SG66387A1 - Pressure type flow rate control apparatus - Google Patents

Pressure type flow rate control apparatus

Info

Publication number
SG66387A1
SG66387A1 SG1997002751A SG1997002751A SG66387A1 SG 66387 A1 SG66387 A1 SG 66387A1 SG 1997002751 A SG1997002751 A SG 1997002751A SG 1997002751 A SG1997002751 A SG 1997002751A SG 66387 A1 SG66387 A1 SG 66387A1
Authority
SG
Singapore
Prior art keywords
flow rate
control apparatus
rate control
pressure type
type flow
Prior art date
Application number
SG1997002751A
Other languages
English (en)
Inventor
Tadahiro Ohmi
Koji Nishino
Nobukazu Ikeda
Akihiro Morimoto
Yukio Minami
Koji Kawada
Ryosuke Dohi
Hiroyuki Fukuda
Original Assignee
Fujikin Kk
Tadahiro Ohmi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk, Tadahiro Ohmi filed Critical Fujikin Kk
Publication of SG66387A1 publication Critical patent/SG66387A1/en

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7759Responsive to change in rate of fluid flow
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7761Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Control Of Fluid Pressure (AREA)
SG1997002751A 1996-08-12 1997-08-01 Pressure type flow rate control apparatus SG66387A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21233096A JP3580645B2 (ja) 1996-08-12 1996-08-12 圧力式流量制御装置

Publications (1)

Publication Number Publication Date
SG66387A1 true SG66387A1 (en) 1999-07-20

Family

ID=16620759

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997002751A SG66387A1 (en) 1996-08-12 1997-08-01 Pressure type flow rate control apparatus

Country Status (9)

Country Link
US (1) US5816285A (ja)
EP (1) EP0824232B1 (ja)
JP (1) JP3580645B2 (ja)
KR (1) KR100248961B1 (ja)
CA (1) CA2212547C (ja)
DE (1) DE69700733T2 (ja)
IL (1) IL121494A (ja)
SG (1) SG66387A1 (ja)
TW (1) TW353730B (ja)

