JP4268914B2 - Connection structure between fluid devices - Google Patents

Description

The present invention relates to a connection structure between fluid devices, and more specifically, a piping system of high-purity liquid or ultrapure water handled in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, food processing, chemical industry, etc. The present invention relates to a connection structure for directly connecting various fluid devices such as pumps and valves used in the above.

Conventionally, in order to connect fluid devices such as a pump and a valve in a communication state in which a liquid can freely come and go, a tube (pipe) and a pipe joint are generally used. That is, a pipe joint made of a union nut, an inner ring, or the like is formed at the fluid supply / exhaust port of the fluid equipment, and the pipe joints of the fluid equipment are connected to each other using a flexible tube. (For example, refer to Patent Document 1).

Japanese Patent Laid-Open No. 04-248095

However, in such a connection structure using a fluid device-integrated pipe joint and a tube, a slight gap is likely to be formed between the tube and the pipe joint, and the liquid that has entered the gap is difficult to escape and becomes a liquid pool. Of high purity. In addition, since fluid devices cannot be connected to each other through a tube, the space required for pipe connection is increased, and compactness is likely to be hindered. In addition, the flow path becomes longer accordingly, which is disadvantageous in terms of fluid pressure loss.
In view of such circumstances, the object of the present invention is to improve the purity without fluid accumulation by revising the connection structure between fluid devices in the fluid piping system, and to directly connect the fluid devices closer to each other. An object of the present invention is to provide a connection structure between fluid devices capable of reducing the length of the pipe line required for the connection and reducing the piping system and reducing the pressure loss.

The invention according to claim 1 is the first fluid supply / discharge port portion of the first fluid device (1) including the first fluid supply / discharge port portion (1b) made of synthetic resin, and the second fluid made of synthetic resin. Second with a supply / discharge port (2a)
A connection structure between fluid devices that communicate with the second fluid supply / exhaust port of the fluid device (2),
The first fluid supply / exhaust port portion (1b) and the second fluid supply / discharge port portion (2a) open tubular fluid passages (4) that communicate with each other in a face-to-face relationship and are fitted to face each other. A first seal end (t1) and a second seal end (t2) are provided.
One of the seal end portions (t2) is formed on the outer diameter side portion of the tubular fluid passage (4) that opens to the end surface of the first fluid supply / discharge port portion or the second fluid supply / discharge port portion. An annular groove (6) is formed, and the other is formed on the outer diameter side portion of the tubular fluid passage (4) opened at the end face of the second fluid supply / discharge port portion or the first fluid supply / discharge port portion. The annular groove (6) and the annular protrusion are formed across the first fluid device (1) and the second fluid device (2). The first fluid supply / exhaust port portion (1b) and the second fluid supply / exhaust port portion (2a) are attracted to each other so that (8) are fitted together to form a fitting seal portion (3). A drawing means (M) for maintaining the state ;
The first seal end portion (t1) or the second seal end portion (t2) constituted by the annular groove (6) includes an inner diameter portion of the annular groove (6) and the tubular fluid passage (4). An annular first joint end (5) is formed between them, and a tapered inner peripheral surface (5a) is formed on the tip inner peripheral side of the first joint end, and the annular protrusion (8) is formed. The second seal end portion (t2) or the first seal end portion (t1) constituted by an annular protrusion between the annular protrusion (8) and the tubular fluid passage (4)
A second joint end (7) is formed, and the tapered inner peripheral surface (5) is formed on the outer peripheral surface of the tip of the second joint end.
The tapered outer peripheral surface (7a) that abuts against a) is tapered to form a tapered shape.
M) pulls the first fluid supply / discharge port (1b) and the second fluid supply / discharge port (2a) together.
As a result, the taper inner peripheral surface (5a) and the taper outer peripheral surface (7a) are pressed against each other.
Those having features that you have.

According to a second aspect of the present invention, in the connection structure between fluid devices according to the first aspect, the attracting means (M) is the first fluid supply / exhaust port (1b) or the second fluid supply / discharge port. A cylindrical nut (22) provided with a female screw part (23) that can be screwed into a male screw part (1n) formed on one outer peripheral part of (2a), and the other second fluid supply / discharge port The axial direction of the first and second fluid supply / discharge ports (1b), (2a) is connected to the outward flange (2f) formed at the end of the portion (2a) or the first fluid supply / discharge port (1b) ( P) and a half ring (25) fitted on the end of the second fluid supply / exhaust port (2a) or the first fluid supply / exhaust port (1b) so as to interfere with the cylindrical nut ( 22) is allowed to pass through the outward flange (2f), and interferes with the split ring (25) in the axial direction (P). An inward flange (24) having an opening (24a) is formed, and the first fluid supply / discharge port (1b) is formed by tightening the cylindrical nut (22) to the male thread (1n). And the second fluid supply / exhaust port (2a) are configured to be attracted to each other.

According to a third aspect of the present invention, in the connection structure for fluidic devices according to the second aspect, the cylinder
An inner back end portion of the female screw portion (23) and the inward flange (24) of the nut (22).
An inner diameter portion is formed on a flat inner peripheral surface concentrically with the tubular fluid passage (4),
And the inner diameter of the inner diameter portion and the outer diameter of the split ring (25) formed in a rectangular cross section are approximately
The second fluid supply / exhaust port portion (2a) formed to have the same diameter and fitted on the split ring (25).
Alternatively, the outer diameter portion of the first fluid supply / discharge port portion (1b) is concentrically flat with the tubular fluid passage (4).
The outer diameter of the outer diameter portion formed on the peripheral surface is substantially the same as the inner diameter of the split ring (25).
It is characterized by being formed in a diameter.

