JP4856905B2 - 流量レンジ可変型流量制御装置 - Google Patents
流量レンジ可変型流量制御装置 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
- G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F7/00—Volume-flow measuring devices with two or more measuring ranges; Compound meters
- G01F7/005—Volume-flow measuring devices with two or more measuring ranges; Compound meters by measuring pressure or differential pressure, created by the use of flow constriction
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1927—Control of temperature characterised by the use of electric means using a plurality of sensors
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
- G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
- Y10T137/0379—By fluid pressure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
- Y10T137/776—Control by pressures across flow line valve
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86718—Dividing into parallel flow paths with recombining
- Y10T137/86734—With metering feature
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
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- Y10T137/86493—Multi-way valve unit
- Y10T137/86815—Multiple inlet with single outlet
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/87298—Having digital flow controller
- Y10T137/87306—Having plural branches under common control for separate valve actuators
- Y10T137/87314—Electromagnetic or electric control [e.g., digital control, bistable electro control, etc.]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T137/87265—Dividing into parallel flow paths with recombining
- Y10T137/8741—With common operator
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T137/87499—Fluid actuated or retarded
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87676—With flow control
- Y10T137/87684—Valve in each inlet
Description
一方、流量制御範囲が大きくなると、必然的に低流量域に於ける制御精度が低下することになり、流量制御装置に設けた測定値の補正機能だけでは低流領域に於ける制御精度の低下をカバーしきれなくなると云う問題がある。
圧力式流量制御装置は構造が簡素であるだけでなく、応答性や制御精度、制御の安定性、製造コスト、メンテナンス性等の点でも優れた特性を具備しており、更に、熱式質量流量制御装置とも簡単に交換することができるからである。
尚、図7(a)及び図7(b)において、3はオリフィス上流側配管、4は弁駆動部、5はオリフィス下流側配管、9はバルブ、15は流量変換回路、10、11、22、28は増幅器、7は温度検出器、17、18、29はA/D変換器、19は温度補正回路、20、30は演算回路、21は比較回路、Qcは演算流量信号、Qfは切換演算流量信号、Qeは流量設定信号、Qoは流量出力信号、Qyは流量制御信号、P1はオリフィス上流側気体圧力、P2はオリフィス下流側気体圧力、kは流量変換率である。
また、前記図7(b)の圧力式流量制御装置FCSは、臨界状態と非臨界状態の両方の流れ状態となる気体の流量制御に主として用いられるものであり、オリフィス8を流れる気体の流量は、Qc=KP2 m(P1−P2)n(Kは比例定数、mとnは定数)として与えられる。
例えば、いま流量変換回路15の変換率kが1に設定されているとき、流量設定信号Qe=5Vが入力されると、切換演算流量信号Qf(Qf=kQc)は5Vとなり、上流側圧力P1が3(kgf/cm2 abs)になるまでコントロール弁2が開閉操作されることになり、P1=3(kgf/cm2 abs)に対応する流量Qc=KP1の気体がオリフィス8を流通することになる。
即ち、Qe=5Vが、P1=2(kgf/cm2 abs)に相当する流量Qc=KP1を表すようにフルスケールの流量が変換される。
