TW200515070A - Thin film transistor substrate, flat panel display including the same, and manufacturing method thereof - Google Patents

Thin film transistor substrate, flat panel display including the same, and manufacturing method thereof

Info

Publication number
TW200515070A
TW200515070A TW093128209A TW93128209A TW200515070A TW 200515070 A TW200515070 A TW 200515070A TW 093128209 A TW093128209 A TW 093128209A TW 93128209 A TW93128209 A TW 93128209A TW 200515070 A TW200515070 A TW 200515070A
Authority
TW
Taiwan
Prior art keywords
layer
ito
present
manufacturing
thin film
Prior art date
Application number
TW093128209A
Other languages
English (en)
Inventor
Sang-Gab Kim
Je-Min Lee
Kwan-Young Cho
Jong-Tae Jeong
In-Ho Song
Hee-Hwan Choe
Sung-Chul Kang
Ho-Min Kang
Beohm-Rock Choi
Joon-Hoo Choi
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020030064816A external-priority patent/KR20050028531A/ko
Priority claimed from KR1020030066484A external-priority patent/KR100984354B1/ko
Priority claimed from KR1020040024951A external-priority patent/KR20050099765A/ko
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of TW200515070A publication Critical patent/TW200515070A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/81—Anodes
    • H10K50/816—Multilayers, e.g. transparent multilayers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/13629—Multilayer wirings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/351—Thickness
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW093128209A 2003-09-18 2004-09-17 Thin film transistor substrate, flat panel display including the same, and manufacturing method thereof TW200515070A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020030064816A KR20050028531A (ko) 2003-09-18 2003-09-18 박막 트랜지스터 기판 및 그 제조 방법
KR1020030066484A KR100984354B1 (ko) 2003-09-25 2003-09-25 박막 트랜지스터 기판, 이를 포함하는 액정 표시 장치 및그 제조 방법
KR1020040024951A KR20050099765A (ko) 2004-04-12 2004-04-12 박막 트랜지스터 표시판, 이를 포함하는 평판 디스플레이표시 장치 및 그 제조 방법

Publications (1)

Publication Number Publication Date
TW200515070A true TW200515070A (en) 2005-05-01

Family

ID=34317267

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093128209A TW200515070A (en) 2003-09-18 2004-09-17 Thin film transistor substrate, flat panel display including the same, and manufacturing method thereof

Country Status (4)

Country Link
US (1) US7482208B2 (zh)
JP (1) JP2007506139A (zh)
TW (1) TW200515070A (zh)
WO (1) WO2005027187A2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI645560B (zh) * 2013-10-10 2018-12-21 日商精工愛普生股份有限公司 發光裝置及包含其之電子機器

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KR101078360B1 (ko) * 2004-11-12 2011-10-31 엘지디스플레이 주식회사 폴리형 액정 표시 패널 및 그 제조 방법
US7898623B2 (en) * 2005-07-04 2011-03-01 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic device and method of driving display device
CN100422833C (zh) * 2006-09-27 2008-10-01 友达光电股份有限公司 液晶显示面板及其制造方法
CN100432811C (zh) * 2006-11-29 2008-11-12 北京京东方光电科技有限公司 薄膜晶体管液晶显示器像素结构及其制造方法
JP4946458B2 (ja) * 2007-01-25 2012-06-06 ソニー株式会社 表示装置
JP5303119B2 (ja) * 2007-06-05 2013-10-02 株式会社ジャパンディスプレイ 半導体装置
JP5426138B2 (ja) * 2008-10-17 2014-02-26 株式会社ジャパンディスプレイ 表示装置及びその製造方法
JP5740169B2 (ja) * 2010-02-19 2015-06-24 株式会社半導体エネルギー研究所 トランジスタの作製方法
WO2011114595A1 (ja) * 2010-03-16 2011-09-22 シャープ株式会社 表示パネル用基板、その製造方法、表示パネル及び表示装置
KR101692954B1 (ko) 2010-05-17 2017-01-05 삼성디스플레이 주식회사 유기 발광 디스플레이 장치 및 그 제조 방법
CN103649889A (zh) 2011-07-25 2014-03-19 松下电器产业株式会社 显示装置
KR102118332B1 (ko) 2013-08-12 2020-06-04 삼성디스플레이 주식회사 표시 기판 및 표시 기판의 제조 방법
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CN108735777B (zh) * 2017-04-21 2020-11-06 群创光电股份有限公司 显示装置
CN106896608B (zh) * 2017-04-28 2020-03-06 京东方科技集团股份有限公司 阵列基板、显示面板及显示装置
US10459300B2 (en) * 2017-05-18 2019-10-29 Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd Array substrate and a method for fabricating the same, a liquid crystal display panel
CN110828487B (zh) * 2019-11-19 2022-05-20 京东方科技集团股份有限公司 一种显示基板及其制作方法、显示装置
CN114355659B (zh) * 2022-03-21 2022-06-14 南昌虚拟现实研究院股份有限公司 基于阵列基板结构的光学显示器件制作方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI645560B (zh) * 2013-10-10 2018-12-21 日商精工愛普生股份有限公司 發光裝置及包含其之電子機器
TWI681559B (zh) * 2013-10-10 2020-01-01 日商精工愛普生股份有限公司 發光裝置及包含其之電子機器

Also Published As

Publication number Publication date
WO2005027187A3 (en) 2005-06-09
US20070065991A1 (en) 2007-03-22
JP2007506139A (ja) 2007-03-15
WO2005027187A2 (en) 2005-03-24
US7482208B2 (en) 2009-01-27

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