JP4048193B2 - Connection structure between integrated panel and fluidic device - Google Patents

Description

  The present invention relates to a connection structure between an integrated panel and a fluid device, and more specifically, a high-purity liquid or ultrapure water handled in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, food processing, chemical industry, and the like. Alternatively, the present invention relates to a connection structure for connecting a fluid integrated panel, which is expected to be demanded in the piping system of cleaning liquid, and a fluid device such as a pump, a valve, and an accumulator in a sealed state via a gasket.

  As the above connection structure, for example, there is one in which a valve, which is an example of a fluid device, and an integrated panel in which a fluid passage is formed are connected by connecting a pair of supply / exhaust flow paths to each other. A connection structure disclosed in Document 2 is known. The connection structure disclosed in Patent Document 1 is a structure in which a pair of supply / discharge channels are arranged close to each other, and are connected and connected in a liquid-tight manner with a plurality of bolts via independent ring-shaped gaskets. In the connection structure disclosed in Document 2, a pair of supply / exhaust flow paths are arranged close to each other, and a single gasket having a pair of flow path holes corresponding to the pair of supply / exhaust flow paths is provided as a single outer shell. It is connected and connected using a screw nut.

Each of the connection structures disclosed in Patent Documents 1 and 2 adopts a structure in which a large number of fluid devices are integrated and attached to a fluid block, that is, a so-called integrated piping structure. This is useful in that it can be realized. Therefore, in order to further promote downsizing and modularization, it is of course possible to reduce the size of a single fluid device, but next, after the fluid device itself has been made compact, the connection between the integrated panel and the fluid device is achieved. It is anticipated that there will be a demand for compacting the structure.
JP 2001-82609 A Japanese Patent Laid-Open No. 10-169859

Accordingly, an object of the present invention is to propose and realize a connection structure between an integrated panel and a fluid device that can be made more compact in order to promote integration in a piping system using the integrated panel having the above-described advantages. In the point.

According to the first aspect of the present invention, in the connection structure between the integrated panel and the fluid device, the tubular fluid passage 3 or the annular fluid passage and the one or more annular fluid passages 4 are formed concentrically and open. The first fluid supply / discharge port portion 1A of the integrated panel 1 including the fluid supply / discharge port portion 1A, the tubular fluid passage 7 or the annular fluid passage and one or more annular fluid passages 8 are formed concentrically. A plurality of fluid passages 3, 4 , 7, 8 correspond to the second fluid supply / exhaust port 2 </ b> A of the fluid device 2 including the second fluid supply / discharge port 2 </ b> A that is open to The fluid passages 3, 4 , 7, 8 are sealed by a plurality of ring-shaped gaskets G1, G2 interposed between the first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A. When connecting with
In the first fluid supply / exhaust port portion 1A and the second fluid supply / discharge port portion 2A, annular protrusions 21, 11, and 8 are formed on the outer diameter side portions of the fluid passages 3, 4 , 7, 8 that open to the end surfaces. 41, 31 are formed,
Each of the gaskets G1 and G2 includes fluid paths W1 and W2 formed to communicate the fluid passages 3, 4 , 7, and 8 corresponding to the first and second fluid supply / exhaust ports 1A and 2A. In the outer diameter side portions of the fluid paths W1, W2 to be fitted to the annular projections 21, 11, 41, 31 formed on the end surfaces of the first and second fluid supply / discharge ports 1A, 2A, respectively. It is composed of a flexible material having a pair of annular grooves 51 and 61 formed,
The first fluid supply / exhaust port portion 1A and the second fluid supply / discharge port portion 2A are attracted to each other via the plurality of gaskets G1, G2, and the annular protrusion 21 of the first fluid supply / discharge port portion 1A. , 41 and the annular grooves 51, 61 at one end of each of the gaskets G1, G2, and the annular protrusions 11, 31 of the second fluid supply / exhaust port portion 2A, and the annular grooves at the other ends of the gaskets G1, G2. Maintenance means I for maintaining the joined state in which the grooves 51 and 61 are fitted together to form the fitting seal portion 10 is provided,
Among the plurality of gaskets G1 and G2, the intermediate gasket G1 in which the fluid passage exists on both the inner diameter side and the outer diameter side in the joined state has an outer peripheral portion 55a on the outer diameter side of the intermediate gasket G1. A state of a wall surface for forming an annular fluid path W2 that communicates the annular fluid passage 8 of the first fluid supply / exhaust port 1A and the annular fluid passage 4 of the second fluid supply / exhaust port 2A. Is formed ,
The annular grooves 51, 61 in the gaskets G1, G2 are formed on the inner and outer diameter sides of the annular protrusions 21, 22, 41, 31 on the end surfaces of the first and second fluid supply / discharge ports 1A, 2A. Therefore, the inner and outer peripheral wall end portions 52, 53, 62, and 63 projecting in the direction of the axis P are expanded and deformed by fitting the annular grooves 51 and 61 with the annular protrusions 21, 11, 41, and 31. Annular presser protrusions 22, 23, 12, 13, 42, 43, 32, 33 are formed to suppress or prevent
The annular pressing protrusions 22, 23, 12, 13, 42, 43, 32, 33 are valleys 24, 25, 14, 15, 44, surrounded by the annular protrusions 21, 11, 41, 31. A tapered shape having tapered peripheral surfaces 22a, 23a, 12a, 13a, 42a, 43a, 32a, 33a whose side peripheral surfaces on the annular projection side are inclined so that 45, 34, 35 are constricted. The peripheral wall end portions 52, 53, 62, 63 are formed on the annular protrusions 22, 23, 12, 13, 42, 43, 32, 33. 13a, 42a, 43a, 32a, 33a having tapered peripheral surfaces 52a, 53a, 62a, 63a that can enter the valleys 24, 25, 14, 15, 44, 45, 34, 35 On the ring-shaped annular projection In the joined state, the peripheral wall end portions 52, 53, 62, 63 enter the valley valley portions 24, 25, 14, 15, 44, 45, 34, 35, and the circumferential surfaces of both tapered surfaces are formed. The surfaces 22a, 23a, 12a, 13a, 42a, 43a, 32a, 33a are pressed together to form a seal portion S2,
The gasket is set in such a relationship that the width d1 of the annular protrusions 21, 11, 41, 31 is larger than the width d2 of the annular grooves 51, 61, and the included angle α of the entire valley portion is the sharp angle of the entire peripheral wall end portion. The relationship is set to be smaller than β, and the first and second fluid supply / discharge ports 1A and 2A and the G1 and G2 are made of a fluororesin .

According to a second aspect of the present invention , in the connection structure between the integrated panel and the fluid device according to the first aspect, the cross-sectional shape of the gaskets G1 and G2 is the axis of the first and second fluid supply / discharge ports 1A and 2A. It is configured to have a substantially H-shaped shape that is line symmetric with respect to both the center line Z along the center direction and the center line X orthogonal to the center line Z.

According to a third aspect of the present invention , in the connection structure between the integrated panel and the fluid device according to the first or second aspect, the maintaining means I includes the first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A. It is comprised so that the drawing function for exhibiting the said joining state may be exhibited by drawing .

