CN102674702B - Cleaning component, cleaning method of coater, cleaning device and manufacture method of component for display - Google Patents

Cleaning component, cleaning method of coater, cleaning device and manufacture method of component for display Download PDF

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Publication number
CN102674702B
CN102674702B CN201210034636.9A CN201210034636A CN102674702B CN 102674702 B CN102674702 B CN 102674702B CN 201210034636 A CN201210034636 A CN 201210034636A CN 102674702 B CN102674702 B CN 102674702B
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cleaning
coating fluid
wiper member
grooving
coating
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CN102674702A (en
Inventor
北村义之
谷义则
西元美纪
伊藤祯彦
内山悟
山田浩志
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Toray Engineering Co Ltd
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Toray Engineering Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/26Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/10Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by other chemical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B05D3/141Plasma treatment
    • B05D3/145After-treatment
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Coating Apparatus (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Plasma & Fusion (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Optical Filters (AREA)

Abstract

The present invention relates to a cleaning component, a cleaning method of a coater, a cleaning device and a manufacture method of a component for a display. During the cleaning process, the flowing speed of a coating fluid removed from the coater along the cleaning component is improved, thus the coating fluid is not adhered on the coater and because of no residue of the coating fluid or a solvent for cleaning, abnormal thickness of a coating film or defect on the surface of the coating film is not generated. The cleaning component comprises a first surface and a second surface opposite to the first surface. The cleaning component contacts with a discharge port surface of a discharge port extending along one direction of the coater and two adjacent surfaces of the discharge port surface and simultaneously slides along the direction, thus the discharge port surface and the two adjacent surfaces are cleaned. The cleaning component comprises a cleaning portion arranged on the first surface side and simultaneously contacted with the discharge port surface and the two adjacent surfaces; a plurality of flowing path surfaces started from the cleaning portion and always extending to the second surface side, wherein a cutting groove is arranged on the second surface side on the flowing path surface.

Description

The manufacture method of cleaning method, clearing apparatus and the parts of display of cleaning part, spreader
Technical field
The present invention relates to be for example used in colour liquid crystal display device chromatic filter and array substrate, the parts in the manufacture field of the parts of display such as panel, optical filter for plasma display, specifically, be the improvement that forms in the above the relief outlet of gap nozzle of the slit type coater of coated film and cleaning method and clearing apparatus around it about being applicable to discharge coating fluid on the applied parts surfaces such as glass substrate and use the manufacture method of these parts of display.
Background technology
Colour liquid crystal display device is made up of with parts such as array substrates chromatic filter and TFT, chromatic filter and TFT include the low viscous fluent material of a lot of coatings drying coated fluent material with the manufacture of array substrate, form thus the manufacturing process of coated film.
For example, in the manufacturing process of chromatic filter, on glass substrate, form the coated film of the photo-induced corrosion resistant material of black, be processed into the coated film that forms respectively successively red, light blue and green photo-induced corrosion resistant material after reticulation by same method between grid by photolithography.In addition, in the manufacture of chromatic filter, also comprise, form after coated film at the versicolor photo-induced corrosion resistant material of coating, in order to obtain the operation of injecting the space of liquid crystal and form post between chromatic filter and array substrate, or in order to make the concave-convex surface of chromatic filter level and smooth and form the operation etc. of overcoat coated film.
As the apparatus for coating that forms coated film, from the viewpoint of reduce coating fluid consumption, reduce power consumption, further the length of side to exceed the maximization of the corresponding device of dimetric ultra-large type substrate of 2m easy etc., using in recent years many is slit type coater (for example, patent documentation 1).This slit type coater has dispense tip, there is gap nozzle as spreader, on one side discharge coating fluid from the elongated relief outlet that is arranged on the slit-shaped gap nozzle, on the foliated applied parts of the glass substrate to a direction walking etc., form coated film on one side.
If coating fluid is coated with once with slit type coater, a part for coating fluid with drip the form of shape or elongated liquid membrane remain in the discharge actinal surface of the relief outlet that comprises the coating fluid of discharging gap nozzle and with two adjacent surfaces (being referred to as below " lip inclined-plane ") of discharge actinal surface adjacency on.After one time painting process finishes, proceed coating if discharged on actinal surface and lip inclined-plane in the situation of coating fluid of residual shape or elongated liquid membrane, can not get the problem of even coated face.
Specifically, be coated on substrate together with the coating fluid of discharging from gap nozzle owing to discharging coating fluid residual on actinal surface or lip inclined-plane, the irregular situation of coated film thickness (being referred to as below " being coated with irregular ") therefore occurs.In addition, applied even if residual coating fluid does not have, but in coating direction, produce striped (being referred to as below " coating striped ") with this as the starting point.The not even coating striped of these coatings is referred to as to coating defects.While carrying out high-quality coating with slit type coater continuously on multiple applied parts, for fear of producing such coating defects, must be coated with each time the discharge actinal surface and the lip inclined-plane that after finishing, just clean gap nozzle, remove and adhere to and residual coating fluid thus.
In order to remove so residual coating fluid, disclose each coating and finish or start before for example, with the cleaning part cleaning discharge actinal surface of gap nozzle and the method and apparatus on lip inclined-plane (, patent documentation 2,3).Specifically, use the cleaning part of being manufactured by synthetic resins having with the discharge actinal surface of gap nozzle and the cross-sectional shape same shape on lip inclined-plane, on discharge actinal surface and lip inclined-plane, clean in the mode of sliding.By making this cleaning part directly contact and slide with lip inclined-plane with discharge actinal surface, can fully remove and be attached to the coating fluid of discharging on actinal surface and lip inclined-plane, even if be therefore coated with continuously on applied parts, also can stably obtain film thickness evenly, without the high-quality coated film of coating defects.
During as coating fluid use sense photosensitiveness acrylic acid or the like mill base or the contour volatile matter of photo-resist, especially require to adhere to the removal ability of coating fluid high.This be because, if being attached to that the removal of the coating fluid of discharging actinal surface and lip inclined-plane is insufficient will residual a small amount of coating fluid, residual as the form that adheres to the adhesion residue of discharging actinal surface and lip inclined-plane after these residual coating fluids are dry.And, the residue of adhering while next time coating contacts with coating fluid, the residue that produces thus to adhere is the coating striped of starting point, but also produce, because the adhesion part on adhere residue and discharge actinal surface, lip inclined-plane is dissolved the residue itself of adhering, from discharging actinal surface, disengaging is blended into coated film and becomes particulate state with lip inclined-plane, causes thus further coating defects.
For this reason, in patent documentation 2,3, for fear of there is adhesion residue, cleaning part is contacted with lip inclined-plane line with discharging actinal surface, the removal ability that improves coating fluid with this, cleans ability.Further, in patent documentation 2, once cleaning finishes discharge solvent and coating fluid is washed from nozzle toward being attached with on the cleaning part of coating fluid afterwards, thereby keeps cleaning and gap nozzle being cleaned of cleaning part.Thus, the coating fluid (adhesion residue) that prevents from being attached to cleaning part is attached to gap nozzle again and causes the situation of the defect (coating defects) of coating face to occur.Further, in order not allow coating fluid or dissolvent residual be attached to gap nozzle at cleaning part, from attracting these liquid with the suction port of the adjacent setting of cleaning part.
Patent documentation:
Patent documentation 1: Unexamined Patent 6-339656 communique
Patent documentation 2: Unexamined Patent 11-300261 communique
Patent documentation 3: JP 2008-268906 communique
Summary of the invention
With reference to Fig. 8 and Fig. 9, the existing cleaning part cleaning discharge actinal surface of gap nozzle and the method on lip inclined-plane of using is described.The side cross-sectional view of Fig. 8 represents to make to slide and remove the state of the coating fluid 150 being attached on gap nozzle 20 as the wiper member 400 of cleaning part.Fig. 9 (a) represents to see from the direction of inclination the state of wiper member 400.
Shown in Fig. 8, as the wiper member 400 of arrow Ds direction and the combination situation of gap nozzle 20 of the travel direction of wiper member 400, as illustrated with reference to Fig. 4 (b) below, identical with situation of the present invention.In one side of discharge actinal surface 36, adjacency has lip inclined-plane 34A (according to the situation on figure, indicating contrary one side).In addition, as described later, the coating fluid 150 that has coating fluid 424, debris 420 and adhere on lip inclined-plane 34A.
As shown in Figure 9, wiper member 400 improves the removal ability of coating fluid and in order to be combined with discharge actinal surface 36 or the lip inclined-plane 34A of gap nozzle 20 in order to contact by strengthening and the line of gap nozzle, the size of boring part is minimized, seek thus high rigidization.Wiper member 400 on base 406, hypotenuse 404A, 404B contact with lip inclined-plane 34A line with discharge actinal surface 36, and mobile to arrow Ds direction (in Fig. 8, direction from right to left), clean thus.
