflon LF200", "Lumiflon LF302", "Lumiflon LF400", "Lumiflon LF554", "Lumiflon LF600", manufactured by Asahi Glass Co., Ltd. Can be mentioned.

<Method of forming a water-repellent layer on a glass substrate>
The method for producing the glass substrate 1 of the present invention, specifically, the method for forming the water-repellent layer 4 on the glass substrate 1 does not need to be particularly limited.

For example, it can be easily formed by a partial dipping method as illustrated in FIG.

2 (a) and 2 (b) are explanatory cross-sectional views illustrating a state in which one side of the glass substrate 1 is immersed in the treatment tank 5 containing the treatment liquid 6. FIG. 2A is a front sectional view, and FIG. 2B is a side sectional view. By repeating the process of sequentially immersing the four sides of the glass substrate 1 in the treatment tank 5 and drying the glass substrate 1 in this way, the glass substrate 1 in which the water-repellent layer 4 is formed on all the peripheral edges 7 of the glass substrate 1 is formed. It can be obtained (Fig. 2 (c)).

It is also possible to form the water-repellent layer 4 by masking the portion that does not form the water-repellent layer 4 and then forming the water-repellent layer 4 only in the unmasked openings.

In addition to the method for forming the water-repellent layer 4 by the so-called wet process as described above, a method for forming the water-repellent layer 4 by a dry process may be adopted. For example, it is possible to form a fluorinated resin thin film by using plasma CVD (Chemical Vapor Deposition) for a fluorinated gas. It is also possible to vacuum-deposit using a water-repellent material that can be vacuum-deposited.

Next, examples of the present invention will be described with reference to FIG.

<Example 1>
First, as the glass substrate 1, non-alkali glass manufactured by Nippon Electric Glass Co., Ltd., OA-10G (thickness 0.7 mm) was prepared (FIG. 3 (a)).

Next, a mask pattern 9 is formed on the portion of the glass substrate 1 excluding the peripheral edge 7 and the side surface 8 by using the Sunfort series (manufactured by Asahi Kasei Corporation), which is a dry film type negative photosensitive resist. , The front and back surfaces of the glass substrate were masked (FIG. 3 (b)). In the present invention, a dry film type resist is used as the negative photosensitive resist, but a liquid resist type resist may be applied by a coating method such as roll coating or screen printing, and appropriately dried and cured for masking.

Next, the size of the glass substrate 1 containing the same fluorine-based water-repellent material Cefral Coat (registered trademark of Central Glass Co., Ltd.) A101E as illustrated in FIGS. 2 (a) and 2 (b). A water-repellent layer 4 was formed on the peripheral edge 7 and the side surface 8 of the glass substrate 1 by sequentially immersing all the peripheral edges 7 of the glass substrate 1 in the combined treatment tank 5 and then drying at room temperature for 1 hour. (Fig. 3 (c)).

Finally, the mask pattern 9 was peeled off using a stripping solution of a negative resist to obtain the glass substrate 1-1 of the present invention (FIG. 3 (d)).

As a result of carrying out the black matrix forming step using the glass substrate 1-1 thus produced, the black photosensitive resin forming the black matrix is formed on the peripheral portion 7 and the side surface 8 of the glass substrate 1-1. No residue was found.

<Comparative example 1>
The black matrix forming step was carried out without forming the water repellent layer 4 on the glass substrate 1. As a result, residual black photosensitive resin forming a black matrix was observed on the peripheral edge 7 and the side surface 8 of the glass substrate 1.

1, 1-1 ... Glass substrate 2 ... Color filter 3 ... Effective area 4 ... Water repellent layer 5 ... Treatment tank 6 ... Treatment liquid 7 ... Peripheral part 8 ...・ Side surface 9 ・ ・ ・ Mask pattern 10 ・ ・ ・ Color filter substrate

Claims (3)

A glass substrate used for color filters for display devices.
A glass substrate characterized in that a water-repellent layer is provided on an outer peripheral edge portion of an effective area on which a color filter of the glass substrate is formed and a side surface of the substrate. The glass substrate according to claim 1, wherein the water-repellent layer contains any one or more selected from a fluorine-based compound and a siloxane compound. The glass substrate according to claim 1 or 2, wherein the thickness of the water-repellent layer is 100 μm or less.

Images