SG10202012083YA - Liquid delivery system - Google Patents

Liquid delivery system

Info

Publication number
SG10202012083YA
SG10202012083YA SG10202012083YA SG10202012083YA SG10202012083YA SG 10202012083Y A SG10202012083Y A SG 10202012083YA SG 10202012083Y A SG10202012083Y A SG 10202012083YA SG 10202012083Y A SG10202012083Y A SG 10202012083YA SG 10202012083Y A SG10202012083Y A SG 10202012083YA
Authority
SG
Singapore
Prior art keywords
delivery system
liquid delivery
liquid
delivery
Prior art date
Application number
SG10202012083YA
Inventor
Chris Melcer
Philip Ryan Barros
Haruyuki Kubota
Randolph Treur
Todd Cushman
Greg Patrick Mulligan
Original Assignee
Ichor Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ichor Systems Inc filed Critical Ichor Systems Inc
Publication of SG10202012083YA publication Critical patent/SG10202012083YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L43/00—Bends; Siphons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
SG10202012083YA 2016-04-04 2017-04-04 Liquid delivery system SG10202012083YA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201662318202P 2016-04-04 2016-04-04

Publications (1)

Publication Number Publication Date
SG10202012083YA true SG10202012083YA (en) 2021-01-28

Family

ID=60000702

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201808788PA SG11201808788PA (en) 2016-04-04 2017-04-04 Liquid delivery system
SG10202012083YA SG10202012083YA (en) 2016-04-04 2017-04-04 Liquid delivery system

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG11201808788PA SG11201808788PA (en) 2016-04-04 2017-04-04 Liquid delivery system

Country Status (7)

Country Link
US (4) US11158521B2 (en)
JP (2) JP2019518175A (en)
KR (1) KR20180136468A (en)
CN (1) CN109564885A (en)
MY (1) MY194459A (en)
SG (2) SG11201808788PA (en)
WO (1) WO2017176815A1 (en)

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* Cited by examiner, † Cited by third party
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JP2019518175A (en) 2016-04-04 2019-06-27 アイコール・システムズ・インク Liquid delivery system
KR102588410B1 (en) * 2018-02-23 2023-10-13 니폰 필라고교 가부시키가이샤 Gasket mounting structure to the block
JP6905948B2 (en) * 2018-03-13 2021-07-21 日本ピラー工業株式会社 Gasket mounting structure on the block and gasket
JP6847888B2 (en) 2018-03-28 2021-03-24 日本ピラー工業株式会社 Gasket mounting structure
DE112019001700T5 (en) 2018-03-30 2020-12-31 Nippon Pillar Packing Co., Ltd. SEAL AND FLOW DUCT CONNECTOR STRUCTURE
JP6858155B2 (en) * 2018-03-30 2021-04-14 日本ピラー工業株式会社 Flow path joint structure
US20220199431A1 (en) * 2019-04-15 2022-06-23 Lam Research Corporation Modular-component system for gas delivery
JP7396933B2 (en) 2020-03-03 2023-12-12 日本ピラー工業株式会社 flow path unit
JP1697126S (en) 2020-12-28 2021-10-18
JP1697125S (en) 2020-12-28 2021-10-18
JP1701102S (en) 2020-12-28 2021-11-29
JP1701019S (en) 2020-12-28 2021-11-29
JP1701103S (en) 2020-12-28 2021-11-29
JP1716682S (en) 2020-12-28 2022-06-06 Fluid block
JP1697127S (en) 2020-12-28 2021-10-18
CN113390275B (en) * 2021-05-20 2022-12-16 延安家安能源科技有限公司 Tube-fin heat exchanger
RU2769077C1 (en) * 2021-06-11 2022-03-28 Компания Домидо Лимитед Self-centering insert sealing element
WO2023096851A2 (en) * 2021-11-24 2023-06-01 Ichor Systems, Inc. Fluid delivery system