According to a fourth aspect of the present invention , in the connection structure between the integrated panel and the fluid device according to the third aspect, the maintaining means I is provided between the first fluid supply / discharge port portion 1A and the second fluid supply / discharge port portion 2A. An outward flange 9 formed in at least one end 2A (or 1A), a through hole 9a formed in the outward flange 9, and the first fluid supply / exhaust port 1A through the through hole 9a And a second fluid supply / exhaust port portion 2A, and a bolt 66 screwed to a nut portion 67 provided in the other 1A (or 2A),
The first fluid supply / exhaust port portion 1A and the second fluid supply / exhaust port portion 2A are attracted to each other via the plurality of gaskets G1 and G2 by screwing and tightening the bolt 66 to the nut portion 67. It is comprised so that it may be comprised .

According to a fifth aspect of the present invention , in the connection structure between the integrated panel and the fluid device according to the third aspect , the maintaining means I is either the first fluid supply / discharge port portion 1A or the second fluid supply / discharge port portion 2A. On the other hand, a cylindrical nut 81 provided with a female screw portion 81n that can be screwed into a male screw portion 1n formed on the outer peripheral portion of 1A (or 2A), the first fluid supply / discharge port portion 1A, and the second fluid supply The first and second fluid supply / exhaust port portions 1A and 2A interfere with each other in the direction of the axis P of the first and second fluid supply / discharge port portions 1A and 2A. It consists of a split ring 82 fitted on the end of the other 2A (or 1A) of either the fluid supply / exhaust port 1A or the second fluid supply / discharge port 2A,
An inward flange 83 having an opening 83a that allows passage of the outward flange 9 and interferes with the split ring 82 in the axial center P direction is formed at one end of the cylindrical nut 81. Has been
The first fluid supply / exhaust port portion 1A and the second fluid supply / exhaust port portion 2A are attracted to each other via the plurality of gaskets G1 and G2 by the tightening operation of the cylindrical nut 81 to the male screw portion 1n. It is comprised so that it may be comprised.

According to the first aspect of the present invention, the connecting structure portion can be made more compact than the structure in which a plurality of fluid passages are arranged independently by concentrically connecting two or more fluid passages. is there. Since the annular projections formed on the first and second fluid supply / exhaust port portions and the annular grooves respectively formed on one end surface and the other end surface of the gasket are fitted to each other to form a fitting seal portion, , It is possible to prevent liquid leakage from between the two fluid supply / discharge ports and obtain excellent sealing performance. For example, if such a connection structure is used in the piping system of a cleaning device in a semiconductor manufacturing facility, the area occupied by the device can be reduced while ensuring good sealing performance, and a large flow path is secured. As a result, it is possible to increase the circulation flow rate, increase the purity of the chemical solution, and contribute to the yield improvement.
Further, since the maintaining means can maintain the joined state in which the fluid supply / exhaust ports are attracted to each other via the gasket, the integrated panel and the fluid device can maintain a good sealing property without liquid leakage. It is possible to provide a connection structure between an integrated panel and a fluid device that can be maintained for a long period of time and has excellent reliability.

  By the way, in the fitting structure in which the convex is inserted into the concave, even if both of them are made of the same material, the convex member hardly changes (compression deformation), and the concave member expands. It is generally known that there is a tendency to deform. Therefore, in the first aspect of the present invention, since the annular protrusion that is convex on the fluid device and the annular groove that is concave on the gasket are formed, the deformation due to creep or change with time is less than that of the fluid device. Since the gasket is a small component and the fluid device side is hardly deformed, the advantage of maintaining good sealing performance over a long period of time can be realized at low cost by replacing the gasket. In addition, the intermediate gasket in which the fluid passage is formed inside and outside of the gasket has a structure in which not only the inner peripheral portion but also the outer peripheral portion is also used as the wall surface of the fluid path. The interval between the passages is only the thickness of the intermediate gasket, and it becomes possible to arrange a plurality of fluid passages as close to the radial direction as possible, and the connection structure portion between the integrated panel and the fluid device can be made more compact. There are advantages. As a result, it was possible to realize a connection structure between an integrated panel that connects a plurality of fluid passages concentrically and a fluid device, thereby contributing to the promotion of integration of fluid devices that are advantageous for modularization and compaction. In addition, it is possible to provide a connection structure between an integrated panel and a fluid device that can maintain good sealing performance over a long period of time, is excellent in reliability, and can be further downsized.

As described above, in the concave / convex fitting, the concave side tends to spread and deform easily, that is, in the present invention, the inner and outer peripheral wall ends formed on the gasket to expand and deform in order to form the annular groove. I mean. Therefore, since the first and second fluid supply / discharge port portions are formed with annular pressing protrusions that suppress or prevent the expansion deformation of the peripheral wall end portion, the expansion deformation of the peripheral wall end portion is eliminated or reduced, and The annular groove can be fitted with a strong pressure contact force, and an excellent sealing function due to the fitting of both can be exhibited as expected. In addition, since the rigidity of the peripheral wall end can be compensated for by the presence of the annular presser protrusion, it is possible to reduce the thickness of the peripheral wall end of the gasket as compared with the case where they do not exist. There is also an advantage that the overall diameter of the plurality of fluid passages arranged concentrically can be reduced by reducing the width dimension, that is, the connection panel between the integrated panel and the fluid device can be further downsized.

In the joined state, a seal portion is formed by pressure contact between the annular protrusions of the first and second fluid supply / exhaust port portions and the annular groove on one end surface or the other end surface of each gasket. A fitting seal portion is configured, and a connection structure between the integrated panel and the fluid device having excellent sealing performance can be obtained.

Further, in the joined state, the first and second fluid supply / exhaust port portions are connected to the inner diameter side and the outer diameter side of the fitting portion between the annular groove on one end surface or the other end surface of each gasket. There is a configuration in which the taper peripheral surface of the second fluid supply / discharge port and the taper peripheral surface of the gasket are in pressure contact with each other, and the contact between the taper peripheral surfaces makes the connecting structure portion compact and improves the sealing performance. Both effects can be obtained. In addition, since the structure in which the tapered peripheral surfaces are brought into contact with each other, the pressure contact force increases as each fluid device and the gasket are strongly pressed, and there is an advantage that the effect of the above-mentioned compactness and improvement of the sealing performance can be further strengthened. Therefore, it is possible to obtain a connection structure in which no liquid pool is generated between the tapered peripheral surfaces.

Since the width of the annular protrusion is set so as to be larger than the width of the annular groove, the annular protrusion and the annular groove are in detail inside and outside of the annular groove corresponding to the inner and outer circumferential surfaces of the annular protrusion. The side peripheral surface is strongly pressed and a seal portion is formed that exhibits excellent sealing performance that prevents fluid leakage. In addition, in the joined state in which the annular protrusion and the annular groove are fitted with each other, the sandwiching angle of the entire valley portion is set to be larger than the sharpness angle of the entire peripheral wall end portion. The part is in a state where the tapered peripheral surfaces are in pressure contact with each other at the portion closest to the fluid path in the radial direction (see the phantom line in FIG. 3), and the fluid passing through the fluid passage is between the tapered peripheral surfaces. The advantage of functioning as a seal portion that also prevents entry is obtained.

Since the first and second fluid supply / discharge ports and gaskets are made of a fluorine-based resin having excellent chemical resistance and heat resistance, even if the fluid is a chemical liquid or a chemical liquid, Even if it is a fluid, a pipe joint structure part does not deform | transform and does not become easy to leak, and favorable sealing property can be maintained now. The fluororesin is a resinous substance obtained by polymerization of ethylene and derivatives thereof in which one or more hydrogen atoms are substituted with fluorine, and is stable at high temperatures and excellent in water repellency. Further, it is preferable in that it has a small coefficient of friction, extremely high chemical resistance, and high electrical insulation.

