MY194459A - Fluid delivery system - Google Patents

Fluid delivery system

Info

Publication number
MY194459A
MY194459A MYPI2018703659A MYPI2018703659A MY194459A MY 194459 A MY194459 A MY 194459A MY PI2018703659 A MYPI2018703659 A MY PI2018703659A MY PI2018703659 A MYPI2018703659 A MY PI2018703659A MY 194459 A MY194459 A MY 194459A
Authority
MY
Malaysia
Prior art keywords
substrate
component
port
ring
delivery system
Prior art date
Application number
MYPI2018703659A
Other languages
English (en)
Inventor
Melcer Chris
Ryan Barros Philip
Kubota Haruyuki
Treur Randolph
Cushman Todd
Patrick Mulligan Greg
Original Assignee
Ichor Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ichor Systems Inc filed Critical Ichor Systems Inc
Publication of MY194459A publication Critical patent/MY194459A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L43/00—Bends; Siphons
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Measuring Volume Flow (AREA)
  • Medicinal Preparation (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Gasket Seals (AREA)
MYPI2018703659A 2016-04-04 2017-04-04 Fluid delivery system MY194459A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662318202P 2016-04-04 2016-04-04
PCT/US2017/026022 WO2017176815A1 (en) 2016-04-04 2017-04-04 Liquid delivery system

Publications (1)

Publication Number Publication Date
MY194459A true MY194459A (en) 2022-11-30

Family

ID=60000702

Family Applications (2)

Application Number Title Priority Date Filing Date
MYPI2018703659A MY194459A (en) 2016-04-04 2017-04-04 Fluid delivery system
MYPI2022001456A MY208092A (en) 2016-04-04 2017-04-04 Liquid delivery system

Family Applications After (1)

Application Number Title Priority Date Filing Date
MYPI2022001456A MY208092A (en) 2016-04-04 2017-04-04 Liquid delivery system

Country Status (7)

Country Link
US (5) US11158521B2 (enExample)
JP (3) JP2019518175A (enExample)
KR (1) KR20180136468A (enExample)
CN (1) CN109564885A (enExample)
MY (2) MY194459A (enExample)
SG (2) SG11201808788PA (enExample)
WO (1) WO2017176815A1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
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MY194459A (en) 2016-04-04 2022-11-30 Ichor Systems Inc Fluid delivery system
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US12589474B2 (en) 2020-05-12 2026-03-31 Ichor Systems, Inc. Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
EP4154305A4 (en) * 2020-05-19 2024-06-05 Ichor Systems, Inc. SEAL INSERTION TOOL FOR A FLUID DISPENSING MODULE AND METHOD FOR INSTALLING A SEAL IN A FLUID DISPENSING MODULE
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US12183597B2 (en) 2021-11-24 2024-12-31 Ichor Systems, Inc. Fluid delivery system
TWI906923B (zh) * 2023-06-30 2025-12-01 美商艾克爾系統公司 流體輸送系統
US12500094B2 (en) * 2023-09-01 2025-12-16 Applied Materials, Inc. Modular fluid delivery assembly
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Also Published As

Publication number Publication date
CN109564885A (zh) 2019-04-02
SG11201808788PA (en) 2018-11-29
JP2025090697A (ja) 2025-06-17
US11158521B2 (en) 2021-10-26
US11990354B2 (en) 2024-05-21
US11158522B2 (en) 2021-10-26
US20220384217A1 (en) 2022-12-01
US12062553B2 (en) 2024-08-13
SG10202012083YA (en) 2021-01-28
JP2022046791A (ja) 2022-03-23
WO2017176815A1 (en) 2017-10-12
JP7671258B2 (ja) 2025-05-01
US20220028705A1 (en) 2022-01-27
US20210159093A1 (en) 2021-05-27
KR20180136468A (ko) 2018-12-24
US20240274444A1 (en) 2024-08-15
US20210193487A1 (en) 2021-06-24
JP2019518175A (ja) 2019-06-27
MY208092A (en) 2025-04-15

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