DE69700733D1 - Durchflussregler mit einer Druckregelung - Google Patents

Durchflussregler mit einer Druckregelung

Info

Publication number
DE69700733D1
DE69700733D1 DE69700733T DE69700733T DE69700733D1 DE 69700733 D1 DE69700733 D1 DE 69700733D1 DE 69700733 T DE69700733 T DE 69700733T DE 69700733 T DE69700733 T DE 69700733T DE 69700733 D1 DE69700733 D1 DE 69700733D1
Authority
DE
Germany
Prior art keywords
pressure control
flow regulator
regulator
flow
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69700733T
Other languages
English (en)
Other versions
DE69700733T2 (de
Inventor
Tadahiro Ohmi
Koji Nishino
Nobukazu Ikeda
Akihiro Morimoto
Yukio Minami
Koji Kawada
Ryosuke Dohi
Hiroyuki Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE69700733D1 publication Critical patent/DE69700733D1/de
Application granted granted Critical
Publication of DE69700733T2 publication Critical patent/DE69700733T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Control Of Fluid Pressure (AREA)
DE69700733T 1996-08-12 1997-08-07 Durchflussregler mit einer Druckregelung Expired - Fee Related DE69700733T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21233096A JP3580645B2 (ja) 1996-08-12 1996-08-12 圧力式流量制御装置

Publications (2)

Publication Number Publication Date
DE69700733D1 true DE69700733D1 (de) 1999-12-09
DE69700733T2 DE69700733T2 (de) 2000-03-16

Family

ID=16620759

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69700733T Expired - Fee Related DE69700733T2 (de) 1996-08-12 1997-08-07 Durchflussregler mit einer Druckregelung

Country Status (9)

Country Link
US (1) US5816285A (de)
EP (1) EP0824232B1 (de)
JP (1) JP3580645B2 (de)
KR (1) KR100248961B1 (de)
CA (1) CA2212547C (de)
DE (1) DE69700733T2 (de)
IL (1) IL121494A (de)
SG (1) SG66387A1 (de)
TW (1) TW353730B (de)

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JP3684307B2 (ja) * 1998-10-19 2005-08-17 シーケーディ株式会社 ガス供給制御装置
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JP5283312B2 (ja) * 2005-08-31 2013-09-04 トーヨーコーケン株式会社 エアー式荷役機械及びその制御方法
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JP5143543B2 (ja) * 2007-08-30 2013-02-13 株式会社酉島製作所 ポンプの軸受診断装置及びその方法
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JP4819028B2 (ja) * 2007-12-21 2011-11-16 株式会社酉島製作所 ポンプの軸受診断装置及びその方法
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JP5755958B2 (ja) 2011-07-08 2015-07-29 株式会社フジキン 半導体製造装置の原料ガス供給装置
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Also Published As

Publication number Publication date
EP0824232B1 (de) 1999-11-03
US5816285A (en) 1998-10-06
TW353730B (en) 1999-03-01
IL121494A0 (en) 1998-02-08
CA2212547A1 (en) 1998-02-12
KR100248961B1 (ko) 2000-03-15
CA2212547C (en) 1999-08-03
JP3580645B2 (ja) 2004-10-27
DE69700733T2 (de) 2000-03-16
SG66387A1 (en) 1999-07-20
EP0824232A1 (de) 1998-02-18
IL121494A (en) 2000-06-29
JPH1055218A (ja) 1998-02-24

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