As shown in Figure 8, if coating fluid 150 wiper member 400 being attached on gap nozzle 20 is removed from discharging actinal surface 36 or lip inclined-plane 34A, temporarily first converge in by discharge actinal surface 36 with in the space S that the bottom surface 402 of corresponding wiper member 400 surrounds with it.The coating fluid 154 converging will become along bottom surface 402 and 412 coating fluids 152 that flow out and flowing down downwards above, or is arranged on as required the suction port 422 keeping on the support of wiper member 400 on 112 and attracts.
But, if enhance productivity and clean at faster speed in order to shorten the cleaning time, the amount that converges in the coating fluid 154 in space S is more much bigger than the amount of the coating fluid 152 flowing out along bottom surface 402 grades, and therefore, the coating fluid 154 converging in space S can overflow.Even if strengthen the speed that attracts from suction port 422, but it does not exert an influence to the take-off rate of the coating fluid 152 flowing out along bottom surface 402, therefore cannot prevent that coating fluid from overflowing from space S.
The coating fluid overflowing from space S becomes the coating fluid 424 moving to top along the gap between wiper member 400 and lip inclined-plane 34A, can again be attached to lip inclined-plane 34A top and in the long dimensional directions of gap nozzle 20 form with the debris 420 of wire residual.If the amount of the debris of adhering to again 420 is many, debris 420 flows to the discharge actinal surface 36 of gap nozzle 20 always along lip inclined-plane 34A, and can be attached to while being coated with sometimes on coating face and cause coating striped or be coated with the coating defects such as irregular.
Thereby the width that all can put aside line while being attached to again the debris 420 each cleaning on gap nozzle 20 with the form of wire becomes greatly gradually, if solidified with this state, owing to contacting with wiper member 400, cleaning part is frayed.The frayed part of wiper member 400 does not have enough contact pressures and cannot carry out the removal of coating fluid, therefore make the scope that can clean diminish, produce thus the time shorten that wiper member 400 is used in cleaning, the problem shortening the work-ing life of wiper member 400.
As mentioned above, wiper member 400 makes the part of boring minimized in order to seek high rigidization, therefore, and as shown in Fig. 9 (b), cleaning finishes that rear coating fluid is attached to the bottom surface 402 of wiper member 400 and its around and residual, and becomes residual coating fluid 426.Even discharge solvent and these residual coating fluids 426 are cleaned from nozzle, solvent also can replace the coating fluid of (in the same manner) residual coating fluid 426 and be attached to bottom surface 402 and its and residual around.
So, if the state with residual solvent on cleaning part (wiper member 400) cleans gap nozzle 20, solvent is attached to cleaning start portion and remains on gap nozzle 20, in addition the solvent adhering to contacts with the coating fluid of the relief outlet of gap nozzle 20 and mixes with it, coating fluid is diluted, and therefore causes the film thickness that is coated with start portion to diminish.In addition, the mixing of solvent and coating fluid can cause so-called solvent shock (Solvent Shock), and the solid part of coating fluid separates and generation foreign matter, and these foreign matters are attached to coated face and remarkably influenced coating quality.
The object of the invention is to solve the problem that above-mentioned existing cleaning part exists; its object is, provides a kind of and improves that speed that the coating fluid removed from spreader flows out along cleaning part prevents that coating fluid is attached to spreader again can realize cleaning time, coating fluid or solvent for cleaning etc. are residual and can not cause the cleaning part of the abnormal or coated film plane defect of coated film.Further, its object is to provide a kind of this cleaning part that utilizes obviously to enhance productivity or the cleaning method of spreader of quality and the manufacture method of the parts of display of device and use the method.
Reach above-mentioned object of the present invention by following method.
Relate to the cleaning part of the present invention of the first invention, have the first surface relatively put with second and contact one side on one side with the discharge actinal surface of a upwardly extending relief outlet in side at spreader and two adjacent surfaces of this discharge actinal surface and at this square upward sliding, this discharge actinal surface and this two adjacent surfaces are cleaned, it is characterized in that, this cleaning part comprises: cleaning portion, be arranged in described first surface side, and contact with described two adjacent surfaces with described discharge actinal surface simultaneously; Multiple outflow path faces, take described cleaning portion as starting point, and extend to described second side; Wherein, on described outflow path face, be provided with grooving in described second side.
The cleaning part of the present invention that relates to the second invention, described grooving preferably has the cross section of triangular shape.
Relate to the cleaning method of the spreader of the present invention of the 3rd invention, clean according to after the cleaning portion of cleaning part described in any one of the first invention and the second invention with scavenging solution, when being contacted with described two adjacent surfaces with described discharge actinal surface, this cleaning portion at a described square upward sliding, described spreader is cleaned, it is characterized in that, in described second side, this cleaning part is remained on gravity direction on the position lower than this grooving, so that coating fluid and scavenging solution flow out from one end of this grooving.
Relate to the clearing apparatus of the spreader of the present invention of the 3rd invention, by the cleaning part described in any one of the first invention and the second invention, slide by described cleaning portion is contacted with described two adjacent surfaces with described discharge actinal surface when and clean, it is characterized in that, this device comprises: holder, keeps described cleaning part; Running gear, makes described cleaning part and described holder at a described square upward sliding; Cleaning part washing unit, cleans the cleaning portion of cleaning part with scavenging solution; Wherein, described holder remains on the position lower than described grooving on gravity direction in described second side.
The manufacture method of parts of display of the present invention, is characterized in that, uses the described cleaning method of the 3rd invention to manufacture parts of display.
Use cleaning method and the clearing apparatus of cleaning part of the present invention and spreader, owing to flowing out and crossing over adjacent outflow path face in a side and be provided with grooving with the liquid of the contrary side of cleaning portion of cleaning part, therefore, because the speed quickening degree that goes out along outflow path surface current of coating fluid of removing from spreader is equivalent to the component capillaceous by grooving, the coating fluid of removing therefore can suppress to clean time amasss between spreader and cleaning part and overflows.Result can prevent that coating fluid is attached to the problem on spreader again.In addition, necessarily flow out from cleaning part by grooving coating fluid or solvent for cleaning, therefore can be suppressed at the cleaning portion of cleaning part or residual coating fluid or the solvent as scavenging solution near it.So, be attached to again on spreader or coating fluid or solvent for cleaning remain near the cleaning portion of cleaning part or its owing to can suppressing coating fluid, therefore, can make spreader there is no residual high-quality cleaning state completely in coating fluid.Consequently, can form that coating film thickness precision is high, coating does not have defective high-quality coated film on face completely.
According to the manufacture method of parts of display of the present invention, manufacture parts of display owing to utilizing above-mentioned good cleaning method, therefore, even also can improve cleaning ability when high velocity sweep, treatment time can significantly be shortened, therefore, can high-level efficiency, that high rate of finished products produces thickness precision is high and there is no a parts of display of the good coating quality of coating defects.