Families Citing this family (89)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5902927A (en) * 1995-12-01 1999-05-11 Perception Incorporated Fluid metering apparatus and method
US6076542A (en) * 1995-12-01 2000-06-20 Perception Incorporated Fluid metering method
US6104964A (en) * 1997-02-06 2000-08-15 Matsushita Electric Industrial Co., Ltd. Processing rate calculation apparatus, a processing rate calculation method, and a computer readable recording medium having thereon a processing rate calculation program
US6026834A (en) * 1997-10-17 2000-02-22 Azima; Faramarz Fluid mass flow controller device and method
JPH11212653A (ja) * 1998-01-21 1999-08-06 Fujikin Inc 流体供給装置
WO1999042793A1 (fr) * 1998-02-23 1999-08-26 Smc Kabushiki Kaisha Procede et appareil de mesure de consommation de fluide
US6022483A (en) * 1998-03-10 2000-02-08 Intergrated Systems, Inc. System and method for controlling pressure
SE9801588D0 (sv) * 1998-05-05 1998-05-05 Swiss Fed Inst Of Tech Zuerich Electromagnetic valve for gaseous fluids
JP3522535B2 (ja) * 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
JP3522544B2 (ja) * 1998-08-24 2004-04-26 忠弘 大見 流体可変型流量制御装置
JP3684307B2 (ja) * 1998-10-19 2005-08-17 シーケーディ株式会社 ガス供給制御装置
EP1096351A4 (en) * 1999-04-16 2004-12-15 Fujikin Kk FLUID SUPPLY DEVICE OF THE PARALLEL BYPASS TYPE, AND METHOD AND DEVICE FOR CONTROLLING THE FLOW OF A VARIABLE FLUID TYPE PRESSURE SYSTEM USED IN SAID DEVICE
JP3387849B2 (ja) * 1999-05-10 2003-03-17 株式会社フジキン フローファクターによる流体可変型流量制御方法およびその装置
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6581623B1 (en) * 1999-07-16 2003-06-24 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
US6443174B2 (en) 2000-07-08 2002-09-03 Daniel T. Mudd Fluid mass flow control valve and method of operation
US6561218B2 (en) 2000-07-25 2003-05-13 Fugasity Corporation Small internal volume fluid mass flow control apparatus
US6539968B1 (en) 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
WO2002061179A1 (en) * 2001-01-19 2002-08-08 Tokyo Electron Limited Method and apparatus for gas injection system with minimum particulate contamination
KR20040024854A (ko) * 2001-04-24 2004-03-22 셀레리티 그룹 아이엔씨 질량유량 제어장치를 위한 시스템 및 방법
US6704682B2 (en) * 2001-07-09 2004-03-09 Angela E. Summers Dual sensor process pressure switch having high-diagnostic one-out-of-two voting architecture
US6711956B2 (en) * 2001-10-31 2004-03-30 Macronix International Co., Ltd. Method and apparatus for regulating exhaust pressure in evacuation system of semiconductor process chamber
DE10154352B4 (de) * 2001-11-06 2015-09-17 Asco Numatics Gmbh Dosiervorrichtung zum Dosieren eines strömenden Mediums
JP4102564B2 (ja) 2001-12-28 2008-06-18 忠弘 大見 改良型圧力式流量制御装置
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
US7104275B2 (en) * 2002-04-01 2006-09-12 Emerson Electric Co. Pinch valve
FR2838839B1 (fr) 2002-04-19 2004-07-09 Olicorp Sarl Dispositif de regulation du debit et/ou de la pression d'un fluide
EP1523701A2 (en) * 2002-07-19 2005-04-20 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
JP4137612B2 (ja) * 2002-12-02 2008-08-20 株式会社フジキン レイノルズ数と流出係数の対応関係の測定方法
TWI344525B (en) * 2003-01-17 2011-07-01 Applied Materials Inc Combination manual/pneumatics valve for fluid control assembly
JP4195819B2 (ja) * 2003-01-17 2008-12-17 忠弘 大見 弗化水素ガスの流量制御方法及びこれに用いる弗化水素ガス用流量制御装置
JP4204400B2 (ja) 2003-07-03 2009-01-07 忠弘 大見 差圧式流量計及び差圧式流量制御装置