According to a fourth aspect of the present invention, in the connection structure between fluid devices according to the first aspect, the attracting means (M) includes an outer periphery of the first fluid supply / discharge port (1b) and a second fluid supply / discharge. A pair of outward flanges (1f), (2f) formed on the outer periphery of the mouth portion (2a) so as to face each other, and the axial centers of the first and second fluid supply / discharge ports (1b), (2a) It comprises a bolt (31) and a nut (32) penetrated between the holes (1h) and (2h) formed in the pair of outward flanges (1f) and (2f) in a state along the direction (P). The first fluid supply / exhaust port portion (1b) and the second fluid supply / exhaust port portion (2a) are attracted to each other by tightening the nut (32) to the bolt (31). It is characterized by being.

The invention according to claim 5 is the connection structure between fluid devices according to any one of claims 1 to 4.
The synthetic resin is characterized in that it is a fluororesin.

According to the invention which concerns on Claim 1, a 1st fluid apparatus and a 2nd fluid apparatus are those 1st, 2nd flow.
Annular grooves and annular projections at the first seal end and the second seal end respectively formed at the body supply / exhaust port
Are connected to communicate with each other.
Compared to conventional communication connection structures that use pipe joints with body equipment, the number of parts is reduced and the cost is reduced.
In addition, the connecting portion can be made compact. Therefore, saving
Not only contributes to energy saving and energy saving, but also reduces the pressure loss of the fluid by shortening the flow path.
To ensure a larger flow rate than the conventional one even with the same fluid equipment.
It becomes possible. In particular, it tends to create gaps that cause liquid pools that hinder the high purity of the liquid.
Since no connecting tube and fittings are used, there is no accumulation of liquid, contributing to high purity of the liquid.
wear.

The annular groove and the annular projection of the first seal end and the second seal end are fitted to each other so that the fitting seat
Since it forms a seal part, it can prevent liquid leakage from between the first and second fluid supply / exhaust port parts and has an excellent seal
It becomes possible to get sex. For example, this is used in the piping system of cleaning equipment in semiconductor manufacturing facilities.
If such a connection structure is used, the area occupied by the device can be reduced while ensuring good sealing performance.
This is advantageous in terms of cost and secures a large flow path, thereby increasing the circulation flow rate.
There is an effect that the high purity of the liquid can be improved and the yield can be improved.

Their to both fluid supply and discharge port portion with each other by attracting means is attracted so as to approach each other, and, since it maintains its close state, the fluid between devices can ensure a good sealing property without leakage liquid state Can be maintained over a long period of time, and a connection structure between fluid devices having excellent reliability can be provided.

According to the first aspect of the present invention, in the seal connection state, on the inner diameter side of the fitting portion between the annular groove and the annular protrusion, the tapered inner peripheral surface of the first joint end and the tapered outer periphery of the second joint end are provided. There is a configuration in which the surface is in pressure contact, and thereby the seal portion is configured, and the following effects can be obtained. That is, as will be described in detail in Example 1, when the rigidity of the inner diameter side portion of the annular groove is insufficient, the first joint end portion is inclined toward the inner diameter side as the annular protrusion is fitted into the annular groove. There is a risk of deformation. However, the second joint end supports the first joint end to be inclined and deformed from the inner diameter side, and compensates for the lack of rigidity of the first joint end to prevent the tilt deformation toward the inner diameter. This can secure a tubular fluid passage without liquid accumulation.

According to the second aspect of the present invention, as will be described in detail in the first embodiment, the cylindrical nut engaged with the outward flange of one fluid supply / exhaust port portion with a split ring is used as the other fluid. By simply operating the supply / exhaust port, the first and second fluid devices can be directly connected to each other by fitting the annular protrusion into the annular groove, and the screwing of the cylindrical nut is stopped. Just
A convenient and easy-to-handle pulling means that can maintain the connection state is obtained as a compact and space-saving rational one.

In addition, the cylindrical nut can be externally fitted and detached at the end of the first fluid supply / exhaust port or the second fluid supply / exhaust port. Since it interferes in the axial direction, the split ring and cylindrical nut are retrofitted to the first or second fluid supply / exhaust port while enabling direct connection between the first and second fluid supply / discharge ports using the cylindrical nut. You can do it freely. In addition, it is possible to reliably transmit the tightening force of the cylindrical nut to the outward flange with a small number of parts and only one kind of parts that is economical and reasonable. Therefore, the cylindrical nut is externally fitted to the fluid supply / exhaust port when the first or second fluid device is manufactured.
Without adopting such difficult manufacturing means, the connecting operation between fluid devices can be performed easily and conveniently using a cylindrical nut.

