JP2001252603A - Cleaning method and cleaning device for coating head and manufacturing method and manufacturing device for color filter using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning method and cleaning device for a coating head, which is capable of performing high quality film forming with high productivity by enabling to clean the peripheral part of a slit die without the wear of a cleaning tool and the slit die or the adverse effect on a coated material due to the deterioration of a coating liquid and a manufacturing method and manufacturing device for a color filter using the cleaning method and cleaning device. SOLUTION: In the method and device of the coating head for cleaning the periphery of the discharge port of the coating head for discharging the coating liquid from the discharge port, a sticking material stuck to the periphery of the discharge port of the coating head is stripped by the collision with a gas and the stripped sticking material and the gas are recovered and the manufacturing method and device for the color filter uses the above cleaning method and device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to, for example, the field of manufacturing color filters for color liquid crystal displays, optical filters, printed boards, integrated circuits, semiconductors, and the like. The present invention relates to a method and apparatus for cleaning a coating head for forming a coating film while discharging a coating liquid onto a surface, and a method and apparatus for manufacturing a color filter using the method and apparatus.

[0002]

2. Description of the Related Art A color filter for a color liquid crystal display has a fine lattice pattern of three primary colors on a glass substrate. Such a lattice pattern is formed by first forming a black coating film on a glass substrate. Thereafter, it is obtained by forming red, blue and green coating films.

[0003] Therefore, in order to manufacture a color filter, a coating step of applying black, red, blue, and green coating liquids on a glass substrate and sequentially forming a coating film with these coating liquids is indispensable. Becomes In this type of coating process, a spinner, a bar coater, a roll coater, or the like has been used as a conventional coating device, but recently, in order to reduce the consumption of the coating liquid and to improve the physical properties of the coating film, Are using die coaters.

An example of this type of die coater is disclosed in, for example, Japanese Patent Application Laid-Open No. Hei 6-339655. This known die coater has a slit die as a coating head, and forms a coating film on a member to be coated such as a substrate traveling in one direction while discharging a coating liquid from a discharge port of the slit die. ing.

In order to repeatedly and stably apply a material such as a substrate with a die coater, the adhering material such as a coating solution remaining around the discharge port is removed before each application to clean the substrate. It is necessary to do. By cleaning the periphery of the discharge port before the application, the application can always be started in the same state, so that the application thickness distribution at the application start portion can always be kept constant. Further, unnecessary foreign matters are also removed from the periphery of the discharge port, so that coating defects caused by these foreign matters, such as dropping of foreign matters on the coating film and occurrence of streak-like defects due to contact with foreign matters immediately after coating, can be prevented. Can be prevented.

[0006] As means for cleaning the periphery of the discharge port, which is indispensable when applying a sheet material such as a substrate using a die coater, three types of cleaning means have been proposed.

The first type is disclosed in Japanese Patent Application Laid-Open No. 7-168015.
And a cleaning tool that is made of a chemical-resistant polymer material and conforms to the shape of the tip of a slit die including a discharge port. By sliding in the longitudinal direction, excess coating liquid or the like adhering to the periphery of the discharge port is eliminated.

The second type wipes the periphery of the discharge port with a dust-free cloth moistened with a solvent as described in Japanese Patent Application Laid-Open No. 7-80386.

The third type is disclosed in Japanese Unexamined Patent Publication No. 7-803.
No. 86, JP-A-10-308338, JP-A-11-7
As described in Japanese Patent Publication No. 4179 or the like, excess extraneous matter near the discharge port is washed away with a dedicated cleaning liquid made of a solvent or the like, and then dried with a drying gas or the like.

[0010]

The above three types of conventional means have the following problems. First, in the first type of means, when the cleaning tool is slid into contact with the slit die, if the cleaning tool is cleaned for a long time, the cleaning tool wears and the cleaning effect is reduced. There is a problem that the product is mixed with the coating film to deteriorate the quality.

Also, in the second type of means, since the dust-free cloth is brought into contact with the slit die to wipe off the adhered substances, the dust-free cloth is worn out and particles are generated, and the quality of the coated material is similarly deteriorated. Would.

Furthermore, in the third type of means, since a solvent or the like is sprayed near the discharge port, no trouble due to abrasion occurs, but the cleaning effect is slightly inferior due to a small force for removing the attached matter. When the solvent comes into contact with the coating liquid at the outlet of the discharge port, the coating liquid is degraded (solvent shock), which causes coating defects such as aggregation of pigments, thereby deteriorating the quality of the coated material.

The present invention has been made based on the above-mentioned circumstances, and an object of the present invention is to provide a discharge port of a slit die without abrasion of a cleaning tool and a slit die, or a bad influence on a coating material due to deterioration of a coating solution. A cleaning method and a cleaning apparatus for a coating head, which realizes cleaning of a peripheral portion and thereby can form a high-quality coating film with high productivity, and a color filter using the cleaning method and the cleaning apparatus. A manufacturing method and a manufacturing apparatus are provided.

[0014]

The object of the present invention is achieved by the following means. The method for cleaning a coating head according to claim 1 is a method for cleaning the vicinity of a discharge port of a coating head that discharges a coating liquid from a discharge port. The method is characterized in that the kimono is separated by collision with a gas, and the separated gas and the gas are recovered.