Accompanying drawing explanation
Fig. 1 is the explanatory view that comprises the apparatus for coating of the clearing apparatus of embodiments of the present invention;
Fig. 2 is the figure that the operation of cleaning by the clearing apparatus shown in Fig. 1 is described stage by stage;
Fig. 3 is the approximate three-dimensional map that represents the wiper member of embodiments of the present invention;
Fig. 4 is the explanatory view of the position relationship between the wiper member shown in presentation graphs 2 and gap nozzle;
Fig. 5 is that explanation is by the figure of the cleaning effect of the gap nozzle of the wiper member shown in Fig. 3;
Fig. 6 is the approximate three-dimensional map of the variation of the wiper member shown in presentation graphs 3;
Fig. 7 is the figure that represents the test-results of the cleaning effect of the wiper member that passes through embodiments of the present invention;
Fig. 8 is that explanation is by the figure of the cleaning effect of the gap nozzle of existing cleaning part;
Fig. 9 is explanation as the wiper member 400 of the cleaning part of Fig. 8 with the figure of the state after solvent cleaning;
Drawing reference numeral explanation:
1 slit type coater
2 base stations
4 guide rails
6 platforms
10 pillars
20 gap nozzles (spreader)
22 anterior lips
24 posterior lips
26 branch manifolds
28 slits
30 relief outlets
32 pads
34A, 34B lip inclined-plane
36 discharge actinal surface
40 coating liquid supplying devices
42 supply valves
44 aspirating valves
46 strainers
50 liquid-feeding pumps
52 liquid feeding devices
54 pistons
56 main bodys
60 supplying flexible pipes
62 attract flexible pipe
64 casees
66 coating fluids
68 compressed air sources
70 oscilaltion unit
72 motors
74 guides
76 screw with round heads
78 lifting tables
80 hang maintenance platform
90 thickness transducers
92 support platform
94 control device
96 operation boards
100 wiping unit
102 chassis
104 brackets
106 slide units
108 driver elements
110 pallets
112 supports
114 pressing plates
116 guides
118 springs
120 front support sections
122 induction faces
214 tops
126 front bevels
140 cleaning units
142 solvent nozzle
144 pipe arrangements
150 coating fluids that adhere to
152 coating fluids that flow out
154 coating fluids that converge
200 wiper members
202 bottom surfaces
204A, 204B hypotenuse
206 bases
208A, 208B inclined-plane
After 210
Before 212
214A, above 214B
220 groovings
222 grooving bases
224A, 224B grooving inclined-plane
300 wiper members
400 wiper members (existing)
402 bottom surfaces
406 bases
Before 412
420 debris
422 suction ports
424 coating fluids that move to top
426 residual coating fluids
A substrate (applied parts)
B pearl
C coated film
The F direction of arrow (thickness direction of wiper member)
The length of the each several part of L1, L2, L3, L4 wiper member
The length on Lc grooving base
LP1 is projected in the length of the bottom surface on grooving base
LP2 is projected in the length above on grooving base
S space
The thickness of T wiper member
The angle of α bottom surface and discharge actinal surface
β bottom surface and angle below
Angle between γ c hypotenuse
The lip inclined-plane 34A of γ n gap nozzle and the angle of 34B
Figure BSA00000670777000091
below with the angle on inclined-plane
θ is with respect to the angle of inclination of the vertical surface above of wiper member
The angle above on θ c1 grooving base
The angle that θ c2 grooving inclined-plane is clipped in the middle grooving base
Embodiment
Below with reference to Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5, Fig. 6 and Fig. 7, the preferred embodiment of the present invention is described.Fig. 1 represent as comprise clearing apparatus of the present invention apparatus for coating slit type coater summary form, Fig. 2 represents the situation with wiper member cleaning gap nozzle, Fig. 3 represents the wiper member as cleaning part of the present invention, Fig. 4 and Fig. 5 represent the cleaning effect to gap nozzle of wiper member by embodiments of the present invention, Fig. 6 is the approximate three-dimensional map as the wiper member 300 of the example of other embodiment of cleaning part of the present invention, and Fig. 7 table is by the test-results of the cleaning effect of the wiper member of embodiments of the present invention.
As shown in Figure 1, the slit type coater 1 of embodiments of the present invention comprises the wiping unit 100 as clearing apparatus.Slit type coater 1 comprises base station 2, is provided with pair of guide rails 4 on base station 2.On guide rail 4, dispose as the mounting table of the substrate A of applied parts, i.e. platform 6.Platform 6 use linear motors (not shown) drive, and freely come and go mobile towards the directions X representing with arrow.Platform 6 loads according to the mode that is parallel to the XY plane being stipulated with the Y-direction vertical with respect to directions X by directions X.In addition, XY face is preferably set according to the mode that is parallel to horizontal plane.
Further, above platform 6, become the vacuum suck face being formed by adsorption hole, can and keep substrate A absorption.Be provided with the pillar 10 of a type in the central authorities of base station 2.On pillar 10, comprise towards be vertical Z direction with respect to XY plane and freely come and go mobile oscilaltion unit 70, on this oscilaltion unit 70, the gap nozzle 20 as the spreader being coated with is installed according to its long dimensional directions mode parallel with Y-direction.
Gap nozzle 20, the anterior lip 22 extending to Y-direction and posterior lip 24 are overlapping on directions X by pad 32, and are combined into one by multiple coupling screws (not shown).Central authorities in gap nozzle 20 inside are formed with branch manifold 26.Branch manifold 26 also extends to Y-direction.Below branch manifold 26, the slit 28 extending to the long dimensional directions (Y-direction) of gap nozzle 20 forms in the mode being communicated with.The bottom of slit 28 is at discharge actinal surface 36 openings of the face bottom as gap nozzle 20, and forms relief outlet 30.That is, gap nozzle 20 has at it relief outlet 30 extending to long dimensional directions bottom, and relief outlet 30 is present in discharges on actinal surface 36.As being adjacent to two adjacent surfaces of discharging actinal surface 36 both sides, there is lip inclined-plane 34A and 34B.Because slit 28 forms by pad 32, therefore the gap of slit 28 (directions X sow discord distance) is identical with the thickness of pad 32.
The oscilaltion unit 70 of gap nozzle 20 liftings is made up of following mechanism, is specially: hang and keep platform 80, so that relief outlet 30 keeps gap nozzle 20 towards the mode of downside; Lifting table 78, is connected with and hangs the one end that keeps platform 80, makes its lifting; Guide 74, by lifting table 78 direction guiding up and down; Screw with round head 76, converts rotatablely moving of motor 72 to the translational motion of lifting table 78.
The both ends of the long dimensional directions (Y-direction) of gap nozzle 20 are supported in oscilaltion unit 70, and according to can be respectively independently the mode of lifting be provided with a pair of in left and right.By this pair of oscilaltion unit 70, can set arbitrarily the angle of inclination with respect to the level (Y-direction) of gap nozzle 20 long dimensional directions.Thus, can make discharge actinal surface 36 and substrate A almost parallel in the whole long dimensional directions of gap nozzle 20 of gap nozzle 20.Further, can set arbitrarily gap between the substrate A of platform 6 and the discharge actinal surface 36 of gap nozzle 20, i.e. gap by oscilaltion unit 70.
The upstream side of the branch manifold 26 in gap nozzle 20 is normally connected with the supplying flexible pipe 60 that is connected to coating liquid supplying device 40 by internal path (not shown).Can supply with coating fluid 66 to branch manifold 26 from coating liquid supplying device 40 by supplying flexible pipe 60.After the coating fluid that is fed into branch manifold 26 is expanded equably to the long dimensional directions (Y-direction) of gap nozzle 20, discharge from relief outlet 30 through slit 28.
Coating liquid supplying device 40 comprises strainer 46, supply valve 42, liquid-feeding pump 50, aspirating valve 44, attracts flexible pipe 62 and case 64 on the upstream side of supplying flexible pipe 60.In case 64, store coating fluid 66.Case 64 is connected with compressed air source 68, can apply to the coating fluid 66 storing the back pressure of arbitrary size.Coating fluid 66 in case 64 is through attracting flexible pipe to be fed into liquid-feeding pump 50.
Liquid-feeding pump 50 is that the mode that is arranged on main body 54 with liquid feeding device 52, piston 54 forms.Direction is freely round mobile up and down by drive source (not shown) for piston 54.Liquid-feeding pump 50 is following constant volume type pumps, is specially, and coating fluid 66 is filled in to the inside of the liquid feeding device 52 with certain internal diameter, and by piston 54, coating fluid 66 is extruded, and supplies with the coating fluid of the amount that can be coated with a substrate A at gap nozzle 20.
In the time that coating fluid is filled in the inside of liquid feeding device 52, open aspirating valve 44, close supply valve 42, piston 54 is moved downwards.In addition, when being filled in coating fluid in liquid feeding device 54 and supplying with to gap nozzle 20, close aspirating valve 44, open supply valve 42, piston is moved upward, thus, the coating fluid in liquid feeding device 52 66 is forced up and discharged with piston 54.The section area that the translational speed of piston 54 is multiplied by liquid feeding device is exactly the feed speed of coating fluid 66,, the feed speed of pump.
In Fig. 1, as shown in base station 2 left sides, the thickness transducer 90 of measuring substrate A thickness is arranged on to be supported on platform 92.Thickness transducer 90 preferably utilizes the sensor of laser.By measure the thickness of substrate A with thickness transducer 90, though the substrate A different to thickness, always also can make to keep particular value as the gap in the gap between discharge actinal surface 36 and the substrate A of gap nozzle 20.
The right-hand end of the base station 2 in Fig. 1, is arranged on guide rail 4 according to the mode moving freely to directions X as the wiping unit 100 of clearing apparatus.On wiping unit 100, be arranged on support 112 as the wiper member 200 of the cleaning part with the shape that is incorporated into gap nozzle 20.Wiper member 200 is fixed by pressing plate 114, not allow it moving.Pressing plate 114 is connected maintenance with support 112 by the coupling devices such as screw (not shown).
Support 112 is arranged on bracket 104 by two guides 116 that only direction guides up and down.Around each guide 116, spring 118 is installed, wiper member 200 can freely be followed the change in location of the above-below direction of the leading section being made up of discharge actinal surface 36 and lip inclined-plane 34A, the 34B of gap nozzle 20 by support 112.Bracket 104 is arranged on slide unit 106.Slide unit 106 can freely move to the long dimensional directions (Y-direction) of gap nozzle 20 by driver element 108.
