NL9400225A - Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven. - Google Patents

Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven. Download PDF

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Publication number
NL9400225A
NL9400225A NL9400225A NL9400225A NL9400225A NL 9400225 A NL9400225 A NL 9400225A NL 9400225 A NL9400225 A NL 9400225A NL 9400225 A NL9400225 A NL 9400225A NL 9400225 A NL9400225 A NL 9400225A
Authority
NL
Netherlands
Prior art keywords
photoresist layer
stamper
unstructured
structured
photoresist
Prior art date
Application number
NL9400225A
Other languages
English (en)
Dutch (nl)
Inventor
Maria Elizabeth Reuhma Huisken
Alex Thomas Van Der Plaat
Original Assignee
Od & Me Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Od & Me Bv filed Critical Od & Me Bv
Priority to NL9400225A priority Critical patent/NL9400225A/nl
Priority to SG1996009446A priority patent/SG52782A1/en
Priority to ES95200328T priority patent/ES2140613T3/es
Priority to DE69513424T priority patent/DE69513424T2/de
Priority to EP95200328A priority patent/EP0667608B1/en
Priority to AT95200328T priority patent/ATE187010T1/de
Priority to KR1019950002702A priority patent/KR100336105B1/ko
Priority to CN95102747A priority patent/CN1056937C/zh
Priority to JP02544095A priority patent/JP3636387B2/ja
Priority to TW084101811A priority patent/TW279978B/zh
Publication of NL9400225A publication Critical patent/NL9400225A/nl
Priority to US08/680,110 priority patent/US6159664A/en
Priority to HK98102794A priority patent/HK1003736A1/xx

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/263—Preparing and using a stamper, e.g. pressing or injection molding substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
NL9400225A 1994-02-14 1994-02-14 Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven. NL9400225A (nl)

Priority Applications (12)

Application Number Priority Date Filing Date Title
NL9400225A NL9400225A (nl) 1994-02-14 1994-02-14 Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven.
AT95200328T ATE187010T1 (de) 1994-02-14 1995-02-10 Verfahren zur herstellung einer matrize zur erzeugung optischer scheiben ohne benutzung einer hauptplatte
ES95200328T ES2140613T3 (es) 1994-02-14 1995-02-10 Metodo de fabricacion de una matriz para producir discos opticos sin un disco maestro.
DE69513424T DE69513424T2 (de) 1994-02-14 1995-02-10 Verfahren zur Herstellung einer Matrize zur Erzeugung optischer Scheiben ohne Benutzung einer Hauptplatte
EP95200328A EP0667608B1 (en) 1994-02-14 1995-02-10 A method of manufacturing a matrix for producing optical disks without the medium of a master
SG1996009446A SG52782A1 (en) 1994-02-14 1995-02-10 A method of manufacturing a matrix for producing optical disks without the medium of a master
KR1019950002702A KR100336105B1 (ko) 1994-02-14 1995-02-14 마스터의매개가없는광학디스크생산용매트릭스의제조방법
CN95102747A CN1056937C (zh) 1994-02-14 1995-02-14 无需母片为媒介的制造光盘的型片的方法
JP02544095A JP3636387B2 (ja) 1994-02-14 1995-02-14 マスターによらずに光ディスクを生産するためのマトリックスの製造方法
TW084101811A TW279978B (zh) 1994-02-14 1995-02-25
US08/680,110 US6159664A (en) 1994-02-14 1996-07-15 Method of manufacturing a matrix for producing optical disks without the medium of a master
HK98102794A HK1003736A1 (en) 1994-02-14 1998-04-02 A method of manufacturing a matrix for producing optical disks without the medium of a master

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9400225 1994-02-14
NL9400225A NL9400225A (nl) 1994-02-14 1994-02-14 Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven.

Publications (1)

Publication Number Publication Date
NL9400225A true NL9400225A (nl) 1995-09-01

Family

ID=19863833

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9400225A NL9400225A (nl) 1994-02-14 1994-02-14 Werkwijze voor het zonder tussenkomst van een master vervaardigen van een stamper voor het voortbrengen van optische schijven.