Here, after the adhered substance is peeled off, a solvent for dissolving the coating liquid is brought into contact with the periphery of the discharge port of the coating head, and the remaining adhered substance and the solvent are removed by collision with gas. Collecting the removed deposits and the solvent and the gas, the collision position between the deposits and the gas is moved in the longitudinal direction of the coating head, the contact position of the solvent with the coating head, and remaining It is desirable to move the collision position of the deposit and the solvent with the gas in the longitudinal direction of the coating head.

According to a sixth aspect of the present invention, there is provided a method for cleaning a coating head.
A method for cleaning the periphery of a discharge port of a coating head that discharges a coating liquid from a discharge port, in which a solvent that dissolves the coating liquid is brought into contact with a substance attached to the periphery of the discharge port of the coating head. Thereafter, the method is characterized in that the deposits and the solvent remaining around the discharge port of the coating head are removed by collision with the gas, and the removed deposits, the solvent and the gas are recovered.

Here, the collision position between the solvent and the attached matter,
In addition, it is desirable to move the collision position between the gas and the deposits and the solvent remaining around the discharge port of the coating head in the longitudinal direction of the coating head.

In the method of manufacturing a color filter according to claim 8, since the color filter is manufactured by using the above-described method of cleaning the coating head, a high quality color filter can be manufactured.

According to a ninth aspect of the present invention, there is provided an apparatus for cleaning a coating head.
A cleaning device for a coating head for cleaning a peripheral portion of a coating head for discharging a coating liquid from a discharging port,
The apparatus is characterized in that it comprises a gas discharging means for peeling off the deposits adhering around the discharge port of the coating head, and a collecting means for collecting the peeled off deposits and the gas.

Here, the gas discharging means and the collecting means are:
It is movable in the longitudinal direction of the coating head, and a solvent discharging means for bringing a solvent for dissolving the coating liquid into contact with the vicinity of the discharge port of the coating head; and removing remaining deposits and the solvent by collision with gas. And a solvent gas discharging means and the second gas discharging means are movable in the longitudinal direction of the coating head, and further remove the adhered substance, the solvent and the gas. It is preferable to have a solvent / gas recovery unit for recovery, and that the solvent / gas recovery unit be movable in the longitudinal direction of the coating head.

According to a fifteenth aspect of the present invention, there is provided a cleaning apparatus for cleaning a coating head for cleaning a peripheral portion of a coating head for discharging a coating liquid from a discharge port, wherein the coating liquid is dissolved. Solvent discharging means for bringing the solvent into contact with the attached matter around the discharge port of the coating head,
Gas ejecting means for removing adhering matter and solvent remaining around the discharge port of the coating head after collision with the adhering matter by collision with gas; and collecting means for collecting the removed adhering matter, solvent and the gas. It is characterized by having. Here, it is desirable that all means can be moved in the longitudinal direction of the coating head.

In the apparatus for manufacturing a color filter according to the seventeenth aspect, since the color filter is manufactured by using the above-described apparatus for cleaning a coating head, a high quality color filter can be manufactured.

According to the method for cleaning a coating head according to the first and sixth aspects and the cleaning apparatus for a coating head according to the ninth and fifteenth aspects, the cleaning tool does not come into contact with the periphery of the discharge port of the slit die without contact. The peripheral portion of the discharge port can be cleaned by the contact, and the deterioration of the coating liquid due to the contact between the coating liquid and the solvent at the exit of the slit die discharge port can be prevented by minimizing the contact time between the two.

[0024]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an overall schematic perspective view of a cleaning apparatus according to the present invention, FIG. 2 is a configuration diagram around a stage 6 and a slit die 40 in FIG. 1, and FIG. 3 is a front sectional view showing an embodiment of the cleaning apparatus according to the present invention. FIG. 4, FIG.
5 is a side sectional view of each part of FIG.

FIG. 1 shows a coating apparatus used for manufacturing a color filter for a color liquid crystal display according to the present invention.
That is, a so-called die coater 1 is shown. The die coater 1 has a base 2. A pair of guide groove rails 4 are provided on the base 2, and a stage 6 as a holding body is disposed on the guide groove rails 4 via a pair of slide legs 9. The upper surface 10 of the stage 6 is long in the running direction, and is configured as a suction surface to which the substrate A as a member to be coated can be fixed by vacuum suction. The stage 6 is reciprocally movable in the horizontal direction on the guide groove rail 4.

Between the pair of guide groove rails 4, feed screw mechanisms 14, 16, and 18 and a casing 12 containing the same are arranged, as shown in FIG. Extending in the direction. The feed screw mechanism has a feed screw 14 composed of a ball screw as shown in FIG. 2, and the feed screw 14 is screwed into a nut-shaped connector 16 fixed to the lower surface of the stage 6. The connector 16 extends through the connector 16 and both ends thereof are rotatably supported by bearings (not shown).
Are connected. In addition, although the opening which allows the movement of the connector 16 is formed in the upper surface of the casing 12,
In FIG. 1, the opening is omitted.