According to the second aspect of the present invention, the gasket is formed in a substantially H-shaped cross section that is line-symmetrical in the vertical and horizontal directions. It can be excellent in balance (strength balance, assembly balance) when fitted to a fluid device. In addition, there is an advantage that only one type of gasket is required.

According to the invention of claim 3, the maintaining means I not only maintains the joined state of the multiple pipe joint structure, but also draws the first fluid supply / exhaust port portion and the second fluid supply / exhaust port portion to bring the joined state. Since the attracting function for obtaining can also be exhibited, there is no need to prepare any other attracting means, and there is an advantage that the entire assembling work can be omitted and the cost can be reduced.

According to invention of Claim 4, if the outward flange with a hole is formed in at least one of both fluid supply / exhaust parts, the bolt which lets the hole pass, and the nut part provided in the other fluid supply / exhaust part, It is possible to draw and maintain the two fluid supply / exhaust ports by a simple means simply by providing the two. That is, it is possible to obtain a connection structure between fluid devices having various advantages while having a simple structure and a low-priced maintaining means with a drawing function .

According to the invention of claim 5, the cylindrical nut that is engaged with the outward flange formed at one end of the first and second fluid supply / exhaust ports via the split ring is already provided. An integrated panel in which the annular protrusions of the first and second fluid supply / exhaust ports and the annular groove of the gasket are fitted by a simple operation by simply screwing them into the male threads of the first and second fluid supply / discharge ports. The fluid device and the fluid device can be connected in a sealed state, and it is possible to maintain the connection state simply by stopping the screwing of the cylindrical nut. It is obtained as a reasonable one that does not take up space.

In addition, the cylindrical nut can be externally fitted to and detached from the end of the first fluid supply / exhaust port or the second fluid supply / exhaust port. Since it interferes in the axial direction, the split ring and cylindrical nut are retrofitted to the first or second fluid supply / exhaust port while enabling direct connection between the first and second fluid supply / discharge ports using the cylindrical nut. You can do it freely. In addition, it is possible to reliably transmit the tightening force of the cylindrical nut to the outward flange with a small number of parts and only one kind of parts that is economical and reasonable. Therefore, the integrated panel and the fluid device can be formed using the cylindrical nut without taking the difficult manufacturing means of fitting the cylindrical nut to the fluid supply / exhaust port when the first or second fluid device is manufactured. The connection operation is easy and convenient.

  Embodiments of a connection structure between an integrated panel and a fluid device according to the present invention will be described below with reference to the drawings. 1 and 2 are an overall view and a cross-sectional view of an essential part showing a connection structure between an integrated panel and a fluid device according to Embodiment 1, and FIG. 3 shows a detailed fitting structure between a first gasket and a first fluid supply / exhaust port. FIG. 4 is an overall view showing the connection structure between the integrated panel and the fluidic device according to the second embodiment, and FIGS. 5 and 6 are half cutaway sectional views and assembly explanations of the maintaining means according to the first separate structure. FIGS. 7 and 8 are cross-sectional views and assembly explanatory views of the retaining means according to the second separate structure, FIG. 9 is a sectional view of the retaining means according to the third separate structure, and FIGS. It is sectional drawing of the principal part which shows various different fitting structures with.

  The connection structure between the integrated panel and the fluid device according to the first embodiment is shown in FIGS. The connection structure between the integrated panel and the fluid device includes an integrated panel 1 in which a plurality of tubular fluid passages 3 and 4 are formed, and a total of two ring-shaped gaskets G1 and G2 inside and outside the upper surface 1a. It is a concentric double channel type that shares a longitudinal axis P that is configured to straddle a valve (open / close valve, stop valve, etc.) 2 that is mounted via the valve.

As shown in FIGS. 1 and 2, the integrated panel 1 has a vertical vertical passage 3a opened in the panel upper surface 1a and a horizontal direction inside a panel material (or block material) 5 made of fluororesin such as PFA or PTFE. A lateral supply side fluid passage 3 composed of a lateral passage 3b, an annular longitudinal ring passage 4a formed on the outer diameter side of the longitudinal passage 3a and opened to the panel upper surface 1a, and communicated with the bottom of the lateral passage. A discharge-side fluid passage 4 including the passage 4b is formed. A portion of the integrated panel 1 where the supply / discharge fluid passages 3 and 4 are opened in a double pipe shape is referred to as a first fluid supply / exhaust port 1A. The passage 3a and the annular vertical ring passage 4a are formed as concentric passages having the same axis P. The first fluid supply / exhaust port 1A has an annular shape centered on the axis P and protrudes upward from each of the outer diameter side portions of the fluid passages 3 and 4 that open to the upper end surface thereof. The lower first seal end t21 and the lower second seal end t22 having the inner and outer annular projections 21 and 41 are formed.

  As shown in FIGS. 1 and 2, the valve (an example of a fluid device) 2 has a valve case 6 made of a fluororesin such as PFA or PTFE and having a circular shape when viewed in the vertical direction. The lower end portion is formed in a tubular supply-side fluid passage 7 vertically disposed in the center in a state where it opens to the bottom surface 6a, and is formed on the outer diameter side of the supply-side fluid passage 7 so as to open to the bottom surface 6a. It is formed in the second fluid supply / exhaust port portion 2A having an annular discharge side fluid passage 8 arranged vertically. That is, in the second fluid supply / exhaust port portion 2A, the tubular supply-side fluid passage 7 and the annular discharge-side fluid passage 8 are formed as concentric passages having the same axis P. A flange 9 made of fluororesin such as PFA or PTFE having a pair of bolt insertion holes 9a is integrated with the outer periphery of the lower end of the valve case 6 by fusion. The valve case 6 and the mounting flange 9 may be an integral type integrally formed by cutting or molding. The second fluid supply / exhaust port portion 2A has an annular shape centering on the axis P and protrudes upward at each of the outer diameter side portions of the fluid passages 7 and 8 that open to the lower end surface thereof. The upper first seal end t11 and the upper second seal end t12 having the inner and outer annular projections 11 and 31 are formed.

  The inner and outer gaskets G1 and G2 are formed to have the same cross-sectional shape except for the diameters. The structure will be described by taking the inner first gasket G1 as an example. In addition, the code | symbol corresponding to the location corresponding to the 1st gasket G1 is attached | subjected to the outer 2nd gasket G2 which abbreviate | omits description (example: 54a-> 64a). The first gasket G1 is a tubular fluid path formed so as to communicate the longitudinal passage 3a and the supply-side fluid passage 7 which are fluid passages corresponding to the first and second fluid supply / discharge ports 1A and 2A. W1 is fitted to each of the annular projection 11 of the upper first seal end t11 and the annular projection 31 of the upper second seal end t12 formed on the end surfaces of the first and second fluid supply / exhaust ports 1A and 2A. Preferably, it is made of a fluororesin such as PFA or PTFE having a pair of upper and lower annular grooves 51, 51 formed on the outer diameter side portion of the fluid path W1.