By slide unit 106, driver element 108 and pallet 110 that wiper member 200 moves are fixed on chassis 102.Pallet 110 is the devices that reclaim the coating fluid removed by wiper member 200 etc., and it is connected with removal system (not shown), can discharge and reclaim amassing at liquid such as inner coating fluids.Pallet 110 can also be used for reclaiming from gap nozzle 20 by the coating fluid of method discharges such as deflating.Chassis 102 is on guide rail 4, and it is freely round mobile to directions X under the guiding of guide rail 4, to pass through linear motor (not shown), and therefore, wiping unit 100 entirety can come and go to directions X mobile.
The cleaning unit 140 cleaning to wiper member 200 ejection of solvent, on directions X the right-hand end of base station 2, in the Y direction with non-interference position, the long dimensional directions end of gap nozzle 20 on, fix by support (not shown).Cleaning unit 140 is by spraying as the solvent nozzle 142 of the solvent of scavenging solution and forming to the pipe arrangement 144 of solvent nozzle 142 donor solvents from solvent supply source (not shown).Solvent nozzle 142 is, as by solvent with cylindricality, shower shape or fan-shaped spray etc., as long as can ejection of solvent just thering is any form.
Based on headed by wiping unit 100, the device that also has the control signal of linear motor, motor 72, coating liquid supplying device 40 and cleaning unit 140 etc. to move is all electrically connected with control device 94.Control device 94 is according to enrolling in automatic running program own to each device sending controling instruction signal, the action that each device is scheduled to.In addition, if input the parameter suitably changing to operation board 96, this parameter is communicated to control device 94 and is reflected to control signal and will realizes the change of running action.
About wiping unit 100, the long dimensional directions translational speed of the gap nozzle 20 by any control wiper member 200 or cleaning start and end position etc. can be realized desired cleaning arbitrarily and moves.About cleaning unit 140, make wiper member 200 carry out predetermined cleaning action by any control solvent from jet velocity or the injecting time of solvent nozzle 142.
Then, with reference to Fig. 2, the cleaning method that uses wiping unit 100 is described.In Fig. 2, represent stage by stage the situation of cleaning gap nozzle 20 with wiper member 200.In addition, before cleaning starts, wiper member 200 is the cleaning starting position in primary position (right-hand end of the base station 2 in Fig. 1), the Y-direction on directions X.
If cleaning starts, first as shown in Fig. 2 (a), wiping unit 100 to directions X by integrated moving so that wiper member 200 arrive the discharge actinal surface 36 of gap nozzle 20 and the position of lip inclined- plane 34A and 34B combination under.One side of wiper member 200 is supported by the front support section 120 of the travel direction side representing with arrow at support 112.The top 124 of the topmost of front support section 120 is connected with induction face 122 and front bevel 126 downward.Extend to directions X top 124, and contact with this wiper member 200 in the whole length of wiper member 200 on directions X.Induction face 122 with along gravity direction (Z direction) and favour downside planeform form the coating fluid 152 flowing out so that send falls.Induction face 122 is preferably 15 degree~80 degree of angle of inclination of (XY plane) with respect to the horizontal plane, more preferably 30 degree~60 degree.
Then, as shown in Fig. 2 (b), if wiper member 200 arrive gap nozzle 20 leading section under and the cleaning starting position left a little to Y-direction from relief outlet 30, discharge the coating fluid 66 of specified quantitative from the relief outlet 30 of gap nozzle 20.The coating fluid 66 of discharging is attached to the discharge actinal surface 36 of gap nozzle 20 or lip inclined- plane 34A and 34B and becomes the coating fluid 150 adhering to.
Then, as shown in Fig. 2 (c), gap nozzle 20 decline and with wiper member 200 in conjunction with (contact).The gap nozzle 20 lowering positions position that preferably spring 118 shrinks 0.5mm~5mm, more preferably spring 118 shrinks the position that 1mm~3mm shrinks.If spring 118 (0.5mm~5mm) within the scope of this shrinks, wiper member 200 can easily be followed the shift in position of upper and lower (Z) direction of the leading section of gap nozzle 20.
Then, as shown in Fig. 2 (d), driver element 108 is driven, the Ds direction that wiper member 200 is represented to arrow with the state contacting with 34B with lip inclined-plane 34A with the discharge actinal surface 36 of gap nozzle 20 moves, and removes thus and clean coating fluid 150 that the discharge actinal surface 36 of gap nozzle 20 and lip inclined- plane 34A and 34B adhere on separately and other pollutent.Ds direction is the slip direction that wiper member 200 moves, slides with the state contacting with gap nozzle 20, and this direction is consistent with the long dimensional directions of Y-direction or gap nozzle 20.
Removed coating fluid and other material will become the coating fluid 152 flowing out through the induction face 122 of wiper member 200 or support 112 or front bevel 126, and fall on pallet 110 and be recovered.Wiper member 200 is then mobile to Ds direction (Y-direction), and in the position of the long dimensional directions end by gap nozzle 20, stop with the mutual incoherent position, long dimensional directions end of gap nozzle 20.Then, wiping unit 100 entirety move to the primary position of directions X always, wiper member 200 be stopped at cleaning unit 140 under.
As shown in Fig. 2 (e), wiper member 200 is on above-mentioned closed position, below solvent nozzle 140.Under this state, the solvent of supplying with by pipe arrangement 144 is sprayed from solvent nozzle 142, clean wiper member 200 with this.After finishing, cleaning make wiper member 200 be reset to the cleaning starting position of Y-direction.Afterwards, while coating, repeat identical cleaning method at every turn.
Then, describe the wiper member 200 of present embodiment in detail with reference to Fig. 3.In addition, in Fig. 3, represent to clean the wiper member 200 of seeing from the inclination front side of slip direction (Ds direction) while action.Wiper member 200 has flat shape, and has 210 (first surfaces) next and 212 (the second faces) above.After this, be provided with on 210 the base 206 that contacts with discharge actinal surface 36 lines of gap nozzle 20 and with the hypotenuse 204A and the 204B that contact with 34B line as the lip inclined-plane 34A of two adjacent surfaces that discharges actinal surface 36.Line contact refers to as the line on limit and is completely contained in as the state on the face of object.Therefore, contact in whole modes of discharging on actinal surface 36 that are included on base 206, contact with the mode on 34B with whole lip inclined-plane 34A that are included in respectively of hypotenuse 204A and 204B.
At this, after 210 are end faces of a side of wiper member 200, before 212 are 210 end faces that leave other side of thickness T from behind.,, 210 is relations relative and that put with 212 position relationships above.And, in the present embodiment thickness direction refer to below 210 with 212 vertical directions respectively above, as shown in Figure 3, be defined as F direction.In addition, as hereinafter described, be mounted in the state of wiping unit 100 at wiper member 200, F direction is the downward direction that forms special angle with respect to Y-direction.
Be included in below 210 as the base 206 of the cleaning portion contacting with 34B with the lip inclined-plane 34A as two adjacent surface with the discharge actinal surface 36 of gap nozzle 20 and hypotenuse 204A and 204B simultaneously, and be defined as being positioned at next 210 in A side.The opposite of next 210 thickness direction, the face of a contrary side is above 212, and 212 to be defined as being positioned at A side be in the B side of the opposition side of thickness direction above.In the time that wiper member 200 slides to Ds direction, B side is positioned at the front of A side.In this sense, A side and B side are referred to as to side and front face side below.
See that from thickness direction (F direction) the state of wiper member 200, it is configured to, hypotenuse 204A and 204B angulation γ c, and be connected with the two ends on base 206 respectively.On thickness direction, after 210 be connected as border with 202Yi base, bottom surface 206, after 210 be connected as border using hypotenuse 204A and 204B with inclined-plane 208A and 208B.The leading section of gap nozzle 20 and wiper member 200 in conjunction with time, bottom surface 202 facing to discharge actinal surface 36, inclined- plane 208A and 208B are facing to lip inclined-plane 34A and 34B.The bottom surface 202 that comprises base 206 and below angulation β between 210.The inclined-plane 208A that comprises hypotenuse 204A and 204B and 208B and below angulation between 210
Figure BSA00000670777000151
In Fig. 3, dotted line representative be next 210, angle beta is the angle between bottom surface 202 and dotted line.Bottom surface 202 and the below angle beta between 210, be defined in detail with in bottom surface 202 and 210 simultaneously vertical reference planes below the intersection of reference plane and bottom surface 202 and reference plane and the angle that 210 intersection forms below.In addition, inclined- plane 208A and 208B and the below angle of formation between 210
Figure BSA00000670777000152
be defined in detail with inclined- plane 208A and 208B with in 210 simultaneously vertical reference planes below the intersection of reference plane and inclined- plane 208A and 208B and reference plane and the angle that 210 intersection forms below.Wiper member 200 is angle beta and angle
Figure BSA00000670777000153
it is all the example of 90 embodiments while spending.In addition, in the topmost contact of inclined- plane 208A and 208B and to horizontally extending be above 214A and 214B.
