NL1015471C2 - Organisch anti-reflecterend polymeer en werkwijze voor de bereiding hiervan. - Google Patents

Organisch anti-reflecterend polymeer en werkwijze voor de bereiding hiervan. Download PDF

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Publication number
NL1015471C2
NL1015471C2 NL1015471A NL1015471A NL1015471C2 NL 1015471 C2 NL1015471 C2 NL 1015471C2 NL 1015471 A NL1015471 A NL 1015471A NL 1015471 A NL1015471 A NL 1015471A NL 1015471 C2 NL1015471 C2 NL 1015471C2
Authority
NL
Netherlands
Prior art keywords
chemical formula
hydrogen
acrylate
methacrylate
polymer
Prior art date
Application number
NL1015471A
Other languages
English (en)
Dutch (nl)
Other versions
NL1015471A1 (nl
Inventor
Min-Ho Jung
Sung-Eun Hong
Ki-Ho Baik
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Publication of NL1015471A1 publication Critical patent/NL1015471A1/xx
Application granted granted Critical
Publication of NL1015471C2 publication Critical patent/NL1015471C2/nl

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10—Esters
    • C08F220/34—Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C251/00—Compounds containing nitrogen atoms doubly-bound to a carbon skeleton
    • C07C251/32—Oximes
    • C07C251/62—Oximes having oxygen atoms of oxyimino groups esterified
    • C07C251/64—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids
    • C07C251/66—Oximes having oxygen atoms of oxyimino groups esterified by carboxylic acids with the esterifying carboxyl groups bound to hydrogen atoms, to acyclic carbon atoms or to carbon atoms of rings other than six-membered aromatic rings

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Materials For Photolithography (AREA)
  • Polymerisation Methods In General (AREA)
  • Polymerization Catalysts (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
NL1015471A 1999-06-22 2000-06-19 Organisch anti-reflecterend polymeer en werkwijze voor de bereiding hiervan. NL1015471C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019990023382A KR100310252B1 (ko) 1999-06-22 1999-06-22 유기 반사방지 중합체 및 그의 제조방법
KR19990023382 1999-06-22

Publications (2)

Publication Number Publication Date
NL1015471A1 NL1015471A1 (nl) 2000-12-28
NL1015471C2 true NL1015471C2 (nl) 2001-04-09

Family

ID=19594043

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1015471A NL1015471C2 (nl) 1999-06-22 2000-06-19 Organisch anti-reflecterend polymeer en werkwijze voor de bereiding hiervan.

Country Status (10)

Country Link
US (3) US6388039B1 (it)
JP (2) JP3920537B2 (it)
KR (1) KR100310252B1 (it)
CN (1) CN1224610C (it)
DE (1) DE10028345A1 (it)
FR (1) FR2795411B1 (it)
GB (1) GB2351288B (it)
IT (1) IT1320274B1 (it)
NL (1) NL1015471C2 (it)
TW (1) TW553923B (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1016942C2 (nl) * 1999-12-23 2002-05-01 Hyundai Electronics Ind Organisch antireflecterend deklaagpolymeer en bereiding hiervan.

