JP4644477B2 - Gasket for fluid - Google Patents

Description

  The present invention relates to a gasket for fluid, and more specifically, a piping system for high-purity liquid, ultrapure water, or cleaning liquid used in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, food processing, and chemical industry. The present invention relates to a fluid gasket for connecting fluid devices such as integrated panels, pumps, valves, and accumulators in a sealed state.

  Conventionally, as means for connecting fluid devices in a sealed state so as to allow fluid to flow freely by interposing a fluid gasket, a first flange pipe that is an example of a first fluid device is used. A flange portion (first fluid supply / discharge port portion) and a second flange portion (second fluid supply / discharge port portion) of a second flange pipe, which is an example of the second fluid device, include a ring-shaped gasket therebetween. There is a structure in which a plurality of bolts and nuts are used to fasten and fix via a screw. As such an example, those disclosed in Patent Document 1 and Patent Document 2 are known.

Also, when connecting and connecting the flange pipe and a pump, a valve or the like, a connection structure according to the connection structure between the flange pipes described above is employed. That is, this is a connection structure in which the flange portion of the flange pipe and the end portion of the fluid supply / exhaust port portion of the fluid device are opposed to each other via a gasket, and both are tightened and connected by a bolt or the like. That is, the fluid gasket interposed between the fluid devices includes the first fluid supply / discharge port portion of the first fluid device including the first fluid supply / discharge port portion in which the tubular first fluid passage opens. The first fluid supply / exhaust port portion is connected to the second fluid supply / exhaust port portion of the second fluid device having a second fluid supply / exhaust port portion in which the tubular second fluid passage opens. A first end contacting the second fluid supply port and a second end contacting the second fluid supply / exhaust port, and between the first fluid supply / exhaust port and the second fluid supply / exhaust port. It is configured in an intervening ring shape.
Japanese Patent Laid-Open No. 2000-120953 Japanese Patent Laid-Open No. 10-231969

  In the connection structure described above, effective sealing performance is obtained by tightening the bolts until the predetermined surface pressure is reached between the pair of flange portions between which the gasket is sandwiched. However, since the bolt tightening force decreases with time, it has been necessary to periodically perform additional tightening in order to prevent the tightening force from decreasing, that is, leakage from the connection portion due to torque reduction. In this way, in the structure that seals using the gasket for fluid, a very high tightening force is required, so the flange portion of the flange piping and the fluid supply / exhaust port portion of the fluid equipment require high strength, It was also disadvantageous in terms of workability for connecting and connecting.

  In the connection structures disclosed in Patent Documents 1 and 2 described above, the inner diameter of the gasket is slightly larger than the diameter of the tubular fluid passage in the flange piping or the flange portion of the fluid device, and the fluid passage has irregularities. Therefore, there is a possibility that a liquid pool is generated in the portion, which may cause a high purity or a hindrance to the cleaning.

  The present invention has been made in view of such circumstances, and the purpose of the present invention is to retighten by contriving a connection structure between fluid devices using a gasket in a liquid piping system or the like. An object of the present invention is to provide a fluid gasket that can maintain a good sealing performance with little or no improvement and improve its assembling workability. Another object of the present invention is to eliminate the liquid pool in the connection structure portion and thereby achieve high purity.

First, the invention according to the reference claim is defined as follows. That is, the invention according to the reference claim includes the first fluid supply / discharge port portion 1B of the first fluid device 1 including the first fluid supply / discharge port portion 1B in which the tubular first fluid passage E1 opens, The first fluid supply / exhaust port is connected to the second fluid supply / exhaust port part 2B of the second fluid device 2 having the second fluid supply / exhaust port part 2B in which the second fluid passage E2 is opened in a sealed state. A first end T1 that contacts the portion 1B and a second end T2 that contacts the second fluid supply / exhaust port 2B. The first fluid supply / discharge port 1B and the second fluid supply / discharge In the ring-shaped fluid gasket interposed between the mouth 2B,
The first end T1 can be fitted into a first annular groove R1 formed in an outer diameter side portion of the first fluid passage E1 in the first fluid supply / exhaust port 1B to form a seal portion S. The first annular protrusion D1 and a tapered first annular shape formed with a tapered outer peripheral surface 7a that abuts an outwardly tapered inner peripheral surface 5a formed by expanding the opening side end of the first fluid passage E1. A presser protrusion O1,
The second end portion T2 can be fitted into a second annular groove R2 formed in the outer diameter side portion of the second fluid passage E2 in the second fluid supply / exhaust port portion 2B to freely form a seal portion S. A tapered second annular presser protrusion having a second annular protrusion D2 and a tapered outer peripheral surface 7a that comes into contact with an outwardly tapered inner peripheral surface 5a formed by expanding the opening side end of the second fluid passage E2. O2 and
A fluid path F for communicating the first and second fluid passages E1 and E2 is formed.

According to the first aspect of the present invention, the first fluid supply / discharge port portion 1B of the first fluid device 1 including the first fluid supply / discharge port portion 1B in which the tubular first fluid passage E1 opens, and the tubular second The first fluid supply / exhaust port 1B is connected to the second fluid supply / discharge port 2B of the second fluid device 2 having the second fluid supply / discharge port 2B through which the fluid passage E2 is opened in a sealed state. A first end T1 that contacts the second fluid supply port 2B, and a second end T2 that contacts the second fluid supply / discharge port 2B. The first fluid supply / discharge port 1B and the second fluid supply / discharge port In the ring-shaped gasket for fluid interposed between 2B,
The first end portion T1 is fitted to a first annular protrusion D1 formed on the outer diameter side portion of the first fluid passage E1 in the first fluid supply / exhaust port portion 1B to form a seal portion. An inward direction of a tapered first annular presser protrusion O1 formed in a portion between the first annular groove R1 and the first fluid passage E1 and the first annular protrusion D1 in the first fluid supply / exhaust port 1B. A first peripheral wall end C1 formed with a taper inner peripheral surface 15a contacting the taper outer peripheral surface 17a;
The second end T2 can be fitted into a second annular protrusion D2 formed on an outer diameter side portion of the second fluid passage E2 in the second fluid supply / exhaust port 2B to form a seal portion S. Inside the second annular groove R2 and the tapered second annular pressing projection O2 formed in the portion between the second fluid passage E2 and the second annular projection D2 in the second fluid supply / exhaust port 2B. A second peripheral wall end C2 formed with a taper inner peripheral surface 15a that contacts the direction taper outer peripheral surface 17a;
A fluid path F for communicating the first and second fluid passages E1 and E2 is formed.

In the invention according to claim 2, the first fluid supply / discharge port portion 1B of the first fluid device 1 including the first fluid supply / discharge port portion 1B in which the tubular first fluid passage E1 opens, and the tubular second The first fluid supply / exhaust port 1B is connected to the second fluid supply / discharge port 2B of the second fluid device 2 having the second fluid supply / discharge port 2B through which the fluid passage E2 is opened in a sealed state. A first end T1 that contacts the second fluid supply port 2B, and a second end T2 that contacts the second fluid supply / discharge port 2B. The first fluid supply / discharge port 1B and the second fluid supply / discharge port In the ring-shaped gasket for fluid interposed between 2B,
The first end T1 is an annular protrusion that can be fitted into an annular groove R formed in an outer diameter side portion of the first fluid passage E1 in the first fluid supply / exhaust port 1B to form a seal portion S. D and a tapered first annular presser protrusion O having a tapered outer peripheral surface 7a formed on the opening-side end portion of the first fluid passage E1 to be in contact with the outward tapered inner peripheral surface 5a. Have
The second end T2 is an annular groove in which a seal portion S can be freely formed by fitting into an annular protrusion D formed on the outer diameter side portion of the second fluid passage E2 in the second fluid supply / exhaust port 2B. R and an inwardly tapered outer circumferential surface 17a of a tapered annular presser protrusion O formed in a portion between the second fluid passage E2 and the annular protrusion D in the second fluid supply / discharge port 2B. A peripheral wall end C on which a tapered inner peripheral surface 15a is formed,
A fluid path F for communicating the first and second fluid passages E1 and E2 is formed.

According to a third aspect of the present invention, in the fluid gasket according to the first or second aspect, the depth of the annular grooves R, R1, and R2 is determined based on the protrusion amount of the corresponding annular protrusions D, D1, and D2. The taper inner peripheral surfaces 5a and 15a and the taper outer peripheral surfaces 7a and 17a are pressed to form a seal portion S.

According to a fourth aspect of the present invention, in the fluid gasket according to any one of the first to third aspects, the diameter of the first end T1 side opening of the fluid path F and the first fluid passage E1 The openings are the same as each other, the diameter of the opening on the second end T2 side of the fluid path F and the opening of the second fluid passage E2 are the same, and the fluid path F is It is characterized in that it is formed in a shape that does not have a sudden change in cross-sectional area .

The invention according to claim 5 is the gasket for fluid according to any one of claims 1 to 4, wherein the first fluid supply / exhaust port portion 1B and the first end portion T1 are fitted, and In the assembled state in which the second fluid supply / discharge port portion 2B and the second end T2 are fitted, the first fluid supply / discharge port portion 1B and the second fluid supply / discharge port portion 2B are separated from each other. The first and second end portions T1 and T2 are dimensioned so as to be connected in a connected state, and in the assembled state, the first fluid supply / discharge port portion 1B and the second fluid supply / discharge port The outer peripheral projection 1f for extraction having a thickness smaller than the distance from the portion 2B is formed between the first fluid supply / exhaust port 1B and the second fluid supply / exhaust port 2B. it is characterized in that there.

According to a sixth aspect of the present invention, in the fluid gasket according to any one of the first to fifth aspects, the first and second end portions T1 and T2 are formed of a fluorine-based synthetic resin material. It is characterized by.