As shown in FIG. 1, on the upper surface of the base 2, an inverted L-shaped die support 24 is disposed substantially at the center thereof. The tip of the die post 24 is positioned above the reciprocating path of the stage 6, and the lifting mechanism 26 is attached to the tip. The elevating mechanism 26 includes an elevating bracket (not shown) that can be moved up and down. The elevating bracket is attached to a pair of guide rods in a casing 28 so as to be able to move up and down. Also, the casing 28
A feed screw (not shown) composed of a ball screw is also rotatably disposed between the guide lots, and a lifting bracket is connected to the feed screw via a nut-type connector. An AC servomotor 30 is connected to the upper end of the feed screw.
It is attached to the upper surface of.

A support shaft (not shown) is mounted on the lifting bracket.
A die holder 32 is attached via a pair of guide rails 32. The die holder 32 has a U-shape and extends horizontally above the pair of guide groove rails 4 therebetween. Since the die holder 32 is rotatably supported in the lifting bracket by the support shaft, it is rotatable in a vertical plane.

A horizontal bar 36 is also fixed to the lifting bracket. The horizontal bar 36 is located above the die holder 32 and extends along the die holder 32. At both ends of the horizontal bar 36, electromagnetically actuated linear actuators 38 are respectively attached. These linear actuators 38 have telescopic rods projecting from the lower surface of the horizontal bar 36, and the lower ends of the telescopic rods are respectively in contact with both ends of the die holder 32.

A slit die 40 as a coating head is held in the die holder 32. As is apparent from FIG. 1, the slit die 40 is in a direction orthogonal to the reciprocating direction of the stage 6, that is, the longitudinal direction of the die holder 32. And supported at both ends by a die holder 32.

As shown in FIG. 2, a supply hose 42 for the coating liquid extends from the slit die 40. The tip of the supply hose 42 is connected to a supply port of an electromagnetic switching valve 46 in a syringe pump 44. It is connected. A suction hose 48 extends from a suction port of the electromagnetic switching valve 46, and the tip of the suction hose 48 is inserted into a tank 50 storing a coating liquid 70.

The application liquid in the syringe 80 of the syringe pump 44 can be selectively connected to one of the supply hose 42 and the suction hose 48 by the switching operation of the electromagnetic switching valve 46. The piston 52 is reciprocally movable up and down by a drive source (not shown), and in combination with the electromagnetic switching valve 46, supplies the coating liquid in the syringe 80 to the slit die 40 or Can be filled in the syringe 80. Driving sources (not shown) of the electromagnetic switching valve 46 and the piston 52 are electrically connected to a computer 54, and the operation thereof is controlled in response to a control signal from the computer 54.

Further, a sequencer 56 is also electrically connected to the computer 54 to control the operation of the syringe pump 44. The sequencer 56 includes an AC servomotor 18 for driving the feed screw 14 on the stage 6 side and an AC servomotor 3 for the lift mechanism 26.
0, and controls the operation of the linear actuator 38 in a sequence.
The sequencer 56 receives a signal indicating an operation state of the AC servomotors 18 and 30, a signal from a position sensor 58 for detecting a moving position of the stage 6, and a sensor (not shown) for detecting an operation state of the slit die 40. A signal or the like is input. On the other hand, the sequencer 56
, A signal indicating the sequence operation is output to the computer 54.

Next, as schematically shown in FIG.
The slit die 40 has a front lip 59 and a rear lip 60 which are long blocks in the direction orthogonal to the reciprocating direction of the stage 6, that is, in the width direction. The lips 59 and 60 face each other in the reciprocating direction of the stage 6, and are integrally connected to each other by a plurality of connecting bolts (not shown). Due to the combination of the two lips 59 and 60, the lower portion of the slit die 40 has a sloped surface 66 and 68 to form a tapered shape, and the lowermost surface is formed as a coating liquid discharge portion.

A manifold 62 is formed in the slit die 40 at a central portion thereof, and the manifold 62 extends horizontally in the width direction of the slit die 40. The manifold 62 is always connected to the above-described coating liquid supply hose 42 via an internal passage (not shown), so that the manifold 62 can receive the supply of the coating liquid.

A slit 64 whose upper end communicates with the manifold 62 is formed inside the slit die 40, and the lower end of the slit 64 opens at the lower surface 74 of the slit die 40. 72. The slit 64 is the front lip 59
The rear lip 60 is secured by a shim (not shown) sandwiched between the rear lip 60 and the rear lip 60.

Referring to FIG. 1 again, a sensor column 20 is disposed on the upper surface of the base 2 at a position closer to the near side than the die column 24. This sensor support 20 is also the die support 2 described above.
4, a thickness sensor 22 is held via a bracket 21 so that its tip is positioned above the reciprocating path of the stage 6.

When the substrate A is mounted on the stage 6, the thickness sensor 22 optically detects the thickness of the substrate A, and outputs a detection signal corresponding to the thickness to the computer 54. A sensor 7 for measuring the distance between the suction surface of the stage and the lower surface 74 of the slit die 40 is provided at the tip of the stage 6.
6 are provided on the left and right.