Above-mentioned bottom surface 202, inclined- plane 208A and 208B and 212 be above, using the base of cleaning portion 206, hypotenuse 204A and 204B extend to the face of the B side of thickness direction (F direction) as starting point, is therefore defined as outflow path face always.Above in the B side at 212 places, cross over be mutually close to as the bottom surface 202 of outflow path face and 212 be provided with grooving 220 above.
Grooving 220 is connected to form outflow path face.In the present embodiment, with bottom surface 202 with 212 be connected to form above.Grooving 220 has trilobal(cross)section, is made up of with the grooving inclined-plane 224A and the 224B that are equivalent to leg-of-mutton limit the grooving base 222 that is equivalent to vertex of a triangle.In the present embodiment, this grooving base 222 forms with rectilinear form., due to bottom surface 202 with 212 is communicated with point-blank by grooving base 222 above, therefore compared with the situation of grooving base 222 complications, bending, in bottom surface 202, overstocked coating fluid flows to above 212 swimmingly.Grooving inclined-plane 224A and 224B form symmetrically with respect to grooving base 222, but can be also asymmetricly to form.The size of grooving 220 is by grooving base 222 and the 212 angle θ c1 that form (indicate in figure and be included in above the angle forming between 212 dotted line and base 222), grooving base 222 and length L c (with the length of the direction of 212 angulation θ c1 above) and grooving inclined-plane 224A and 224B clamp the angle θ c2 that grooving base 222 forms and directly defined above.About length L c and angle θ c1, can project to respectively bottom surface 202 and 212 length L P1 and LP2 replace above by grooving base 222.
The angle θ c2 forming between grooving inclined-plane 224A and grooving inclined-plane 224B is defined as, be grooving inclined-plane 224A and grooving inclined-plane 224B be all in vertical reference plane in the angle that forms of reference plane and the intersection of grooving inclined-plane 224A and the intersection of reference plane and grooving inclined-plane 224B.In addition, grooving 220 is according to being positioned at grooving base 222 direction vertical with thickness direction (F),, central mode in the bottom surface 202 of the long dimensional directions of wiper member 200 configures, but grooving 220 will be included in bottom surface 202, can be configured in any position of the long dimensional directions of wiper member 200.
The effect of the cleaning that uses wiper member 200 then, is described with reference to Fig. 4 and Fig. 5.Fig. 4 (a) is for seeing the side elevational view of wiper member 200 and gap nozzle 20 bonding states from directions X.As shown in Fig. 4 (a), the mode of 210 slip directions to wiper member 200 (Ds direction) side tilt angle theta is arranged on the support 112 of wiping unit 100 after the vertical surface that wiper member 200 extends according to the above-below direction with respect to being illustrated by the broken lines (Z direction).Vertical surface is vertical with the slip direction (Ds direction) of the wiper member 200 representing with arrow with (XY plane) above platform 6.Discharge actinal surface 36 and be also vertical with vertical surface.
It is tiltedly that coating fluid in order to make to be attached to lip inclined- plane 34A and 34B etc. is easily fallen downside that wiper member 200 rolls to slip direction (Ds direction).Roll tiltedly to slip direction (Ds direction) by wiper member 200, with respect to the bottom surface 202 of the wiper member 200 of the discharge actinal surface 36 of gap nozzle 20 than with the base 206 of discharging actinal surface 36 lines and contacting, in the front of slip direction (Ds direction), configure to the mode of the obliquely-angled α of downside of gravity direction with respect to discharging actinal surface 36.Equally, with respect to inclined-plane 208A and the 208B of the lip inclined-plane 34A of gap nozzle 20 and the wiper member 200 of 34B, than the hypotenuse 204A and the 204B that contact with lip inclined- plane 34A and 34B line, configure obliquely to the front of slip direction (Ds direction).
The wiping unit 100 of seeing from slip direction (Ds direction) when state shown in Fig. 4 (b) presentation graphs 4 (a).Base 206 contacts with lip inclined-plane 34A and the 34B isochrone of gap nozzle with discharge actinal surface 36, hypotenuse 204A and 204B.In order to realize this spline structure, the angle γ c between hypotenuse 204A and 204B is set, and this angle geometrically must be less than the lip inclined-plane 34A of gap nozzle 20 and the angle γ n that 34B forms in vertical surface.
Fig. 5 amplifies expression, makes wiper member 200 mobile to slip direction (Ds) at the state shown in Fig. 4 (a), removes thus the situation of the coating fluid 150 of the discharge actinal surface 36, lip inclined-plane 34A and the 34B that are attached to gap nozzle 20.But Fig. 5 is the locational side cross-sectional views on the grooving base 222 of grooving 220.Dot with the part (coating fluid 150, hypotenuse 204A, the inclined-plane 208A etc. that adhere to) of the lip inclined-plane 34A side of discharging actinal surface 36 adjacency.In addition, the part (hypotenuse 204A, inclined-plane 208A) that the coating fluid 154 that is concentrated in space S blocks the visual field also will dot.
Because base 206 is seamless with discharging that the lip inclined-plane 34A of actinal surface 36, hypotenuse 204A and 204B and gap nozzle 20 and 34B isochrone contact, therefore, if wiper member 200 moves to slip direction (Ds) direction, the coating fluid 150 that is attached to discharge actinal surface 36 and lip inclined- plane 34A and 34B passes through base 206 and hypotenuse 204A and 204B and certainly removes from gap nozzle.By being into droplet-like once in a while and falling downwards by being arranged on the coating fluid that the cleaning portion that forms as 210 the base 206 below of A side and hypotenuse 204A and 204B removes, but after bottom surface 202, lip inclined-plane 208A and the 208B of the outflow path face as wiper member 200,212 outflows above, become along the induction face 122 of support 112, the coating fluid 152 that front bevel 126 flows out downwards in most of situation.
The coating fluid of removing from gap nozzle 20 by wiper member 200 converges in bottom surface 202 and it around forms the coating fluid 154 converging, and flow out along bottom surface 202, and according to the bottom surface 202 of the contrary B side adjacency of the thickness direction of A side with the capillary action amount of crossing over the grooving 220 arranging on 212 above, near B side, its take-off rate can increase.Therefore, even when the amount of coating fluid 150 that is attached to gap nozzle 20 is many or when the translational speed the amount high and coating fluid that the unit time removes of wiper member 200 is many, the coating fluid of removing by the cleaning portion of wiper member 200 successfully, under the outflow path surface current of bottom surface 202 grades, therefore can suppress to overflow from the besieged space S between bottom surface 202 and discharge actinal surface 36.Thus, can suppress coating fluid from space S overflow and along inclined-plane 208A and 208 and lip inclined- plane 34A and 34B between gap move to top, and be attached to again on lip inclined- plane 34A and 34B with wire.
Below, make comparisons with the cleaning effect of the existing wiper member 400 with reference to Fig. 8 and Fig. 9 explanation, the cleaning effect of the wiper member 200 of present embodiment is described.Existing wiper member 400 is except not having grooving 220, and other place and wiper member 200 are just the same.But, in the wiper member 400 that there is no grooving, the coating fluid flowing out along bottom surface 402 is subject to as bottom surface 402 and the surface tension acting in the edge part on 412 border and take-off rate can be slowed down above, coating fluid overflows from space S, and it is upper and become debris 420 to be attached to lip inclined-plane 34A with wire again.In addition, as shown in Fig. 9 (a), the base 406 contacting with gap nozzle 20 lines in wiper member 400 and hypotenuse 404A and 404B are arranged in next 410, and form bottom surface 402, inclined-plane 408 and 408B being connected on thickness direction with these limits, before 412 be set up according to the mode that is parallel to next 410.So, the wiper member 200 of present embodiment is owing to having grooving 220, and therefore cleaning ability improves significantly compared with existing wiper member 400.