According to the invention described in the reference claim , the fluid gasket sandwiched between the first fluid supply / discharge port portion of the first fluid device and the second fluid supply / discharge port portion of the second fluid device and each fluid supply. By fitting the annular groove and the annular protrusion along the axial direction of the fluid passage of each device by the exhaust port portion, the fitting seal portion is formed by the annular groove and the annular protrusion being pressed in the radial direction. Since the fitting seal portion is formed, an excellent sealing action can be exhibited even if the fluid supply / discharge port portions are not strongly pressed against each other.

  In the connected state in which the fluid gasket and each fluid device are assembled, each peripheral wall is formed on the inner diameter side of the fitting portion between the annular protrusion of each fluid supply / discharge port portion and the annular grooves of the first and second end portions. There is a structure in which the taper inner peripheral surface of the end and the taper outer peripheral surface of each annular pressing protrusion are in contact with each other, thereby providing a seal portion that is more excellent in sealing properties and has no liquid reservoir and can promote high purity. In addition, the following effects can be obtained. That is, as will be described in detail in the embodiments, the thickness of the end portion of the peripheral wall, which is the portion between the annular groove and the fluid passage in each fluid device, is made too thick in order to avoid the enlargement of the fluid gasket and the connection portion. Therefore, since there is a surface where strength and rigidity are likely to be insufficient, there is a possibility that the peripheral wall end portion of each fluid device is inclined and deformed toward the inner diameter side when the annular protrusion is fitted into the annular groove.

  However, the peripheral wall end portion to be inclined and deformed is supported by the first and second annular pressing protrusions of the fluid gasket having the tapered inner peripheral surface that abuts the tapered outer peripheral surface, and the peripheral wall end of each fluid device It is possible to compensate for the lack of rigidity of the part and prevent tilting deformation to the inner diameter side, effectively exhibit the sealing function of the seal part by fitting the annular groove and the annular projection, and each taper outer surface and each taper It is possible to prevent fluid from entering between the inner peripheral surface and the liquid pool from occurring at the boundary between the fluid passage and the fluid path.

  As a result, the first and second fluid devices can be connected in a sealed state by a seal portion by tightening the fluid gasket in the radial direction instead of the axial direction by fitting the annular groove and the annular protrusion. Thus, even if the pressure contact force between the first and second fluid devices is somewhat loosened, the effective sealing function is maintained, and additional tightening is unnecessary or hardly performed, and is excellent for a long time. In addition, it is possible to provide a fluid gasket that contributes to the realization of a connection structure that can maintain a high sealing performance and also improve assembly workability and compactness. For example, if such a connection structure is used in the piping system of a cleaning device in a semiconductor manufacturing facility, the area occupied by the device can be reduced while ensuring good sealing performance, and a large flow path is secured. As a result, it is possible to increase the circulation flow rate, increase the purity of the chemical solution, and contribute to the yield improvement.

In the first aspect of the present invention, an annular groove and a peripheral wall end are formed in each fluid device, and an annular protrusion and an annular presser protrusion are formed in the fluid gasket. This is the invention of the reference claim. The configuration is the opposite of that of Therefore, as the fluid gasket, the difference in shape is that the one according to the reference claim is a convex type having annular projections at both ends, and the one according to this claim is a concave type having annular grooves at both ends. As a result, the same effects as the effects of the invention of the above-mentioned reference claims can be obtained.

By the way, in the fitting structure in which the convex is inserted into the concave, even if both of them are made of the same material, the convex member hardly changes (compression deformation), and the concave member expands. It is generally known that there is a tendency to deform. In this regard, in the invention of claim 1 , the annular protrusion that is convex in the fluid device and the annular groove that is concave in the fluid gasket are formed. The fluid device side is a small part compared to the fluid device, and the fluid device side hardly deforms. Therefore, if the deformation occurs, the fluid gasket, which is a small part, can be replaced. The advantage of maintaining good sealing performance is added.

The invention of claim 2, the connection between the gasket and the first fluid device for fluid is employed the configuration of reference claims, the configuration of claim 1 is employed to connect the gasket to the second fluid device for a fluid Is. Therefore, according to the second aspect of the present invention, it is possible to obtain the effect of the invention of the reference claim in the seal portion between the fluid gasket and the first fluid device, and the fluid gasket and the second fluid device. In the seal portion, a fluid gasket can be provided that can obtain the operational effects of the invention of claim 1 .

According to the invention of claim 3 , the expansion deformation of the peripheral wall end part due to the fitting of the annular groove and the annular protrusion is suppressed by a simple modification that defines the dimension setting of the annular groove and the annular protrusion fitted thereto. The contact between the tapered inner peripheral surface and the tapered outer peripheral surface also functions as a seal portion where the tapered inner peripheral surface and the tapered outer peripheral surface are in pressure contact with each other, improving the overall sealing performance. Thus, it is possible to provide a multi-functionalized gasket with a high added value.

According to invention of Claim 4 , when the diameter of the 1st fluid channel | path of a 1st fluid device and the 2nd fluid channel | path of a 2nd fluid device differs, the fluid of the gasket interposed between these both The path can buffer the difference in diameter between the two fluid passages, and can be connected in a smooth tubular path. As a result, when the first and second fluid passages have the same diameter, it is needless to say that the fluid passages of the first and second fluid devices can be made using a structure in which a fluid gasket is interposed. It is possible to provide a fluid gasket capable of exhibiting the advantage of being able to communicate and connect in a state in which fluid smoothly flows regardless of whether there is a difference in diameter.

According to the invention of claim 5 , the details will be described in the embodiments. However, if an outer peripheral protrusion for extraction is formed on the fluid gasket, the fluid is discharged from the first or second fluid supply / exhaust port in the assembled state. When the gasket is extracted, the outer peripheral protrusion can be easily removed by pulling it with a tool or fingers, and there is an advantage that the operation of extracting the fluid gasket from the fluid device is facilitated.

According to the invention of claim 6 , since the fluid gasket is formed of a fluorine-based resin having characteristics excellent in chemical resistance and heat resistance, even if the fluid is a chemical liquid or a chemical liquid, or a high temperature Even if it is a fluid, the first and second end portions are not deformed to be easily leaked, and a good sealing property can be maintained. The fluororesin is a resinous substance obtained by polymerization of ethylene and derivatives thereof in which one or more hydrogen atoms are substituted with fluorine, and is stable at high temperatures and excellent in water repellency. Further, it is preferable in that it has a small coefficient of friction, extremely high chemical resistance, and high electrical insulation.

Hereinafter, embodiments of a fluid gasket according to the present invention and a connection structure between fluid devices using the fluid gasket will be described with reference to the drawings. FIGS. 1 to 6 are views of a convex fluid gasket and a connection structure between flange pipes using the same, and are based on reference claims and will be described as reference examples 1 and 2. FIG. FIGS. 7 and 8 are diagrams relating to a concave gasket for fluid and a connection structure between flange pipes using the gasket, which will be described as a third embodiment. FIGS. 9 to 11 are diagrams relating to a convex fluid gasket, and a connection structure between a flange pipe and a fluid device using the gasket, which will be described as a fourth embodiment. FIGS. 12 to 14 are diagrams regarding a symmetrical gasket and a connection structure between an integrated panel and a valve using the same, and will be described as a fifth embodiment. FIG. 15 is a diagram relating to a symmetrical gasket and a connection structure between an integrated panel using the same and a filter, which will be described as a sixth embodiment.

[ Reference Example 1 ]
The fluid gasket according to Reference Example 1 is used for a connection structure between flange pipes. As shown in FIG. 1, the end of a tubular portion 1A having a circular fluid passage 4 has a first flange portion 1B having a larger diameter and a circular cross section than the tubular portion 1A. The first flange pipe (an example of the first fluid device) 1B of the first flange part (an example of the first fluid supply / exhaust port part) 1B and the end of the tubular part 2A having the circular fluid passage 4, A second flange portion (second fluid) of a second flange pipe (an example of a second fluid device) 2 made of fluororesin such as PFA and PTFE having a second flange portion 2B having a larger diameter and a circular cross section than the tubular portion 2A. An example of the supply / discharge port portion) 2B is a connection portion that is connected in a sealed state through a ring-shaped fluid gasket G for fluid interposed between the first flange portion 1B and the second flange portion 2B, that is, Configured as a connection between flange pipes That.

  The first flange pipe 1 and the second flange pipe 2 are identical to each other and have a common axis P. As shown in FIG. 2, the first flange portion 1B and the second flange portion 2B Are connected in a sealed state via a ring-shaped fluid gasket G sandwiched between them. At that time, the two flange portions 1B and 2B are attracted to each other by the attracting means M via the fluid gasket G, and the first seal end t1 formed on the end surface of the first flange portion 1B by this attracting action. And the first end T1 of the fluid gasket G, and the second seal end t2 formed on the end face of the second flange portion 2B and the second end T2 of the fluid gasket G, respectively. The fitting seal part 3 is formed by fitting.

  In the connection part between both flange pipes 1 and 2 shown in FIG. 2, the first seal end t1 formed on the end face of the first flange part 1B and the second seal formed on the end face of the second flange part 2B. Since the end portion t2 has the same structure, only the first seal end portion t1 will be described, and the second seal end portion t2 will be denoted by the same reference numeral and description thereof will be omitted. The first seal end t1 is concentric with the fluid passage 4 on the outer diameter side portion of the opening end of the fluid passage 4 on the end face of the first flange portion 1B that opens the fluid passage 4 (fluid passage E1 or fluid passage E2). It is comprised by the annular groove 6 formed in outward open shape. The first seal end t1 has an annular first joint end (the first peripheral wall end C1 or the second peripheral wall end C2) formed between the inner diameter portion of the annular groove 6 and the fluid passage 4. ) A taper inner peripheral surface 5a having a tapered shape is formed on the inner peripheral side of the tip of 5). The annular groove 6 is formed in a shape having a deep cross-sectional rectangle in the direction of the axis P of the fluid passage 4 at a position relatively close to the outer diameter side from the fluid passage 4, and an inner peripheral surface 6a thereof is a first joint end portion. 5 also serves as an outer peripheral surface.