Still referring to FIG. 1, the sensor support 20
The cleaning device 100 is mounted on the base 2 between the
Is provided. The main body 102 of the cleaning apparatus 100 extends in the longitudinal direction (width direction) of the slit die 40, that is, in the direction orthogonal to the reciprocating direction of the stage 6. A rectangular carrier 106 is slidably attached to the main body 102 with the guide port 110 as a linear guide. Further, the lower portion of the carrier 106 is penetrated by a ball screw (not shown). The ball screw extends in the sliding direction of the carrier 106, and one end thereof is connected to the output shaft of the electric motor 104.

Further, a flat plate bar 112 is attached to the carrier 106 via four lifting guides 108. A drive source such as an air cylinder (not shown) is connected to the flat bar 112 and can move freely in the up-down direction. Further, a cleaning unit 120 is attached to the tip of the flat bar 112 so as to provide a certain clearance with the slit die 40. The cleaning unit 120 is moved in the longitudinal direction of the slit die 40 by the operation of the carrier 106 and the lower surface 74 of the slit die 40 is moved.
Can be opposed over the entire length. The operation of the cleaning unit 120 is controlled by the sequencer 56 shown in FIG.

One example of an embodiment of the cleaning unit 120 is the cleaning unit A130 shown in FIGS. The cleaning unit A130 includes a solvent discharge / collection unit 140 and an air injection / collection unit 160.

The solvent discharge / recovery unit 140 has a pair of solvent nozzles 142A, 142B whose discharge ports are directed horizontally to the inclined surfaces 66, 68 of the slit die 40.
The solvent 152 discharged from the solvent nozzles 142A and 142B has the coating liquid 150 adhering to the lower surface 74 of the slit die 40.
And a recovery box 144 for recovering the falling object 154 by colliding with the liquid. The coating liquid / solvent recovery box 144 is connected to a suction source (not shown) through a connection port 146.
The falling object 154 can be collected without sending the falling object 154 to the outside by setting the inside 156 of the container 4 to a negative pressure. Solvent nozzle 1
42A and 42B are also connected to a solvent supply source (not shown).

The air injection / collection unit 160
This also has a pair of air nozzles 162A, B whose air discharge ports are directed horizontally to the inclined surfaces 66, 68 of the slit die 40, and the air 174 injected from the air nozzles 162A, B is formed by the slit die 40. Lower surface 7
A liquid recovery box 165 for recovering a liquid falling object 178 generated by colliding with the liquid adhering substance 176 adhering to the liquid container 4;
Air collection box 16 for collecting air 174
4. The liquid recovery box 165 and the air recovery box 164 have connection ports 172 and 170, respectively, and are connected to separate suction sources (not shown), respectively.
The inside 166 of the liquid recovery box 165 and the inside 168 of the air recovery box 164 are set to a negative pressure, and
8, and the air 174 can be reliably collected without leaking to the outside. The air nozzles 162A and 162B are also connected to an air supply source (not shown).

The cleaning method using the cleaning unit A130 is performed as follows. First, the electric motor 104 of the cleaning device 100 is driven to move the flat plate bar 112, and the cleaning unit A13 placed on the flat bar 112
0 is moved to the longitudinal end of the slit die 40 (either side) and stopped. Subsequently, a suction source (not shown) is started to make the inside 156 of the coating liquid / solvent recovery box 144 negative pressure, and the solvent nozzles 142A, 142B
, The cleaning unit A130 is moved toward the opposite end of the slit die 40, and the coating liquid 150 attached to the lower surface 74 and the inclined surfaces 66 and 68 of the slit die 40, and others. And is collected together with the solvent in the coating solution / solvent collection box 144 (solvent washing step).

When the opposite end of the slit die 40 is reached, the operation is stopped, and the discharge of the solvent from the solvent nozzles 142A and 142B is also stopped. Subsequently, while injecting air from the air nozzles 162A and 162B, another suction source (not shown) is started to perform suction from the connection ports 172 and 170, and the inside 168 of the air collection box 164 and the liquid collection box 1
A negative pressure is applied to the inside 168 of the tube 65. In this state, the cleaning unit A130 is moved to the first end of the slit die 40, and the lower surface 74 and the slope 66 of the slit die 40,
68, the liquid adhering substance 176 such as a solvent remaining in the liquid collecting box
5 and from the air recovery box 164 (residual solvent recovery step). At this time, if the air is directly sprayed onto the remaining solvent or the like, the solvent or the like is sprayed and adheres again to the lower surface 74 and the like of the slit die 40. It is important to inject air onto the surface to create an air flow that flows in the longitudinal direction of the slit die 40, and to adjust the positions of the air nozzles 162A and 162B so as to blow off the solvent and the like.

Further, by shortening the time from the solvent cleaning step to the residual solvent recovery step, the contact time of the solvent with the coating liquid at the outlet of the discharge port 72 of the slit die 40 is shortened, and It is preferable not to give time margin.

The solvent used in each of the above steps is preferably a solvent constituting the coating solution. This is because even if the coating solution is dried and becomes a solid film and adheres to the vicinity of the discharge port of the slit die 40, it can be washed away by the dissolving action.

Also, in the above, a solvent washing step,
Although the example in which the residual solvent recovery step is performed once each time is shown, the residual solvent recovery step may be performed a plurality of times until it can be completely cleaned, the two steps may be performed alternately, or the same step may be continuously repeated many times. .