According to the invention of claim 3 , the inner diameter portion between the inner back end portion and the inward flange of the female screw portion of the cylindrical nut is formed on the flat inner peripheral surface concentrically with the tubular fluid passage, and The second fluid supply / exhaust port portion or the first fluid supply / exhaust port portion in which the inner diameter of the inner diameter portion and the outer diameter of the split ring formed in a rectangular cross section are formed to have substantially the same diameter, and the split ring is externally fitted. The outer diameter portion of the cylindrical ring is formed on a flat outer peripheral surface concentrically with the tubular fluid passage, and the outer diameter of the outer diameter portion and the inner diameter of the split ring are formed to be substantially the same diameter, so that the cylindrical nut If the split ring is tilted when it is screwed, the axial force due to the screwing of the cylindrical nut may not be transmitted well to the outward flange. Both fluid supply and discharge ports can be effectively pressed against the outward flange. The advantage of the better possible that draws toward each other is obtained.

According to the invention which concerns on Claim 4 , if the outward flange with a hole is formed in the edge part of both fluid supply / exhaust parts, it is easy only to provide the bolt and nut which penetrates over both these outward flanges. The attracting means can be constituted by the means. That is, it is possible to obtain a connection structure between fluid devices having various advantages while having a simple structure and inexpensive drawing means.

According to the invention according to claim 5 , the first and second fluid supply / exhaust ports are formed of a fluororesin (for example, PTFE, PFA, etc.) having characteristics excellent in chemical resistance and heat resistance. Even if the fluid is a chemical solution, a chemical liquid, or a high-temperature fluid, the pipe joint structure portion is not easily deformed and leaks easily, and good sealing performance can be maintained. The fluororesin is a resinous substance obtained by polymerization of ethylene and derivatives thereof in which one or more hydrogen atoms are substituted with fluorine, and is stable at high temperatures and excellent in water repellency. Further, it is preferable in that it has a small coefficient of friction, extremely high chemical resistance, and high electrical insulation.

Hereinafter, embodiments of a connection structure for fluid devices according to the present invention will be described with reference to the drawings. FIG. 1 is an overall schematic view of a connection structure between a valve and an accumulator showing an embodiment of the present invention, FIG. 2 is a half-broken sectional view of a connection portion of the connection structure of FIG. 1, and FIGS. FIG. 4 is an explanatory view showing a connection procedure of the connection structure of FIG. 1, and FIG. 4 is a cross-sectional view of a main part showing various different shapes of the fitting seal part of the connection structure of FIG.

[Example 1]
FIG. 1 shows a manual stop valve 1 that is an example of a first fluid device, an accumulator 2 that is an example of a second fluid device, and a connection portion A thereof. The manual stop valve 1 includes a valve body 1H, a rotation operation unit 1K, a pair of fluid supply / discharge ports 1a and 1b, and the like. The accumulator 2 includes an accumulator body 2H composed of a casing 2A and a bottom wall 2B.
The flange portion 2C on the casing 2A side and the flange portion 2D on the bottom wall 2B side are integrated with a plurality of bolts 2E and a pair of fluid supply / discharge port portions 2a and 2b.

The manual stop valve 1 and the accumulator 2 are an out-side fluid supply / discharge port portion (first fluid supply / discharge port portion) 1b of the manual stop valve 1 and an in-side fluid supply / discharge port portion (second fluid) of the accumulator 2. The supply / discharge port portion 2a is connected via a connection portion A that connects the tubular fluid passages 4 and 4 having the same diameter facing each other and that are connected in a sealed state. That is, the connecting portion A according to the first embodiment includes the first seal end t1 formed on the end surface of the out-side fluid supply / discharge port portion 1b of the manual stop valve 1 and the accumulator 2 as shown in FIG. A direct connection structure is formed in which the second seal end t2 formed on the end surface of the side fluid supply / exhaust port 2a is fitted to face each other. The fluid supply / exhaust port portions 1a and 2a are attracted in a direction approaching each other by the attracting means M, and are connected so as to maintain a seal connection state by the attraction.

The first seal end t1 is formed on the outer diameter side portion of the open end of the tubular fluid passage 4 on the end face of the out-side fluid supply / exhaust port 1b that opens the tubular fluid passage 4, and is concentrically outward with the tubular fluid passage 4. The annular groove 6 is formed in an open shape. In addition, the first seal end t1 has a taper that tapers toward the inner peripheral end of the annular first joint end 5 formed between the inner diameter of the annular groove 6 and the tubular fluid passage 4. An inner peripheral surface 5a is formed. The annular groove 6 is formed in a shape exhibiting a deep cross-sectional rectangle in the axial center P direction of the tubular fluid passage 4 at a position relatively close to the outer diameter side from the tubular fluid passage 4, and the inner peripheral surface 6a thereof is a first joint. It also serves as the outer peripheral surface of the end portion 5.

The second seal end t2 is fitted to the annular groove 6 concentrically with the tubular fluid passage 4 on the outer diameter side portion of the open end of the tubular fluid passage 4 on the end face of the in-side fluid supply / discharge port portion 2a. It is comprised by the annular protrusion 8 formed so that it may protrude integrally. Further, the annular protrusion 8 is formed on the second seal end t2.
A tapered outer peripheral surface 7a that comes into contact with the tapered inner peripheral surface 5a is tapered and formed in a tapered shape on the outer peripheral surface of the tip end of the annular second joint end portion 7 formed between the pipe and the tubular fluid passage 4. The annular protrusion 8 is formed in a shape exhibiting a rectangular cross section that is long in the direction of the axis P of the tubular fluid passage 4, and the protruding length is set to be slightly shorter than the depth of the annular groove 6. Between the 2nd junction end part 7 and the cyclic | annular protrusion 8, it is the cyclic | annular trough part which expands ahead, and it has the structure which the 1st junction end part 5 fits into this trough part.