また、臨界状態下においては、オリフィス8を流通する気体流量Qcは、前述のとおりQc=KP1なる式で与えられるが、流量制御すべきガス種が変れば、同一オリフィス8を使用している場合には、前記比例定数Kが変化する。
尚、前記図5(b)の圧力式流量制御装置においても同様であり、オリフィス8を流通する気体の流量Qcは、Qc=KP2 m(P1−P2)n(Kは比例定数、mとnは定数)として与えられ、ガス種が変われば前記比例定数Kが変化する。
また、流体の流通状態が前記臨界条件を外れると、流量制御精度が大幅に低下することになり、結果として半導体製品の品質にばらつきを生ずることになる。
その結果、流量制御範囲の異なる二つの圧力式流量制御装置を必要とすることになり、半導体製造装置等の製造コストの上昇を招くことになる。
また、切換弁の操作により自動的に流量制御域を切換選択することができ、操作の複雑化を招くこともない。
更に、臨界条件下における流体流量制御を基本とした場合には、フローファクタF.Fを活用することによってガス種の変更にも容易に対応することができ、各種の流体供給設備の流量制御に適用することができる。
図1は、本発明の第1実施形態に係る流量レンジ可変型流量制御装置の構成図を示すものであり、図1に於いて1は制御部、2はコントロール弁、3はオリフィス上流側(一次側)管路、4は弁駆動部、5は流体供給用管路、6は圧力センサ、8aは小流量用オリフィス、8bは中流量用オリフィス、8cは大流量用オリフィス、32、33は切換用電磁弁、34、35は切換弁である。
尚、本実施形態においては、切換弁34、35として空気圧作動の常時閉鎖型バルブが使用されている。
また、制御流量が中流量域の場合には、管路5a、5b、5dを通して流体が中流量オリフィス8bへ流入し、主として中流量用オリフィス8bにより流量制御された流体が流体供給用管路5内へ流出して行く。
更に、制御流量が大流量域の場合には、流体は管路5aを通して大流量用オリフィス8cへ流入し、大流量用オリフィス8cにより主に流量制御された流体が、流体供給用管路5内へ流入する。
尚、その流量特性は図2の特性Aの如くになり、20〜2SCCMの流量範囲に亘って誤差±1%セットポイント以下の精度でもって流量制御を行うことが出来る。
尚、この場合の流量制御特性は図2の特性Bの如き状態となり、200〜20SCCMの流量範囲に亘って、誤差±1%セットポイント以下の精度でもって流量制御が行われる。
尚、この場合の流量制御特性は図2の特性Cのようになり、2000〜200SCCMの流量範囲に亘って、誤差±1%セットポイント以下の精度で流量QLの制御が行える。
例えば、最大流量2000SCCMの流量制御を行う場合、小流量用オリフィス8aにより200SCCMまでの流量を、また大流量用オリフィス8cにより2000SCCMまでの流量を夫々流量制御する構成とする。
当該小流量オリフィス8aを用いた流量制御により流量200SCCM〜20SCCMの範囲に亘って、誤差±1%セットポイント以下の精度でもって流量制御を行うことができる。
尚、図4の特性Dは、この時の流量制御特性を示すものであり、オリフィス下流側管路5が100Torr以下の場合には、流量20SCCMにおいて、誤差±1%セットポイント以下に押え得ることが確認されている。
従って、この場合には、図4に示すように、流量20SCCM以下の領域を所謂パルス制御により流量制御を行なっても良い。
即ち、管路5へ流入する流体流量は、大流量オリフィス8cによる制御流量QC=KCP1(但し、Kcは大流量オリフィス8cに固有の定数)と小流量オリフィス8aによる制御流量QS=KSP1(但しKSは小流量オリフィス8aに固有の定数)との和となり、その流量特性曲線は図4の特性Eで示されたものとなる。
約5%の点で、誤差が−1%F.Sを越えることになる。
当該熱式質量流量制御装置MFCは、図6に示す如く制御部36と、流量制御バルブ37と、層流素子バイパス部38と、流量センサ部39と、切替バルブ40等から構成されており、流量センサ部39で流体の質量流量に比例した温度変化を検出し、当該検出温度に基づいて流量制御バルブ37を開閉制御することにより、一定の設定流量の流体を流出せしめるものである。
尚、熱式質量流量制御装置MFCそのものは公知であるため、ここではその詳細な説明を省略する。
又、図6において、36aはブリッジ回路、36bは増幅回路、36cは補正回路、36dは比較回路、36eはバルブ駆動回路、36fはアクチュエータである。
即ち、バイパス流路の一方の流体通路40aには粗い層流素子38aが設けられており、中流量流体の流量制御に適用される。また、他方の流体通路40bにはより粗い層流素子38bが設けられており、大流量流体の流量制御に適用される。
また、小流量の流量制御時には切換バルブ42及び切替バルブ41を閉にすると共に、制御部36の増幅回路36bの増幅レベルを小流量の検出に適したレベルに切換えする。
更に、中流量の流量制御時には、切換バルブ41を閉、切換バルブ42を開にすると共に、前記増幅回路36bの増幅レベル等を中流量の検出に適したレベルに切換える。
MFCは熱式質量流量制御装置
1は制御部
2はコントロール弁
3はオリフィス一次側管路
4は駆動部
5は流体供給用管路
6は圧力センサ
8aは小流量用オリフィス
8bは中流量用オリフィス
8cは大流量用オリフィス
32はNo1切換用電磁弁
33はNo2切換用電磁弁
34はNo1切換弁
34aは弁駆動部
34bは近接センサ
35はNo2切換弁
35aは弁駆動部
35bは近接センサ
36は制御部
36aはブリッジ回路
37は流量制御バルブ
38.38a.38bは層流素子バイパス
39は流量センサ部
40a・40bは流体通路
41.42は切換バルブ
Claims (1)