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US2046155A (en) * 1933-02-15 1936-06-30 Fred C Fantz Return bend
US5466018A (en) * 1992-03-12 1995-11-14 Techlok Limited Seal ring and joint
CA2127957A1 (en) 1993-09-29 1995-03-30 Gerald A. Babuder Clamped flange fitting and assembly
US5839765A (en) * 1996-11-01 1998-11-24 Cooper Cameron Corporation Metal seal ring for tubular joint
JP3965512B2 (en) * 1998-03-31 2007-08-29 株式会社フジキン Gasket retainer used in fluid coupling and fluid coupling
AU4434799A (en) * 1998-06-12 1999-12-30 J. Gregory Hollingshead Modular chemical delivery blocks
JP4200245B2 (en) * 1998-11-11 2008-12-24 株式会社フジキン Fluid coupling
JP4156184B2 (en) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー Integrated gas control device
US6450507B2 (en) * 2001-02-01 2002-09-17 Abb Vetco Gray Inc. Water ingress seal for tapered seals
JP2003322127A (en) * 2002-04-26 2003-11-14 Fujikin Inc Fluid coupling
US6907904B2 (en) * 2003-03-03 2005-06-21 Redwood Microsystems, Inc. Fluid delivery system and mounting panel therefor
US20050242519A1 (en) * 2004-04-29 2005-11-03 Koleilat Bashir M Wedge seal
US20060011246A1 (en) * 2004-07-09 2006-01-19 Leys John A Fluid flow control system and method
JP2006084002A (en) * 2004-09-17 2006-03-30 Ckd Corp Channel block
TW200613670A (en) * 2004-09-22 2006-05-01 Nippon Pillar Packing Connection structure for integration panel and fluid device
JP4465254B2 (en) * 2004-11-05 2010-05-19 日本ピラー工業株式会社 Connection structure between integrated panel and fluidic device
WO2006059362A1 (en) * 2004-11-30 2006-06-08 Ckd Corporation Seal structure for connecting section in fluidic device
JP4644477B2 (en) 2004-11-30 2011-03-02 日本ピラー工業株式会社 Gasket for fluid
JP4653551B2 (en) 2005-04-28 2011-03-16 シーケーディ株式会社 Chemical valve mounting method
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP4393472B2 (en) * 2006-04-26 2010-01-06 日本ピラー工業株式会社 Connection structure between fluid devices
JP5221534B2 (en) * 2006-07-14 2013-06-26 インテグリス・インコーポレーテッド Valve connection pipe assembly
JP5183935B2 (en) * 2007-02-26 2013-04-17 Ｃｋｄ株式会社 Manufacturing method of flow path block
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JP5127304B2 (en) * 2007-05-31 2013-01-23 株式会社フジキン Fluid control device
JP2011503450A (en) 2007-11-02 2011-01-27 インテグリス・インコーポレーテッド Integrated face seal
SG176152A1 (en) * 2009-06-10 2011-12-29 Vistadeltek Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8336573B2 (en) * 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
NO332742B1 (en) * 2010-09-22 2013-01-02 Vetco Gray Scandinavia As pipe couplings
US20150176744A1 (en) * 2013-12-20 2015-06-25 Onesubsea Ip Uk Limited Gasket
JP5883907B1 (en) 2014-09-30 2016-03-15 日本ピラー工業株式会社 Resin pipe fittings
US10704712B1 (en) * 2015-12-17 2020-07-07 Cameron International Corporation External pressure CX gasket
JP2019518175A (en) 2016-04-04 2019-06-27 アイコール・システムズ・インク Liquid delivery system
JP6905948B2 (en) 2018-03-13 2021-07-21 日本ピラー工業株式会社 Gasket mounting structure on the block and gasket
JP6847888B2 (en) 2018-03-28 2021-03-24 日本ピラー工業株式会社 Gasket mounting structure

Also Published As

Publication number Publication date
JP2022046791A (en) 2022-03-23
US20210193487A1 (en) 2021-06-24
CN109564885A (en) 2019-04-02
US11158521B2 (en) 2021-10-26
US20220384217A1 (en) 2022-12-01
JP2019518175A (en) 2019-06-27
SG11201808788PA (en) 2018-11-29
US11158522B2 (en) 2021-10-26
KR20180136468A (en) 2018-12-24
US20220028705A1 (en) 2022-01-27
WO2017176815A1 (en) 2017-10-12
MY194459A (en) 2022-11-30
US20210159093A1 (en) 2021-05-27

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