That is, the cross-sectional shape of the first gasket G1 has a pair of upper and lower annular grooves 51, 51 and an inner peripheral wall 54 and an outer peripheral wall 55 for forming the annular grooves 51, 51, and the upper and lower annular grooves 51, 51 51 is vertically symmetric with the same depth and width, and the inner and outer peripheral walls 54 and 55 are also symmetric in the direction of the axis P of the first and second fluid supply / exhaust ports 1A and 2A. It is formed in a substantially H-shaped shape that is line symmetric (may be substantially line symmetric ) with respect to both the vertical center Z along and the horizontal center line X orthogonal to the vertical center line Z. The upper and lower ends of the inner peripheral wall 54 are formed on tapered inner peripheral surfaces 52a and 52a in which the upper and lower ends of the fluid path W1, which is the inner peripheral surface 54a, are inclined outwardly in a forward shape. The upper and lower end portions of the outer peripheral surface 55a are also formed on tapered outer peripheral surfaces 53a and 53a inclined inward.

Upper first and upper annular protrusions 21 and 41 of the lower first and lower seal end portions t21 and t22 of the first fluid supply / discharge port portion 1A of the integrated panel 1 and the second fluid supply / discharge port portion 2A of the valve 2 Inner and outer peripheral walls projecting in the direction of the axis P to form the annular grooves 51 and 61 in the gaskets G1 and G2 on the inner and outer diameter sides of the annular protrusions 11 and 31 at the second seal ends t11 and t12. The annular presser protrusions 12, 13 prevent the end portions 52 , 53 , 62 , 63 from being expanded and deformed by fitting the corresponding annular grooves 51, 61 with the corresponding annular protrusions 11, 21, 31, 41. , 22, 23, 32, 33, 42, 43 are formed.

The structure relating to the annular pressing protrusion will be described with respect to the first gasket G1 and the upper first seal end t11. The inner and outer annular presser protrusions 12 and 13 are symmetrical, and the valley protrusions 14 and 15 surrounded by these and the annular protrusions 11 are in the form of a constricted shape (upper constricted shape). The peripheral surface is formed into a tapered annular protrusion having a tapered outer peripheral surface 12a and a tapered inner peripheral surface 13a. That is, the first seal end portion t11 above is a general term for the annular retainer projections 12, 13 and valleys 14, 15 are formed ring Jo突 force 11 and on both sides of the inside and outside.

The upper ends of the inner and outer peripheral walls 54, 55 of the first gasket G1 have a tapered inner peripheral surface 52a and a tapered outer peripheral surface 53a that are in contact with the tapered outer peripheral surface 12a and the tapered inner peripheral surface 13a of the annular presser protrusions 12, 13, respectively. has to Subomari freely previously enter the 14,15-shaped annular seal projections (an example of the peripheral wall end) 52 and 53, in a joined state (see FIG. 1), the upper side in the inner and outer peripheral wall 54 and 55 The annular seal protrusions 52 and 53 which are peripheral wall end portions enter the corresponding valley portions 14 and 15, and the tapered outer peripheral surface 12a of the upper first seal end portion t11 and the tapered inner peripheral surface 52a of the first gasket G1 are pressure-contacted, In addition, the tapered inner peripheral surface 13a of the upper first seal end t11 and the tapered outer peripheral surface 53a of the first gasket G1 are configured to be in pressure contact with each other.

  That is, the upper seal portion g11 is formed at the upper end portion of the first gasket G1 by the annular groove 51 and the inner and outer annular seal protrusions 52 and 53, and similarly, the lower seal portion g12 is formed at the lower end portion. ing. The upper seal part g11 is fitted with the upper first seal end part t11 to form the fitting seal part 10, and the lower seal part g12 is fitted with the lower second seal end part t21 to form the fitting seal part 10. To do. Similarly, an upper seal portion g21 and a lower seal portion g22 are also formed in the second gasket, and are fitted to the upper second seal end portion t12 and the lower second seal end portion t22, respectively. Form.

The fitting structure of the fitting seal portion 10 will be described in detail with respect to the upper first seal end t11 and the upper seal portion g11 of the first gasket G1, as shown in FIGS. 15 and the inner and outer annular seal protrusions 52 and 53 are symmetrical to each other, and the sandwich angle α ° of the entire inner and outer valley portions 14 and 15 and the cusp angle β ° of the inner and outer annular seal protrusions 52 and 53 as a whole. Between them, a relationship of α ° <β ° is set, and preferably a relationship of α ° + (5 to 15 °) = β ° is set. With this configuration, in the joined state (described later) in which the upper annular protrusion 11 and the annular groove 51 of the upper first seal end t11 are fitted, the upper inner annular pressing protrusion 12 and the upper inner annular sealing protrusion 52 are The taper outer peripheral surface 12a and the taper inner peripheral surface 52a are brought into pressure contact with each other at the innermost diameter side portion (see the phantom line in FIG. 3), and the fluid passing through the fluid passage W1 passes between the outer taper peripheral surfaces 12a and 52a. The advantage of functioning as the secondary seal portion S2 that also prevents entry into the space is obtained.

  A relation d1> d2 is set between the width d1 of the upper annular protrusion 11 and the width d2 of the upper annular groove 51, and preferably d1 × (0.75 to 0.85) = d2. It is good to set it as a relationship. A relationship of h1 <h2 is set between the protrusion length h1 of the upper annular protrusion 11 and the depth h2 of the upper annular groove 51. With these configurations, the upper annular protrusion 11 and the upper annular groove 51 are in strong pressure contact with the inner and outer side peripheral surfaces of the upper annular protrusion 11 and the corresponding inner peripheral surfaces of the upper annular groove 51 in detail. A primary seal portion S1 that exhibits excellent sealing performance that prevents fluid leakage is formed, and the tapered outer peripheral surface 12a of the upper inner annular presser protrusion 12 and the tapered inner peripheral surface 52a of the upper inner annular seal protrusion 52 are necessarily formed. There is an advantage that the secondary seal portion S2 described above is satisfactorily formed.

  In addition, the tips of the annular presser protrusions 12 and 13 and the tips of the annular seal projections 52 and 53 are formed in a shape cut so as not to have a pin angle, that is, the inclined cut surfaces 12b and 13b and the cut surfaces 52b and 53b. ing. With these configurations, even if the tip of the upper inner annular presser protrusion 12 is slightly expanded and deformed toward the fluid passage W1, it is originally cut, so that a recess having a triangular cross-section that is largely open in the middle of the fluid passage W1 is formed. As much as possible, the fluid existing in the dent can easily flow out, and substantially no liquid pool is generated. In addition, the opening angle of the recess, that is, the included angle between the inclined cut surface 12b and the tapered inner peripheral surface 52a is sufficiently large, and the possibility of liquid accumulation due to surface tension is avoided. Further, since the inner and outer angles of the tip of the annular protrusion 11 are formed as a chamfered shape 11a, the press-fitting movement into the narrow annular groove 51 can be smoothly performed without inconvenience such as galling.

  The structure of the fitting seal portion 10 described above is similarly configured in the lower side of the first gasket G1 and the second gasket G2, and corresponding portions are denoted by corresponding reference numerals. The second gasket G2 has the same diameter as that of the first gasket G1, although the diameter is different. However, the upper second seal end t12 and the lower second seal end t22 of the first and second fluid supply / exhaust port portions 1A, 2A do not have fluid passages on the outer peripheral side thereof, and therefore the upper first seal The shape is slightly different between the end t11 and the lower second seal end t21.