KR100849155B1 (ko) * 2003-11-20 2008-07-30 바이킹 테크놀러지스, 엘.씨. 전기-기계식 액추에이터를 위한 통합적 열 보상 장치 및방법
JP2005307233A (ja) * 2004-04-19 2005-11-04 Tokyo Electron Ltd 成膜装置及び成膜方法及びプロセスガスの供給方法
US7117104B2 (en) * 2004-06-28 2006-10-03 Celerity, Inc. Ultrasonic liquid flow controller
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
JP4560394B2 (ja) * 2004-12-13 2010-10-13 長州産業株式会社 薄膜形成用分子供給装置
US9921089B2 (en) 2005-06-27 2018-03-20 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9383758B2 (en) 2005-06-27 2016-07-05 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
JP4856905B2 (ja) 2005-06-27 2012-01-18 国立大学法人東北大学 流量レンジ可変型流量制御装置
US7866337B2 (en) * 2005-07-08 2011-01-11 Entegris, Inc. Chemically inert flow controller with non-contaminating body
CN101258351A (zh) * 2005-07-08 2008-09-03 安格斯公司 具有无污染本体的化学惰性流量控制器
JP2007034667A (ja) 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット
WO2007021883A1 (en) * 2005-08-12 2007-02-22 Celerity, Inc. Ultrasonic flow sensor
JP4690827B2 (ja) * 2005-08-26 2011-06-01 株式会社フジキン ガスケット型オリフィス及びこれを用いた圧力式流量制御装置
JP5283312B2 (ja) * 2005-08-31 2013-09-04 トーヨーコーケン株式会社 エアー式荷役機械及びその制御方法
JP2007133829A (ja) * 2005-11-14 2007-05-31 Hamlet Motoyama Japan:Kk 流体制御装置と圧力調節弁と制御方法
JP4814706B2 (ja) * 2006-06-27 2011-11-16 株式会社フジキン 流量比可変型流体供給装置
JP5143543B2 (ja) * 2007-08-30 2013-02-13 株式会社酉島製作所 ポンプの軸受診断装置及びその方法
JP5054500B2 (ja) 2007-12-11 2012-10-24 株式会社フジキン 圧力制御式流量基準器
JP4819028B2 (ja) * 2007-12-21 2011-11-16 株式会社酉島製作所 ポンプの軸受診断装置及びその方法
KR101162546B1 (ko) * 2008-05-21 2012-07-05 가부시키가이샤 후지킨 압력식 유량 제어 장치를 이용한 유체의 비연속식 유량 스위칭 제어 방법
JP5408916B2 (ja) * 2008-07-08 2014-02-05 サーパス工業株式会社 差圧式流量計及び流量コントローラ
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
JP5209524B2 (ja) * 2009-02-05 2013-06-12 サーパス工業株式会社 流量計および流量コントローラ
US9157643B2 (en) 2010-10-14 2015-10-13 Fimcim S.P.A. Conditioning plant
KR101550255B1 (ko) 2011-05-10 2015-09-04 가부시키가이샤 후지킨 유량 모니터 부착 압력식 유량 제어 장치와, 이것을 사용한 유체 공급계의 이상 검출 방법 및 모니터 유량 이상 시의 처치 방법
JP5755958B2 (ja) 2011-07-08 2015-07-29 株式会社フジキン 半導体製造装置の原料ガス供給装置
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
JP5890984B2 (ja) * 2011-08-30 2016-03-22 株式会社フジキン 流体制御装置
JP5647083B2 (ja) 2011-09-06 2014-12-24 株式会社フジキン 原料濃度検出機構を備えた原料気化供給装置
TWI458843B (zh) * 2011-10-06 2014-11-01 Ind Tech Res Inst 蒸鍍裝置與有機薄膜的形成方法
DE102012109206B4 (de) * 2011-11-30 2019-05-02 Hanon Systems Ventil-Sensor-Anordnung
US9557744B2 (en) * 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
JP5938557B2 (ja) * 2012-04-03 2016-06-22 パナソニックIpマネジメント株式会社 水素発生装置
JP5665793B2 (ja) * 2012-04-26 2015-02-04 株式会社フジキン 可変オリフィス型圧力制御式流量制御器
DE102012017501A1 (de) 2012-09-05 2014-03-06 Astrium Gmbh Vorrichtung zur Druck- und/oder Massenstromregelung für einen Raumfahrtantrieb
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6216389B2 (ja) * 2013-10-31 2017-10-18 株式会社フジキン 圧力式流量制御装置
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
US9904299B2 (en) * 2015-04-08 2018-02-27 Tokyo Electron Limited Gas supply control method
CN108780332B (zh) * 2016-02-29 2021-10-01 株式会社富士金 流量控制装置
US10684159B2 (en) * 2016-06-27 2020-06-16 Applied Materials, Inc. Methods, systems, and apparatus for mass flow verification based on choked flow
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7068712B2 (ja) * 2017-07-31 2022-05-17 株式会社フジキン ガス供給システム
JP7222542B2 (ja) * 2018-05-31 2023-02-15 株式会社フジキン 流体封止装置及び圧力検出器校正装置