In addition, if the cleaning of being undertaken by the slip of wiper member finishes,, as shown in Fig. 9 (b), do not there is the residual coating fluid of wiper member 400 meeting of grooving 220, and become residual coating fluid 426.In addition, the situation of ejection of solvent being cleaned to wiper member 400 by cleaning unit 140 also, the residual coating fluid 426 shown in Fig. 9 (b), similarly residual solvent.The viscosity of coating fluid or solvent, the higher such phenomenon of surface tension are more obvious.That be because, as bottom surface 402 and the surface tension acting in the edge part on 412 border above than the gravity composition acting on along bottom surface 402 is large, the outflow of coating fluid is prevented from.If there is grooving 220 as wiper member 200 of the present invention, irrelevant with the power relation of surface tension and gravity composition, but therefore the coating fluid contacting with grooving 220 by capillary action or solvent outflow can suppress coating fluid or dissolvent residual on bottom surface 202.Therefore,, in wiper member 200 of the present invention, can avoid the unfavorable condition producing in bottom surface 202 with around it due to coating fluid or dissolvent residual.
Then, with reference to Fig. 6, the variation of above-mentioned wiper member 200 is described.Wiper member 300 is except by the angle of wiper member 200
Figure BSA00000670777000181
outside acutangulating, other is local just the same with wiper member 200.By by angle
Figure BSA00000670777000182
acutangulate, hypotenuse 204A and 204B contact and become stronger with the line of lip inclined- plane 34A and 34B, and therefore, the high speed removal ability of adhering to coating fluid further improves.The effect of the cleaning by wiper member 300, by grooving 220 along bottom surface 202 and above the take-off rate of 212 coating fluids 152 that flow out increase, or after cleaning, the solvent of coating fluid or cleaning use does not have residual effect, just the same with wiper member 200.
In wiper member 200 and 300, coating fluid along bottom surface 202, grooving 220 and above 212 while flowing out with original take-off rate, as shown in Figure 5 and Figure 6, all need the top 124 of the topmost of the front support section 120 that keeps wiper member 200 and 300 to keep as the front side in slip direction (Ds, Y) to be configured in the downside of the grooving on gravity direction.Thus, as above in 212 of B side, in the lower position of gravity direction, keep wiper member 200 and 300 compared with grooving 220.Consequently, directly flow out from one end of the grooving 220 212 above as the solvent of coating fluid or scavenging solution, flow to induction face 122.If top 124 is to interfere on the position of grooving 220, can occur because coating fluid or solvent are hindered and take-off rate reduces or the phenomenon that do not flow out completely serious time from the outflow of grooving 220, therefore improper.
About the grooving 220 that is arranged on wiper member 200,300, preferably 0.2mm~2mm of its length L P1, more preferably 0.5mm~1.5mm, length L P2 is 0.2mm~3mm preferably, more preferably 1.5mm~2.5mm, angle θ c2 is 10 degree~80 degree preferably, more preferably 30 degree~70 degree.If less than these scopes, by capillary action, the speed that coating fluid or solvent flow out can be reduced, serious time, do not have capillary action completely, therefore coating fluid or solvent can remain in around bottom surface 202 and its.On the other hand, if larger than this scope, the rigidity of wiper member 200 and 300 declines, therefore base 206 contacts and dies down with respect to the line of lip inclined- plane 34A and 34B with hypotenuse 204A and 204B with respect to the line contact of discharging actinal surface 36, therefore remove at high speed the degradation of accompanying coating fluid, serious time, cannot remove accompanying coating fluid at all.
The direction that flows out from coating fluid or solvent,, while seeing grooving 220 in the direction that extend on grooving base 222, it has trilobal(cross)section.But it is not limited to this, can be formed as the rectangle using grooving base 222 as face or trapezoidal tetragonal cross section.In addition, grooving inclined- plane 224A and 224B can be also curved surfaces.
The material of wiper member 200 and 300 preferably has elastic macromolecule resin, for example, be synthetic rubber, can make base 206 contact with lip inclined-plane 34A and the simultaneously abundant ground wire of 34B with discharge actinal surface 36, hypotenuse 204A and 204B.As synthetic rubber, preferably have suitable elasticity and with respect to the resistance of coating fluid, be for example ethylene-propylene rubber(EPR), silicon rubber, isoprene-isobutylene rubber, FFKM (trade(brand)name " Kalrez " etc.).The rubber hardness C type spring loaded testing machine that represents extent of elasticity is measured, and preferably 50 °~90 °, more preferably 60 °~80 °.
If grooving 220 is applicable to the line by cleaning portion is made it to high rigidization with minimal large small bore and contacts strong and the high cleaning part of cleaning ability, effect performance is better.Therefore, as the shape of the applicable cleaning part of the present invention preferably, angle in wiper member 200 and 300
Figure BSA00000670777000191
preferably 90 degree following, more preferably 80 °~90 °, preferred 80 °~130 ° of angle beta, more preferably 90 °~120 °.
Then, describe the coating process of the slit type coater 1 that utilizes cleaning part of the present invention and cleaning method in detail.First,, if carry out the initial point involution of each operating member of slit type coater 1, each operating member will move to stand-by station.; platform 6 moves to the left end (position dotting) of Fig. 1, the origin position that gap nozzle 20 moves to topmost; and; wiping unit 100 moves, so that pallet 110 arrives the lower position of gap nozzle 20 from starting position (right-hand end of base station 2).Now, wiper member 200 on directions X, be gap nozzle 20 relief outlet 30 under position, but in the Y-direction as the long dimensional directions of gap nozzle 20, as shown in Fig. 2 (a), the cleaning starting position that is to leave a little from relief outlet 30.
Now, full to coating fluid in gap nozzle 20 at case 64, and the operation of getting rid of the interior residual air of gap nozzle 20 also finishes.The state of coating liquid supplying device 40 be now on liquid feeding device 52 be full of coating fluid 66, aspirating valve is closed, supply valve is unlocked, and piston 54 is positioned on position bottom, coating fluid 66 can be supplied at any time to the state of gap nozzle 20.
At first, jacking pin (not shown) is risen on the surface of platform 6, substrate A is placed on the top of jacking pin from shovel loader (not shown).Then, make general who has surrendered's substrate A under jacking pin be placed on platform 6 above, and absorption keeps simultaneously.Meanwhile make coating liquid supplying device 40 start working, thereby the coating fluid of predefined amount 66 is supplied to gap nozzle 20 from liquid-feeding pump 50, and coating fluid 66 is discharged to pallet 110 from gap nozzle 20.Now,, therefore can there is not the coating fluid decline of discharging from the relief outlet 30 of gap nozzle 20 and the situation of adhering in the not position under relief outlet 30 of wiper member 200 in the Y direction.
Stop after the supply of coating fluid 66, decline gap nozzle 20, wiper member 200 is contacted with lip inclined- plane 34A and 34B with the discharge actinal surface 36 of gap nozzle 20, then slide in the Y direction wiper member 200 until final position, clean along Y-direction being positioned near discharge actinal surface 36 relief outlet 30 of gap nozzle 20 and lip inclined-plane 34A and 34B.By such cleaning, also complete the internal passages of gap nozzle 20 until the initialize that the complete applied liquid of relief outlet 30 is filled.
After cleaning finishes, gap nozzle 20 is risen to origin position, make simultaneously wiping unit 100 to directions X move and involution on starting position (right-hand end of base station 2).Now, to stop at cleaning unit 140 under wiper member 200 from solvent nozzle 142 ejection of solvent, wiper member 200 is carried out to solvent cleaning, then, wiper member 200 is moved to the reverse direction of slip direction (Ds direction), thus by wiper member 200 involutions the cleaning starting position to Y-direction.
Confirm that wiping unit 100 is after the movement of starting position, start the mobile platform 6 of placing substrate A.Now, gap nozzle 20 is positioned at than on the high origin position in the position being coated with on above-below direction, and liquid-feeding pump 50 stops and in holding state.And substrate A measures substrate thickness during by thickness transducer 90.Then, when the coating start portion of substrate A arrive gap nozzle 20 relief outlet 30 under time stop platform 6.
Now, utilize the thickness data of measured substrate A to drive oscilaltion unit 70, make gap nozzle 20 decline and stop, so that gap between discharge actinal surface 36 and the substrate A of gap nozzle 20,, gap reaches predefined value.Under the state that gap nozzle 20 and platform 6 stop completely, make the piston 54 of liquid-feeding pump 50 increase with specific speed, discharge coating fluid 66 and between gap nozzle 20 and substrate A, form pearl B from gap nozzle 20, then platform 6 is started mobile with specific speed to directions X, thereby substrate A is started to be coated with coating fluid 66, form thus coated film C.
Then, if under the relief outlet 30 of the coating end position of substrate A position arrival gap nozzle 20 a little above, stop piston 54 and stop the supply of coating fluid, then, when the coating end position of substrate A arrive gap nozzle 20 relief outlet 30 under time, drive oscilaltion unit 70 and make gap nozzle 20 increase.Thus, the pearl B forming between substrate A and gap nozzle 20 is cut off and finishes to be coated with.