As shown in FIG. 2, the fitting seal portion 3 is formed by fitting the annular groove 6 and the annular protrusion 8 together. In this case, if the thickness in the free state of the annular protrusion 8, that is, the radial dimension is set to a value larger than the groove width in the free state of the annular groove 6, that is, the radial dimension, the annular groove is formed by the attracting means M described later. The fitting seal portion 3 formed by fitting the ring 6 and the annular protrusion 8 to each other is configured such that both the inner diameter side peripheral surface 6a and the outer diameter side peripheral surface 6b of the annular groove 6 and the annular protrusion 8 are pressed in the radial direction. Primary and secondary seal portions S1 and S2. However, the fitting seal part 3
As such, it is preferable that both the primary and secondary seal portions S1 and S2 are filled in terms of enhancing the sealing performance, but only the primary seal portion S1 or only the secondary seal portion S2 is satisfied. It may be formed.

At least the out-side fluid supply / discharge port portion 1b of the manual stop valve 1 and at least the in-side fluid supply / discharge port portion 2a of the accumulator 2 are both made of fluororesin such as PFA, PTFE, etc. The diameter d1 of the tubular fluid passage 4 and the diameter d2 of the tubular fluid passage 4 of the accumulator 2 are set to the same value.

An attraction means M is provided between the manual stop valve 1 and the accumulator 2, and the attraction means M causes the out-side fluid supply / discharge port portion 1 b of the manual stop valve 1 and the in-side fluid supply / discharge port portion 2 a of the accumulator 2 to Are attracted in a direction approaching each other, and this attracted state can be maintained. When the fluid supply / exhaust port portions 1b and 2a are drawn toward each other by the drawing means M, the annular groove 6 and the annular protrusion 8 are first fitted, and most of them are fitted. The taper inner peripheral surface 5a and the taper outer peripheral surface 7a come into contact with each other. When the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are in strong pressure contact with each other and the fluid supply / discharge port portions 1b and 2a stop moving toward each other, the axis P between the annular groove 6 and the annular protrusion 8 is obtained. The axis P between the outer diameter portion 1g from the annular groove 6 on the end surface of the out-side fluid supply / discharge port portion 1b and the outer diameter portion 2g from the annular protrusion 8 on the end surface of the in-side fluid supply / discharge port portion 2a. A gap is set between each direction. That is, the outer diameter portion 1g so that the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are in reliable contact with each other.
, 2g is provided with a gap between them. Thereby, an effective sealing function at the primary and secondary seal portions S1 and S2 in the fitting seal portion 3 by fitting the annular groove 6 and the annular protrusion 8 is obtained, and the tapered inner peripheral surface 5a and the tapered outer peripheral surface are obtained. In the tertiary seal portion S3 formed between the tubular fluid passages 7a and 7a, there is no gap and no liquid is accumulated, and the liquid can flow between the tubular fluid passages 4 and 4 having the same diameter in a clean state. it can.

As a specific example of the attracting means M, for example, as shown in FIGS. 1 and 2, it is screwed into a male screw portion 1 n formed on the outer peripheral portion of the out-side fluid supply / discharge port portion 1 b of the manual stop valve 1. Interference in the axial direction of the in-side fluid supply / exhaust port 2a occurs between the cylindrical nut 22 provided with a free female screw portion 23 and the outward flange 2f formed in the in-side fluid supply / discharge port 2a of the accumulator 2. Split in two,
Alternatively, it is composed of a split ring 25 having three or more splits, and the fluid supply / discharge port portions 1b, 2a are brought closer to each other by the tightening operation of the cylindrical nut 22 to the out-side fluid supply / discharge port portion 1b of the manual stop valve 1. It is configured to be able to be pulled in the direction to be held and to be able to maintain the pulled state.

Fluid supply / exhaust port portion 2 that protrudes laterally from the root portion 2t of the accumulator 2 with its diameter reduced.
a is formed in a long cylindrical shape having an outer diameter smaller than that of the out-side fluid supply / discharge port portion 1b of the manual stop valve 1 and having an outward flange 2f at the tip.

The opening portion 24a of the inward flange 24 of the cylindrical nut 22 is set to a minimum inner diameter dimension sufficient to allow passage of the outward flange 2f, and the outer diameter of the split ring 25 is the cylindrical nut 22. The inner thread portion 23 is set to have a dimension slightly smaller than the inner diameter of the female screw portion 23 so that it can enter, and the inner diameter is the minimum that can be fitted onto the outer diameter portion of the in-side fluid supply / discharge port portion 2 a of the accumulator 2. Set to dimensions. In this case, in order to equip the split ring 25, the axial length of the narrow-diameter portion excluding the outward flange 2 f in the in-side fluid supply / discharge port 2 a is divided by the axial length of the cylindrical nut 22. It is necessary to set a value that exceeds the sum of the thickness of the mold ring 25. Specifically, as shown in FIG. 3 (b), the cylindrical nut 22 is in contact with the root portion 2t.
And the outward flange 2f has a length d2 larger than the thickness d1 of the split ring 25 (d2> d1).

