JPH0995762A - Jig for sputtering - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the flawing and fine cracking to the peripheral parts of color filters by providing a mask with apertures and forming a coating layer of a fluororesin. SOLUTION: This jig for sputtering is composed of the mask 5 formed with the apertures 7 and a mask holder 1. Many magnets 2 are embedded into the mask holder 1. The coating layer 6 consisting of the fluororesin is formed on the surface of the mask 5 facing a glass substrate 3. The mask 5 is pressed via the coating layer 5 to the glass substrate 3. Color patterns 4 are formed on the glass substrate 3. The apertures 7 are so formed at the mask 5 as to face these color patterns 4. As a result, the flawing and fine cracking to the peripheral parts of the color filters are prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sputtering jig used for manufacturing a color filter for a liquid crystal display device or the like and for forming a transparent electrode film having a predetermined shape on the color filter.

[0002]

2. Description of the Related Art First, an example of a method of manufacturing a color filter will be described with reference to FIG. The black light shielding layer 8 having a predetermined shape is formed on the glass substrate 3 by using a vacuum film forming method, a photolithography method or the like (A). Next, a first color, for example, a red color layer forming photosensitive material is applied from above the black light shielding layer 8, a photomask is arranged and exposed, and then development is performed to form a red color layer 9 (B). For the second and subsequent colors, for example, a green and blue colored layer forming photosensitive material is applied, a photomask is arranged and exposed, and then development is performed to form green and blue colored layers 10 and 11 (C, D). Next, a transparent overcoat layer 12 is formed on the color coloring layer for the purpose of physicochemical protection, surface leveling, and flattening (E). Further, the transparent electrode layer 13 is formed on the overcoat layer 12 to manufacture a color filter (F).

There are various methods of forming the transparent electrode layer 13 in the above steps, such as vapor deposition, ion plating, and sputtering. The overcoat layer 12 serving as the base of the transparent electrode of the color filter is made of synthetic resin. Therefore, the sputtering method is widely used because it can form a film at a relatively low temperature in terms of heat resistance of the overcoat layer 12.

In an automated line, a glass substrate and a mask are fixed at predetermined positions in a jig, and several tens of jigs are housed in a sputtering apparatus to perform sputtering. In the conventional sputtering jig, a glass substrate is appropriately positioned on a mask having an opening, and a mask holder having a large number of magnets inside is placed to integrate the mask / glass substrate / mask holder. Objects are mechanically fixed by means of fastening springs, screws or the like.

However, in the above-mentioned sputtering jig, the mask made of a ferromagnetic material is attracted by the magnet of the mask holder to firmly adhere the mask to the glass substrate, and the inside of the sputtering apparatus is heated to a high temperature of about 200.degree. Therefore, due to the difference in the coefficient of thermal expansion between the mask and the glass substrate, there is a gap between the mask and the glass substrate, which causes scratches on the surface of the overcoat layer in the periphery of the color pattern on the transparent substrate, resulting in fine cracks. Had.

In the liquid crystal display device, if the peripheral portion of the color pattern on the glass substrate 3 is scratched, the gap between the color filter and the counter substrate (generally about 5 μm) cannot be accurately produced by the spacer, resulting in a defective product. There was a problem.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to provide a sputtering jig which can prevent scratches and fine cracks in the peripheral portion of a color filter.

[0008]

Means for Solving the Problems As a result of intensive studies to solve such a problem, the inventors of the present invention prevent damage to the peripheral portion of the color filter by coating the mask with a specific resin. The inventors have found that it is possible to achieve the present invention. That is, the present invention comprises a mask having an opening formed therein and a mask holder having a large number of magnets provided therein, and a glass for forming a color pattern between the mask and the mask holder. A sputtering jig for fixing a substrate to the mask, the mask having openings corresponding to color patterns to be formed on the glass substrate, and the glass substrate. And a coating layer made of a fluororesin on the surface facing to the sputtering jig. Hereinafter, the present invention will be described in detail.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A detailed description will be given with reference to the drawings. 1 and 2 show one embodiment of a sputtering jig of the present invention, FIG. 1 is a perspective view, and FIG. 2 is a partially enlarged sectional view showing a state where a glass substrate is set in the jig of FIG. is there. In FIG. 1, the sputtering jig of the present invention comprises a mask 5 having an opening 7 and a mask holder 1, and a large number of magnets 2 are embedded in the mask holder 1. The magnet 2 is preferably a ferromagnetic material having excellent heat resistance that can withstand a high temperature of about 200 ° C., and specific examples thereof include Nd-B (neodymium boron) -based magnets and Sm-Co (samarium cobalt) -based magnets. .