During this period, platform 6 continues action, stop, and the absorption of removing substrate A rises jacking pin and keeps substrate A in the time reaching home position.Now, unloaded machine (not shown) keeps below substrate A, and substrate A is carried to next operation.If substrate A is handed off on unloading machine, platform 6 jacking pin is declined and involution to origin position.Platform 6 involutions are after origin position, and mobile wiping unit 100 is so that pallet 110 arrives the lower position of the relief outlet 30 of gap nozzle 20.
After mobile end, open aspirating valve 44, close supply valve 42, and piston 54 is declined and coating fluid 66 is filled in liquid feeding device 52.After end-of-fill, stop piston 54, and close aspirating valve 44, unlatching supply valve 42, wait for the arrival of next substrate A, so repeatedly carry out identical action.As coating fluid, consider from coating, preferably viscosity is 1mPas~100mPas, more preferably 1mPas~50mPas, there is Newtonianism (Newtonian), use be applicable to have thixotropic coating fluid, the high solvent of volatility especially, for example, while being the coating fluid coating of PGMEA, N-BUTYL ACETATE, ethyl lactate etc. effective.
Specifically, as the example of coating fluid that can be applicable, black matrix, the RGB color pixel used except above-mentioned chromatic filter form with coating fluid, also have resist liquid, lagging material to become material etc. with cylindrical.As the applied parts of substrate, except using glass, can also use the metal sheets such as aluminium, pottery, silicon chip etc.
Further, the coating condition using as surface covered etc., surface covered is 10mm/s~600mm/s preferably, more preferably 100mm/s~400mm/s, as the preferably 100mm/s~1000mm/s of sliding velocity of the wiper member 200 and 300 of cleaning part, more preferably 200mm/s~600mm/s, the lip gap of gap nozzle is 50 μ m~1000 μ m preferably, more preferably 80 μ m/s~200 μ m/s, coating thickness preferably 1 μ m~50 μ m, more preferably 2 μ m~20 μ m under wet state.
Below, in order to confirm by the cleaning performance of the wiper member of embodiments of the present invention, after actual manufacture wiper member, carried out test 1.Its content is narrated below.
< tests 1>
The long dimensional directions length of what gap nozzle 20 used is relief outlet 30, for the gap of 1100mm, slit 28 is 100 μ m, and can form the gap nozzle 20 that width is the coated film of 1100mm on substrate.The angle γ n (with reference to Fig. 4 (b)) that the lip inclined-plane 34A that the length of the coating direction (X) of the discharge actinal surface 36 of gap nozzle is seen for 0.6mm, in the long dimensional directions of gap nozzle 20 and 34B form is 90 °.The wiper member using as the gap nozzle 20 with such discharge actinal surface 36 and lip inclined- plane 34A and 34B, has adopted as the parts 300 shown in Fig. 6 of the test film 1 of subjects.
Specifically, in Fig. 6, thickness T=5mm, the inclined-plane 208A of test film 1 (wiper member 300) and 208B and below 210 angles that form
Figure BSA00000670777000221
the length L 4=25mm of the length L 3=20mm of the vertical line direction of length L 1=0.6mm, the hypotenuse 204A of long dimensional directions (with consistent as the directions X of coating direction) of wiper member 300 on the angle γ c=81.8 between hypotenuse 204A and 204B °, bottom surface 202 and 210 angle beta=90 that form below °, base 206 and the length L 2=5mm of the vertical line direction (above-below direction) of 204B, wiper member 300, the long dimensional directions of wiper member 300.
212 and below 210 form abreast above, about grooving 220, LP1=0.9mm, LP2=2mm, angle θ c2 are 50 °.By above-mentioned size, grooving 220 forms with respect to what arrange with mode vertical in this length dimensional directions on the intermediate point of the long dimensional directions of wiper member 300 vertical symmetrically.In addition, test film 1 (wiper member 300) is using the ethylene-propylene rubber(EPR) of 60 ° of rubber hardnesses as materials'use, and manufactures the shape being stipulated by above-mentioned parameter by mould molding.
Test film 1 (wiper member 300) is arranged on support 112, so that 210 spend with respect to vertical direction tilt angle theta=30 below.The angle that inclined-plane 208A when test film 1 under this state (wiper member 300) contacts with gap nozzle 20 and 208B and lip inclined- plane 34A and 34B form is 7 °, angle [alpha]=30 ° that bottom surface 202 and discharge actinal surface 36 form.When gap nozzle 20 contacts with test film 1 (wiper member 300), gap nozzle is dropped to the position that the shrinkage of spring 118 is 1mm.
< evaluates >
Then, used chromatic filter R look (redness) to use coating fluid as the coating fluid of the cleaning ability of evaluation test sheet 1 (wiper member 300).R look coating fluid be viscosity be 3mPas, using acrylic resin as tackiness agent, as solvent use PGMEA (monomethyl ether propylene glycol acetic ester) photosensitive coating fluid, solid point concentration is 20%.The case 64 that R look is filled in to slit type coater 1 with coating fluid is to gap nozzle 20.In addition, after the cleaning by wiper member 300, from nozzle 142 with the angle fan shape of 60 ° implement solvent cleaning to wiper member 300 ejection of solvent.Cleaning solvent uses PGMEA, sprays 100 μ L while cleaning at every turn.
Under above-mentioned condition, carry out the evaluation of the cleansing power of test film 1 (wiper member 300) for four projects (evaluating 1~evaluation 4) of the following stated.
(1) evaluate 1 (the cleaning merit rating in high-speed condition)
The R look of discharging 2000 μ L from gap nozzle, with coating fluid, makes wiper member 300 contact with gap nozzle 20, and slides with the speed of 500mm/s to Y-direction.Such action repeats 100 times, then observes and cleans the R look residual situation of coating fluid and the abrasive conditions of wiper member 300 of discharging afterwards for 10 times and 100 times in actinal surface 36 and lip inclined- plane 34A and 34B.
(2) the residual condition evaluation of the coating fluid on evaluation 2 (test films 1 (wiper member 300) after cleaning))
Based on evaluate 1, after cleaning 10 times and 100 times, observe the bottom surface 202 of wiper member 300 and the residual situation of its coating fluid of R look around.
(3) evaluate 3 (the residual condition evaluations of the solvent after the solvent cleaning of wiper member 300)
Based on evaluate 1, after solvent cleaning 10 times and 100 times, observe the bottom surface 202 of wiper member 300 and the residual situation of its solvent for cleaning around.
(4) evaluate 4 (coating is evaluated)
Based on evaluate 1, after 10 times and 100 times clean, being 0.7mm at 1100 × 1300mm and thickness is coated with take thickness 10 μ m, surface covered as the condition of 150mm/s under wet state with coating fluid according to coating R look without whole of alkaline glass substrate is upper.Gap between gap nozzle 20 and substrate is 150 μ m.Substrate after coating is dried with the vacuum-drying that is decompressed to 60Pa, and evaluates the thickness precision U of coating direction (X) and the situation of observing coated face.In the region except the 10mm of end, thickness precision U calculates by U=(maximum value-minimum value)/(2 × mean value) × 100 (%).
The result of evaluation 1~evaluation 4 of carrying out for test film 1 (wiper member 300) is described with reference to Fig. 7.In Fig. 7, what table T represented is situation about comparing for the cleaning ability of test film 1, about evaluation 1~evaluation 4 and comparison test 1.
< comparison test 1>
Formation in comparison test sheet 1 is to remove grooving 220 from test film 1 (wiper member 300).Utilize this comparison test sheet 1 with the identical condition of test film 1 under clean and be coated with, thereby carried out identical cleaning ability and the evaluation 1 of coating~evaluation 4.
Evaluate in 1, about test film 1, after clean 10 times and after cleaning 100 times, on discharge actinal surface 36 and lip inclined- plane 34A and 34B, all there is no residual R look coating fluid.Consequently, do not observe the situation that wiper member 300 weares and teares.In addition, in comparison test sheet 1, there is no residual R look coating fluid although discharge on actinal surface 36, the top of lip inclined- plane 34A and 34B remains R look coating fluid in the whole long dimensional directions of gap nozzle 20.Residual R look is that cleaning is 1mm after 10 times with the line width of coating fluid, is 2mm after cleaning 100 times.Answer in contrast ground, length is arranged at the top of the hypotenuse of cleaning part is the wearing and tearing that are equivalent to the line width of residual R look coating fluid.
About evaluating 2, in test film 1, around the bottom surface 202 of wiper member 300 and its, there is no residual R look coating fluid.In addition, in comparison test sheet 1, around wiper member 200 and its, remain R look coating fluid.
