PL1613795T5 - Tygiel do urządzenia służącego do wytwarzania bloku materiału krystalicznego i sposób produkcji - Google Patents

Tygiel do urządzenia służącego do wytwarzania bloku materiału krystalicznego i sposób produkcji

Info

Publication number
PL1613795T5
PL1613795T5 PL04742479T PL04742479T PL1613795T5 PL 1613795 T5 PL1613795 T5 PL 1613795T5 PL 04742479 T PL04742479 T PL 04742479T PL 04742479 T PL04742479 T PL 04742479T PL 1613795 T5 PL1613795 T5 PL 1613795T5
Authority
PL
Poland
Prior art keywords
crucible
block
crystalline material
production
fabrication
Prior art date
Application number
PL04742479T
Other languages
English (en)
Other versions
PL1613795T3 (pl
Inventor
Roland Einhaus
François Lissalde
Pascal Rivat
Original Assignee
Apollon Solar
Cyberstar
Efd Induction Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=33041932&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=PL1613795(T5) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Apollon Solar, Cyberstar, Efd Induction Sa filed Critical Apollon Solar
Publication of PL1613795T3 publication Critical patent/PL1613795T3/pl
Publication of PL1613795T5 publication Critical patent/PL1613795T5/pl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/605Products containing multiple oriented crystallites, e.g. columnar crystallites
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002Crucibles or containers for supporting the melt
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00Glass manufacturing
    • Y10S65/08Quartz
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1052Seed pulling including a sectioned crucible [e.g., double crucible, baffle]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Photovoltaic Devices (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Details Of Cutting Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
PL04742479T 2003-04-17 2004-04-09 Tygiel do urządzenia służącego do wytwarzania bloku materiału krystalicznego i sposób produkcji PL1613795T5 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0304803A FR2853913B1 (fr) 2003-04-17 2003-04-17 Creuset pour un dispositif de fabrication d'un bloc de materiau cristallin et procede de fabrication
EP04742479A EP1613795B2 (fr) 2003-04-17 2004-04-09 CREUSET POUR UN DISPOSITIF DE FABRICATION D’UN BLOC DE MATERIAU CRISTALLIN ET PROCEDE DE FABRICATION
PCT/FR2004/000894 WO2004094704A2 (fr) 2003-04-17 2004-04-09 Creuset pour un dispositif de fabrication d’un bloc de materiau cristallin et procede de fabrication

Publications (2)

Publication Number Publication Date
PL1613795T3 PL1613795T3 (pl) 2007-05-31
PL1613795T5 true PL1613795T5 (pl) 2010-10-29

Family

ID=33041932

Family Applications (1)

Application Number Title Priority Date Filing Date
PL04742479T PL1613795T5 (pl) 2003-04-17 2004-04-09 Tygiel do urządzenia służącego do wytwarzania bloku materiału krystalicznego i sposób produkcji

Country Status (14)

Country Link
US (1) US7442255B2 (pl)
EP (1) EP1613795B2 (pl)
JP (1) JP4607096B2 (pl)
CN (1) CN100429333C (pl)
AT (1) ATE350519T1 (pl)
BR (1) BRPI0409464A (pl)
DE (1) DE602004004095T3 (pl)
ES (1) ES2279402T5 (pl)
FR (1) FR2853913B1 (pl)
NO (1) NO20055454L (pl)
PL (1) PL1613795T5 (pl)
RU (1) RU2344206C2 (pl)
WO (1) WO2004094704A2 (pl)
ZA (1) ZA200507846B (pl)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2892426B1 (fr) * 2005-10-26 2008-01-11 Apollon Solar Soc Par Actions Dispositif de fabrication d'un ruban de silicium ou autres materiaux cristallins et procede de fabrication
FR2895749B1 (fr) * 2006-01-04 2008-05-02 Apollon Solar Soc Par Actions Dispositif et procede de fabrication d'un bloc de materiau cristallin
US20090208400A1 (en) * 2006-06-23 2009-08-20 Stein Julsrud Method and crucible for direct solidification of semiconductor grade multi-crystalline silicon ingots
FR2908125B1 (fr) * 2006-11-02 2009-11-20 Commissariat Energie Atomique Procede de purification de silicium metallurgique par solidification dirigee
FR2909990B1 (fr) * 2006-12-13 2009-03-13 Efd Induction Sa Sa Procede et installation de fabrication de blocs d'un materiau semiconducteur
FR2913434B1 (fr) * 2007-03-08 2009-11-20 Apollon Solar Dispositif et procede de fabrication de plaques autosupportees de silicium ou autres materiaux cristallins.
DE102007026298A1 (de) * 2007-06-06 2008-12-11 Freiberger Compound Materials Gmbh Anordnung und Verfahren zur Herstellung eines Kristalls aus der Schmelze eines Rohmaterials sowie Einkristall
FR2918675B1 (fr) * 2007-07-10 2009-08-28 Commissariat Energie Atomique Dispositif de fabrication d'un bloc de materiau cristallin avec modulation de la conductivite thermique.
JP5277654B2 (ja) * 2008-02-15 2013-08-28 住友化学株式会社 ホウ素添加シリコンの製造方法
US20090280050A1 (en) * 2008-04-25 2009-11-12 Applied Materials, Inc. Apparatus and Methods for Casting Multi-Crystalline Silicon Ingots
US20110180229A1 (en) * 2010-01-28 2011-07-28 Memc Singapore Pte. Ltd. (Uen200614794D) Crucible For Use In A Directional Solidification Furnace
JP5676900B2 (ja) * 2010-03-26 2015-02-25 三菱マテリアル株式会社 多結晶シリコンインゴットの製造方法
US8562740B2 (en) * 2010-11-17 2013-10-22 Silicor Materials Inc. Apparatus for directional solidification of silicon including a refractory material
US20120248286A1 (en) 2011-03-31 2012-10-04 Memc Singapore Pte. Ltd. (Uen200614794D) Systems For Insulating Directional Solidification Furnaces
RU2560439C1 (ru) * 2011-08-01 2015-08-20 ДжиТиЭйТи Корпорейшн Теплообменник жидкостного охлаждения
FR2979638A1 (fr) * 2011-09-05 2013-03-08 Commissariat Energie Atomique Dispositif de fabrication de materiau cristallin a partir d'un creuset a resistance thermique non uniforme
CN102677166B (zh) * 2012-06-08 2015-06-03 常州天合光能有限公司 一种多晶硅铸锭用梯度坩埚的制备方法
CN102703969B (zh) * 2012-06-14 2015-04-15 天威新能源控股有限公司 低碳准单晶铸锭炉及应用该铸锭炉进行铸锭的方法
DE102015118042A1 (de) 2015-10-22 2017-04-27 Nexwafe Gmbh Verfahren und Vorrichtung zum Herstellen einer Halbleiterschicht
JP7068914B2 (ja) * 2018-04-26 2022-05-17 昭和電工株式会社 断熱性遮蔽部材及びそれを備えた単結晶製造装置