A coating layer 6 made of fluororesin is formed on the surface of the mask 5 facing the glass substrate 3, and the mask 5 is formed.
Is brought into contact with the glass substrate 3 through the coating layer 6. The reason why the fluororesin is adopted is that it is a heat-resistant material that can withstand a high temperature of about 200 ° C., and does not generate gas, so it does not adversely affect the color pattern. As the fluororesin, tetrafluoroethylene
Perfluoroalkyl vinyl ether copolymer (hereinafter,
Sometimes called PFA. ), Polytetrafluoroethylene (hereinafter sometimes referred to as PTFE), tetrafluoroethylene / hexafluoropropylene copolymer (hereinafter sometimes referred to as FEP), and the like. A heat resistant resin or a filler may be added to the fluororesin within a range not impairing the object of the present invention.

The fluororesin coating method is as follows:
Coating method using dispersion type paint, namely spray coating method, electrostatic coating method, airless spray coating method, electrodeposition coating method, etc. and coating method using powder coating material, ie spraying method, electrostatic spraying method, flow An immersion method, an electrostatic fluidized immersion method and the like can be mentioned. In a coating method using a dispersion type coating, coating is generally performed through steps such as degreasing, surface treatment, primer coating, drying, primer firing, top coating, drying, firing, and cooling. If oil adheres to the substrate, the fluororesin film may be easily peeled off or coating may be uneven. Therefore, it is preferable to first perform a degreasing treatment by solvent degreasing or baking. Next, the surface treatment step is to roughen the surface of the base material in order to enhance the adhesion of the film. For roughening, there are methods such as sandblasting, liquid honing, and chemical etching. The primer is a dispersion of a fluororesin, to which specific components are added in order to increase the adhesion to the substrate. When the primer is completely baked, the topcoat is applied. If the topcoat is thickly applied at one time, cracks occur. Therefore, it is preferable to repeat the coating, drying, and baking until the desired film thickness is achieved.
Generally, it is possible to coat PTFE with a layer thickness of 20 μm or less, and a maximum layer thickness of about 40 μm with one coating. F
EP is somewhat thicker than that, and can be coated up to a layer thickness of about 50 μm. On the other hand, the coating method using the powder coating material has great economic merit because the coating material can be collected. Generally, coating is performed through steps such as degreasing, surface treatment, primer coating, drying, primer firing, preheating, powder coating, firing and cooling. Generally, the coating method using powder can be applied thicker at one time than the coating method of dispersion type paint,
Layer thicknesses up to around 00 μm are possible. Specifically, the layer thickness of the coating layer is preferably 10 to 200.
μm, and more preferably 20 to 100 μm. If the layer thickness is less than 10 μm, the effect of the present invention is not sufficient,
If it exceeds m, the cost increases, which is not preferable.

The glass substrate 3 is appropriately positioned and fixed between the mask 5 and the mask holder 1. The glass substrate 3 is
The color pattern 4 is to be formed. That is, the color pattern 4 is formed on the glass substrate 3, or the color pattern 4 is formed. Normally, the color pattern 4 is formed on the glass substrate 3, but the sputtering jig of the present invention is preferably used even when the glass substrate 3 is before the color pattern 4 is formed. You can Mask 5
An opening 7 is formed in the so as to face the color pattern 4. The numbers of the color patterns 4 and the openings 7 are arbitrary.