  As shown in FIGS. 2 and 4, the fluid gasket G is formed in a ring shape having a circular fluid passage 9 (fluid passage F) having the same diameter as the fluid passage 4 in the center, and the first flange portion 1B. An annular protrusion 8 that can be press-fitted into the annular groove 6 is formed on the outer diameter side portion of the fluid passage 9 that opens to the first end T1 that faces the first seal end t1. At the second end T2 facing the second seal end t2 of the flange portion 2B, an annular protrusion 8 that fits into the annular groove 6 is formed on the outer diameter side portion of the fluid path 9 that opens to the second end T2. . In addition, annular second joint end portions (an example of first and second presser protrusions) 7 are provided between the annular protrusion 8 and the fluid path 9 in the first and second end portions T1 and T2 of the fluid gasket G, respectively. The tapered outer peripheral surface 7a that contacts the tapered inner peripheral surface 5a of the first joint end 5 is tapered and formed on the outer peripheral surface of the tip of the second joint end 7 to be tapered. The annular protrusion 8 is formed in a shape having a rectangular cross section that is long in the direction of the axis P of the fluid path 9, and the protruding length is set to be slightly shorter than the depth of the annular groove 6. Between the 2nd junction end part 7 and the cyclic | annular protrusion 8, it is the cyclic | annular trough part which expands ahead, and it has the structure which the 1st junction end part 5 fits into this trough part.

  As shown in FIG. 2, by fitting the annular grooves 6 and 6 of the first and second seal end portions t1 and t2 and the annular projections 8 and 8 on both end faces of the fluid gasket G to each other, the fitting seal portions 3 are respectively fitted. Is formed. In this case, if the thickness in the free state of the annular protrusion 8, that is, the radial dimension is set to a value larger than the groove width in the free state of the annular groove 6, that is, the radial dimension, the annular groove is formed by the attracting means M described later. The fitting seal portion 3 formed by fitting the ring 6 and the annular protrusion 8 to each other is configured such that both the inner diameter side peripheral surface 6a and the outer diameter side peripheral surface 6b of the annular groove 6 and the annular protrusion 8 are pressed in the radial direction. Primary and secondary seal portions S1 and S2. However, the fitting seal portion 3 is preferably formed so as to satisfy both the primary and secondary seal portions S1 and S2 in terms of enhancing the sealing performance, but only the primary seal portion S1 or the secondary seal portion 3 It may be formed so as to satisfy only the seal portion S2.

  At least the first flange portion 1B of the first flange pipe 1, at least the second flange portion 2B of the second flange pipe 2, and the fluid gasket G are all formed of a fluorine-based resin such as PFA or PTFE. The diameters d1 and d2 of the fluid passage 4 of the flange pipes 1 and 2 and the diameter d3 of the fluid gasket G are set to the same value. For example, the first flange pipe 1 (and second) formed by fixing and integrating a tubular portion 1A formed of a material other than fluororesin such as metal, non-ferrous metal, and PE resin and a first flange portion 1B made of fluororesin. It is also possible to use flange piping 2). In the first embodiment, the flange portions 1B and 2B are the same, and the fluid gasket G is formed symmetrically, but this is not restrictive.

  A drawing means M is provided across the first and second flange pipes 1 and 2, and the drawing means M causes the first flange portion 1B and the second flange portion 2B to approach each other via the fluid gasket G. It is comprised so that it can be drawn and can be maintained in this drawn state. When the flanges 1B and 2B are drawn toward each other via the fluid gasket G by the drawing means M, the annular groove 6 and the annular protrusion 8 are first fitted, and most of them are After the fitting, the tapered inner peripheral surface 5a and the tapered outer peripheral surface 7a come into contact with each other. When the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are in strong pressure contact and the approaching movement of both flange portions 1B and 2B is stopped, the space between the annular groove 6 and the annular protrusion 8 in the direction of the axis P And between the outer circumferential portion 1g from the annular groove 6 on the end face of the first flange portion 1B and the outer diameter portion (an example of the outer circumferential projection portion 1f) 10 from the annular projection 8 of the fluid gasket G, In addition, the annular protrusion 8 on the end face of the second flange portion 2B is set such that a gap exists between the outer diameter portion 2g and the outer diameter portion 10 of the fluid gasket G in the axial center P direction.

  That is, a gap is provided between the outer diameter portions 1g, 10 and 2g so that the tapered inner peripheral surface 5a and the tapered outer peripheral surface 7a are in contact with each other. Thereby, an effective sealing function at the primary and secondary seal portions S1 and S2 in the fitting seal portion 3 by fitting the annular groove 6 and the annular protrusion 8 is obtained, and the tapered inner peripheral surface 5a and the tapered outer peripheral surface are obtained. In the tertiary seal portion S3 formed between the fluid passages 7a and 7a, there is no gap between the fluid passages 4 and 4 and the fluid passages 9 having the same diameter so that the liquid can be kept clean. It can flow.

  As shown in FIGS. 1 to 3, the attracting means M is composed of a total of four parts including two sets of split rings 25, 25 and a pair of cylindrical nuts 22, 23. The first split ring 25 fitted on the first flange pipe 1 has an outer diameter larger than that of the first flange part 1B, and the first flange part in the direction of the axis P of the first and second flange pipes 1 and 2 It is fitted on the tubular portion 1A of the first flange pipe 1 so as to interfere with 1B, and is composed of a split ring that is divided into two or more than three. The first cylindrical nut 22 has an inward flange 24 having an opening 24a that allows passage of the first flange portion 1B and interferes with the first split ring 25 in the axial center P direction at one end portion. The cylindrical nut is formed and has a male screw portion 22n formed on the outer periphery of the other end.

  The second split ring 25 fitted on the second flange pipe 2 has an outer diameter larger than that of the second flange part 2B and also interferes with the second flange part 2B in the axial center P direction. The tubular portion 2A is externally fitted, and is constituted by a split ring that is divided into two or more than three. The second split ring 25 is the same component as the first split ring 25. The second cylindrical nut 23 is allowed to pass through the second flange portion 2B, and an inward flange 24 having an opening 24a that interferes with the second split ring 25 in the axial center P direction is provided at one end portion. The cylindrical nut is formed and formed with a female screw portion 23n that can be screwed to the male screw portion 22n on the inner periphery of the other end portion. That is, the diameter of the second cylindrical nut 23 is larger than the diameter of the first cylindrical nut 22. Then, the first flange portion 1B and the second flange portion 2B mutually attach the fluid gasket G to each other by tightening the cylindrical nuts 22 and 23 by screwing the male screw portion 22n and the female screw portion 23n. It is constructed so that it can be pulled in the direction of approaching through, and the drawing state can be maintained (see FIG. 3).

  The opening 24a of the inward flange 24 of each cylindrical nut 22, 23 is set to a minimum inner diameter dimension sufficient to allow the passage of the flange portions 1B, 2B. The outer diameter of each split ring 25 is set to be slightly smaller than the inner diameter of the inner diameter portion 22a so that it can enter the inner diameter portion 22a of the first cylindrical nut 22, and the inner diameter is each tubular shape. It is set to the minimum dimension that allows the parts 1A and 2A to be fitted externally. A portion of the second cylindrical nut 23 adjacent to the inward flange 24 has a smaller diameter than the female screw portion 23n and the inner diameter portion 23a connected to the inner screw portion 23n in order to closely fit the second split ring 25 therein. An inner peripheral surface portion 23m is formed.

  A portion adjacent to the inward flange 24 in the inner diameter portion 22a of the first cylindrical nut 22 is slidable in the axial direction on the first split mold ring 25, and the width dimension of the first split ring 25 is set. An inner peripheral surface portion 22m having a length in the axial center P direction to cover is formed on a flat inner peripheral surface concentric with the fluid passage 4. The inner peripheral surface portion 23 m of the second cylindrical nut 23 described above is also formed on a flat inner peripheral surface concentric with the fluid passage 4. That is, the inner peripheral surface portion 22m that is the inner back portion of the inner diameter portion 22a of the first cylindrical nut 22 is formed on a flat inner peripheral surface concentric with the fluid passage 4, and the inner diameter of the inner peripheral surface portion 22m is While the fitting tolerance is set to be slightly larger than the outer diameter of the first split ring 25 formed in a rectangular cross section, the inner peripheral surface portion 23m of the second cylindrical nut 23 is connected to the fluid passage 4. Dimensionally set to a fitting tolerance state in which the inner peripheral surface portion 23m is concentrically flat on the outer peripheral surface and the inner diameter of the inner peripheral surface portion 23m is slightly larger than the outer diameter of the first split ring 25 formed in a rectangular cross section. Has been. In addition, the inner diameter of each split ring 25 is set to be approximately the same as the diameter of the root of each flange portion 1B, 2B in each tubular portion 1A, 2A so as to come into surface contact with each flange portion 1B, 2B.

  As a result, when the first and second cylindrical nuts 22 and 23 are screwed together and the respective cylindrical nuts 22 and 23 are screwed, the split rings 25 and 25 are tilted. It is possible to prevent the inconvenience that the pressing force in the axis P direction due to the screwing of the first and second cylindrical nuts 22 and 23 is not transmitted well to the flange portions 1B and 2B. The flange portions 1B and 2B are pushed to each other, so that both flange portions 1B and 2B can be satisfactorily drawn toward each other. That is, the inner peripheral surface portions 22m and 23m of the split ring inner fitting portion adjacent to the inward flange 24 of the cylindrical nuts 22 and 23 are formed on a flat inner peripheral surface concentric with the tubular fluid passage 4, and In the region where the inner diameter of the inner peripheral surface portions 22m, 23m and the outer diameter of the split ring 25 formed in a rectangular cross section are larger than the outer diameter of the split ring 25, the inner diameter of the inner peripheral surface portions 22m, 23m. They are formed with almost the same diameter.