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DE2259353C3 (de) * 1972-12-04 1975-07-10 Heraeus-Quarzschmelze Gmbh, 6450 Hanau Tiegel aus Quarzglas oder Quarzgut zur Verwendung beim Züchten von Einkristallen
DE2508803C3 (de) 1975-02-28 1982-07-08 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur Herstellung plattenförmiger Siliciumkristalle mit Kolumnarstruktur
DE2543752B2 (de) * 1975-10-01 1979-03-15 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren und Vorrichtung zum Herstellen eines Einkristalles
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FR2487863A1 (fr) * 1980-08-01 1982-02-05 Sklyarov Alexei Dispositif pour la croissance des monocristaux a partir d'alliages a constituants multiples
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US4590043A (en) * 1982-12-27 1986-05-20 Sri International Apparatus for obtaining silicon from fluosilicic acid
JPH01142464U (pl) * 1988-03-23 1989-09-29
JP2553633B2 (ja) * 1988-05-19 1996-11-13 住友電気工業株式会社 高温炉の断熱方法
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DE4236827A1 (de) * 1992-10-30 1994-05-05 Wacker Chemitronic Vorrichtung zur Herstellung multikristalliner Halbleiter-Blöcke mit kolumnarer Kristallstruktur
JP2934121B2 (ja) * 1993-06-25 1999-08-16 信越化学工業株式会社 単結晶の製造方法
JPH08301683A (ja) * 1995-05-09 1996-11-19 Nippon Koki Co Ltd エアバッグ用ガス発生器
JP2936392B2 (ja) * 1995-12-12 1999-08-23 三菱マテリアルクォーツ株式会社 シリコン単結晶引上げ用石英ルツボ
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Also Published As

Publication number Publication date
WO2004094704A3 (fr) 2004-12-16
ZA200507846B (en) 2007-02-28
US7442255B2 (en) 2008-10-28
ATE350519T1 (de) 2007-01-15
FR2853913B1 (fr) 2006-09-29
RU2344206C2 (ru) 2009-01-20
CN1774526A (zh) 2006-05-17
RU2005135646A (ru) 2006-03-10
NO20055454L (no) 2005-11-17
PL1613795T3 (pl) 2007-05-31
EP1613795A2 (fr) 2006-01-11
EP1613795B2 (fr) 2010-06-02
CN100429333C (zh) 2008-10-29
DE602004004095T3 (de) 2010-12-02
ES2279402T5 (es) 2010-10-08
JP4607096B2 (ja) 2011-01-05
DE602004004095D1 (de) 2007-02-15
JP2006526751A (ja) 2006-11-24
BRPI0409464A (pt) 2006-04-18
ES2279402T3 (es) 2007-08-16
FR2853913A1 (fr) 2004-10-22
US20060144326A1 (en) 2006-07-06
EP1613795B1 (fr) 2007-01-03
WO2004094704A2 (fr) 2004-11-04
DE602004004095T2 (de) 2007-07-12

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