- 流量制御装置の流量検出部への流体通路として少なくとも小流量用と大流量用の流体通路を設け、前記小流量用流体通路を通して小流量域の流体を流量検出部へ流通させると共に、流量制御部の検出レベルを小流量域の検出に適した検出レベルに切換えし、また、前記大流量用流体通路を通して大流量域の流体を前記流量検出部へ流通させると共に、流量制御部の検出レベルを大流量域の流量の検出に適した検出レベルに切換えすることにより、大流量域と小流量域の流体を夫々切り換えて流量制御し、オリフィスを大流量用オリフィスと中流量用オリフィスと小流量用オリフィスの三種類とすると共に、一方の流体通路にNo1切換用バルブとNo2切換バルブと大流量オリフィスを直列状に介在させ、また他方の流体通路に小流量オリフィスと中流量オリフィスを介在させ、更に、前記両切換バルブ間を連通する通路と、小流量オリフィスと中流量オリフィス間を連通する通路とを連通させる構成としたことを特徴とする流量レンジ可変型流量制御装置。
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JP2005185845A JP4856905B2 (ja) | 2005-06-27 | 2005-06-27 | 流量レンジ可変型流量制御装置 |
KR1020077019468A KR20070110499A (ko) | 2005-06-27 | 2006-06-22 | 유량 레인지 가변형 유량 제어 장치 |
US11/913,277 US8418714B2 (en) | 2005-06-27 | 2006-06-22 | Flow rate range variable type flow rate control apparatus |
PCT/JP2006/312952 WO2007001041A1 (ja) | 2005-06-27 | 2006-06-22 | 流量レンジ可変型流量制御装置 |
EP06767569A EP1901154A1 (en) | 2005-06-27 | 2006-06-22 | Variable flow range type flow control device |
CN2006800232002A CN101208641B (zh) | 2005-06-27 | 2006-06-22 | 流量范围可变型流量控制装置 |
TW095123000A TW200712814A (en) | 2005-06-27 | 2006-06-26 | Flow rate range variable flow control device |
US13/763,178 US9010369B2 (en) | 2005-06-27 | 2013-02-08 | Flow rate range variable type flow rate control apparatus |
US14/626,128 US20150160662A1 (en) | 2005-06-27 | 2015-02-19 | Flow rate range variable type flow rate control apparatus |
US14/977,162 US9383758B2 (en) | 2005-06-27 | 2015-12-21 | Flow rate range variable type flow rate control apparatus |
US15/171,333 US9921089B2 (en) | 2005-06-27 | 2016-06-02 | Flow rate range variable type flow rate control apparatus |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010151698A (ja) * | 2008-12-26 | 2010-07-08 | Fujikin Inc | ガスケット型オリフィス及びこれを用いた圧力式流量制御装置 |
TWI722538B (zh) * | 2018-08-17 | 2021-03-21 | 台灣積體電路製造股份有限公司 | 監測系統及監測方法 |
US11243549B2 (en) | 2017-09-30 | 2022-02-08 | Fujikin Inc. | Valve and fluid supply line |
Families Citing this family (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9921089B2 (en) * | 2005-06-27 | 2018-03-20 | Fujikin Incorporated | Flow rate range variable type flow rate control apparatus |
JP5041427B2 (ja) * | 2008-03-19 | 2012-10-03 | Ckd株式会社 | 流量制御装置 |
JP5430007B2 (ja) * | 2008-05-21 | 2014-02-26 | 株式会社フジキン | 圧力式流量制御装置を用いた流体の非連続式流量切替制御方法 |
JP5213583B2 (ja) * | 2008-08-18 | 2013-06-19 | アドバンス電気工業株式会社 | 流量測定装置 |
JP5213582B2 (ja) * | 2008-08-18 | 2013-06-19 | アドバンス電気工業株式会社 | 流量測定装置 |
JP5357478B2 (ja) * | 2008-09-24 | 2013-12-04 | アドバンス電気工業株式会社 | 差圧式流量測定装置 |
US7891228B2 (en) * | 2008-11-18 | 2011-02-22 | Mks Instruments, Inc. | Dual-mode mass flow verification and mass flow delivery system and method |
JP5209524B2 (ja) * | 2009-02-05 | 2013-06-12 | サーパス工業株式会社 | 流量計および流量コントローラ |
JP5216632B2 (ja) * | 2009-03-03 | 2013-06-19 | 東京エレクトロン株式会社 | 流体制御装置 |