  The operation procedure for connecting and connecting the two flange portions 1B and 2B using the pulling means M is as follows. First, as shown in FIG. 3A, the first cylindrical nut 22 is fitted to the outer periphery of the tubular portion 1A of the first flange pipe 1 through the outer diameter side of the first flange portion 1B. And the 2nd cylindrical nut 23 is fitted in the outer periphery of 2 A of tubular parts of the 2nd flange piping 2 through the outer-diameter side of 2nd flange part 2B. Since each cylindrical nut 22 and 23 can pass the 1st and 2nd flange parts 1B and 2B, respectively, these flange pipes 1 and 2 have their other ends already connected to fluid equipment etc. Even in the case, it is possible to externally fit the tubular portions 1A and 2A from the end portions on the flange portions 1B and 2B side without any problem. In addition, if a hexagonal part or a two-sided width part for turning operation with a spanner tool or the like is formed at the inward flange side end of each cylindrical nut 22, 23, it is convenient in tightening and disassembling operation. .

  Next, as shown in FIG. 3 (b), the first split ring 25 is passed between the first flange 1B and the tip of the first cylindrical nut 22 and is in contact with the side surface of the first flange portion 1B. The second flange portion is fitted on the outer periphery of the tubular portion 1A of the first flange pipe 1 and the second split ring 25 is passed between the second flange 2B and the tip of the second cylindrical nut 23. It fits on the outer periphery of the tubular portion 2A of the second flange pipe 2 in a state of abutting against the side surface of 2B. At this time or before that, the fluid gasket G may be attached to the end face of one of the flange portions 1B, 2B through provisional fitting between the annular protrusion 8 and the annular groove 6. Next, the two flange portions 1B and 2B are applied to each other through the fluid gasket G, and in this state, the first cylindrical nut 22 and the second cylindrical nut 23 are screwed together to perform a tightening operation [FIG. By performing c), the connection states shown in FIGS. 1 and 2 are obtained.

  The first flange pipe 1 and the second flange pipe 2 are attracted in the direction approaching each other by the attracting means M, and in the connected state, as shown in FIG. The gasket G for use is pressed and clamped. Further, as described above, the annular grooves 6 and 6 on the end faces of the flange portions 1B and 2B and the annular protrusions 8 on both end faces of the fluid gasket G are press-fitted to form the fitting seal portions 3 and 3. The taper inner peripheral surface 5a and the taper outer peripheral surface 7a are pressed against each other, so that the fluid passage 4 of the first flange pipe 1, the fluid passage 9 of the fluid gasket G, and the fluid passage of the second flange pipe 2 are formed. It is possible to exhibit a good sealing function that the liquid can flow between the four without leaking or collecting liquid.

  If the radial dimension of the annular protrusion 8 is slightly larger than the radial dimension of the annular groove 6 and is inserted in a press-fit state, the inner diameter side peripheral surface 6a and the outer diameter side peripheral surface 6b and the annular protrusion 8 are formed. A highly effective primary seal portion S1 and secondary seal portion S2 are obtained by being pressed strongly in the radial direction. In this case, the outer diameter side portion of the annular groove 6 of both flange portions 1B and 2B has sufficient rigidity due to sufficient thickness (diameter dimension), but the inner diameter side portion of the annular groove 6 is thin (radial direction). Since only the first joint end 5 (which is short in dimension) is not in a rigid state, the first joint end 5 is inclined and deformed toward the inner diameter side as the annular protrusion 8 is press-fitted into the annular groove 6. The diameter of the fluid passage 4 may be partially reduced.

  However, as shown in FIG. 2, the second joint end 7 of the fluid gasket G is positioned on the inner diameter side of the first joint end 5 in a state where the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are in close contact with each other. Therefore, the presence of the second joint end 7 has an advantage that the deformation of the first joint end 5 toward the inner diameter side (diameter reduction) is prevented. That is, not only the function as the tertiary seal portion S3 by the press contact between the taper inner peripheral surface 5a and the taper outer peripheral surface 7a is obtained, but the rigidity of the first joint end portion 5 is compensated for and the tubular fluid passages 4, The diameter of 4 is regulated so as not to change, and a reduction in contact pressure between the primary seal portion S1 and the secondary seal portion S2 can be prevented to effectively exhibit excellent sealing performance.

  Although the relationship between the annular groove 6 and the annular protrusion 8 has been described a little earlier, as shown in FIG. 5, the diameter width (groove width) 6w of the annular groove 6 in the free state and the diameter of the annular protrusion 8 in the free state. The diameter width (groove width) of the annular groove 6 is made smaller than the diameter width (thickness) of the annular protrusion 8 so that the width (thickness) 8w becomes 6w × (1.05 to 1.5) = 8w. It is preferable that the fitting seal portion 3 is formed by press-fitting both. As a result, the fitting seal portion 3 formed by fitting the annular groove 6 and the annular projection 8 can exhibit extremely good sealing performance without leakage. In addition, as described above, in this seal connection state, the recess depth of the annular groove 6 is set so that a gap in the axial center P direction is formed between the annular groove 6 and the annular protrusion 8. If the value is slightly larger than the protruding amount, it is advantageous in that the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are reliably pressed against each other.

  As shown in FIG. 5, the relationship between the taper inner peripheral surface 5a and the taper outer peripheral surface 7a is such that when both flange portions 1B and 2B are moved relatively close to each other by movement in the axis P direction, From the front end side of the taper outer peripheral surface 7a in the second joint end portion 7 to the taper inner peripheral surface 5a of the first joint end portion 5 of the first flange portion 1B (or the second joint end portion 5 of the second flange portion 2B). The inclination angle α of the taper outer peripheral surface 7a is 1-30 degrees, preferably 3-10 degrees smaller than the inclination angle θ of the taper inner peripheral surface 5a (1-30 degrees + α = θ). good. Further, after tightening the flange portions 1B and 2B by the first and second cylindrical nuts 22 and 23, a gap is provided between the tapered outer peripheral surface 5a except for the tip portion of the tapered outer peripheral surface 7a, and A tertiary seal portion S3 that increases the surface pressure between the tip end portion of the tapered outer peripheral surface 7a and the tapered inner peripheral surface 5a can be formed, which is preferable.

  As shown in FIG. 5, the annular groove 6 may be formed on a tapered surface 6 a whose opening side end portion is inclined so as to be expanded so that the annular protrusion 8 can easily enter. As shown in FIG. 5, the tip corner 8 a of the annular protrusion 8 may have a shape that is cut obliquely by chamfering or the like in order to easily enter the annular groove 6. The corner portion s between the annular protrusion 8 and the seal end portion 7 may be subjected to curved surface processing so that the shape thereof smoothly changes as shown in FIG. Further, the tip end portion 7b of the seal end portion 7 may be chamfered so as not to have a pin angle as shown in FIG. The first and second cylindrical nuts 22 and 23 and the first and second split rings 25 and 25 are made of various materials such as non-ferrous metals such as metals and aluminum alloys in addition to fluororesins such as PFA and PTFE. It is possible to make it.

  By the way, as shown in the second flange pipe 2 in FIG. 2, the outer diameter portion 2k of the tubular portion 2A on which the split ring 25 is fitted is formed on the flat outer peripheral surface concentrically with the tubular fluid passage 4, In addition, the outer diameter of the outer diameter portion 2k and the inner diameter of the split ring 25 are formed to be substantially the same in a region where the inner diameter of the split ring 25 is larger than the outer diameter of the outer diameter portion 2k. This is more convenient. If this configuration is adopted, the split ring 25 and the tubular portion 2A can be smoothly moved relative to each other without being twisted during the tightening operation of the cylindrical nut 23, and both flange portions 1B, 2B by the pulling means M can be moved. The function of efficiently performing the pulling movement is promoted. When combined with a fitting structure having a fitting tolerance between the inner peripheral surface portion 23m of the second cylindrical nut 23 and the outer diameter portion of the split ring 25, the follow-up of the split ring 25 by the screwing of the cylindrical nut 23 is performed. The movement is further smoothed, and the connection means can be firmly connected without leakage while easily operating the attracting means M. Naturally, the above-described configuration can be applied to the first flange pipe 1.

[ Reference Example 2 ]
As shown in FIG. 6, the fluid gasket G according to Reference Example 2 is basically the same as the connection structure between flange pipes according to Reference Example 1 shown in FIG. It is used for the structure of In this case, the attracting means M is attached to the flange portions 1B and 2B in a state along the outer diameter side portions of the first and second flange portions 1B and 2B and the axis P direction of the first and second flange portions 1B and 2B. It comprises a bolt 41 and a nut 42 that can pass through the formed holes 1h and 2h.

  Bolts 41 and nuts 42 constituting the pulling means M are arranged at a plurality of locations (for example, three locations) around the flange portions 1B and 2B at equal angles, and the first and second flange portions 1B, 1B, It is configured to be able to draw 2B in a direction approaching each other and to be able to maintain the drawing state. That is, by tightening the bolt 41 and nut 42, the first and second flange portions 1B and 2B are moved closer to each other via the fluid gasket G, and the first and second seal end portions of both flange portions 1B and 2B are moved. The first and second seal ends t1 and t2 are formed by press-fitting the annular grooves 6 and 6 of t1 and t2 and the annular protrusions 8 of the first and second ends T1 and T2 of the gasket G for fluid. In order to form a tertiary seal portion S3 between the first joint end portion 5 and the second joint end portion 7 by the fitting operation, both of them are pressed into contact with each other without any gaps, and the annular groove 6 It is possible to maintain the seal connection state in which the fitting seal portion 3 is formed so that the primary and secondary seal portions S1 and S2 are generated by press-fitting with the annular protrusion 8.