Further, the cylindrical nut 22 is slidable in the axial direction on the split ring 25 and covers the width dimension of the split ring 25 between the inner back end portion of the female screw portion 23 and the inward flange 2f. An inner diameter portion 22 m having a length in the axial center P direction is formed on a flat inner peripheral surface concentric with the tubular fluid passage 4. That is, an inner diameter portion 22m between the female screw portion 23 of the cylindrical nut 22 and the inward flange is formed on a flat inner peripheral surface concentric with the tubular fluid passage 4, and the inner diameter portion 22m.
The inner diameter of the second fluid supply / exhaust port portion 2a is the tubular fluid passage while the inner diameter of the second fluid supply / exhaust port portion 2a is dimensionally set to a fitting tolerance state that is slightly larger than the outer diameter of the split ring 25 having a rectangular cross section. 4 is formed on a flat outer peripheral surface, and the outer diameter of the outer diameter portion and the inner diameter of the split ring 25 are formed to have substantially the same diameter. As a result, when the cylindrical nut 22 is screwed, the split ring 25 is inclined, and the pressing force in the direction of the axis P due to the screwing of the cylindrical nut 22 is applied to the outward flange 2f. The inconvenience of not being transmitted well is prevented, and the outward flange 2f can be effectively pushed so that the fluid supply / exhaust ports 1b and 2a can be satisfactorily drawn toward each other. Yes.

The operation procedure for connecting and connecting the two fluid supply / exhaust port portions 1a and 2a using the drawing means M is as follows. First, as shown in FIG. 3A, the cylindrical nut 22 is fitted on the outer periphery of the fluid supply / discharge port portion 2a of the accumulator 2, and is moved to the innermost back side (until contact with the root portion 2t). . Next, as shown in FIG. 3B, the split ring 25 is fitted to the fluid supply / exhaust port portion 2 a through between the outward flange 2 f and the tip of the cylindrical nut 22. Next, the annular protrusion 8
By fitting both fluid supply / exhaust ports 1b and 2a so as to be fitted in the annular groove 6 and sliding the cylindrical nut 22 in that state, and then performing a tightening operation (see FIG. 3C) The connection state shown in FIGS. 1 and 2 is obtained.

The manual stop valve 1 and the accumulator 2 are drawn toward each other by the drawing means M, and as shown in FIG. 2, in the connected state, as described above, the annular groove 6 and the annular projection are provided. 8 is press-fitted to form the primary and secondary seal portions S1 and S2, and the tapered inner peripheral surface 5a and the tapered outer peripheral surface 7a are press-contacted to each other so that the tubular fluid passages 4 and 4 are connected to each other. Thus, the fitting seal portion 3 is formed which exhibits a better sealing function that allows the liquid to flow without leakage and liquid accumulation. When the pulling force in the direction in which the two fluid supply / exhaust port portions 1b, 2a are brought close to each other is too strong, the outer diameter portions 1g, 2g come into contact with each other, and the both fluid supply / exhaust ports come into contact with each other due to the large area contact. It is possible to exert a function of restricting the parts 1b and 2a from being moved closer to each other.

If the radial dimension of the annular protrusion 8 is slightly larger than the radial dimension of the annular groove 6 and is inserted in a press-fit state, the inner diameter side peripheral surface 6a and the outer diameter side peripheral surface 6b and the annular protrusion 8 are formed. A highly effective primary seal portion S1 and secondary seal portion S2 are obtained by being pressed strongly in the radial direction. In this case, the outer diameter side portion of the annular groove 6 at the first seal end t1 has a sufficient thickness (diameter dimension).
However, since the inner diameter side portion of the annular groove 6 is only the first joining end portion 5 having a small thickness (short in the radial direction) and is not in a state of high rigidity, the annular protrusion 8 has an annular shape. Along with the insertion into the groove 6, the first joint end 5 is inclined and deformed toward the inner diameter side, and the diameter of the tubular fluid passage 4 may be partially reduced.

However, as shown in FIG. 2, the second joint end 7 is positioned on the inner diameter side of the first joint end 5 in a state where the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are in close contact with each other. The presence of the second joint end portion 7 has an advantage that the deformation of the first joint end portion 5 toward the inner diameter side (diameter reduction deformation) is prevented. That is, not only the function as the tertiary seal portion S3 by the press contact between the tapered inner peripheral surface 5a and the tapered outer peripheral surface 7a is obtained, but also the diameter of the tubular fluid passage 4 is compensated for the lack of rigidity of the first joint end portion 5. The primary seal part S1 and the secondary seal part S are regulated so as not to change.
It is possible to effectively exhibit excellent sealing performance by preventing a decrease in the contact pressure of No. 2.

Although the relationship between the annular groove 6 and the annular protrusion 8 has been described a little earlier, as shown in FIG. 4, the diameter width (groove width) 6w of the annular groove 6 in the free state and the diameter of the annular protrusion 8 in the free state. The radial width (groove width) of the annular groove 6 so that the width (thickness) 8w is 6w × (1.05-1.5) = 8w.
It is preferable that the fitting seal portion 3 is formed by making the diameter narrower than the diameter width (thickness) of the annular protrusion 8 and press-fitting both. As a result, the fitting seal portion 3 formed by fitting the annular groove 6 and the annular projection 8 can exhibit extremely good sealing performance without leakage. Further, as described above, in this seal connection state, the recess depth of the annular groove 6 is such that a gap b (see FIG. 2) in the axial center P direction is formed between the annular groove 6 and the annular protrusion 8. If the height is set to a value slightly larger than the protruding amount of the annular protrusion 8, it is advantageous in that the taper inner peripheral surface 5a and the taper outer peripheral surface 7a are reliably pressed against each other.