JP5508875B2 (ja) | 2010-01-26 | 2014-06-04 | 株式会社フジキン | 流体制御器および流量制御装置 |
US9233347B2 (en) | 2010-02-22 | 2016-01-12 | Fujikin Incorporated | Mixed gas supply device |
JP5562712B2 (ja) * | 2010-04-30 | 2014-07-30 | 東京エレクトロン株式会社 | 半導体製造装置用のガス供給装置 |
JP5703032B2 (ja) * | 2011-01-06 | 2015-04-15 | 株式会社フジキン | ガス供給装置用流量制御器の流量測定方法 |
ES2522166T3 (es) * | 2011-01-14 | 2014-11-13 | Grundfos Management A/S | Sistema y método para controlar la presión en una red |
KR101550255B1 (ko) * | 2011-05-10 | 2015-09-04 | 가부시키가이샤 후지킨 | 유량 모니터 부착 압력식 유량 제어 장치와, 이것을 사용한 유체 공급계의 이상 검출 방법 및 모니터 유량 이상 시의 처치 방법 |
JP5755958B2 (ja) | 2011-07-08 | 2015-07-29 | 株式会社フジキン | 半導体製造装置の原料ガス供給装置 |
JP5647083B2 (ja) | 2011-09-06 | 2014-12-24 | 株式会社フジキン | 原料濃度検出機構を備えた原料気化供給装置 |
JP2013057278A (ja) * | 2011-09-07 | 2013-03-28 | Mitsubishi Heavy Ind Ltd | ガスタービン |
TWI458843B (zh) * | 2011-10-06 | 2014-11-01 | Ind Tech Res Inst | 蒸鍍裝置與有機薄膜的形成方法 |
US9471066B2 (en) | 2012-01-20 | 2016-10-18 | Mks Instruments, Inc. | System for and method of providing pressure insensitive self verifying mass flow controller |
US9557744B2 (en) | 2012-01-20 | 2017-01-31 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
US9846074B2 (en) * | 2012-01-20 | 2017-12-19 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
JP5754853B2 (ja) * | 2012-01-30 | 2015-07-29 | 株式会社フジキン | 半導体製造装置のガス分流供給装置 |
US20130240045A1 (en) * | 2012-03-15 | 2013-09-19 | Xiufeng Pang | Method for Determining a Fluid Flow Rate With a Fluid Control Valve |
JP5665793B2 (ja) * | 2012-04-26 | 2015-02-04 | 株式会社フジキン | 可変オリフィス型圧力制御式流量制御器 |
JP5665794B2 (ja) | 2012-04-27 | 2015-02-04 | 株式会社フジキン | 半導体製造装置のガス分流供給装置 |
JP5947659B2 (ja) * | 2012-08-06 | 2016-07-06 | 株式会社堀場エステック | 流量制御装置 |
DE102012017207A1 (de) * | 2012-08-31 | 2014-03-06 | Robert Bosch Gmbh | Verfahren zum Ansteuern einer hydraulischen Ventilanordnung und hydraulische Ventilanordnung |
US10031005B2 (en) | 2012-09-25 | 2018-07-24 | Mks Instruments, Inc. | Method and apparatus for self verification of pressure-based mass flow controllers |
CN102968132A (zh) * | 2012-11-28 | 2013-03-13 | 重庆赛联自动化工程技术有限公司 | 一种用于转炉底吹系统的气体高精度大流量控制方法 |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
JP5847106B2 (ja) * | 2013-03-25 | 2016-01-20 | 株式会社フジキン | 流量モニタ付圧力式流量制御装置。 |
JP5893592B2 (ja) * | 2013-08-23 | 2016-03-23 | 東京エレクトロン株式会社 | 液処理装置 |
JP5797246B2 (ja) * | 2013-10-28 | 2015-10-21 | 株式会社フジキン | 流量計及びそれを備えた流量制御装置 |
JP6158111B2 (ja) * | 2014-02-12 | 2017-07-05 | 東京エレクトロン株式会社 | ガス供給方法及び半導体製造装置 |
CN104215406B (zh) * | 2014-09-12 | 2017-04-05 | 天津博益气动股份有限公司 | 宽量程流量式检漏仪及其检测方法 |
TW201634738A (zh) * | 2015-01-22 | 2016-10-01 | 應用材料股份有限公司 | 用於在空間上分離之原子層沉積腔室的經改良注射器 |
CN106257370B (zh) * | 2015-06-19 | 2019-07-02 | 株式会社Posco | 偏流控制装置及偏流控制方法 |