Example 3
As shown in FIG. 7, the fluid gasket G according to the third embodiment is also used in a connection structure between flange pipes which are fluid devices. In the connection structure between flange pipes according to the reference example 1 , the first and second seal end portions t1 and t2 are formed by the annular groove 6, and the first and second end portions T1 and T2 of the fluid gasket G are respectively provided. The annular protrusion 8 is formed. According to the third embodiment, on the contrary, the annular protrusion 8 is formed at the first and second seal end portions t1 and t2, and the first and second fluid gaskets G2 are formed. In each of the two end portions T1 and T2, an annular groove 6 that can be press-fitted and fitted into the annular protrusion 8 is formed.

  That is, in the connection structure using the fluid gasket G according to the third embodiment, as shown in FIGS. 7 and 8, the fluid path 9 (the fluid path F of the fluid path F) at the first and second end portions T1 and T2 of the fluid gasket G is used. An annular groove 16 (an example of the first and second annular grooves R1 and R2) is formed on the outer diameter portion of the opening end portion of the example) so as to be open to the outside. In addition, the front end of the annular first joining end portion (an example of the first and second peripheral wall end portions C1 and C2) 15 formed between the inner diameter portion of the annular groove 6 and the fluid path 9 expands forward. A tapered inner circumferential surface 15a (an example of the tapered inner circumferential surface 5a) is formed. The annular groove 16 is formed in a shape having a rectangular cross section extending in the direction of the axis P of the fluid path 9, and the inner peripheral surface 16 a also serves as the outer peripheral surface of the first joint end 15.

  On the other hand, the first and second seal end portions t1 and t2 formed on the end surfaces of the first and second flange portions 1B and 2B of the first and second flange pipes 1 and 2 are the first and second flange portions 1B and 2B. Of the tubular fluid passages 4 (one example of the first and second fluid passages E1 and E2) at the respective end faces of the open end portions of the tubular fluid passages 4 are concentric with the fluid passages 4 and are annular on the fluid gasket 2 side. It is constituted by an annular protrusion 18 that is integrally formed so as to fit into the groove 16. The first and second seal end portions t1 and t2 have an annular second joint end portion formed between the annular projection 18 (an example of the first and second annular projections D1 and D2) and the fluid passage 4. (An example of the first and second annular presser protrusions O1 and O2) A tapered outer peripheral surface 17a (an example of the tapered outer peripheral surface 7a) that contacts the tapered inner peripheral surface 15a is tapered and formed in a tapered shape on the outer peripheral surface of the tip. Is done. The annular protrusion 18 is formed in a shape having a long cross-sectional rectangle in the direction of the axis P of the fluid passage 4, and the protruding length is set to be slightly shorter than the depth of the annular groove 16. Between the 2nd junction end part 17 and the cyclic | annular protrusion 18, it is the cyclic | annular valley part which expands, and it has the structure which the 1st junction end part 15 fits in this valley part.

  In addition, in order to obtain the functions of the primary and secondary seal portions S1 and S2 effective in the seal connection state in which the annular protrusion 18 having a larger radial dimension is press-fitted into the annular groove 16 of the fluid gasket 2. On the outer diameter side of the annular groove 16, an annular outer peripheral projection 19 having a sufficiently large radial dimension and rigidity is formed. On the other hand, an annular large groove 20 is formed on the outer diameter side of the annular protrusion 18 constituting the first and second seal end portions t1 and t2 for fitting the outer peripheral protrusion 19 with a gap.

Also in the third embodiment, the inner circumferential surface of the taper is designed to function as the tertiary seal portion S3 in the seal connection state in which the annular protrusion 18 is fitted into the annular groove 16 to form the primary seal portion S1 and the secondary seal portion S2. 15a and the taper outer peripheral surface 17a are in contact with each other between the annular groove 16 and the annular protrusion 18 and between the outer peripheral protrusion 19 and the large annular diameter groove 20 in the direction of the axial center P so as to ensure contact with each other. Is set to The pulling means M used in the connection structure using the fluid gasket G of the third embodiment has the same structure as that of the first embodiment , and the first and second flange portions 1B and 2B are connected to each other. It is configured to be able to be drawn in the approaching direction and to be able to maintain the drawing state, and corresponding portions are denoted by the same reference numerals as the drawing means M according to the first embodiment .

Example 4
As shown in FIG. 9, the fluid gasket G according to the fourth embodiment is used for a connection structure between a flange pipe and a fluid device, and includes a manual stop valve (an example of a fluid device) 31 and a second flange pipe 2. It is configured in the connection part. That is, the flange portion (an example of the second fluid supply / exhaust port portion) 2B of the flange pipe 2 having a flange portion 2B having a diameter larger than that of the tubular portion 2A at the end portion of the tubular portion 2A having the tubular fluid passage 4; The fluid supply / discharge port portion (an example of the first fluid supply / discharge port portion) 31b of the manual stop valve 31 having the fluid supply / discharge port portion 31b having the tubular fluid passage 32 is connected to the flange portion 2B and the fluid supply. This is a connection structure in which a fluid connection is established via a ring-shaped fluid gasket G interposed between the exhaust port 31b. The manual stop valve 31 includes a valve body 31H, a rotation operation unit 31K, a pair of fluid supply / discharge ports 31a and 31b, and the like.

  As an example, as shown in FIG. 10, the manual stop valve 31 and the flange pipe 2 include a fluid supply / exhaust port portion 31 b on the out side of the manual stop valve 31 and a flange portion 2 </ b> B through a fluid gasket G. Are connected in a sealed state. At that time, the out-side fluid supply / discharge port portion 31b and the flange portion 2B are attracted to each other via the fluid gasket G by the attracting means M, and are formed on the end surface of the fluid supply / discharge port portion 31b by this attracting action. Between the first seal end t1 and one end face of the fluid gasket G, and between the second seal end t2 formed on the end face of the flange portion 2B and the other end face of the fluid gasket G, respectively. The fitting seal part 3 is formed by fitting.

  The first seal end t1 formed on the end surface of the fluid supply / exhaust port portion 31b shown in FIG. 10 and the second seal end t2 formed on the end surface of the flange portion 2B have the same structure and the second seal. Since the end portion t2 is the same as that of the second flange portion 2B shown in FIG. 2, only the first seal end portion t1 will be described, and the second seal end portion t2 will be assigned the same or corresponding symbol. The description is omitted. The first seal end t1 is formed on the outer diameter side portion of the opening end of the fluid passage 32 on the end surface of the fluid supply / exhaust port portion 31b that opens the tubular fluid passage 32 (an example of the first fluid passage E1). 32 is formed by an annular groove 6 (an example of the first annular groove R1) formed concentrically with the outer opening. Further, at the first seal end t1, the tip of the annular first joining end 5 (an example of the first peripheral wall end C1) 5 formed between the inner diameter portion of the annular groove 6 and the fluid passage 32 is provided. A taper inner peripheral surface 5a having a tapered shape is formed on the inner peripheral side. The annular groove 6 is formed in a shape having a deep cross-sectional rectangle in the direction of the axis P of the fluid passage 32 at a position relatively close to the outer diameter side from the fluid passage 32, and the inner peripheral surface 6a thereof is a first joint end portion. 5 also serves as an outer peripheral surface.

  As shown in FIGS. 10 and 4, the fluid gasket G is formed in a ring shape having a tubular fluid path 9 (an example of the fluid path F) having the same diameter as the fluid path 32 of the fluid supply / exhaust port 31 b at the center. The annular groove 6 of the first seal end t1 is formed on the outer diameter side portion of the fluid path 9 at the first end T1 that faces the first seal end t1 that is formed and faces the first seal end t1 that is the end face of the out-side fluid supply / discharge port 31b. An annular protrusion 8 (an example of a first annular protrusion D1) that fits in the outer periphery of the fluid passage 9 is formed at the second end T2 that faces the second seal end t2 that is the end face of the flange 2B. In addition, an annular protrusion 8 (an example of the second annular protrusion D2) that fits into the annular groove 6 of the second seal end t2 is formed. Further, second joint end portions (an example of the first and second presser protrusions O1 and O2) 7 between the annular protrusions 8 of the first and second end faces T1 and T2 of the fluid gasket G and the fluid path 9, respectively. A tapered outer peripheral surface 7a that contacts the tapered inner peripheral surface 5a of the first joint end portion 5 is tapered and formed in a tapered shape on the outer peripheral surface of the distal end portion of the second joint end portion 7. The annular protrusion 8 is formed in a shape having a rectangular cross section that is long in the direction of the axis P of the fluid path 9, and the protruding length is set to be slightly shorter than the depth of the annular groove 6. Between the 2nd junction end part 7 and the cyclic | annular protrusion 8, it is the cyclic | annular trough part which expands ahead, and it has the structure which the 1st junction end part 5 fits into this trough part.

  As shown in FIG. 10, the annular grooves 6 and 6 of the first and second seal end portions t1 and t2 and the annular protrusions 8 and 8 of the first and second end portions T1 and T2 are fitted to each other, thereby A fitting seal portion 3 is formed on each end surface portion of the gasket G. In this case, if the thickness in the free state of the annular protrusion 8, that is, the radial dimension is set to a value larger than the groove width in the free state of the annular groove 6, that is, the radial dimension, the annular groove is formed by the attracting means M described later. The fitting seal portion 3 formed by fitting the ring 6 and the annular protrusion 8 to each other is configured such that both the inner diameter side peripheral surface 6a and the outer diameter side peripheral surface 6b of the annular groove 6 and the annular protrusion 8 are pressed in the radial direction. Primary and secondary seal portions S1 and S2. However, the fitting seal portion 3 is preferably formed so as to satisfy both the primary and secondary seal portions S1 and S2 in terms of enhancing the sealing performance, but only the primary seal portion S1 or the secondary seal portion 3 It may be formed so as to satisfy only the seal portion S2.

  At least the out-side fluid supply / exhaust port portion 31b of the manual stop valve 31, the at least flange portion 2B of the flange pipe 2, and the fluid gasket G are all formed of fluorine resin such as PFA, PTFE, etc. The diameter d1 of the tubular fluid passage 32 of the type stop valve 31, the diameter d2 of the tubular fluid passage 4 (an example of the second fluid passage E2) of the flange pipe 2, and the diameter of the tubular fluid passage 9 of the fluid gasket G d3 is set to the same value.