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KR100721181B1 (ko) * 2000-06-30 2007-05-23 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR100687850B1 (ko) * 2000-06-30 2007-02-27 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR100721182B1 (ko) * 2000-06-30 2007-05-23 주식회사 하이닉스반도체 유기반사방지막 조성물 및 그의 제조방법
KR20020090584A (ko) * 2001-05-28 2002-12-05 주식회사 동진쎄미켐 유기 반사 방지막용 고분자 수지, 및 이를 이용하는ＫｒＦ 포토레지스트용 유기 반사 방지막 조성물
US6670425B2 (en) 2001-06-05 2003-12-30 Brewer Science, Inc. Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
US6893684B2 (en) * 2001-06-05 2005-05-17 Brewer Science Inc. Anti-reflective coating compositions for use with low k dielectric materials
KR100480235B1 (ko) * 2002-07-18 2005-04-06 주식회사 하이닉스반도체 유기 반사방지막 조성물 및 이를 이용한 포토레지스트의패턴 형성 방법
US7056826B2 (en) * 2003-01-07 2006-06-06 Taiwan Semiconductor Manufacturing Co., Ltd. Method of forming copper interconnects
WO2004090640A1 (ja) * 2003-04-02 2004-10-21 Nissan Chemical Industries, Ltd. エポキシ化合物及びカルボン酸化合物を含むリソグラフィー用下層膜形成組成物
US7078336B2 (en) * 2003-11-19 2006-07-18 Taiwan Semiconductor Manufacturing Co., Ltd. Method and system for fabricating a copper barrier layer with low dielectric constant and leakage current
KR101156973B1 (ko) * 2005-03-02 2012-06-20 주식회사 동진쎄미켐 유기 반사방지막 형성용 유기 중합체 및 이를 포함하는 유기 조성물
KR100712999B1 (ko) * 2006-03-29 2007-05-02 주식회사 하이닉스반도체 유기 반사 방지막 중합체, 이를 포함하는 유기 반사 방지막조성물 및 이를 이용한 포토레지스트의 패턴 형성 방법
US20090253080A1 (en) * 2008-04-02 2009-10-08 Dammel Ralph R Photoresist Image-Forming Process Using Double Patterning
US20090253081A1 (en) * 2008-04-02 2009-10-08 David Abdallah Process for Shrinking Dimensions Between Photoresist Pattern Comprising a Pattern Hardening Step
JP2010034494A (ja) * 2008-06-30 2010-02-12 Sumitomo Chemical Co Ltd 有機光電変換素子
US20100040838A1 (en) * 2008-08-15 2010-02-18 Abdallah David J Hardmask Process for Forming a Reverse Tone Image
US8986561B2 (en) * 2008-12-26 2015-03-24 Tokyo Electron Limited Substrate processing method and storage medium
US8084186B2 (en) * 2009-02-10 2011-12-27 Az Electronic Materials Usa Corp. Hardmask process for forming a reverse tone image using polysilazane
JP6089743B2 (ja) * 2013-02-05 2017-03-08 Jsr株式会社 硬化膜形成用感放射線性樹脂組成物、硬化膜、その形成方法、半導体素子及び表示素子
US9772552B2 (en) 2013-03-19 2017-09-26 Eastman Kodak Company Thiosulfate polymer compositions and articles
US9005878B2 (en) 2013-03-19 2015-04-14 Eastman Kodak Company Forming patterns using thiosulfate polymer compositions
US8986924B2 (en) 2013-03-19 2015-03-24 Eastman Kodak Company Method of sequestering metals using thiosulfate polymers
US9499650B2 (en) * 2013-03-19 2016-11-22 Eastman Kodak Company Thiosulfate polymers
US8916336B2 (en) 2013-03-19 2014-12-23 Eastman Kodak Company Patterning method using thiosulfate polymer and metal nanoparticles
KR101699382B1 (ko) * 2014-10-22 2017-01-24 유한책임회사 도요엔지니어링 가공성이 향상된 낚시릴 프레임
TWI662370B (zh) * 2015-11-30 2019-06-11 南韓商羅門哈斯電子材料韓國公司 與外塗佈光致抗蝕劑一起使用之塗料組合物

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1016942C2 (nl) * 1999-12-23 2002-05-01 Hyundai Electronics Ind Organisch antireflecterend deklaagpolymeer en bereiding hiervan.

Also Published As

Publication number Publication date
FR2795411B1 (fr) 2004-01-30
ITTO20000606A1 (it) 2001-12-21
US6388039B1 (en) 2002-05-14
GB2351288B (en) 2004-02-11
ITTO20000606A0 (it) 2000-06-21
GB0014257D0 (en) 2000-08-02
US6538090B2 (en) 2003-03-25
DE10028345A1 (de) 2001-01-25
IT1320274B1 (it) 2003-11-26
US20020137826A1 (en) 2002-09-26
CN1278529A (zh) 2001-01-03
US20020136834A1 (en) 2002-09-26
CN1224610C (zh) 2005-10-26
US6489423B2 (en) 2002-12-03
JP4808597B2 (ja) 2011-11-02
NL1015471A1 (nl) 2000-12-28
TW553923B (en) 2003-09-21
KR20010003188A (ko) 2001-01-15
JP3920537B2 (ja) 2007-05-30
JP2001049231A (ja) 2001-02-20
FR2795411A1 (fr) 2000-12-29
KR100310252B1 (ko) 2001-11-14
JP2007113014A (ja) 2007-05-10
GB2351288A (en) 2000-12-27

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