CN108351240B (zh) | 2015-08-31 | 2020-10-20 | Mks 仪器公司 | 在非临界流量条件下基于压力的流量控制的方法和装置 |
JP6775288B2 (ja) | 2015-10-08 | 2020-10-28 | 株式会社堀場エステック | 流体制御弁及びその制御プログラム |
US10665430B2 (en) * | 2016-07-11 | 2020-05-26 | Tokyo Electron Limited | Gas supply system, substrate processing system and gas supply method |
JP6786096B2 (ja) * | 2016-07-28 | 2020-11-18 | 株式会社フジキン | 圧力式流量制御装置 |
US20180046206A1 (en) * | 2016-08-13 | 2018-02-15 | Applied Materials, Inc. | Method and apparatus for controlling gas flow to a process chamber |
US10364136B2 (en) * | 2016-09-26 | 2019-07-30 | Gate Cfv Solutions, Inc. | Valve device |
JP6996289B2 (ja) * | 2016-12-26 | 2022-01-17 | 株式会社島津製作所 | バルブ装置 |
US10983537B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
US10344237B2 (en) * | 2017-04-13 | 2019-07-09 | Welker, Inc. | System and method for odorizing natural gas |
WO2019026700A1 (ja) * | 2017-07-31 | 2019-02-07 | 株式会社フジキン | 流体制御システムおよび流量測定方法 |
JP6960278B2 (ja) * | 2017-08-31 | 2021-11-05 | 東京エレクトロン株式会社 | 流量測定システムを検査する方法 |
WO2019107215A1 (ja) * | 2017-11-30 | 2019-06-06 | 株式会社フジキン | 流量制御装置 |
WO2019107216A1 (ja) * | 2017-11-30 | 2019-06-06 | 株式会社フジキン | 流量制御装置の自己診断方法 |
JP7008499B2 (ja) * | 2017-12-27 | 2022-01-25 | 株式会社堀場エステック | 校正データ作成装置及び校正データ作成方法、並びに、流量制御装置 |
RU2682540C9 (ru) * | 2018-08-22 | 2019-07-08 | Александр Александрович Калашников | Способ настройки измерительного канала расхода среды с сужающим устройством |
JP7232506B2 (ja) * | 2018-12-27 | 2023-03-03 | 株式会社フジキン | 流量圧力制御装置 |
JP7142963B2 (ja) * | 2018-12-27 | 2022-09-28 | 伸和コントロールズ株式会社 | バルブユニット及び温度制御装置 |
CN109855691B (zh) * | 2019-01-14 | 2020-06-09 | 中国计量大学 | 一种差分式层流流量测量方法及装置 |
CN112169584A (zh) * | 2020-10-09 | 2021-01-05 | 山东国舜建设集团有限公司 | 一种脱硝系统中氨水流量的控制装置和方法 |
KR20230000975A (ko) * | 2021-06-25 | 2023-01-03 | 가부시키가이샤 호리바 에스텍 | 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램 및 유체 제어 방법 |
Family Cites Families (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1938460A (en) * | 1933-12-05 | Orifice fitting | ||
US2229903A (en) * | 1939-02-04 | 1941-01-28 | Arthur L Parker | Metering valve |
US3081942A (en) * | 1961-09-18 | 1963-03-19 | Ibm | Digital-to-analog control system |
US3375845A (en) * | 1964-04-21 | 1968-04-02 | Houdaille Industries Inc | Fluid flow device |
US3411669A (en) * | 1966-09-08 | 1968-11-19 | Reynolds Metals Co | Beverage dispenser regulation and the like |
GB1364841A (en) * | 1971-08-12 | 1974-08-29 | British Oxygen Co Ltd | Fluid mixing |
US3827457A (en) * | 1973-06-22 | 1974-08-06 | Westinghouse Air Brake Co | Fluid pressure system for converting digital signals to analog signals |