  That is, with respect to the upper second seal end t12, there is a lower end inner peripheral portion 6b for forming the lower end portion of the valve case 6 in a state following the tapered inner peripheral surface 33a of the annular pressing protrusion 33. is there. The lower end inner peripheral portion 6b functions as a guide when the upper seal portion g21 of the second gasket G2 is fitted to the upper second seal end portion t12, and the outer peripheral wall 65 of the second gasket G2 together with the tapered inner peripheral surface 33a. It is also possible to exert the function of preventing the spread deformation of the material. And about the lower 2nd seal end part t22, it is a point in which the panel material 5 exists in the outer peripheral side of the outer annular pressing protrusion 43 continuously, and the lower seal part g22 and the lower second seal end part t22 The effect of preventing the outer annular seal protrusion 63 of the lower seal part g22 of the second gasket G2 from being expanded and deformed by the tapered inner peripheral surface 43a is enhanced.

  On the other hand, of the first and second gaskets G1 and G2, the first gasket G1, which is an intermediate gasket in which the fluid passages 7 and 8 exist on both the inner diameter side and the outer diameter side in the joined state, is the outer peripheral portion thereof. The outer peripheral surface 55a communicates with the annular fluid passage 4a of the first fluid supply / exhaust port 1A and the annular fluid passage 8 of the second fluid supply / exhaust port 2A existing on the outer diameter side of the first gasket G1. It forms in the state used as the wall surface for forming the fluid path | route W2. If both the inner and outer peripheral surfaces 54a and 55a of the first gasket G1 serve as the wall surfaces forming the fluid passages W1 and W2, the "thickness of the first gasket G1" = "the annular fluid passages 3a and 7 and The distance between the tubular fluid passages 4a and 8 "is established, and the connecting portions of the first and second fluid supply / discharge ports 1A and 2A can be made more compact. In addition, as shown by the phantom line in FIG. 1, if the ring-shaped attachment / detachment flange 1f projecting laterally on the outer peripheral wall 65 of the second gasket G2 is integrally formed, the first or second fluid supply / exhaust port 1A, When the second gasket G2 is extracted from 2A, there is an advantage that the flange 1f can be easily removed by pulling the flange 1f with a tool or fingers. In this case, the thickness of the desorption flange 1f is set to a value smaller than the gap between the first and second fluid supply / exhaust port portions 1A and 2A in the joined state.

  Next, the maintenance means I will be described. As shown in FIGS. 2 and 3, the maintaining means I includes a first fluid supply / exhaust port portion 1A of the integrated panel 1 and a second fluid supply / discharge port portion 2A of the valve 2 that are connected to each other by the first and second gaskets G1, G1. The first and second seal end portions t11 and t12 of the first fluid supply / exhaust port portion 1A and the first and second gaskets G1 and G2 are pulled by the pulling action G2. The upper seal portions g11 and g21, the lower first and lower second seal end portions t21 and t22 of the second fluid supply / exhaust port portion 2A, and the lower seal portions g12 and g22 of the first and second gaskets G1 and G2. Are respectively fitted together to maintain the joined state in which each fitting seal portion 10 is formed. That is, the annular protrusions 11 and 31 of the second fluid supply / exhaust male port portion 2A and the annular grooves 51 and 61 on the upper sides of the first and second gaskets G1 and G2 and the annular shape of the first fluid supply / exhaust male port portion 1A. The protrusions 21 and 41 and the annular grooves 51 and 61 on the lower side of the first and second gaskets G1 and G2 are fitted into each other.

  The specific structure of the maintaining means I includes a pair of bolts 66 inserted into the bolt insertion holes 9a of the mounting flange 9 of the second fluid supply / exhaust port 2A, and the first fluid corresponding to the pair of bolt insertion holes 9a, 9a. Nut portions 67 and 67 formed in the supply / exhaust port portion 1A (in the panel material 5), and the valve 2 is attached to the integrated panel 1 by a tightening operation by screwing the bolt 66 to the nut portion 67. The drawing and the drawing state can be maintained. Further, when the pressure contact force of each fitting seal portion 10 is reduced due to aging, creep, or the like, it can be dealt with by tightening the bolt 66, and good sealing performance can be maintained. It is.

  As shown in FIG. 4, the connection structure between the integrated panel and the fluid device according to the second embodiment is a flange of the integrated panel 1 and a pump 2 (such as a bellows pump for a high-temperature cleaning apparatus circulation line) that is an example of the fluid device. The communication connection is made through the pipe 71. Since the configuration of the connecting portion itself via the inner and outer gaskets G1 and G2 is the same as that of the first embodiment, only the main reference numerals are given, and the detailed description thereof is omitted.

  The integrated panel 1 has basically the same structure except that the discharge direction of the fluid passage 4 on the discharge side is opposite to that of the integrated panel 1 according to the first embodiment. However, the connection structure between the integrated panel and the fluid device according to the first embodiment is configured on the upper surface of the integrated panel, whereas the connection structure according to the second embodiment is configured on the lateral side surface of the integrated panel 1. The supply and discharge fluid passages 7 and 8 of the pump 2 have a structure that opens to the side surface. In the integrated panel 1, the pair of fluid passages 3 and 4 have a double pipe structure, but are arranged side by side. It is an independent type.

  The flange pipe 71 includes a flange portion 72 having the mounting flange 9 described above and a substantially bifurcated pipe portion 73 that follows the flange portion 72, and the pipe portion 73 has a supply side fluid passage 74 having a tubular shape. 73A and a discharge-side fluid passage 73B having a tubular discharge-side fluid passage 75. In the flange portion 72, the supply-side fluid passage 74 is opened in a tubular shape centered on the axis P so as to face the vertical passage 3 a of the integrated panel 1, and is opposed to the vertical ring passage 4 a of the integrated panel 1. An annular passage portion 75 a that is opened in this manner is formed so as to be continuous with the discharge-side fluid passage 75. The fluid passages 74 and 75 are connected and connected in communication with the in-side port 76 and the out-side port 77 of the pump 2 by means such as fusion.

  Thus, by using the flange pipe 71 having the double pipe structure flange part 72 and the two independent pipe parts 73, the first fluid supply / exhaust port part 1A of the double pipe structure in the integrated panel 1 The second fluid supply / exhaust port portion 2A composed of a pair of in and out ports 76 and 77 arranged in parallel, that is, the integrated panel 1 and the pump 2 are different from each other in the fluid passage opening structure. However, they are close to each other and can be connected in a compact manner without difficulty.

  A connection structure between the integrated panel and the fluidic device according to the third embodiment is shown in FIGS. This is different from the first embodiment only in the maintenance means I, and the maintenance means I having the first separate structure will be described. 5 and 6, portions corresponding to those of the first embodiment shown in FIGS. As shown in FIGS. 5 and 6, the maintaining means I according to the first different structure is provided on the outer peripheral portion of the first fluid supply / exhaust port 1 </ b> A having a circular shape in a plan view formed on the upper surface of the integrated panel 1. An annular fluid is formed on a cylindrical nut 81 formed with a male screw 1n and having a female screw 81n that can be screwed to the male screw 1n, and an outward flange 9 formed at the lower end of the valve case 6 of the valve 2. The split ring 82 is divided into two or three or more split rings 82 that interfere with each other in the direction of the axis P of the passage 7. By tightening the cylindrical nut 81 by screwing the female screw 81n to the male screw 1n of the first fluid supply / discharge port portion 1A, the two fluid supply / discharge port portions 1A, 2A are connected to each other with two gaskets G1, G2. It is comprised in the maintenance means I with a drawing function which can be pulled in the direction which approaches via, and can maintain a drawing state.

