JP2001252603A5 - - Google Patents

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Publication number
JP2001252603A5
JP2001252603A5 JP2000065453A JP2000065453A JP2001252603A5 JP 2001252603 A5 JP2001252603 A5 JP 2001252603A5 JP 2000065453 A JP2000065453 A JP 2000065453A JP 2000065453 A JP2000065453 A JP 2000065453A JP 2001252603 A5 JP2001252603 A5 JP 2001252603A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000065453A
Other languages
Japanese (ja)
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JP2001252603A (en
JP4645926B2 (en
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Publication date
Application filed filed Critical
Priority to JP2000065453A priority Critical patent/JP4645926B2/en
Priority claimed from JP2000065453A external-priority patent/JP4645926B2/en
Publication of JP2001252603A publication Critical patent/JP2001252603A/en
Publication of JP2001252603A5 publication Critical patent/JP2001252603A5/ja
Application granted granted Critical
Publication of JP4645926B2 publication Critical patent/JP4645926B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000065453A 2000-03-09 2000-03-09 Coating head cleaning method and cleaning apparatus, and color filter manufacturing method and manufacturing apparatus using them Expired - Lifetime JP4645926B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000065453A JP4645926B2 (en) 2000-03-09 2000-03-09 Coating head cleaning method and cleaning apparatus, and color filter manufacturing method and manufacturing apparatus using them

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000065453A JP4645926B2 (en) 2000-03-09 2000-03-09 Coating head cleaning method and cleaning apparatus, and color filter manufacturing method and manufacturing apparatus using them

Publications (3)

Publication Number Publication Date
JP2001252603A JP2001252603A (en) 2001-09-18
JP2001252603A5 true JP2001252603A5 (en) 2007-04-26
JP4645926B2 JP4645926B2 (en) 2011-03-09

Family

ID=18584979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000065453A Expired - Lifetime JP4645926B2 (en) 2000-03-09 2000-03-09 Coating head cleaning method and cleaning apparatus, and color filter manufacturing method and manufacturing apparatus using them

Country Status (1)

Country Link
JP (1) JP4645926B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100615170B1 (en) * 2002-06-22 2006-08-25 삼성에스디아이 주식회사 Cleaning apparatus for coating die
JP4247890B2 (en) * 2003-08-12 2009-04-02 東京エレクトロン株式会社 Coating nozzle and coating device
JP4808147B2 (en) 2006-12-15 2011-11-02 中外炉工業株式会社 Coating die cleaning device
CN108580185B (en) * 2018-05-15 2019-11-19 苏州赛腾精密电子股份有限公司 A kind of remaining glue cleaning mechanism for packing element syringe needle

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0780385A (en) * 1993-09-10 1995-03-28 Hirata Corp Coating head cleaning device and cleaning method of coating head
JPH0780386A (en) * 1993-09-10 1995-03-28 Hirata Corp Cleaning method of coating head and coating head cleaning device
JP3306838B2 (en) * 1993-12-14 2002-07-24 東レ株式会社 CLEANING METHOD FOR CURTAIN FLOW COATER AND METHOD FOR PRODUCING COATING FILM FOR COLOR FILTER
JPH07289973A (en) * 1994-04-21 1995-11-07 Dainippon Screen Mfg Co Ltd Coating apparatus and coating method
JPH07328516A (en) * 1994-06-08 1995-12-19 Dainippon Screen Mfg Co Ltd Treating-liquid coating apparatus
JP3757992B2 (en) * 1996-01-18 2006-03-22 東レ株式会社 Coating apparatus and coating method, and color filter manufacturing method and manufacturing apparatus
JPH10216598A (en) * 1997-02-04 1998-08-18 Toray Ind Inc Method and device for coating and method and device for manufacture of color filter
JP3679904B2 (en) * 1997-08-29 2005-08-03 大日本スクリーン製造株式会社 NOZZLE CLEANING DEVICE AND COATING DEVICE HAVING THE NOZZLE CLEANING DEVICE
JP4371337B2 (en) * 2000-01-27 2009-11-25 大日本印刷株式会社 Coating nozzle cleaning device

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