Country Status (12)

Country Link
US (1) US6159664A (zh)
EP (1) EP0667608B1 (zh)
JP (1) JP3636387B2 (zh)
KR (1) KR100336105B1 (zh)
CN (1) CN1056937C (zh)
AT (1) ATE187010T1 (zh)
DE (1) DE69513424T2 (zh)
ES (1) ES2140613T3 (zh)
HK (1) HK1003736A1 (zh)
NL (1) NL9400225A (zh)
SG (1) SG52782A1 (zh)
TW (1) TW279978B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1007216C2 (nl) * 1997-10-07 1999-04-08 Od & Me Bv Werkwijze voor het vervaardigen van een stamper voor het voortbrengen van optische schijven, aldus verkregen stamper en optische schijf verkregen onder toepassing van een dergelijke stamper.
NL1009106C2 (nl) * 1998-05-08 1999-11-09 Od & Me Bv Werkwijze voor het vervaardigen van een stamper, stamper verkregen volgens een dergelijke werkwijze alsmede optische schijf verkregen onder toepassing van een dergelijke stamper.

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19653078A1 (de) * 1996-12-19 1998-06-25 Trace Optical Leitstrukturen in optischen Speichermedien
SE9703479D0 (sv) * 1997-06-02 1997-09-25 Toolex Alpha Ab Stamper
SE9703480D0 (sv) * 1997-07-16 1997-09-25 Toolex Alpha Ab Stamper and method of manufacturing the same
DE19919764A1 (de) * 1999-04-29 2000-11-02 Innovators Ag Neuhausen Am Rhe Herstellung eienr Preßform für Compact Discs
JP3104699B1 (ja) * 1999-06-01 2000-10-30 株式会社ニコン 細溝付き成形基板の製造方法
FR2809532B1 (fr) * 2000-05-23 2003-09-26 St Microelectronics Sa Procede de fabrication de circuits semiconducteurs double face
NL1015524C2 (nl) * 2000-06-26 2001-12-28 Otb Group Bv Werkwijze ter vervaardiging van een substraat om te worden toegepast in een stampervervaardigingsproces, alsmede substraat verkregen volgens een dergelijke werkwijze.
JP2002096334A (ja) * 2000-09-25 2002-04-02 Nippon Columbia Co Ltd スタンパの製造方法
JP3592678B2 (ja) 2002-02-27 2004-11-24 松下電器産業株式会社 ブランク盤の製造方法とダイレクトスタンパーの製作方法
ITTO20011038A1 (it) * 2001-10-30 2003-04-30 St Microelectronics Srl Procedimento per la fabbricazione di una fetta semiconduttrice integrante dispositivi elettronici e una struttura per il disaccoppiamento el
CN100386807C (zh) * 2003-09-18 2008-05-07 周照耀 圆片上集成电路图案的制作方法及其应用
US20050151283A1 (en) * 2004-01-08 2005-07-14 Bajorek Christopher H. Method and apparatus for making a stamper for patterning CDs and DVDs
TWI298522B (en) * 2004-01-13 2008-07-01 Hon Hai Prec Ind Co Ltd A manufacturing method of a cavity
CN1300792C (zh) * 2004-03-15 2007-02-14 周照耀 信息记录薄膜材料及其制备方法
US20060115789A1 (en) * 2004-11-26 2006-06-01 Wishart Kenneth D Self-approximating intraoral
TW200903192A (en) * 2007-01-17 2009-01-16 Sony Corp Developing solution and method for production of finely patterned material

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2278474A1 (fr) * 1974-07-16 1976-02-13 Thomson Brandt Procede de fabrication d'une matrice destinee a la duplication d'un enregistrement de signaux en videofrequence, et matrice ainsi obtenue
JPS57172548A (en) * 1981-04-17 1982-10-23 Toshiba Corp Original disk for medium for reproducing stored information
JPS6045956A (ja) * 1983-08-20 1985-03-12 Dainippon Screen Mfg Co Ltd 光ディスク原盤作成方法
JPS60251537A (ja) * 1984-05-25 1985-12-12 Fujitsu Ltd 光デイスク用原盤の製造方法
EP0176684A2 (en) * 1984-09-04 1986-04-09 International Business Machines Corporation Process for forming a master mold for optical storage disks
EP0185097A1 (en) * 1984-06-01 1986-06-25 Hitachi, Ltd. Method of manufacturing stamper
EP0490547A1 (en) * 1990-11-30 1992-06-17 Sharp Kabushiki Kaisha Method of manufacturing a photomask for an optical memory
FR2701151A1 (fr) * 1993-02-03 1994-08-05 Digipress Sa Procédé de fabrication d'une matrice de pressage, notamment pour la réalisation de disques optiques, matrice de pressage obtenue par ce procédé et produit, tel que disque optique, obtenu à partir de cette matrice de pressage.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3832176A (en) * 1973-04-06 1974-08-27 Eastman Kodak Co Novel photoresist article and process for its use
US4164754A (en) * 1974-07-16 1979-08-14 Thomson-Brandt Method of manufacturing a die designed to duplicate a video frequency signal recording
US4650735A (en) * 1982-10-14 1987-03-17 U.S. Philips Corporation Method of manufacturing a metal matrix and an intermediate product obtained in performing the method
US4724043A (en) * 1984-09-04 1988-02-09 International Business Machines Corporation Process for forming a master mold for optical storage disks
US4729940A (en) * 1986-05-16 1988-03-08 Cbs Inc. Method of manufacturing master for optical information carrier
US5156936A (en) * 1989-09-19 1992-10-20 U.S. Philips Corporation Contact device for the photocathode of photoelectric tubes and manufacturing method
JP2868682B2 (ja) * 1992-05-15 1999-03-10 シャープ株式会社 光ディスク
US5407787A (en) * 1993-04-14 1995-04-18 The United States Of America As Represented By The Secretary Of The Navy Process to fabricate thick coplanar microwave electrode structures