  The opening 83 a of the inward flange 83 formed on the valve 2 side (upper side) of the cylindrical nut 81 is set to a minimum inner diameter dimension sufficient to allow passage of the outward flange 9. The outer diameter of the split ring 82 is set to be slightly smaller than the inner diameter of the female screw 81n so that it can enter the cylindrical nut 81, and the inner diameter is the circular second fluid supply / exhaust port of the valve 2 It is set to a minimum dimension that can be fitted onto the outer diameter portion of the portion 2A. In this case, in order to equip the split ring 82, the axial length of the thin portion excluding the outward flange 9 in the second fluid supply / exhaust port portion 2 </ b> A is divided by the axial length of the cylindrical nut 81. It is necessary to set a value exceeding the sum of the thickness of the mold ring 82. Specifically, as shown in FIG. 6B, the length d3 between the cylindrical nut 81 and the outward flange 9 in contact with the root portion 6t of the valve case 6 has a split ring. The condition is that the thickness is greater than the thickness d4 of 82 (d3> d4).

  Further, between the inner back end portion of the female screw 81 n and the inward flange 83 in the cylindrical nut 81, the split ring 82 is slidable in the axial direction and covers the width of the split ring 82. An inner peripheral surface portion 81m having a length in the axial center P direction is formed on a flat inner peripheral surface concentrically with the axial center P. That is, an inner diameter portion 81 a between the female screw 81 n of the cylindrical nut 81 and the inward flange 83 is formed on a flat inner peripheral surface concentric with the supply-side fluid passage 7, and the inner peripheral surface portion 81 m has an inner diameter. While the fitting tolerance is set to be slightly larger than the outer diameter of the split ring 82 having a rectangular cross section, the outer diameter portion of the second fluid supply / discharge port portion 2A is connected to the supply-side fluid passage 7. Concentrically formed on a flat outer peripheral surface, the outer diameter of the outer diameter portion and the inner diameter of the split ring 82 are formed to have substantially the same diameter. As a result, when the cylindrical nut 81 is screwed, the split ring 82 is tilted and bent, or the pressing force in the direction of the axis P due to the screwing of the cylindrical nut 81 is applied to the outward flange 9. It is possible to prevent the inconvenience of not being transmitted well, effectively pushing the outward flange 9 and pulling the first and second fluid supply / exhaust port portions 1A and 2A toward each other well. Has been.

  The operation procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the maintaining means I having the first different structure is as follows. First, as shown in FIG. 6A, the tubular flange 81 is fitted over the outer periphery of the second fluid supply / exhaust port portion 2A of the valve 2 by passing through the outward flange 9 (up to the innermost side). Move until it touches the root 6t). Next, as shown in FIG. 6B, the split ring 82 is fitted between the outward flange 9 and the tip of the cylindrical nut 81 and fitted to the second fluid supply / exhaust port 2 </ b> A. At this time or before, the first and second gaskets G1 and G2 are temporarily fitted to the end faces of one of the fluid supply / discharge ports 1A and 2A with the annular protrusions 11, 21, 31, and 41 and the annular grooves 51 and 61. You may make it wear through. Next, the first fluid supply / exhaust port portion 1A is applied to the second fluid supply / discharge port portion 2A via the gaskets G1, G2, and the cylindrical nut 81 is slid in this state before the tightening operation [FIG. The connection state shown in FIG. 5 is obtained. In FIG. 6, the integrated panel 1 and the valve 2 that are stacked one above the other are drawn in a lying state for convenience of drawing.

  7 and 8 show a connection structure between the integrated panel and the fluid device according to the fourth embodiment. This is different from the first embodiment only in the maintaining means I, and the second different structure maintaining means I will be described. 7 and 8, portions corresponding to those of the first embodiment shown in FIGS. The second separate structure maintaining means I includes first and second frustoconical end portions 1D formed by expanding the first and second fluid supply / exhaust port portions 1A and 2A so that the diameter increases toward the end surfaces. , 2D, the first tapered inner peripheral surface 84a that contacts the tapered outer peripheral surface 1d of the first truncated cone-shaped end 1D, and the second tapered inner surface that contacts the tapered outer peripheral surface 2d of the second truncated cone-shaped end 2D. A split-type presser ring 85 comprising a pair of half-arc members 84, 84 having an inner peripheral surface having a substantially square cross section with the peripheral surface 84b, a bolt 86 for pulling the half-arc members 84, 84 together, and It has a nut 87 formed on one half arc member 84.

  In a state in which the pair of half arc members 84 are covered over the first frustoconical end 1D and the second frustoconical end 2D in the joined state, the insertion holes of the other half arc members 84 are covered. By tightening the bolt 86 and nut 87 passed through 84h, the half arc members 84 and 84 pivotally supported by the fulcrum Q at one end are attracted to each other. The fluid supply / discharge port portions 1A and 2A are attracted to each other. The split mold retaining ring 85 is preferably made of a fluororesin material, but may be made of other materials such as an aluminum alloy.

  The operation procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the second different structure maintaining means I is as follows. First, as shown in FIG. 8A, first, a preliminary coupling operation is performed in which the first and second fluid supply / exhaust ports 1A and 2A are lightly connected and connected via the first and second gaskets G21 and G2. Next, the first and second frustoconical end portions 1D and 2D that are pre-connected are covered with a split-type presser ring 85, and a tightening operation with a bolt 86 is performed. By tightening the bolt 86, the gaskets G1 and G2 are deeply fitted into the fluid supply / discharge ports 1A and 2A, and a connection and connection state between the integrated panel 1 and the valve 2 is obtained as shown in FIG. It is done.

  FIG. 9 shows a connection structure between the integrated panel and the fluid device according to the fifth embodiment. This is different from the first embodiment only in the maintaining means I, and the third different structure maintaining means I will be described. In FIG. 9, portions corresponding to those in the first embodiment shown in FIGS. The third different structure maintaining means I includes a first fluid supply / exhaust port 1A having a protruding shape that is circular in a plan view and formed on the upper surface of the integrated panel 1 with a male screw 1n on the outer periphery. A flange portion 9 formed at the lower end portion of the valve case 6 with a male screw 9n on the outer peripheral portion in the two-fluid supply / discharge port portion 2A, and female screws 91n, 92n that can be screwed to the male screws 1n, 9n. The first and second ring nuts 91 and 92 have an engagement ring 93 having a substantially U-shaped cross section that can be fitted into the outer peripheral grooves 91m and 92m of the ring nuts 91 and 92.

  Both the ring nuts 91 and 92 and the engagement ring 93 are made of a fluororesin such as PFA or PTFE, and have a certain degree of flexibility. Therefore, the procedure for connecting and connecting the fluid supply / exhaust ports 1A and 2A using the maintaining means I of the third separate structure was integrated by engaging the engagement rings 93 with the ring nuts 91 and 92 in advance. First and second ring nuts 91 and 92 are formed, and the integrated first and second ring nuts 91 and 92 are drawn together through gaskets G1 and G2 to be assembled. The first and second fluid supply / discharge ports 1A and 2A are screwed to form a connection structure between the integrated panel and the fluid device. Of course, in this case, it is a condition that the male screws 1n and 9n are identical to each other, and after the screwing, the ring nuts 91 and 92 can be turned to be tightened more strongly or to be tightened later.