  By means of attracting means M provided between the manual stop valve 31 and the flange pipe 2, the out-side fluid supply / discharge port portion 31b of the manual stop valve 31 and the flange portion 2B of the flange pipe 2 mutually connect the fluid gasket G. It draws in the direction which approaches through, and it is comprised so that this drawn state can be maintained. When the fluid supply / discharge port portion 31b and the flange portion 2B are drawn toward each other via the fluid gasket G by the drawing means M, first, the annular groove 6 and the annular protrusion 8 are fitted, The taper inner peripheral surface 5a and the taper outer peripheral surface 7a come into contact with each other after most of them are fitted. When the tapered inner peripheral surface 5a and the tapered outer peripheral surface 7a are in strong pressure contact with each other and the fluid supply / exhaust port portion 31b and the flange portion 2B stop moving toward each other, the shaft between the annular groove 6 and the annular projection 8 is stopped. Between the center P direction, between the outer diameter portion 31g from the annular groove 6 on the end surface of the fluid supply / discharge port portion 31b, between the annular projection 8 of the fluid gasket G and the outer diameter portion 10, and between the flange P direction and the flange The annular protrusion 8 on the end face of the portion 2B is set such that a gap exists between the outer diameter portion 2g and the outer diameter portion 10 of the fluid gasket G in the axial center P direction.

  That is, a gap is provided between the outer diameter portions 31g, 10 and 2g so that the tapered inner peripheral surface 5a and the tapered outer peripheral surface 7a are in contact with each other. Thereby, an effective sealing function at the primary and secondary seal portions S1 and S2 in the fitting seal portion 3 by fitting the annular groove 6 and the annular protrusion 8 is obtained, and the tapered inner peripheral surface 5a and the tapered outer peripheral surface are obtained. In the tertiary seal portion S3 formed between the fluid passages 7a and 7a, there is no gap between the fluid passages 32 and 4 and the fluid passages 9 having the same diameter so that the liquid is kept clean. It can flow.

  As a specific example of the attracting means M, for example, as shown in FIGS. 9 and 10, it is screwed into a male screw 31 n formed on the outer peripheral portion of the out-side fluid supply / discharge port portion 31 b of the manual stop valve 31. It consists of a cylindrical nut 21 provided with a free female screw 21n, and a split ring 25 that is split into two or more than three that interferes with the flange portion 2B of the flange pipe 2 in the direction of the axis P thereof. By tightening the cylindrical nut 21 to the male thread 31n of the mouth portion 31b, the fluid supply / discharge port portion 31b and the flange portion 2B can be pulled toward each other via the fluid gasket G, and pulled. The state can be maintained.

  The opening portion 24a of the inward flange 24 of the cylindrical nut 21 is set to a minimum inner diameter dimension sufficient to allow passage of the flange portion 2B, and the outer diameter of the split ring 25 is set to the cylindrical nut 21. The inner screw 21n and the inner diameter portion 21a connected to the inner screw 21n and the inner diameter portion 21a are set to be slightly smaller than the inner diameter, and the inner diameter is set to a minimum dimension that allows the tube portion 2A to be fitted externally. In addition, although illustration is abbreviate | omitted, you may employ | adopt the close fitting structure which has the fitting tolerance shown in FIG. 2 in the fitting part of the outer diameter of the tubular part 2A, and the inner diameter of the split ring 25.

  Further, an axial center that is slidable in the axial direction on the split ring 25 and covers the width of the split ring 25 between the inner back end portion of the female screw 21n and the flange portion 2B in the cylindrical nut 21. An inner peripheral surface portion 21 m having a length in the P direction is formed in a flat state concentrically with the fluid passage 4. That is, the inner diameter portion 21a between the female screw 21n of the cylindrical nut 21 and the inward flange 24 is formed on a flat inner peripheral surface concentric with the fluid passage 4, and the inner diameter portion 21a has a rectangular cross section. The inner peripheral surface portion 21m is dimensioned to a fitting tolerance that is slightly larger than the outer diameter of the formed split ring 25. On the other hand, as described above, the outer peripheral portion of the tubular portion 2A adjacent to the flange portion 2B is formed in a flat outer peripheral surface concentrically with the fluid passage 4, and the outer diameter of the outer peripheral surface and the inner diameter of the split ring 25 And may be formed to have substantially the same diameter. As a result, when the cylindrical nut 21 is screwed, the split ring 25 is inclined, and the pressing force in the axis P direction due to the screwing of the cylindrical nut 21 on the flange portion 2B is good. The inconvenience of not being transmitted can be prevented, and the flange portion 2B can be effectively pushed, and the fluid supply / exhaust port portion 31b and the flange portion 2B can be satisfactorily drawn toward each other.

  The operation procedure for connecting and connecting the fluid supply / exhaust port portion 31a and the flange portion 2B using the pulling means M is as follows. First, as shown to Fig.11 (a), the cylindrical nut 21 is fitted to the outer periphery of 2 A of tubular parts of the flange piping 2 through the flange part 2B. Next, as shown in FIG. 11B, the split ring 25 is fitted on the tubular portion 2 </ b> A through the gap between the flange portion 2 </ b> B and the tip of the tubular nut 21. At this time or before that, the fluid gasket G may be attached to the end surface of the fluid supply / exhaust port portion 31b or the end surface of the flange portion 2B through provisional fitting between the annular protrusion 8 and the annular groove 6. Next, the fluid supply / exhaust port portion 31b and the flange portion 2B are attached to each other via the fluid gasket G, and the cylindrical nut 21 is slid in that state, and then screwed onto the male screw 31n of the fluid supply / discharge port portion 31b. By performing the tightening operation [see FIG. 11C], the connection states shown in FIGS. 9 and 10 are obtained.

  The manual stop valve 31 and the flange pipe 2 are drawn toward each other by the drawing means M, and as shown in FIG. 10, in the connected state, the fluid supply / discharge port portion 31b and the flange portion 2B Thus, the fluid gasket G is pressed and clamped. Further, as described above, the annular grooves 6 and 6 on the respective end surfaces of the fluid supply / discharge port portion 31b and the flange portion 2B and the annular protrusions 8 on both end surfaces of the fluid gasket G are press-fitted and fitted to each other. The portions 3 and 3 are formed, and the tapered inner peripheral surface 5a and the tapered outer peripheral surface 7a are brought into pressure contact with each other, whereby the fluid passage 32 of the fluid supply / discharge port portion 31b, the fluid passage 9 of the fluid gasket G, and the flange piping It exhibits a good sealing function that allows liquid to flow between the two fluid passages 4 without leakage and liquid accumulation.

  If the radial dimension of the annular protrusion 8 is slightly larger than the radial dimension of the annular groove 6 and is inserted in a press-fit state, the inner diameter side peripheral surface 6a and the outer diameter side peripheral surface 6b and the annular protrusion 8 are formed. A highly effective primary seal portion S1 and secondary seal portion S2 are obtained by being pressed strongly in the radial direction. In this case, the outer diameter side portion of the annular groove 6 between the fluid supply / discharge port portion 31b and the flange portion 2B has sufficient rigidity (diameter dimension), but the inner diameter side portion of the annular groove 6 has a thickness. Since the first joint end 5 is thin (short in radial direction) and not in a rigid state, the first joint end 5 has an inner diameter as the annular projection 8 is press-fitted into the annular groove 6. There is a fear that the diameter of the tubular fluid passage 4 may be partially reduced due to tilting to the side.

  However, as shown in FIG. 10, the second joint end 7 of the fluid gasket G is positioned on the inner diameter side of the first joint end 5 in a state where the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are in close contact with each other. Therefore, the presence of the second joint end 7 has an advantage that the deformation of the first joint end 5 toward the inner diameter side (diameter reduction) is prevented. That is, not only the function as the tertiary seal portion S3 by the press contact between the taper inner peripheral surface 5a and the taper outer peripheral surface 7a is obtained, but also the lack of rigidity of the first joint end portion 5 is compensated for and the fluid passages 32, 4 By restricting the diameter so as not to change, the contact pressure between the primary seal portion S1 and the secondary seal portion S2 is prevented from being lowered, and excellent sealing performance can be effectively exhibited.

Example 5
As illustrated in FIGS. 12 and 13, the fluid gasket G according to the fifth embodiment is used for a connection structure between an integrated panel (an example of a fluid device) 1 and a valve (an example of a fluid device) 2. The connection structure between the integrated panel 1 and the valve (open / close valve, stop valve, etc.) 2 includes an integrated panel 1 in which a pair of circular fluid passages 33 and 34 (an example of a first fluid passage E1) is formed, This is a single-flow-path type that shares a longitudinal axis P formed across the valve 2 mounted on the upper surface 1a via a ring-shaped fluid gasket G. That is, a pair of connection structures are configured to be the same for supply and discharge.

  As shown in FIGS. 1 and 2, the integrated panel 1 has vertical vertical passages 33 a and 34 a opened in the panel upper surface 1 a inside a panel material (or block material) 5 made of fluororesin such as PFA or PTFE. And a pair of circular supply-side fluid passages 33 and 34 each having a lateral passage 33b and 34b are formed. A portion of the integrated panel 1 where the supply / discharge fluid passages 33 and 34 are open is referred to as a first fluid supply / discharge port portion 1B. In the first fluid supply / discharge port portion 1B, circular tubular vertical passages 33a and 34a are provided. Are each formed in a passage having an axis P. The first fluid supply / exhaust port 1B has an annular shape centered on the axis P and protrudes upward from each of the outer diameter side portions of the fluid passages 33 and 34 that open to the upper end surface thereof. A pair of lower first seal end portions t1 having the inner and outer annular protrusions 6 (an example of the first annular protrusion D1) is formed.