Next, a coating method using the above-described coating head cleaning method will be described. First, when the return of the origin of each operation unit in the coating apparatus is performed, the stage 6 and the slit die 40 move to the standby position. At this time, tank 5
The coating liquid has already been filled from 0 to the slit die 40, and the so-called air bleeding operation of discharging the coating liquid with the slit die 40 facing upward and discharging the remaining air inside has already been completed. Then, lift pins (not shown) rise on the surface of the stage 6, and when the substrate A is placed from a loader (not shown) thereon, the lift pins are lowered to place the substrate A on the upper surface 10 of the stage 6. To adsorb.

Subsequently, the cleaning device 100 using the cleaning unit A 130 as the cleaning unit 120 is operated,
The lower surface 74 and the slopes 66 and 68 of the slit die 40 are cleanly cleaned by the above-described cleaning method. When the cleaning operation is completed, the stage 6 is driven to move the application start portion of the substrate A to just below the discharge port 72 of the slit die 40 and stop it. In this stopped state, the thickness of the substrate A is measured by the thickness sensor 22 and, based on the thickness, the substrates A to
The slit die 40 is lowered so that the clearance between the lower surfaces 74 of the slit die 40 becomes a predetermined value.

On the other hand, the syringe pump 44 sucks a predetermined amount of the coating solution 70 from the tank 50 during this time.
To the slit die 40. Syringe pump 44
Simultaneously with the start of the feeding operation, the timer in the computer 54 is started, and after a predetermined time for forming the coating liquid bead C between the lower surface 74 of the slit die 40 and the substrate A, the sequencer 56 , A start signal is issued, the stage 6 starts moving at the coating speed, and the coating is started.

The application end position of the substrate A is determined by the slit die 40
Of the application liquid from the computer 54 to the syringe pump 44 to stop the discharge of the application liquid from the slit die 40 and raise the slit die 40 to completely stop the application liquid bead C. Swiftly.

During these operations, the stage 6 continues to move,
When the substrate A comes to the end position, the substrate A is stopped, the suction of the substrate A is released, and the lift pins are lifted to lift the substrate A. At this time, the substrate A is transported to the next step by an unloader (not shown). Thereafter, the stage 6 lowers the lift pins and returns to the origin position. At the same time, syringe pump 44
Performs a suction operation to refill the application liquid 70 from the tank 50. Next, the same operation is repeated until the next substrate A comes. In the above-mentioned application method, at the stage where the application is completed, the application liquid remains around the discharge port 72 of the slit die 40. The remaining coating liquid is removed by the cleaning device 100 before the start of the next coating according to the above-described coating cycle. However, in the case where the coating liquid is easily evaporated and dries immediately, immediately after the coating is completed, the remaining coating liquid is removed by the cleaning device 100 and the peripheral portion of the discharge port 72 of the slit die 40 is removed. It is desirable to clean.

Next, a cleaning unit B200 as another embodiment of the present invention will be described with reference to FIGS. FIG. 6 is a front sectional view of the cleaning unit B200, FIGS. 7 and 8 are side sectional views at different positions in FIG.
FIG. 9 shows a cleaning process by the cleaning unit B200.

Referring first to FIGS. 6 to 8, the cleaning unit B200 has a slit die 4 for jetting air 222.
A pair of air nozzles 208A, 208B whose air discharge ports are directed horizontally to the slopes 66, 68
And a lower nozzle 212 directed toward the lower surface 74 of the slit die 40. Further, on the opposite side of these nozzles, a slit die 4 is also used for jetting air 222.
A pair of air nozzles 206A and 206B whose discharge ports are directed horizontally to the 0 slopes 66 and 68, and a lower solvent nozzle 210 that discharges the solvent 224 toward the lower surface 74 of the slit die 40 are provided. ing. The above air nozzles 206A, B, 208A, B and the lower solvent nozzle 210
Are connected to an air supply source and a solvent supply source (not shown).

Each of the above nozzles is held by a main body 202 which is also an air suction / recovery port. By fixing the main body 202 on the flat plate bar 112, the slit die 40
Can be moved in the longitudinal direction. Both ends of the main body 202 in the longitudinal direction of the slit die 40 are slit die 40.
Are arranged at a certain gap with a shape similar to the tip of the discharge port. Further, a central portion of the main body 202 is provided with an internal space 216 so that air jetted from each air nozzle can be collected. Internal space 216
Since is connected to the connection port 220, by connecting to a suction source (not shown), it is possible to make the internal space 216 a negative pressure and prevent the air ejected from each nozzle from leaking to the outside.

A liquid recovery port 204 is also provided at the center of the internal space 216. The liquid recovery port 204 communicates with a suction source (not shown) via a connection port 218.
A negative pressure is applied to the interior 214 by the suction action, and a liquid such as a solvent can be collected without leaking to the outside.

A cleaning method using the above-described cleaning unit B200 will be described with reference to FIG. FIG. 9 is a schematic view showing a cleaning step.