About evaluating 3, in test film 1, there is no the PGMEA of the residual solvent as cleaning use around at the bottom surface 202 of wiper member 300 and its.In addition, in comparison test sheet 1, remain the PGMEA as the solvent of cleaning use around in the bottom surface of wiper member and its.
About evaluating 4, in test film 1, on coated face, there is no defect completely, by being all identical color according to the whole face of the visual observations of transmission.Measuring the film thickness of coating direction of representative central part the result that calculates thickness precision U is, removes the region of 10mm from edge of substrate, and mean value is 2.0 μ m, and thickness precision U is below 2%.On the other hand, in comparison test sheet 1, by according to the visual observations of transmission to coated face be equivalent to cleaning start portion and coating start portion position in a little color have thin out.The film thickness of the coating direction of measurement including this part the result that calculates thickness precision U be, removes the region of 10mm from edge of substrate, and mean value is that 1.97 μ m, maximum value are 2.04 μ m, minimum value 1.8 μ m, and thickness precision U is below 6%.
< embodiment >
Utilize slit type coater 1 to manufacture chromatic filter.Wiper member 300 on gap nozzle 20 and wiper member shown in use-testing 1.No matter for which kind of coating fluid, the condition of output 1000 μ L, the sliding velocity 500mm/s of the coating fluid from gap nozzle before cleaning, before each coating, cleaning is used the gap nozzle 20 of this wiper member 300.The liquid cleaning solvent of the wiper member after cleaning is also to clean using PGMEA as scavenging solution and with the emitted dose of 100 μ L.
At first, to clean 1100 × 1300mm and thickness be 0.7mm without after alkaline glass substrate, long dimensional directions (Y) using substrate short brink as gap nozzle, and take the thickness of the state that wets, the gap between 10 μ m, gap nozzle and substrate is coated with as the speed of 150 μ m, 150mm/s by black matrix coating fluid.Now, in the black matrix coating fluid being coated with, use metatitanic acid nitride, use acrylic resin, use PGMEA as solvent as tackiness agent as light screening material, used by solid point concentration be adjusted into 10% and viscosity be adjusted into the photosensitive coating fluid of 4mPas.In addition, the treatment time of coating is 60 seconds.
The substrate of vacuum-drying by just reaching 65Pa for 30 seconds after to coating carries out after the vacuum-drying of 60 seconds, on the hot plate of 100 ℃ further dry 10 minutes.Then expose, develop, peel off, then on the hot plate of 230 degree, heat 30 minutes, by such processing, lattice shape and the thickness of having manufactured pitch on the width of substrate and be pitch in the long dimensional directions of 254 μ m, substrate and be 85 μ m, line width and be 15 μ m are the black matrix film of 1 μ m.In addition, state measurement coating thickness before dried grid apperance forms, in the time that the region of removing end 10mm calculates thickness precision U by formula U=(maximum value-minimum value)/(2 × mean value) × 100 (%), on substrate direction of travel, width, be all below 3%.
Then, after wet-cleaned, be, that gap between 20 μ m, gap nozzle and substrate is the condition coating R look coating fluid that 150 μ m, surface covered are 150mm/s according to R look with coating fluid thickness.R look coating fluid is using acrylic resin as tackiness agent, using PGMEA as solvent, using Pigment red 177 as pigment, mixes with solid point concentration 10%, further viscosity is adjusted into the photosensitive coating fluid of 5mPas.Undertaken after the vacuum-drying of 60 seconds further on the hot plate of 100 ℃ dry 10 minutes by within 30 seconds, just reaching the vacuum-drying of 65Pa to being coated with the substrate of coated film of 20 μ m.
Then expose, develop, peel off, only in R color pixel portion, residual thickness is the R look coated film of 2 μ m, and on the hot plate of 230 ℃, heats 30 minutes, processes thus.Then, being formed with on the substrate of coated film of black matrix, R look, is that gap between 20 μ m, gap nozzle and substrate is the condition coating G look coating fluid that 150 μ m, surface covered are 150mm/s according to G look with coating fluid thickness.Undertaken after the vacuum-drying of 60 seconds further on the hot plate of 100 ℃ dry 10 minutes by within 30 seconds, just reaching the vacuum-drying of 65Pa to being coated with the substrate of coated film of 20 μ m.
Then expose, develop, peel off, only in G pixel portions, residual thickness is the G look coated film of 2 μ m, and on the hot plate of 230 ℃, heats 30 minutes, processes thus.Further, on the substrate of coated film that is formed with black matrix, R look, G look, be that gap between 20 μ m, gap nozzle and substrate is the condition coating B look coating fluid that 150 μ m, surface covered are 150mm/s according to B look with coating fluid thickness.Undertaken after the vacuum-drying of 60 seconds further on the hot plate of 100 ℃ dry 10 minutes by within 30 seconds, just reaching the vacuum-drying of 65Pa to being coated with the substrate of coated film of 20 μ m.
Then expose, develop, peel off, only in B pixel portions, residual thickness is the B coated film of 2 μ m, and on the hot plate of 230 ℃, heats 30 minutes, processes thus.In addition, G look coating fluid is, with R look coating fluid, pigment is become to pigment green 36, and with solid point concentration 10%, viscosity is adjusted into the coating fluid of 5mPas.B look coating fluid is, with R look coating fluid, pigment is become to pigment Blue 15, and with solid point concentration 10%, viscosity is adjusted into the coating fluid of 5mPas.Treatment time when R, G, the coating of B look is all 60 seconds.In addition, coating quality is as follows, after each color is all immaculate, dry to each color measuring film thickness, in the time that the region of removing end 10mm calculates thickness precision U by formula U=(maximum value-minimum value)/(2 × mean value) × 100 (%), on substrate direction of travel and width, be all below 3%.
Finally, with sputtering method, ITO (Indium Tin Oxide) is adhered to.With 1000 chromatic filters of the method manufacture.The chromatic filter obtaining is immaculate qualitatively, is specially, and is not coated with irregularly from the product area of 10mm is removed in substrate end, and colourity is also even, and does not also clean the defect of grain defect causing etc.Further, by this wave filter, with to be formed with the substrate of tft array overlapping, in baking box, limit adds flanging with the temperature heating of 160 ℃ 90 minutes, curing sealant thus.On this unit, inject after liquid crystal, seal liquid crystal injecting port by ultraviolet curable resin.Then, polarization plate is sticked on the outside of two glass substrates of unit, further, obtained unit is carried out to modularization, complete thus liquid-crystal display.The liquid-crystal display obtaining be color depth evenly and there is no grain defect, immaculate qualitatively.
The present invention can be used in colour liquid crystal display device chromatic filter and array substrate, for plasma display, on the substrate of panel, optical filter etc., form in the manufacture of various parts of display of even and high-quality coated film.

Claims (4)

1. a cleaning part, there is the first surface relatively put and second, and contact with the discharge actinal surface of a upwardly extending relief outlet in side at spreader and two adjacent surfaces of this discharge actinal surface on one side one side at this square upward sliding so that this discharge actinal surface and these two adjacent surfaces are cleaned, it is characterized in that, this cleaning part comprises:
Cleaning portion, is arranged in described first surface side, and contacts with described two adjacent surfaces with described discharge actinal surface simultaneously;
Multiple outflow path faces, take described cleaning portion as starting point, extend to described second side;
Wherein, described outflow path mask has inclined-plane and bottom surface,
On the bottom surface of described outflow path face, cross over the described bottom surface and described the second face that are mutually close to and be provided with grooving, and
Described grooving has trilobal(cross)section, and described bottom surface and described second base by described grooving are communicated with point-blank.
2. the cleaning method of a spreader, it is characterized in that, cleaning with scavenging solution after the cleaning portion of cleaning part claimed in claim 1, when this cleaning portion is contacted with described two adjacent surfaces with described discharge actinal surface, sliding and described spreader is cleaned to a described direction
In described second side, this cleaning part is remained on gravity direction on the position lower than this grooving, so that coating fluid and scavenging solution flow out from one end of this grooving.
3. a clearing apparatus, is characterized in that, when cleaning part according to claim 1 is contacted with described two adjacent surfaces with described discharge actinal surface slide and clean, this device comprises:
Holder, keeps described cleaning part;
Running gear, makes described cleaning part and described holder slide to a described direction;
Cleaning part washing unit, cleans the cleaning portion of cleaning part with scavenging solution;
Wherein, described holder keeps the position lower than described grooving on gravity direction in described second side.
4. a manufacture method for parts of display, is characterized in that, utilizes the cleaning method described in claim 2 to manufacture parts of display.
CN201210034636.9A 2011-03-07 2012-02-16 Cleaning component, cleaning method of coater, cleaning device and manufacture method of component for display Active CN102674702B (en)

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