  The following assembly procedure is also possible. That is, in a state where the ring nuts 91 and 92 are screwed into the corresponding male screws 1n and 9n, both the fluid supply / discharge port portions 1A and 2A are drawn through the first and second gaskets G1 and G2, and the gaskets are drawn. A drawing step is performed in which G1 and G2 are connected in a sealed state with pressure contact. This drawing step is performed using a dedicated drawing means different from the maintenance means I. Then, the engagement ring 93 is forcibly expanded and deformed in the outer peripheral grooves 91m and 92m of the first and second ring nuts 91 and 92 that are screwed in the respective male screws 1n and 9n in a state adjacent to each other. By doing so, a connection structure between the integrated panel and the fluidic device is formed. That is, the engagement ring 93 is engaged with the ring nuts 91 and 92 by forcible fitting.

  The maintenance means I having this configuration literally has only the function of maintaining the seal connection state through the gaskets G1 and G2 of the first and second fluid supply / exhaust ports 1A and 2A. However, since the ring nuts 91 and 92 and the engagement ring 93 can be rotated relative to each other, both of the ring nuts 91 and 92 can be independently rotated, and the seal pressure contact is caused by a change with time, creep or the like. When the force decreases, it is possible to perform a retightening operation by forcibly turning one or both of the ring nuts 91 and 92.

[Other Examples]
(1) Various examples of fitting structures between the fluid device and the gasket will be described below. As shown in FIG. 10 (a), in the fitting structure between the valve 2 as the fluid device and the first gasket G1, one or a plurality of circumferential protrusions 11t for pressure contact are provided as the annular protrusions 11 on the inner and outer side peripheral surfaces. It is good also as a formed shape. In the joined state, the circumferential protrusion 11t is in strong contact with the annular groove 51 of the first gasket G1 to form the primary seal portion S1. In this structure, since the annular protrusion 11 and the annular groove 51 are in contact with each other at a plurality of locations, there is an advantage that the frictional resistance when the annular protrusion 11 is inserted into the annular groove 51 is reduced compared to the case of surface contact. is there. This configuration may be applied to a fitting structure between the integrated panel 1 and the first gasket G1.

(2) As shown in the left part of FIG. 10B, in the fitting structure between the valve 2 as the fluid device and the first gasket G1, the tapered peripheral surfaces 12a and 52a are connected to the second fluid supply / exhaust port 2A. One or a plurality of peripheral protrusions 12t are formed on the tapered outer peripheral surface 12a of the annular presser protrusion 12, and the peripheral protrusion 12t and the tapered inner peripheral surface 52a of the peripheral wall end portion 52 of the first gasket G1 are in pressure contact with each other to form a secondary seal. The structure which comprises part S2 is also possible. Further, as shown in the right part of FIG. 10B, conversely to the above, one or a plurality of peripheral protrusions 53t are formed on the tapered inner peripheral surface 53a of the first gasket G1, and the peripheral protrusions 53t and the annular presser are formed. A structure may be employed in which the secondary seal portion S2 is configured by pressure contact with the tapered inner peripheral surface 13a of the protrusion 13. This configuration may be applied to a fitting structure between the integrated panel 1 and the first gasket G1, and a structure including both FIGS. 10A and 10B is also possible.

(3) As shown in FIG. 11A, in the fitting structure between the valve 2 as the fluid device and the second gasket G2, the outer peripheral wall end 63 of the outer side of the second gasket G2 is located more laterally than the outer peripheral wall 65. An annular side protrusion that is protruded sideways is formed, and a valley 35 on the outer diameter side is formed in a cylindrical shape, so that the annular side protrusion 63 and the annular presser protrusion 33 of the second fluid supply / exhaust port portion 2A are formed. The structure which press-contacts the lower end inner peripheral part 6b may be sufficient. In this structure, a strong pressing force acts between the outer peripheral wall end 63 of the second gasket G2 and the annular protrusion 31, and the outer peripheral wall 65 other than the outer peripheral wall end 63 does not contact the lower end inner peripheral portion 6b. The frictional resistance when inserting the outer peripheral wall end 63 into the valley 35 can be reduced. As a result, the load for inserting the annular protrusion 31 into the annular groove 61 is reduced, and there is an advantage that the assembly is easy. The fitting structure between the inner peripheral wall end 62 and the inner circumferential annular pressing protrusion 32 is the same as that of the first embodiment shown in FIGS.

(4) As shown in FIG. 11 (b), in the fitting structure of the valve 2 is a fluid device and a second gasket G2, the second gasket G2, respectively tapered peripheral surface of the inner peripheral wall 64 and 65 the upper end 62a and 63a are formed symmetrically (same as the second gasket G2 according to the first embodiment), and the outer peripheral surface of the lower end inner peripheral portion 6b and the outer peripheral wall 65 of the annular presser protrusion 33 forming the cylindrical valley 35 is formed. The structure may be in surface contact with 65a. In this case, the operation force for inserting the annular protrusion 31 into the annular groove 61 is slightly increased due to the surface contact, but a sufficient pressure contact force between the annular protrusion 31 and the outer peripheral wall end 63 of the second gasket G2 [ This is almost the same as in the case of the configuration of FIG. In addition, you may apply the structure shown by Fig.11 (a), (b) to the fitting structure of the integrated panel 1 and the 2nd gasket G2.

(5) As shown in FIG. 12A, in the fitting structure between the valve 2 as the fluid device and the first gasket G1, the inner and outer peripheral wall end portions 52 and 53 of the upper seal portion g11 of the first gasket G1 are , And a small annular projection 52b, 53b projecting in the direction of the axis P, and a tapered top surface 52c, 53c connected to the inside and outside at the root thereof, and an upper first seal end portion of the second fluid supply / exhaust port portion 2A The annular presser protrusions 12 and 13 at t11 are composed of annular concave grooves 12b and 13b that fit into the small annular protrusions 52b and 53b, and tapered bottom surfaces 12c and 13c that contact the tapered top surfaces 52c and 53c. But it ’s okay.

In a state where the taper top surfaces 52c and 53c and the taper bottom surfaces 12c and 13c are in contact with each other, a gap is set between the small annular protrusions 52b and 53b and the annular concave grooves 12b and 13b in the axis P direction. . In this configuration, since the inner and outer peripheral wall end portions 52 and 53 are prevented from opening and deforming due to the fitting of the small annular projections 52b and 53b and the annular concave grooves 12b and 13b, the annular projection 11 and the annular groove 51 are strong. An effective primary seal portion S1 by contact and an effective secondary seal portion S2 by contact between the tapered top surfaces 52c and 53c and the tapered bottom surfaces 12c and 13c are formed, and a connection structure that can seal well without liquid accumulation It has been realized.