First, the cleaning unit 1 of the cleaning device 100
At 20, the cleaning unit B 200 is attached to the flat bar 112. Next, the electric motor 104 is driven to move the flat bar 112, and the cleaning unit B200 is moved to the left end of the longitudinal ends of the slit die 40 shown in FIG. 9 and stopped (step a in FIG. 9). .

Then, a suction source (not shown) is started to make the interior 214 of the liquid recovery port 204 and the internal space 216 of the main body 202 a negative pressure.
Air injection is started from B. In this state, the cleaning unit B200 is connected to the end opposite to the slit die 40 (FIG. 9).
To the right end of the slit die 40, the coating liquid adhering to the lower surface 74 and the slopes 66, 68 of the slit die 40, and other objects are blown off by air jet, and the falling object 214 made of the blown coating liquid or the like is blown off. Is collected at the liquid recovery port 204 (step b in FIG. 9), and stops when it reaches the opposite end of the slit die 40. In the above steps, the coating liquid is almost removed from the periphery of the discharge port 72 of the slit die 40, and a little dried coating liquid remains afterward.

The cleaning unit B200 is a slit die 4
When the air nozzle 206 reaches the end opposite to
The injection of air from A and B is stopped, and instead the air injection is started from the air nozzles 208A and B and the lower nozzle 212, and the discharge of the solvent from the lower solvent nozzle 210 is also started (step c in FIG. 9). ). Lower solvent nozzle 2
The solvent is discharged from the slit die 4
The discharge speed is such that it reaches not only the lower surface 74 of the “0” but also the slopes 66 and 68. In this state, the cleaning unit B
The member 200 is moved toward the end of the slit die 40 (the left end in FIG. 9). By this operation, the solvent 22
4 is a lower surface 74 of the slit die 40 and slopes 66 and 68.
The coating film that is dried and adhered to the coating solution is dissolved and peeled off from the lower surface 74 and the slopes 66 and 68,
It is blown off together with the solvent by the air jetted from the air nozzles 208A and B and the lower nozzle 212 to become a falling object 232, which is collected in the liquid collecting port 204 and the main body 202 (step d in FIG. 9).

The cleaning unit B200 is a slit die 4
When it reaches the end where it was zero (the left end in FIG. 8), it stops, stops the air injection from the air nozzles 208A and B, the lower nozzle 212, and the discharge of the solvent from the lower solvent nozzle 210. The suction source not to be used is also stopped, and suction from the liquid recovery port 204 and the main body 202 is also stopped (step e in FIG. 9).

In the above cleaning method, the cleaning unit A
For the same reason as the cleaning method using 130, air is sprayed on each surface of the dried slit die 40 to which no solvent or the like has adhered to create an air flow that flows in the longitudinal direction of the slit die 40, thereby forming a solvent or the like. It is important to adjust the position of each air nozzle so as to blow off air. Further, as a matter of course, the solvent 224 is preferably a solvent constituting the coating solution.

In the above embodiment, the solvent or the like is removed by air injection immediately after the solvent 224 is attached to the lower surface 74 and the slopes 66 and 68 of the slit die 40. The contact time with the coating liquid at the outlet of the discharge port 72 is short, so that the deterioration of the coating liquid can be prevented.

The coating liquid to which the present invention can be applied has a viscosity of 1 cps to 100,000 cps, preferably 10 cps.
ps to 500 cps, and Newtonian is preferable from the viewpoint of applicability, but it can also be applied to a thixotropic coating solution. Further, the present invention can be applied to a slit die cleaning means when applying a resist or an O / C material with a die coater, in addition to a coating solution for RGB color, without depending on a drying speed of the coating solution. As a member to be coated as a substrate, a metal plate such as aluminum, a ceramic plate, a silicon wafer, or the like may be used in addition to glass. Further, as a coating state to be used, a clearance is 40 to 500 μm, more preferably 80 to 300 μm, and a coating speed is 0.1 m / min to 10 m / m.
Min, more preferably 0.5 m / min to 6 m / min, the die lip gap is 50 to 1000 μm, more preferably 100 m / min.
６００600 μm, the coating thickness is 5 to 400 μm, more preferably 20 to 250 μm.

The conditions for cleaning are as follows: the discharge speed of the air injected from each nozzle is 1 to 300 m / s;
Desirably, it is 10 to 100 m / s. The shape of the air discharge portion and the solvent discharge portion of the air nozzle and the solvent discharge nozzle may be round, slit-shaped rectangular, or any shape. In the case of a round shape, the inner diameter of the discharge section is 0.1
10 to 10 mm, preferably 0.5 to 5 mm, and in the case of a rectangle, the gap is 0.05 to 5 mm, more preferably 0.1 to 5 mm.
5 mm.

The discharge amount of the solvent is preferably as small as possible, preferably 0.1 cc / s to 50 cc / s, more preferably 0.5 cc / s to 10 cc / s.

In order to recover the solvent, the coating liquid and the air, the pressure at the negative pressure is 10 to 50 kPa, preferably 100 to 10 kPa. The length of the liquid or solvent recovery port in the substrate traveling direction is the lower surface 74 of the slit die 40.
A slightly larger one is preferred.

The setting angle between each nozzle and the slit die is 20 to 9 on the smaller side for both air and solvent.
0 degrees, more preferably 45 to 75 degrees.