US3831845A (en) * | 1973-08-17 | 1974-08-27 | Partek Corp Of Houston | Fluid delivery system |
US3905394A (en) * | 1974-04-12 | 1975-09-16 | Digital Dynamics Inc | Flow control system |
US3963043A (en) * | 1975-01-02 | 1976-06-15 | Motorola, Inc. | Pressure sensing method and apparatus for gases |
US3999572A (en) * | 1975-03-24 | 1976-12-28 | The Garrett Corporation | Fluid flow instrumentality |
JPS534570A (en) * | 1975-12-30 | 1978-01-17 | Mitsui Shipbuilding Eng | Apparatus for measuring flow rate in wide range |
US4030523A (en) * | 1976-04-19 | 1977-06-21 | The United States Of America As Represented By The Secretary Of The Navy | Digital flow control system |
US4089007A (en) * | 1976-05-24 | 1978-05-09 | International Business Machines Corporation | Digital flow pressure regulator |
DE2751743C2 (de) * | 1977-11-19 | 1985-04-18 | Pierburg Luftfahrtgeräte Union GmbH, 4040 Neuss | Verfahren und Regeleinrichtung zum Zumessen strömender Medien |
JPS57122528U (ja) * | 1981-01-23 | 1982-07-30 | ||
DE3130056C2 (de) * | 1981-07-30 | 1983-11-17 | Festo-Maschinenfabrik Gottlieb Stoll, 7300 Esslingen | Steuerventilanordnung für einen Druckmittel-Arbeitszylinder |
US4478246A (en) * | 1981-08-10 | 1984-10-23 | Donnell Sherrod | Method and apparatus for proportioning of fuel usage by a fluid fueled apparatus |
US4431020A (en) * | 1981-10-08 | 1984-02-14 | Marotta Scientific Controls, Inc. | Flow-control system having a wide range of flow-rate control |
US4633911A (en) * | 1985-01-18 | 1987-01-06 | Control Specialties Co., Inc. | Orifice plate seal |
JP2814378B2 (ja) * | 1988-06-20 | 1998-10-22 | 忠弘 大見 | マスフローコントローラ |
US4979639A (en) * | 1989-05-23 | 1990-12-25 | The Coca-Cola Company | Beverage dispenser control valve and ratio control method therefor |
JPH0333566A (ja) | 1989-06-29 | 1991-02-13 | Hitachi Metals Ltd | デジタルバルブ |
US5069252A (en) * | 1990-12-18 | 1991-12-03 | Daniel Industries, Inc. | Orifice system intermediate interface |
JPH064139A (ja) * | 1992-06-17 | 1994-01-14 | Seiko Epson Corp | 流量コントローラー |
US5269334A (en) * | 1992-06-22 | 1993-12-14 | New York State Electric & Gas Corporation | Fluid flow control system |
DE4236460C2 (de) * | 1992-10-29 | 1995-11-23 | Battenfeld Gmbh | Drucksteuer- und/oder Regelvorrichtung für ein fluidisches Medium, insbesondere Luft oder Gas |
US5329965A (en) * | 1993-07-30 | 1994-07-19 | The Perkin-Elmer Corporation | Hybrid valving system for varying fluid flow rate |
DE4400489C2 (de) * | 1994-01-11 | 1996-03-28 | Filtan Gmbh | Zentrifugalabscheider, Vorrichtung und Verfahren |
JP3818547B2 (ja) * | 1994-09-16 | 2006-09-06 | 株式会社堀場エステック | 質量流量制御装置 |