As shown in FIG. 4, the relationship between the taper inner peripheral surface 5a and the taper outer peripheral surface 7a is such that when both the fluid supply / discharge port portions 1b and 2a are moved relatively close by movement in the axis P direction, Out-side fluid supply / discharge port portion 1 from the tip end side of the tapered outer peripheral surface 7a at the second joint end portion 7 of the fluid supply / discharge port portion 2a.
The inclination angle θ of the taper inner peripheral surface 5a so as to contact the taper inner peripheral surface 5a of the first joint end 5 of b.
The inclination angle α of the taper outer peripheral surface 7a should be reduced by 1 to 30 degrees, preferably 3 to 10 degrees (1 to 30 degrees + α = θ). Further, even after the cylindrical nut 22 is tightened, the gap between the tapered outer peripheral surface 5a and the tapered inner peripheral surface 5a except for the tip portion of the tapered outer peripheral surface 7a is provided, so that the surface between the distal end portion of the tapered outer peripheral surface 7a and the tapered inner peripheral surface 5a. The tertiary seal portion S3 that increases the pressure can be formed, which is preferable.

As shown in FIG. 4, the annular groove 6 may be formed on a tapered surface 6 a whose opening side end portion is inclined so as to be expanded so that the annular protrusion 8 can easily enter. As shown in FIG. 4, the tip corner portion 8 a of the annular protrusion 8 may have a shape that is cut obliquely by chamfering or the like in order to easily enter the annular groove 6. The corner portion s between the annular protrusion 8 and the seal end portion 7 may be subjected to curved surface processing so that the shape thereof smoothly changes as shown in FIG. Further, the tip end portion 7b of the seal end portion 7 may be chamfered so as not to have a pin angle as shown in FIG. The cylindrical nut 22 and the split ring 25 can be made of various materials such as non-ferrous metals such as metals and aluminum alloys in addition to fluororesins such as PFA and PTFE. First fluid equipment,
As the second fluid device, in addition to the manual stop valve 1 and the accumulator 2, there are a pump, a heat exchanger, and the like.

[Example 2]
As shown in FIG. 5, the connecting portion A2 according to the second embodiment is basically the same as the connecting portion A according to the first embodiment shown in FIG. Structure. In this case, the attracting means M includes a pair of outward flanges 1f and 2f formed on the outer circumferences of the distal ends of the first and second fluid supply / exhaust ports 1b and 2a, respectively, Fluid supply / discharge port 1
Holes 1h formed in the pair of outward flanges 1f and 2f in a state along the axis P direction of b and 2a
, 2h, and a bolt 31 and a nut 32 that can pass through each other.

Bolts 31 and nuts 32 constituting the pulling means M are outward flanges 1f and 2f.
It is arranged at a plurality of locations (for example, 3 locations) around the center at equal angles, so that the first and second fluid supply / exhaust ports 1b, 2a can be pulled toward each other and can be maintained in a pulled state It is configured. That is, the first and second seal ends are formed by pressing the bolts 31 and nuts 32 to move the first and second fluid devices 1 and 2 closer to each other and press-fitting the annular protrusion 8 into the annular groove 6. The fitting operation between the parts t1 and t2, and the tertiary seal part S3 is formed between the first joint end part 5 and the second joint end part 7 thereby, the two parts 5 and 7 are pressed together without a gap. In addition, the primary and secondary seal portions S1, which are formed by press-fitting between the annular groove 6 and the annular protrusion 8, are used.
The seal connection state in which the fitting seal portion 3 is formed so as to generate S2g can be maintained.

Example 3
In the connection portion A according to the first embodiment, the first seal end t1 is constituted by the annular groove 6 and the second seal end t2 is constituted by the annular protrusion 8, but on the contrary, the third embodiment shown in FIG. The first seal end t11 is formed by the annular protrusion 18 and the second seal end t
12 may be constituted by the annular groove 16.

That is, in the third embodiment, the second seal end t12 formed in the fluid supply / discharge port portion 12a of the second fluid device 12 is on the end surface of the second fluid supply / discharge port portion 12a that opens the tubular fluid passage 14. An annular groove 16 is formed in the outer diameter side portion of the open end of the tubular fluid passage 14 so as to be concentric with the tubular fluid passage 14 and open outward. The second seal end t12 has a taper that tapers toward the inner peripheral end of the annular first joint end 15 formed between the inner diameter of the annular groove 16 and the tubular fluid passage 14. An inner peripheral surface 15a is formed. The annular groove 16 is formed in a shape having a deep rectangular cross section in the axial center P direction of the tubular fluid passage 14 at a position relatively close to the outer diameter side from the tubular fluid passage 14, and an inner peripheral surface 16a thereof is It also serves as the outer peripheral surface of one joining end 15.

On the other hand, a first seal end t11 formed in the first fluid supply / exhaust port portion 11b of the first fluid device 11.
Is on the outer diameter side portion of the open end of the tubular fluid passage 4 on the end face of the first fluid supply / discharge port 11b.
It is constituted by an annular protrusion 18 that is concentrically formed with the tubular fluid passage 14 and is integrally formed so as to fit into the annular groove 16. Further, the tapered inner peripheral surface 1 is formed on the second seal end t2 on the outer peripheral surface of the end of the annular second joint end 17 formed between the annular protrusion 18 and the tubular fluid passage 14.
The taper outer peripheral surface 17a contacting the 5a is tapered and formed into a taper shape. The annular protrusion 1
8 is formed in a shape having a rectangular cross section which is long in the direction of the axis P of the tubular fluid passage 14, and its protruding length is set to be slightly shorter than the depth of the annular groove 16. Second joint end 1
7 and the annular protrusion 18 is an annular valley portion that expands, and the first joint end 15 is fitted into the other portion.