The moving speed of the cleaning unit is preferably 0.1 to 50 m / min, more preferably 0.5 to 1 m / min.
5 m / min.

[0071]

EXAMPLE On a non-alkali glass substrate of 360 × 465 mm and thickness of 0.7 mm, a pitch of 254 was set in the width direction of the substrate.
μm, pitch 85 μm in the longitudinal direction of the substrate, line width 20
μm, number of RGB pixels is 4800 (longitudinal direction of substrate) × 12
A black matrix film having a lattice shape of 00 (substrate width direction) and a diagonal length of 20 inches (substrate width direction 305 mm, substrate longitudinal direction 406 mm) and a thickness of 1 μm was prepared. The black matrix film used titanium oxynitride as a light-shielding material and polyamic acid as a binder.

Subsequently, after removing particles on the substrate by wet cleaning, a polyamic acid was used as a binder and γ-
A mixture of butyrolactone, N-methyl-2-pyrrolidone and 3-methyl-3-methoxybutanol as a solvent, Pigment Red 177 as a pigment and a solid content concentration of 10%, and a viscosity of 50 cps adjusted to R color. The liquid was applied uniformly at a speed of 3 m / min with a die coater shown in FIG. 1 at a thickness of 20 μm. Here, the slit die of the die coater had a slit gap of 100 μm, a slit width of 305 mm, and a gap (clearance) between the slit die and the substrate of 100 μm. At this time, the cleaning unit B shown in FIG. 6 was used as a means for cleaning the discharge port of the slit die, and the periphery of the discharge port of the slit die was always cleaned before coating. Here, each air nozzle is a round nozzle having a concentric cross section and an inner diameter of 1 mm, a lower solvent nozzle for adhering a solvent is a round nozzle having a concentric cross section and an inner diameter of 1.5 mm, and a liquid recovery port is 30 mm (slit). Die longitudinal direction) ×
10mm (substrate running direction), recovery part of main body is 60mm
(Slit die longitudinal direction) x 20mm (substrate running direction)
, Each having a rectangular shape. Each operating condition is
Air is discharged from each air nozzle at a discharge wind speed of 20 m / s,
Γ-butyrolactone was discharged from the lower solvent nozzle at a discharge speed of 0.5 m / s, and the liquid recovery port was suctioned at 2 kPa and the recovery part of the main body was suctioned at a negative pressure of 1 kPa. Further, the moving speed of the cleaning unit B in the longitudinal direction of the slit die was set to 10 m / min.

After completion of the coating, the coating was dried at 100 ° C. for 20 minutes using a drying apparatus using a hot plate, and then the solid content was 10%.
A resist solution having a viscosity of 8% is applied at 10 μm, dried on a hot plate at 90 ° C. for 10 minutes, exposed, developed, and peeled, leaving a color coating film only on the R pixel portion, and heated at a 260 ° hot plate for 30 minutes. It was heated and cured.

For the formation of the same color coating film, for the G and B colors, similarly to the R color, using a die coater and the above-mentioned cleaning means, the application conditions and the cleaning conditions, and other similar steps,
Color coating films of G and B colors were formed. Here, the G coating liquid is a coating liquid of R color, the pigment is made into Pigment Green 36, and the viscosity is adjusted to 40 cps at a solid concentration of 10%. The B coating liquid is an R coating liquid. The pigment is changed to Pigment Blue 15 and the viscosity is 50 cp at a solid concentration of 10%.
s adjusted to s.

Finally, ITO was deposited by sputtering to form a color filter. The obtained color filter has no foreign matters such as pigment aggregates and abrasion powder,
The chromaticity was uniform over the entire surface of the substrate, and the quality was satisfactory.

[0076]

As described above, in the method and apparatus for cleaning the coating head according to the present invention, since the excellent method and apparatus configuration are employed as described above, the wear of the cleaning tool and the slit die are reduced.
Cleans the periphery of the discharge port of the slit die without adversely affecting the coating material due to deterioration of the coating liquid, and further enhances the formation of a high-quality coating film by the coating method and the coating device using the cleaning method and the cleaning device. Can be done with productivity.

Further, according to the method and apparatus for manufacturing a color filter according to the present invention, since the color filter is manufactured using the above-described method and apparatus for cleaning a coating head, there is no defect due to cleaning. High quality color filters can be manufactured with high productivity.

[Brief description of the drawings]

FIG. 1 is an overall schematic perspective view of a die coater according to an embodiment of the present invention.

FIG. 2 is a schematic configuration diagram showing the die coater of FIG. 1 including a coating liquid supply system.

FIG. 3 is a front sectional view showing a cleaning device according to an embodiment of the present invention.

FIG. 4 is a side sectional view taken along line XX of FIG. 3;

FIG. 5 is a side sectional view taken along line YY of FIG. 3;

FIG. 6 is a front sectional view showing a cleaning apparatus according to another embodiment of the present invention.