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2278474A1 (fr) * 1974-07-16 1976-02-13 Thomson Brandt Procede de fabrication d'une matrice destinee a la duplication d'un enregistrement de signaux en videofrequence, et matrice ainsi obtenue
JPS57172548A (en) * 1981-04-17 1982-10-23 Toshiba Corp Original disk for medium for reproducing stored information
JPS6045956A (ja) * 1983-08-20 1985-03-12 Dainippon Screen Mfg Co Ltd 光ディスク原盤作成方法
JPS60251537A (ja) * 1984-05-25 1985-12-12 Fujitsu Ltd 光デイスク用原盤の製造方法
EP0185097A1 (en) * 1984-06-01 1986-06-25 Hitachi, Ltd. Method of manufacturing stamper
EP0176684A2 (en) * 1984-09-04 1986-04-09 International Business Machines Corporation Process for forming a master mold for optical storage disks
EP0490547A1 (en) * 1990-11-30 1992-06-17 Sharp Kabushiki Kaisha Method of manufacturing a photomask for an optical memory
FR2701151A1 (fr) * 1993-02-03 1994-08-05 Digipress Sa Procédé de fabrication d'une matrice de pressage, notamment pour la réalisation de disques optiques, matrice de pressage obtenue par ce procédé et produit, tel que disque optique, obtenu à partir de cette matrice de pressage.

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 10, no. 127 (P - 455)<2184> 13 May 1986 (1986-05-13) *
PATENT ABSTRACTS OF JAPAN vol. 7, no. 18 (P - 170)<1163> 25 January 1983 (1983-01-25) *
PATENT ABSTRACTS OF JAPAN vol. 9, no. 170 (P - 373)<1893> 16 July 1985 (1985-07-16) *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1007216C2 (nl) * 1997-10-07 1999-04-08 Od & Me Bv Werkwijze voor het vervaardigen van een stamper voor het voortbrengen van optische schijven, aldus verkregen stamper en optische schijf verkregen onder toepassing van een dergelijke stamper.
WO1999018572A1 (en) * 1997-10-07 1999-04-15 Odme International B.V. A method of manufacturing a stamper for producing optical discs, a stamper thus obtained and an optical disc obtained by using such a stamper
NL1009106C2 (nl) * 1998-05-08 1999-11-09 Od & Me Bv Werkwijze voor het vervaardigen van een stamper, stamper verkregen volgens een dergelijke werkwijze alsmede optische schijf verkregen onder toepassing van een dergelijke stamper.
EP0955632A1 (en) * 1998-05-08 1999-11-10 ODME International B.V. A method of manufacturing a stamper, a stamper obtained by carrying out such a method as well as an optical disc obtained by using such a stamper

Also Published As

Publication number Publication date
JP3636387B2 (ja) 2005-04-06
KR100336105B1 (ko) 2002-11-27
KR950034137A (ko) 1995-12-26
SG52782A1 (en) 1998-09-28
US6159664A (en) 2000-12-12
EP0667608B1 (en) 1999-11-24
HK1003736A1 (en) 1998-11-06
CN1121240A (zh) 1996-04-24
DE69513424T2 (de) 2000-03-23
CN1056937C (zh) 2000-09-27
JPH07326077A (ja) 1995-12-12
EP0667608A1 (en) 1995-08-16
TW279978B (zh) 1996-07-01
ES2140613T3 (es) 2000-03-01
ATE187010T1 (de) 1999-12-15
DE69513424D1 (de) 1999-12-30

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