Further, the primary and secondary seal portions S1 effective in the seal connection state in which the annular protrusions 18 having a larger radial dimension are press-fitted into the annular grooves 16 constituting the second seal end t12.
In order to obtain the function of S2, an annular outer peripheral projection 19 having a sufficiently large radial dimension and rigidity is formed on the outer diameter side of the annular groove 16.
On the other hand, on the outer diameter side of the annular protrusion 18 constituting the first seal end t11, an annular large groove 20 for fitting the outer peripheral protrusion 19 with a gap is formed. Further, the outer peripheral projection 19
On the outer diameter side of the first, with a gap in the axial center P direction and the radial direction with respect to the outer peripheral projection 19, the first
The outer diameter portion 11c of the fluid supply / discharge port portion 11b goes around, and the first fluid supply / discharge port portion 11
The outer diameter portion 11c of the first fluid supply / exhaust port portion 11b is provided while the annular protrusion 18 is provided on the b.
The length of the male threaded portion 11n formed on the outer periphery of the cylindrical nut 22 can be made longer, and the axial nut P direction dimension of the cylindrical nut 22 can be made compact, or the sufficient threading length between the male threaded portion 11n and the female threaded portion 23 can be increased. It is configured to obtain an advantage that it can be taken.

Also in this structure, the taper inner peripheral surface 15a functions as the tertiary seal portion S3 in a seal connection state in which the annular protrusion 18 is fitted in the annular groove 16 to form the primary seal portion S1 and the secondary seal portion S2. The annular groove 16 and the annular protrusion 1 are provided so that the taper outer peripheral surface 17a is in reliable contact.
8, between the outer circumferential protrusion 19 and the large-diameter groove 20, and between the first seal end t11 and the second seal end t12 so that gaps are generated in the respective axial center P directions. Has been.

Also in the connection portion A3 according to the third embodiment, the first and second fluid supply / discharge port portions 11b and 12a can be pulled in a direction approaching each other and pulled by the pulling means M similar to that of the first embodiment. The gathering state can be maintained, and corresponding portions are denoted by the same reference numerals as those of the pulling means M according to the first embodiment or by analogy. The shape and dimensional relationship between the annular groove 16 and the annular protrusion 18 and the shape and dimensional relationship between the first joint end 15 and the second joint end 17 are the same as the shapes of the fluid devices 1, 11, 2, and 12. By considering the replacement, various variations are possible in the same manner as in the first embodiment shown in FIG.

As another example of the structure of the attracting means M, a structure as shown in FIG. 7 may be used. That is,
A cylindrical screw 22 having a female screw part 23 that can be screwed into a male screw part 1n formed on the outer peripheral part of the first fluid supply / discharge port part 1b, an inward flange 24, and a second fluid supply / discharge port part The first fluid supply / exhaust port portion of the cylindrical nut 22 includes an outward flange 2f formed in 2a and a snap ring 26 that interferes with the cylindrical nut 22 in the direction of the axis P of the second fluid supply / discharge port portion 2a. The first and second fluid supply / exhaust port portions 1b, 2a can be pulled in a direction approaching each other by a tightening operation of the male screw portion 1n of 1b, and the pulled state can be maintained. The snap ring 26 is fitted in an outer peripheral groove 2f formed at the end of the second fluid supply / discharge port 2a.

Furthermore, as another structural example of the attracting means M, a structure as shown in FIG. 8 may be used. That is, the female screw portion 23 that can be screwed into the male screw portion 1n formed on the outer peripheral portion of the first fluid supply / discharge port portion 1b.
And the second fluid supply / exhaust port 2a at the end of the cylindrical nut 22 on the side of the second fluid supply / exhaust port 2a. The split ring 25 interferes in the direction of the axis P. The split ring 25 has a plurality of through holes 25 for bolt insertion.
b is attached to the end of the cylindrical nut 22 on the second fluid supply / exhaust port 2a side with a bolt B. The first and second fluid supply / exhaust port portions 1b, 2a can be pulled in a direction in which the first and second fluid supply / discharge port portions 1b of the cylindrical nut 22 are tightened to the male threaded portion 1n, and the drawing state is maintained. It is configured to be maintainable.

In addition, the drawing means M is a means that can press and maintain the two fluid supply / exhaust ports 1b and 2a, such as a support frame device (not shown) that draws the fluid devices 1 and 2 in a direction in which they are brought together. There may be.