FIG. 7 is a side sectional view taken along line XX of FIG. 6;

FIG. 8 is a side sectional view taken along line YY of FIG. 6;

FIG. 9 is a schematic view showing a cleaning step.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Die coater 2 Base 6 Stage 14 Feed screw 22 Thickness sensor 40 Slit die (coating head) 44 Syringe pump 50 Tank 62 Manifold 64 Slit 66, 68 Slope 72 Discharge port 74 Lower surface 100 Cleaning device 102 Main body 104 Electric motor 106 Carrier 108 Elevating guide 110 Guide opening 112 Flat bar 120 Cleaning unit 130 Cleaning unit A 140 Solvent discharge / collection unit 142A, 142B Solvent nozzle 144 Coating liquid / solvent recovery box 160 Air injection / collection unit 162A, 162B Air nozzle 164 Air recovery box 165 Liquid recovery box 174 Air 178 Liquid falling object 200 Purification unit B 202 Main body 204 Liquid recovery port 206A, 206B Air nozzle 208A, 208B air nozzle 210 under the solvent nozzle 212 lower nozzle A substrate

──────────────────────────────────────────────────続 き Continued on the front page (51) Int. Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B05D 7/00 B05D 7/00 H G02B 5/20 101 G02B 5/20 101 (72) Inventor Kazumi Kamiya Shiga 1-1-1, Sonoyama, Otsu City, Toray F-term (reference) in Shiga Plant of Toray Industries, Inc. 2H048 BA02 BA45 BB02 BB14 BB44 4D075 AC04 AC84 DA06 DC21 DC22 4F041 AA06 AB02 BA35 BA60 CA03 CA11 CA17 CA22 4F042 AA07 CB08 CC28 CC04 DF04 DF27

Claims (17)

[Claims] 1. A method for cleaning the periphery of a discharge port of a coating head that discharges a coating liquid from a discharge port, wherein a substance adhering to a periphery of the discharge port of the coating head is collided with a gas. A method for cleaning a coating head, wherein the method removes the adhered substance and the gas. 2. The method according to claim 1, further comprising: contacting a solvent for dissolving the coating solution around the discharge port of the coating head after removing the deposits, and removing the remaining deposits and the solvent by collision with a gas. The method for cleaning an application head according to claim 1, wherein 3. The method for cleaning an application head according to claim 2, further comprising recovering the attached matter, the solvent, and the gas that have been removed. 4. The apparatus according to claim 1, wherein a collision position between the deposit and the gas is moved in a longitudinal direction of the coating head.
3. The method for cleaning an application head according to item 1. 5. The method according to claim 2, wherein the contact position of the solvent with the coating head and the collision position of the remaining deposits and the solvent with the gas are moved in the longitudinal direction of the coating head. The method for cleaning a coating head according to the above. 6. A method for cleaning the periphery of a discharge port of a coating head that discharges a coating liquid from a discharge port, wherein a solvent dissolving the coating liquid is attached around the discharge port of the coating head. After being brought into contact with the kimono, the deposits and the solvent remaining around the discharge port of the coating head are removed by collision with a gas, and the removed deposits, the solvent, and the gas are recovered. To clean the coating head. 7. The method according to claim 1, wherein the collision position between the solvent and the deposit and the collision position between the deposit and the solvent remaining around the discharge port of the coating head and the gas are moved in the longitudinal direction of the coating head. The method for cleaning a coating head according to claim 6, wherein: 8. A method for producing a color filter, comprising producing a color filter using the method for cleaning a coating head according to claim 1. 9. A cleaning device for a coating head for cleaning a peripheral portion of a discharge port of a coating head for discharging a coating liquid from a discharge port, wherein an adhering substance around the discharge port of the coating head is removed. An apparatus for cleaning a coating head, comprising: a gas discharging unit for separating, and a collecting unit for collecting the separated attached matter and the gas. 10. The gas discharge means and the recovery means are movable in the longitudinal direction of the coating head.
An apparatus for cleaning a coating head according to claim 9. 11. A solvent discharging means for bringing a solvent for dissolving the coating liquid into contact with the periphery of the discharge port of the coating head, and a second gas discharging for removing remaining deposits and the solvent by collision with a gas. The apparatus for cleaning a coating head according to claim 9, wherein the apparatus has means. 12. The solvent discharging means and the second gas discharging means,
The cleaning apparatus for an application head according to claim 11, wherein the apparatus is movable in a longitudinal direction of the application head. 13. The apparatus for cleaning a coating head according to claim 11, further comprising a solvent / gas recovery means for recovering the adhered matter and the solvent removed and the gas. 14. The coating head cleaning apparatus according to claim 13, wherein the solvent / gas recovery unit is movable in a longitudinal direction of the coating head. 15. A coating head cleaning apparatus for cleaning a peripheral portion of a coating head for discharging a coating liquid from a discharging port, wherein a solvent for dissolving the coating liquid is supplied around the discharging port of the coating head. Solvent ejecting means for contacting the attached matter; gas ejecting means for removing the attached matter and solvent remaining around the ejection opening of the coating head after collision with the attached matter by collision with gas; A cleaning unit for recovering the adhered matter, the solvent and the gas. 16. The coating head cleaning apparatus according to claim 15, wherein all the means are movable in the longitudinal direction of the coating head. 17. An apparatus for manufacturing a color filter, wherein the apparatus for cleaning a coating head according to claim 9 is used to manufacture a color filter.