JP7148302B2 (ja) * 2018-07-17 2022-10-05 株式会社堀場エステック 流量制御装置
US11675374B2 (en) 2018-10-26 2023-06-13 Illinois Tool Works Inc. Mass flow controller with advanced zero trending diagnostics
US11914407B2 (en) * 2019-04-25 2024-02-27 Fujikin Incorporated Flow rate control device
WO2021101855A1 (en) * 2019-11-18 2021-05-27 Swagelok Company Arrangements and methods for controlled valve flow rate
KR20230150309A (ko) 2021-03-03 2023-10-30 아이커 시스템즈, 인크. 매니폴드 조립체를 포함하는 유체 유동 제어 시스템
CN113433982B (zh) * 2021-08-26 2022-01-14 常州铭赛机器人科技股份有限公司 微量液体出液的压力控制装置及其压力控制方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1515676A (fr) * 1967-03-28 1968-03-01 Siemens Ag Dispositif pour régler et maintenir constant le débit massique des gaz
US4431020A (en) * 1981-10-08 1984-02-14 Marotta Scientific Controls, Inc. Flow-control system having a wide range of flow-rate control
DE3247325C2 (de) * 1982-12-21 1990-02-15 Grünbeck Wasseraufbereitung GmbH, 8884 Höchstädt Rohrtrenner
JPS59131663U (ja) * 1983-02-24 1984-09-04 株式会社東芝 可変オリフイス装置
US4508127A (en) * 1983-03-30 1985-04-02 The Garrett Corporation Fuel mass flow measurement and control system
FR2594541A1 (fr) * 1986-02-14 1987-08-21 Air Liquide Procede de controle du debit d'un fluide dans une vanne et appareil pour la mise en oeuvre de ce procede
US4794947A (en) * 1986-11-29 1989-01-03 Kabushiki Kaisha Nippon IC (also trading as Nippon IC, Inc.) Mass flow controller
SE8801299L (sv) * 1988-04-08 1989-10-09 Bertil Hoeoek Mikromekanisk envaegsventil
US4836233A (en) * 1988-06-06 1989-06-06 Eclipse Ion Technology, Inc. Method and apparatus for venting vacuum processing equipment
JP2814378B2 (ja) * 1988-06-20 1998-10-22 忠弘 大見 マスフローコントローラ
FR2635383B1 (fr) * 1988-08-12 1990-11-23 Centre Nat Rech Scient Dispositif, application et procede de fabrication d'un regulateur de tres faible debit gazeux a vitesse d'ecoulement sonique pour les mesures d'adsorption et de desorption gazeuse
US5080131A (en) * 1989-09-26 1992-01-14 Lintec Co., Ltd. Mass flow controller
ES2057509T3 (es) * 1989-11-08 1994-10-16 Ciba Geigy Ag Valvula.
JPH03156509A (ja) * 1989-11-14 1991-07-04 Stec Kk マスフローコントローラ
JPH0586923A (ja) * 1991-07-26 1993-04-06 Nippon Soken Inc 蒸発燃料パージ装置を有する内燃機関
US5146941A (en) * 1991-09-12 1992-09-15 Unitech Development Corp. High turndown mass flow control system for regulating gas flow to a variable pressure system
US5148829A (en) * 1991-10-25 1992-09-22 Deville Wayne E Multi-orifice plate and fitting with positioner and differential selector
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
JPH0784650A (ja) * 1993-07-23 1995-03-31 Hitachi Metals Ltd マスフローコントローラ、その運転方法及び電磁弁
JP2837112B2 (ja) * 1995-06-09 1998-12-14 株式会社平井 音速ノズルを用いた質量流量制御方法および装置
JP3291161B2 (ja) * 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
US5660198A (en) * 1995-12-21 1997-08-26 J. C. Carter Company, Inc. Flow compensated pressure control system

Also Published As

Publication number Publication date
EP0824232A1 (en) 1998-02-18
US5816285A (en) 1998-10-06
CA2212547A1 (en) 1998-02-12
DE69700733D1 (de) 1999-12-09
IL121494A (en) 2000-06-29
DE69700733T2 (de) 2000-03-16
IL121494A0 (en) 1998-02-08
JPH1055218A (ja) 1998-02-24
CA2212547C (en) 1999-08-03
EP0824232B1 (en) 1999-11-03
JP3580645B2 (ja) 2004-10-27
TW353730B (en) 1999-03-01
KR100248961B1 (ko) 2000-03-15

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