  As shown in FIGS. 12 and 13, the valve 2 has a valve case 6 made of a fluororesin such as PFA or PTFE and having a circular shape when viewed in the vertical direction. The lower end of the valve case 6 has a bottom surface 6a. A cylindrical supply-side fluid passage 37 (an example of the second fluid passage E2) disposed vertically in a state of projecting downward from the top, and in a state of being opened apart laterally to the supply-side fluid passage 37 in the longitudinal direction Are formed in the second fluid supply / exhaust port portion 2B having a circular discharge side fluid passage 38 (an example of the second fluid passage E2) disposed in the pipe. That is, in the second fluid supply / exhaust port 2B, each of the circular supply side fluid passages 37 and 38 is formed in a passage having the axis P. At the lower end of the valve case 6, a pair of mounting flanges 9 made of fluororesin such as PFA and PTFE having a pair of bolt insertion holes 9a are formed to protrude downward, and a pipe portion 9A having fluid passages 37 and 38, Each mounting flange 9 is formed by a flange portion (outward flange) 9B. The supply-side mounting flange 9 is formed on the upper first seal end t1 having an annular protrusion 11 (an example of the second annular protrusion D2) protruding downward, and the discharge-side mounting flange 9 is protruded upward. It is formed in the upper second seal end t2 having (an example of the second annular protrusion D2).

  The pair of fluid gaskets G is the same as each other, and the structure thereof will be described by taking the fluid gasket G on the supply side as an example. Now, the fluid gasket G made of fluororesin such as PFA or PTFE has a tubular shape formed so as to communicate between the vertical passages 33a of the upper and lower fluid supply / discharge ports 1B and 2B on the supply side and the supply side fluid passages 37. The fluid path F includes a first end T1 fitted to the first seal end t1, and a second end T2 fitted to the second seal end t2. That is, the annular projection 11 (an example of the second annular projection D2) of the upper first seal end t1 and the upper second seal end t2 formed on the end surfaces of the first and second fluid supply / discharge ports 1B and 2B. A pair of upper and lower annular grooves 51, 51 (first and second annular grooves R1, R2) formed in the outer diameter side portion of the fluid path F to be fitted to each of the annular protrusions 21 (an example of the first annular protrusion D1). 1) and the inner and outer annular seal protrusions 52, 53 formed between the annular grooves 51, 51 and the fluid path F constitute first and second end portions T1, T2.

  That is, the cross-sectional shape of the fluid gasket G includes a pair of upper and lower annular grooves 51, 51 and an inner peripheral wall 54 and an outer peripheral wall 55 for forming the annular grooves 51, 51, and the upper and lower annular grooves 51, 51. 51 is vertically symmetric with the same depth and width, and the inner and outer peripheral walls 54 and 55 are also symmetric in the direction of the axis P of the first and second fluid supply / exhaust ports 1A and 2A. It is formed in a substantially H-shaped shape that is line symmetric (may be substantially line symmetric) with respect to both the vertical center Z along and the horizontal center line X orthogonal to the vertical center line Z. The upper and lower inner annular seal protrusions 52 (one example of the first and second peripheral wall end portions C1 and C2) which are the upper and lower end portions of the inner peripheral wall 54 are widened in the upper and lower end portions of the fluid path F which is the inner peripheral surface 54a. Are formed on tapered inner peripheral surfaces 52a, 52a (an example of the tapered inner peripheral surface 5a) that are inclined outward, and the upper and lower ends of the outer peripheral wall 55 are also tapered with the upper and lower ends of the outer peripheral surface 55a inclined inward. It is formed on the outer peripheral surfaces 53a and 53a.

  Inside the annular projection 21 at the lower first seal end t1 of the first fluid supply / exhaust port 1B of the integrated panel 1 and the annular projection 11 at the upper first seal end t1 of the second fluid supply / exhaust port 2B of the valve 2 Further, on the outer diameter side, inner and outer peripheral wall end portions 52a and 53a formed so as to project in the axis P direction in order to form the annular groove 51 in the fluid gasket G are fitted between the annular groove 51 and the annular protrusions 11 and 21. An annular presser protrusion 12 (an example of the second annular presser protrusion O2), 13, 22 (an example of the first annular presser protrusion O1), 23 is formed to prevent the sheet from spreading and deforming.

  The structure related to the annular pressing protrusion will be described with respect to the fluid gasket G and the upper first seal end t1. The inner and outer annular presser protrusions 12 and 13 are symmetrical, and the valley protrusions 14 and 15 surrounded by these and the annular protrusions 11 are in the form of a constricted shape (upper constricted shape). The peripheral surface is formed into a tapered annular protrusion having a tapered outer peripheral surface 12a and a tapered inner peripheral surface 13a. That is, the upper first seal end t1 is a general term for the annular protrusion 11 and the annular pressing protrusions 12 and 13 and the valley portions 14 and 15 formed on both the inside and outside of the annular protrusion 11.

  The upper ends of the inner and outer peripheral walls 54 and 55 of the fluid gasket G have a tapered inner peripheral surface 52a and a tapered outer peripheral surface 53a that are in contact with the tapered outer peripheral surface 12a and the tapered inner peripheral surface 13a of the annular presser protrusions 12 and 13, respectively. In the joined state (see FIG. 1), the annular seal protrusions 52, 53, which are the upper ends of the inner and outer peripheral walls 54, 55, are provided. 53 enters the corresponding valleys 14 and 15, the tapered outer peripheral surface 12a of the upper first seal end t1 (an example of the tapered outer peripheral surface 7a) and the tapered inner peripheral surface 52a of the fluid gasket G are in pressure contact, and The tapered inner peripheral surface 13a of the upper first seal end t1 and the tapered outer peripheral surface 53a of the fluid gasket G are configured to be in pressure contact with each other.

  That is, the upper end portion of the fluid gasket G is formed with the second end portion T2 which is the upper seal portion by the annular groove 51 and the inner and outer annular seal protrusions 52, 53, and similarly, the lower end portion has a lower end portion. A first end T1 that is a seal portion is formed. The second end portion T2 is fitted with the upper first seal end portion t1 to form the fitting seal portion 10, and the first end portion T1 is fitted with the lower second seal end portion t2 to be fitted with the fitting seal portion 10. Form.

  The fitting structure of the fitting seal portion 10 will be described in detail with respect to the upper first seal end portion t1 and the second end portion T2 of the fluid gasket G. As shown in FIGS. 14, 15 and the inner and outer annular seal projections 52, 53 are symmetrical to each other, and the included angle α ° of the entire inner and outer valley portions 14, 15 and the sharp angle β ° of the entire inner and outer annular seal projections 52, 53 are both. Is set to α °> β °, and preferably α ° + (5 to 15 °) = β °. With this configuration, in the joined state (described later) in which the upper annular protrusion 11 and the annular groove 51 of the upper first seal end t1 are fitted, the upper inner annular pressing protrusion 12 and the upper inner annular sealing protrusion 52 are The taper outer peripheral surface 12a and the taper inner peripheral surface 52a are brought into pressure contact with each other at the innermost diameter side portion (see the phantom line in FIG. 3), and the fluid passing through the fluid passage 7 and the fluid path F is inside the taper peripheral surface. The advantage of functioning as the secondary seal portion S2 that prevents entry between the portions 12a and 52a is obtained.

  A relationship of d1> d2 is set between the width d1 of the upper annular protrusion 11 and the width d2 of the upper annular groove 51, and preferably d1 × (0.6 to 0.8) = d2. It is good to set it as a relationship. A relationship of h1 <h2 is set between the protrusion length h1 of the upper annular protrusion 11 and the depth h2 of the upper annular groove 51. With these configurations, the upper annular protrusion 11 and the upper annular groove 51 are in strong pressure contact with the inner and outer side peripheral surfaces of the upper annular protrusion 11 and the corresponding inner peripheral surfaces of the upper annular groove 51 in detail. A primary seal portion S1 that exhibits excellent sealing performance that prevents fluid leakage is formed, and the tapered outer peripheral surface 12a of the upper inner annular presser protrusion 12 and the tapered inner peripheral surface 52a of the upper inner annular seal protrusion 52 are necessarily formed. There is an advantage that the secondary seal portion S2 described above is satisfactorily formed.

  Further, the tip of the inner annular presser projection 12 and the tips of the annular seal projections 52 and 53 are formed in a shape cut so as not to have a pin angle, that is, the inclined cut surface 12b and the cut surfaces 52b and 53b. . With these configurations, even if the tip of the upper inner annular presser protrusion 12 spreads slightly toward the fluid path F and is deformed, it is originally cut, so that a recess having a triangular cross section that is wide open in the middle of the fluid path F is formed. As much as possible, the fluid existing in the dent can easily flow out, and substantially no liquid pool is generated. In addition, the opening angle of the recess, that is, the included angle between the inclined cut surface 12b and the tapered inner peripheral surface 52a is sufficiently large, and the possibility of liquid accumulation due to surface tension is avoided. Further, since the inner and outer angles of the tip of the annular protrusion 11 are formed as a chamfered shape 11a, the press-fitting movement into the narrow annular groove 51 can be smoothly performed without inconvenience such as galling.

  The outer annular presser protrusion 13 has a lower end inner peripheral portion 9b for forming the lower end portion of the valve case 6 in a state following the tapered inner peripheral surface 13a of the annular presser protrusion 13, and the inner annular presser protrusion 13 The overall shape is different from 12. The lower first seal end t21 also has an upper end inner peripheral portion 5b for forming the upper end portion of the panel material 5 in a state following the tapered inner peripheral surface 23a of the annular presser protrusion 23. The shape of the inner annular pressing protrusion 22 is different from that of the inner annular pressing protrusion 22. These upper and lower inner peripheral portions 5b and 9b are guides for fitting the first and second end portions T1 and T2 of the fluid gasket G to the lower and upper first and second seal end portions t1 and t2. And the function of preventing the outer peripheral wall 55 of the gasket G for fluid together with the tapered inner peripheral surfaces 13a and 23a from being expanded and deformed.