As shown in FIG. 2, when the glass substrate 3 is set between the mask holder 1 and the mask 5, the mask 5 is attracted by a large number of magnets 2 in the mask holder 1, and the glass substrate 3 is held by the mask holder 1 and the mask holder 1. The masks 5 are fixed with a uniform force. At this time, the coating layer 6
This prevents the outer circumference of the color pattern 4 on the glass substrate 3 from being scratched. Then, the opening 7 of the mask 5
Sputtering is performed from the side to form a transparent electrode layer on the surface of the color pattern 4.

That is, in the present invention, when the glass substrate is set in the sputtering jig consisting of the mask and the mask holder, the mask is attracted by the many magnets in the mask holder, and the glass substrate is separated from the mask and the mask holder. Fixed with a uniform force between. At this time, since the coating layer made of fluororesin is formed on the surface of the mask facing the glass substrate, it is possible to prevent the outer periphery of the color pattern of the glass substrate from being scratched.

[0015]

The present invention will be described below with reference to examples.
The present invention is not limited to this. A specific example will be described with reference to the drawings. [Measuring method of the number of crack defects on the overcoat layer surface of the color filter] The substrate after the mask sputtering is washed, and a glass substrate surface inspection device (manufactured by Hitachi Electronics Engineering Co.
GI-4600S) measures defects (cracking defects, deposits, etc.) on the substrate surface. After that, based on the coordinate values of the defects output by the glass substrate surface inspection apparatus, each defect is observed by an optical microscope, the number of cracking defects is counted, and the number of cracking defects per mask unit area is measured. It was evaluated as scratches and fine cracks. According to the size of the cracking defect, the cracking defect of 10 μm or more and less than 20 μm was distinguished as M, and the cracking defect of 20 μm or more was distinguished as L.

Example 1 The sputtering jig shown in FIG. 1 was used. The sputtering jig comprises a mask 5 having an opening 7 and a mask holder 1, and a large number of magnets 2 are embedded in the mask holder 1. The glass substrate 3 was positioned and fixed between the mask 5 and the mask holder 1. Color patterns 4 are formed on the glass substrate 3, and openings 7 are formed on the mask 5 so as to correspond to the color patterns 4.

A coating layer 6 of fluororesin PFA having a layer thickness of 50 μm was formed on the surface of the mask 5 facing the glass substrate 3, and the mask 5 was brought into contact with the glass substrate 3 through the coating layer 6. After forming the transparent electrode layer, the number of crack defects on the surface of the overcoat layer of the glass substrate was measured. The results obtained are shown in Table 1.

Comparative Example 1 A glass substrate was sandwiched between jigs for sputtering to form a transparent electrode layer in the same manner as in Example 1 except that a layer made of fluororesin PFA was not provided. Then, the surface of the overcoat layer of the glass substrate was formed. The number of crack defects was measured. The results obtained are shown in Table 1.

[0019]

[Table 1] It can be seen from Table 1 that the cracking defect M and the cracking defect L could be reduced to 1/10 or less by using the sputtering jig of the present invention.

[0020]

According to the present invention, by forming a coating layer made of a fluororesin on the surface of the mask, it is possible to prevent scratches and fine cracks in the peripheral portion of the color filter, which has industrial value. large.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a sputtering jig of the present invention.

FIG. 2 is a partially enlarged sectional view showing an embodiment of a sputtering jig of the present invention.

FIG. 3 is an enlarged sectional view for explaining a manufacturing process of a color filter.

[Explanation of symbols]

 1 ... Mask holder 2 ... Magnet 3 ... Glass substrate 4 ... Color pattern 5 ... Mask 6 ... Coating layer 7 ... Opening portion 8 ... Black light-shielding layer 9 .... -Red colored layer 10 ... Green colored layer 11 ... Blue colored layer 12 ... Overcoat layer 13 ... Transparent electrode layer

Claims (1)

[Claims] 1. A glass substrate comprising a mask having an opening and a mask holder having a large number of magnets provided therein, and a color pattern is formed between the mask and the mask holder. A jig for sputtering which is fixed to the mask, wherein the mask has an opening corresponding to a color pattern to be formed on the glass substrate, and the glass substrate A sputter jig having a coating layer made of a fluororesin on the surface facing to.