1 is an overall schematic view of a connection structure between a valve and an accumulator showing an embodiment of the present invention. FIG. 2 is a half cutaway cross-sectional view of a connection portion of the connection structure of FIG. 1. (A)-(c) is explanatory drawing which shows the connection procedure of the connection structure of FIG. It is sectional drawing of the principal part which shows various different shapes of the fitting seal part of the connection structure of FIG. It is a half notched cross-sectional view showing a connection portion of a connection structure between fluid devices according to another embodiment corresponding to FIG. FIG. 7 is a half-broken cross-sectional view corresponding to FIG. 2 showing a connection portion of a connection structure between fluid devices showing still another embodiment. It is a half notched cross-sectional view of the main part showing another structural example of the attracting means. It is a half notched cross-sectional view of the main part showing still another structural example of the pulling means.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,11 1st fluid apparatus 1b, 11b 1st fluid supply / exhaust part 1f Outward flange 1h hole 2,12 2nd fluid apparatus 2a, 12a 2nd fluid supply / exhaust part 2f Outward flange 2h hole 3 Mating seal Portions 4 and 14 Tubular fluid passages 5 and 15 First joint end portions 5a and 15a Tapered inner peripheral surfaces 6 and 16 Annular grooves 6a Inner diameter side peripheral surfaces 6b Outer diameter side peripheral surfaces 7 and 17 Second joint end portions 7a and 17a Tapers Outer peripheral surface 8, 18 Annular projection 22 Cylindrical nut 22m Inner diameter portion 23 Female thread portion 24 Inward flange 24a Opening portion 25 Split ring 31 Bolt 32 Nut t1, t11 First seal end t2, t12 Second seal end M Pulling means P Axial center of first and second fluid supply / exhaust port

Claims (5)

The first fluid supply / discharge port portion of the first fluid device having the first fluid supply / discharge port portion made of synthetic resin, and the second fluid device having the second fluid supply / discharge port portion made of synthetic resin. 2 It is a connection structure between fluid devices that communicate with the fluid supply / exhaust port,
The first fluid supply / exhaust port and the second fluid supply / discharge port open a tubular fluid passage that communicates with each other in a face-to-face relationship with each other, and a first seal end and a second fit that are fitted face-to-face with each other With a seal end,
Either the first seal end portion or the second seal end portion is formed on the outer diameter side portion of the tubular fluid passage that opens to the end face of the first fluid supply / discharge port portion or the second fluid supply / discharge port portion. The other is fitted to the annular groove on the outer diameter side portion of the tubular fluid passage that opens to the end surface of the second fluid supply / discharge port portion or the first fluid supply / discharge port portion. It is composed of an annular protrusion formed so as to protrude,
The first fluid supply / discharge port portion and the second fluid supply / discharge port portion are connected to each other so that the annular groove and the annular protrusion are fitted to each other to form a fitting seal portion over the first fluid device and the second fluid device. A drawing means for drawing and maintaining this drawing state is provided .
In the first seal end or the second seal end constituted by the annular groove, the annular groove
An annular first joint end portion is formed between the inner diameter portion of the tube and the tubular fluid passage, and the first joint end portion
A taper inner peripheral surface having a tapered shape is formed on the inner peripheral side of the tip,
The second seal end portion or the first seal end portion constituted by the annular protrusion has the annular shape.
An annular second joint end is formed between the projection and the tubular fluid passage, and the tip of the second joint end
On the outer peripheral surface, a tapered outer peripheral surface that comes into contact with the tapered inner peripheral surface is tapered to form a tapered shape,
The first fluid supply / exhaust port portion and the second fluid supply / discharge port portion are attracted to each other by the pulling means.
The taper inner peripheral surface and the taper outer peripheral surface are pressure-contacted by each other, and the connection structure between fluid devices is characterized in that: A cylindrical nut provided with a female threaded portion that can be screwed into a male threaded portion formed on the outer peripheral portion of either the first fluid supply / discharge port portion or the first fluid supply / discharge port portion. And the other second fluid supply / exhaust port or the outward flange formed at the end of the first fluid supply / discharge port so as to interfere in the axial direction of the first and second fluid supply / discharge ports It consists of a split ring that is fitted around the end of the second fluid supply / exhaust port or the first fluid supply / discharge port,
An inward flange having an opening that allows passage of the outward flange and that interferes with the split ring in the axial direction is formed at one end of the cylindrical nut,
By the tightening operation of the cylindrical nut to the male screw portion, the first fluid supply / exhaust port portion and the second fluid supply / discharge port portion
The connection structure between fluid devices according to claim 1 , wherein the fluid supply / exhaust port portion is configured to be attracted to each other. An inner diameter portion of the cylindrical nut between the inner back end portion of the female screw portion and the inward flange is formed on a flat inner peripheral surface concentric with the tubular fluid passage, and an inner diameter of the inner diameter portion. And the outer diameter of the split ring formed in a rectangular cross section is formed to have substantially the same diameter, and the second fluid supply / exhaust port portion or the first fluid supply / exhaust port portion on which the split ring is externally fitted is formed. outer diameter is formed on the flat outer peripheral surface to said tubular fluid passageway concentric, and that the outer diameter of the outer diameter, the inner diameter of the split ring is formed in substantially the same diameter, according to claim 2, wherein Connection structure between fluid devices. The attracting means includes a pair of outward flanges formed on the outer periphery of the first fluid supply / discharge port portion and the outer periphery of the second fluid supply / discharge port portion, respectively, and the first and second fluid supply / discharge ports. It is composed of bolts and nuts that pass through holes formed in the pair of outward flanges in a state along the axial direction of the mouth,
The connection structure between fluid devices according to claim 1 , wherein the first fluid supply / exhaust port portion and the second fluid supply / exhaust port portion are attracted to each other by tightening the nut to the bolt. . The connection structure between fluid devices according to any one of claims 1 to 4 , wherein the synthetic resin is a fluororesin.

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