  As shown by phantom lines in FIG. 1, if a ring-shaped attachment / detachment flange (an example of an outer peripheral protrusion) 1 f that projects laterally on the outer peripheral wall 55 of the fluid gasket G is integrally formed, the first or second When extracting the fluid gasket G from the fluid supply / discharge port portions 1B and 2B, there is an advantage that the flange 1f can be easily removed by pulling it with a tool or fingers. In this case, the thickness of the desorption flange 1f is set to a value smaller than the gap between the first and second fluid supply / exhaust ports 1B and 2B in the joined state. In addition, the desorption flange 1f may be present in the entire circumference in a ring shape, or may be present intermittently on the circumference.

  Next, the maintenance means I will be described. As shown in FIGS. 2 and 3, the maintaining means I is configured such that the first fluid supply / discharge port portion 1B of the integrated panel 1 and the second fluid supply / discharge port portion 2B of the valve 2 are pulled through a fluid gasket G. The first sealing end t1 of the first fluid supply / exhaust port portion 1B, the first end T1 of the fluid gasket G, and the second fluid supply / exhaust port portion 2B of the first fluid supply / discharge port portion 2B 2 seal end part t2 and 2nd end part T2 of the gasket G for fluids are each fitted, and it is comprised so that the joining state in which each fitting seal | sticker part 10 is formed may be maintained. That is, the annular protrusion 11 of the second fluid supply / exhaust port 2B and the annular groove 51 on the upper side of the fluid gasket G, and the annular protrusion 21 of the first fluid supply / exhaust port 1B and the lower side of the fluid gasket G The annular grooves 51 are respectively fitted.

  The specific structure of the maintaining means I includes a pair of bolts 66 inserted into the bolt insertion holes 9a of the flange portion 9B of the second fluid supply / exhaust port 2B, and the first fluid corresponding to the pair of bolt insertion holes 9a, 9a. Nut portions 67, 67 formed in the supply / discharge port portion 1B (in the panel material 5), and the valve 2 is attached to the integrated panel 1 by tightening operation by screwing the bolt 66 to the nut portion 67. It is comprised in the maintenance means I with a drawing function which can be drawn and can maintain the drawing state. Further, when the pressure contact force of each fitting seal portion 10 is reduced due to aging, creep, or the like, it can be dealt with by tightening the bolt 66, and good sealing performance can be maintained. It is.

Example 6
As shown in FIG. 15, the fluid gasket G according to the sixth embodiment is used for a connection structure between an integrated panel (an example of a fluid device) 1 and a filter (an example of a fluid device) 2. The connection structure itself of the integrated panel 1 and the filter 2 is the same as that according to the first embodiment shown in FIGS. Accordingly, the same parts are denoted by the same reference numerals, and the description thereof is omitted.

  The filter 2 includes a main body case 2K, a lower case 2B, and a filter body 2C. The lower case 2B includes a supply-side fluid passage 7 (an example of a second fluid passage E2) and a discharge-side fluid passage 8 (second fluid). An example of the passage E2), and a pair of mounting flanges 9 and 9 formed so as to project laterally in a state having the fluid passages 7 and 8 are formed. The mounting flanges 9 and 9 and the integrated panel 1 are connected and connected via a fluid gasket G.

  As described above, the fluid gasket according to the present invention is fitted with an annular groove that can be fitted by the relative movement in the axial direction of the tubular fluid passage between the first and second fluid devices interposed therebetween. Structure for restricting the expansion of the end of the peripheral wall due to the fitting between the annular groove and the fitting protrusion by the contact between the sealing portion by fitting with the mating protrusion and the tapered outer peripheral surface and the tapered inner peripheral surface formed on the inner diameter side thereof Are configured. That is, these two components can maintain an excellent sealing function by fitting the annular groove and the fitting protrusion without frequent tightening, and inconvenience of the peripheral wall end (due to the expansion of the peripheral wall end). It is possible to make the fitting seal part closer to the fluid passage and make it more compact, and the connection structure between fluid devices using gaskets can be improved in both sealing performance and compactness. Has been realized.

Overall schematic diagram showing connection structure between fluid gasket and fluid device according to Reference Example 1 FIG. 1 is a cross-sectional view of the main part showing the connection structure of FIG. (A)-(c) is explanatory drawing which shows the connection procedure of the connection part of FIG. Half-cut cross-sectional view of the gasket used in the connection structure of FIG. Sectional drawing of the principal part which shows various different shapes of the fitting seal part of the connection structure of FIG. Half cutaway cross-sectional view of the main part showing the connection structure between fluid devices according to Reference Example 2 Half cutaway cross-sectional view of the main part showing the connection structure between fluid devices according to Example 3 FIG. 7 is a half-cut cross-sectional view of the fluid gasket used in the connection structure of FIG. Overall schematic diagram showing connection structure between fluid devices according to embodiment 4 FIG. 9 is a cross-sectional view of the essential part showing the connection structure of FIG. (A)-(c) is explanatory drawing which shows the connection procedure of the connection structure of FIG. Overall schematic diagram showing connection structure between fluid devices according to embodiment 5 Sectional drawing of the principal part in the decomposition | disassembly state which shows the detail of the connection structure of FIG. The elements on larger scale which show the detailed structure of the fitting seal part in the connection structure of FIG. Whole schematic diagram showing connection structure of fluid devices according to embodiment 6

DESCRIPTION OF SYMBOLS 1,31 1st fluid device 1B, 31b 1st fluid supply / exhaust part 1f Outer peripheral projection part 2 2nd fluid device 2B 2nd fluid supply / exhaust part 5a Taper inner peripheral surface 7a Taper outer peripheral surface C Peripheral wall edge C1 1st Peripheral wall end C2 second peripheral wall end D annular projection D1 first annular projection D2 second annular projection E1 first fluid passage E2 second fluid passage F fluid passage G fluid gasket O annular retainer projection O1 first annular retainer projection O2 Second annular presser protrusion R Annular groove R1 First annular groove R2 Second annular groove S Seal part T1 First end T2 Second end

Claims (6)

The first fluid supply / discharge port portion of the first fluid device having a first fluid supply / discharge port portion in which the tubular first fluid passage opens, and the second fluid supply / discharge port portion in which the tubular second fluid passage opens. A first end abutting on the first fluid supply / exhaust port and a second fluid supply / exhaust port to connect the second fluid supply / exhaust port of the second fluid device with a sealing state. A ring-shaped fluid gasket interposed between the first fluid supply / exhaust port portion and the second fluid supply / exhaust port portion.
The first end is a first annular groove that can be fitted to a first annular protrusion formed on an outer diameter side portion of the first fluid passage in the first fluid supply / exhaust port portion to form a seal portion. A taper inner periphery that contacts an inwardly tapered outer peripheral surface of a tapered first annular presser protrusion formed in a portion between the first fluid passage and the first annular protrusion in the first fluid supply / discharge port portion A first peripheral wall end portion on which a surface is formed;
The second end is a second annular groove that fits into a second annular protrusion formed on an outer diameter side portion of the second fluid passage in the second fluid supply / exhaust port portion to form a seal portion. A taper inner periphery that contacts an inwardly tapered outer peripheral surface of a tapered second annular pressing protrusion formed in a portion between the second fluid passage and the second annular protrusion in the second fluid supply / discharge port portion A second peripheral wall end on which a surface is formed,
A fluid gasket in which a fluid path for communicating the first and second fluid passages is formed. The first fluid supply / discharge port portion of the first fluid device having a first fluid supply / discharge port portion in which the tubular first fluid passage opens, and the second fluid supply / discharge port portion in which the tubular second fluid passage opens. A first end abutting on the first fluid supply / exhaust port and a second fluid supply / exhaust port to connect the second fluid supply / exhaust port of the second fluid device with a sealing state. A ring-shaped fluid gasket interposed between the first fluid supply / exhaust port portion and the second fluid supply / exhaust port portion.
The first end portion is fitted with an annular groove formed in an outer diameter side portion of the first fluid passage in the first fluid supply / exhaust port portion, and an annular protrusion capable of forming a seal portion; A tapered annular presser protrusion formed with a tapered outer peripheral surface that abuts an outwardly tapered inner peripheral surface formed by expanding the opening side end of the fluid passage;
The second end portion is fitted with an annular protrusion formed on an outer diameter side portion of the second fluid passage in the second fluid supply / exhaust port portion, and an annular groove capable of forming a seal portion; A peripheral wall end portion formed with a tapered inner peripheral surface that abuts an inwardly tapered outer peripheral surface of a tapered annular presser protrusion formed in a portion between the second fluid passage and the annular protrusion in the fluid supply / discharge port portion And
A fluid gasket in which a fluid path for communicating the first and second fluid passages is formed. The depth of the annular groove is set to be larger than the protrusion amount of the annular protrusion corresponding to the annular groove, and the tapered inner peripheral surface and the tapered outer peripheral surface are pressed to form a seal portion. Item 3. The fluid gasket according to Item 1 or 2 . The diameter of the first end side opening of the fluid path is the same as the opening of the first fluid path, and the diameter of the second end side opening of the fluid path is the second. The fluid gasket according to any one of claims 1 to 3 , wherein openings of the fluid passages are the same as each other, and the fluid path is formed in a shape in which there is no sudden change in the cross-sectional area . In the assembled state in which the first supply / discharge port portion and the first end portion are fitted, and the second supply / discharge port portion and the second end portion are fitted, the first supply / discharge port The first and second end portions are dimensioned so that the mouth portion and the second supply / exhaust portion are connected in a state of being separated from each other, and in the assembled state, the first supply / exhaust port An outer peripheral protrusion for extraction having a thickness smaller than the interval between the first portion and the second supply / discharge port portion is formed between the first supply / discharge port portion and the second supply / discharge port portion. The gasket for fluids according to any one of claims 1 to 4. The fluid gasket according to any one of claims 1 to 5, wherein the first and second end portions are formed of a fluorine-based synthetic resin material .

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