US5660207A (en) * | 1994-12-29 | 1997-08-26 | Tylan General, Inc. | Flow controller, parts of flow controller, and related method |
JP3291161B2 (ja) * | 1995-06-12 | 2002-06-10 | 株式会社フジキン | 圧力式流量制御装置 |
CA2183478C (en) * | 1995-08-17 | 2004-02-24 | Stephen A. Carter | Digital gas metering system using tri-stable and bi-stable solenoids |
JPH09330128A (ja) * | 1996-06-13 | 1997-12-22 | Fujitsu Ltd | マスフローコントローラ |
DE19627539A1 (de) * | 1996-07-09 | 1998-01-15 | Gaggenau Werke | Verfahren und Vorrichtung zum Steuern der Flammengröße gasbetriebener Koch- oder Backgeräte |
JP3580645B2 (ja) | 1996-08-12 | 2004-10-27 | 忠弘 大見 | 圧力式流量制御装置 |
US5911238A (en) * | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
FR2755522B1 (fr) * | 1996-11-05 | 1998-12-18 | Air Liquide | Dispositif de regulation de l'ecoulement de gaz ayant des masses molaires sensiblement differentes |
JP3586075B2 (ja) * | 1997-08-15 | 2004-11-10 | 忠弘 大見 | 圧力式流量制御装置 |
JPH11125398A (ja) | 1997-10-20 | 1999-05-11 | Ckd Corp | 流量制限機構 |
JPH11212653A (ja) * | 1998-01-21 | 1999-08-06 | Fujikin Inc | 流体供給装置 |
JPH11265216A (ja) * | 1998-03-17 | 1999-09-28 | Omi Tadahiro | 圧力式流量制御装置 |
JP3971840B2 (ja) | 1998-03-17 | 2007-09-05 | 大見 忠弘 | 圧力式流量制御装置 |
JP2000020135A (ja) | 1998-06-29 | 2000-01-21 | Ishikawajima Harima Heavy Ind Co Ltd | 流量制御装置 |
JP3522544B2 (ja) * | 1998-08-24 | 2004-04-26 | 忠弘 大見 | 流体可変型流量制御装置 |
DE19914282A1 (de) * | 1999-03-30 | 2000-10-05 | Leybold Vakuum Gmbh | Sperrgas-Ventileinrichtung |
JP3387849B2 (ja) | 1999-05-10 | 2003-03-17 | 株式会社フジキン | フローファクターによる流体可変型流量制御方法およびその装置 |
KR100427563B1 (ko) * | 1999-04-16 | 2004-04-27 | 가부시키가이샤 후지킨 | 병렬분류형 유체공급장치와, 이것에 사용하는 유체가변형압력식 유량제어방법 및 유체가변형 압력식 유량제어장치 |
JP3554509B2 (ja) * | 1999-08-10 | 2004-08-18 | 忠弘 大見 | 圧力式流量制御装置における流量異常検知方法 |
US6314991B1 (en) * | 2000-03-02 | 2001-11-13 | Rajinder S. Gill | Mass flow controller |
US6539968B1 (en) * | 2000-09-20 | 2003-04-01 | Fugasity Corporation | Fluid flow controller and method of operation |
JP4102564B2 (ja) * | 2001-12-28 | 2008-06-18 | 忠弘 大見 | 改良型圧力式流量制御装置 |
US6981518B2 (en) * | 2002-03-15 | 2006-01-03 | Cytonome, Inc. | Latching micro-regulator |
US7552015B2 (en) * | 2002-06-24 | 2009-06-23 | Mks Instruments, Inc. | Apparatus and method for displaying mass flow controller pressure |
US6712084B2 (en) * | 2002-06-24 | 2004-03-30 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
EP1523701A2 (en) * | 2002-07-19 | 2005-04-20 | Celerity Group, Inc. | Methods and apparatus for pressure compensation in a mass flow controller |
JP3910139B2 (ja) | 2002-12-16 | 2007-04-25 | 株式会社フジキン | 圧力式流量制御装置を用いた流体の流量制御方法 |
US6997202B2 (en) * | 2002-12-17 | 2006-02-14 | Advanced Technology Materials, Inc. | Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate |
JP2004243333A (ja) | 2003-02-12 | 2004-09-02 | Hitachi Ltd | 溶接装置および溶接方法 |
JP2004278614A (ja) | 2003-03-14 | 2004-10-07 | Tlv Co Ltd | ウエハー型オリフィストラップ |
KR100418684B1 (ko) * | 2003-06-27 | 2004-02-14 | 주식회사 현대교정인증기술원 | 반도체 공정가스용 차압식 유량 제어기 |
KR100517405B1 (ko) * | 2003-06-27 | 2005-09-27 | 삼성전자주식회사 | 질량 유량 제어기 및 이를 갖는 가스 공급 장치 |
JP4204400B2 (ja) * | 2003-07-03 | 2009-01-07 | 忠弘 大見 | 差圧式流量計及び差圧式流量制御装置 |
ATE452315T1 (de) * | 2003-09-25 | 2010-01-15 | Bsh Bosch Siemens Hausgeraete | Gaskochstelle |
JP4399227B2 (ja) | 2003-10-06 | 2010-01-13 | 株式会社フジキン | チャンバの内圧制御装置及び内圧被制御式チャンバ |
JP4298476B2 (ja) | 2003-11-14 | 2009-07-22 | 株式会社フジキン | 流体制御装置 |
JP4184252B2 (ja) | 2003-12-18 | 2008-11-19 | シーケーディ株式会社 | リーク弁 |
US7673645B2 (en) * | 2005-04-21 | 2010-03-09 | Mks Instruments, Inc. | Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangement |
US7621290B2 (en) * | 2005-04-21 | 2009-11-24 | Mks Instruments, Inc. | Gas delivery method and system including a flow ratio controller using antisymmetric optimal control |
JP4814706B2 (ja) * | 2006-06-27 | 2011-11-16 | 株式会社フジキン | 流量比可変型流体供給装置 |
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2005
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- 2006-06-22 WO PCT/JP2006/312952 patent/WO2007001041A1/ja active Application Filing
- 2006-06-22 CN CN2006800232002A patent/CN101208641B/zh active Active
- 2006-06-22 EP EP06767569A patent/EP1901154A1/en not_active Withdrawn
- 2006-06-22 KR KR1020077019468A patent/KR20070110499A/ko active Search and Examination
- 2006-06-22 US US11/913,277 patent/US8418714B2/en active Active
- 2006-06-26 TW TW095123000A patent/TW200712814A/zh unknown
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2013
- 2013-02-08 US US13/763,178 patent/US9010369B2/en active Active
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010151698A (ja) * | 2008-12-26 | 2010-07-08 | Fujikin Inc | ガスケット型オリフィス及びこれを用いた圧力式流量制御装置 |
US11243549B2 (en) | 2017-09-30 | 2022-02-08 | Fujikin Inc. | Valve and fluid supply line |
TWI722538B (zh) * | 2018-08-17 | 2021-03-21 | 台灣積體電路製造股份有限公司 | 監測系統及監測方法 |
Also Published As
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US20130220451A1 (en) | 2013-08-29 |
EP1901154A1 (en) | 2008-03-19 |
US20100139775A1 (en) | 2010-06-10 |
TWI320520B (ja) | 2010-02-11 |
US8418714B2 (en) | 2013-04-16 |
US9010369B2 (en) | 2015-04-21 |
KR20070110499A (ko) | 2007-11-19 |
CN101208641A (zh) | 2008-06-25 |
WO2007001041A1 (ja) | 2007-01-04 |
CN101208641B (zh) | 2012-11-07 |
JP2007004644A (ja) | 2007-01-11 |
TW200712814A (en) | 2007-04-01 |
US20150160662A1 (en) | 2015-06-11 |
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