(6) As shown in FIG. 12B, both sides of the annular protrusion 11 in the second fluid supply / exhaust port portion 2A of the valve 2 are formed in the annular flat shoulder portions 12 and 13, and the annular groove in the first gasket G1. The inner and outer peripheral wall end portions 52 and 53 on both sides of 51 have a flat end surface, and the inner and outer annular flat shoulder portions 12 and 13 and the inner and outer peripheral wall end portions 52 and 53 basically contact each other. The inner and outer peripheral wall end portions 52 and 53 may have lip 12r and 13r that are annular projections formed on the inner and outer ends. In this case, secondary seal portions S2 are formed by the inner lip 12r and the inner peripheral wall end 52, and by the outer lip 13r and the outer peripheral wall end 53, respectively.

In the connection structure between the integrated panel and a fluid device shown in (7) 1-3, the second gasket G2 of the outer diameter side, although not shown, than upper and lower ends the inner wall 64 of the outer peripheral wall 6 5 A structure that is short and is simply cut horizontally may be used. The double pipe connection structure, it may be no sealing function on the outer circumferential wall 6 5 second gasket G2 of the outermost diameter side. The gaskets G1 and G2 in the first to fifth embodiments are symmetrical in the vertical and horizontal directions, but may be, for example, those having different inner and outer peripheral wall lengths and thicknesses, or those that are asymmetrical in the vertical direction, and are limited to the illustrated shapes. [Refer to FIG. 11A]. Further, a connection structure between a triple or more integrated panel having one or a plurality of annular fluid passages on the outer side of the outer annular fluid passage 8 and the fluid device is also possible, and gaskets other than the gasket located on the outermost side are: A configuration is possible in which both of the inner and outer peripheral surfaces also serve as a fluid path.

  The “fluid device” in the present invention means a valve, pump, accumulator, fluid storage container, heat exchanger, regulator, pressure gauge, flow meter, heater, flange piping, etc. It is defined as a general term for things. Further, as the maintaining means with a pulling function, a turnbuckle type (eg, in the structure shown in FIG. 9, one of the male screws 1n and 9n is a reverse screw, and a turnbuckle nut straddling both the male screws 1n and 9n is screwed) (A structure to be worn) is also possible.

Sectional drawing which shows concentric multiple flow path connection structure of integrated panel and valve (Example 1) Sectional drawing of the principal part of the gasket used for the connection structure of FIG. Enlarged sectional view of the main part showing details of the fitting structure between the gasket and fluid device Sectional drawing which shows the concentric multiple flow path connection structure of the integrated panel and pump via flange piping (Example 2) Sectional drawing of the principal part which shows the 1st another structure of the maintenance means with a drawing function (Example 3) Explanatory drawing which shows the connection procedure of the connection structure which has a maintenance means of FIG. Sectional drawing of the principal part which shows the 2nd another structure of the maintenance means with a drawing function (Example 4) Explanatory drawing which shows the connection procedure of the connection structure which has a maintenance means of FIG. Sectional drawing of the principal part which shows the structure of a maintenance means (Example 5) (A), (b) is sectional drawing of the principal part which shows the separate fitting structure of a fluid device and a gasket together (A), (b) is sectional drawing of the principal part which shows another fitting structure of a fluid device and a 2nd gasket. (A), (b) is sectional drawing of the principal part which shows another fitting structure of a fluid device and a 1st gasket.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Integrated panel 1A 1st fluid supply / exhaust part 1n Male screw part 2 Fluid device 2A 2nd fluid supply / exhaust part
3 , 7 Tubular fluid passage
4 , 8 Annular fluid passage 9 Outward flange 9a Through hole 10 Fitting seal part 11, 21, 31, 41 Annular projection 12, 13, 22, 23, 32, 33, 42, 43 Annular pressing projection 12a, 13a, 22a, 23a, 32a, 33a, 42a, 43a Tapered peripheral surface 14, 15, 24, 25, 34, 35, 44, 45 Valley 51, 61 Annular groove 52, 53, 62, 63 End of peripheral wall 52a, 53a, 62a, 63a Tapered peripheral surface 55a Outer peripheral part of intermediate gasket 66 Bolt 67 Nut part 81 Cylindrical nut 81n Female thread part 82 Split ring 83 Inward flange 83a Opening part G1, G2 Gasket P Shaft S1 Seal part W1, W2 Fluid Route X, Z center line
α Angle of the entire valley
β Sharpness of the entire peripheral wall

Claims (5)

The first fluid supply / exhaust port portion of the integrated panel including a first fluid supply / discharge port portion that is formed by opening a tubular fluid passage or an annular fluid passage and one or more annular fluid passages concentrically; A tubular fluid passage or an annular fluid passage and one or more annular fluid passages are formed concentrically to open the second fluid supply / exhaust portion of the fluid device having a second fluid supply / exhaust portion that opens. The plurality of fluid passages correspond to each other, and each fluid passage is sealed by a plurality of ring-shaped gaskets interposed between the first fluid supply / discharge port portion and the second fluid supply / discharge port portion. When connecting in a connected state,
In the first fluid supply / exhaust port portion and the second fluid supply / discharge port portion, an annular protrusion is formed on an outer diameter side portion of each fluid passage that opens to each end face,
Each of the gaskets is formed on a fluid path formed to communicate the fluid passages corresponding to each other of the first and second fluid supply / exhaust ports, and on end surfaces of the first and second fluid supply / discharge ports. A pair of annular grooves formed in an outer diameter side portion of the fluid path to be fitted to each of the annular projections, and a material having flexibility,
The first fluid supply / discharge port portion and the second fluid supply / discharge port portion are attracted to each other via the plurality of gaskets, and the annular protrusion of the first fluid supply / discharge port portion and one end of each gasket are An annular groove, and a maintaining means for maintaining a joined state in which the annular protrusion of the second fluid supply / exhaust port portion and the annular groove at the other end of each gasket are fitted together to form a fitting seal portion. Equipped with,
Among the plurality of gaskets, the intermediate gasket in which the fluid passage is present on both the inner diameter side and the outer diameter side in the joined state is the first fluid supply whose outer peripheral surface is on the outer diameter side of the intermediate gasket. The annular fluid passage of the outlet port and the annular fluid passage of the second fluid supply / exhaust port portion are formed in a state that becomes a wall surface for forming an annular fluid path ;
Inner and outer peripheral wall end portions protruding in the axial direction to form the annular groove in the gasket are formed on the inner and outer diameter sides of the annular protrusions on the end surfaces of the first and second fluid supply / discharge ports. , An annular presser protrusion is formed that suppresses or prevents the annular groove and the annular protrusion from being expanded and deformed by fitting,
The annular presser projection has a tapered annular projection having a tapered circumferential surface with a side circumferential surface inclined on the annular projection side so that a trough surrounded by the annular projection is recessed. The end portion of the peripheral wall has a tapered peripheral surface that abuts the tapered peripheral surface of the annular presser protrusion, and is formed into a tapered annular protrusion that can enter the valley portion, In the joined state, the peripheral wall end part enters the valley part, and the both tapered peripheral surfaces are press-contacted to form a seal part,
The width of the annular protrusion is set to be larger than the width of the annular groove, the included angle of the entire valley is set to be smaller than the sharpness of the entire peripheral wall end, and the first and A connection structure between an integrated panel in which a second fluid supply / discharge port portion and the gasket are formed of a fluororesin and a fluid device. The gasket has a substantially H-shaped cross-sectional shape that is symmetrical with respect to both the center line along the axial center direction of the first and second fluid supply / exhaust ports and the center line orthogonal to the center line. The structure for connecting an integrated panel and a fluidic device according to claim 1, wherein the integrated panel is configured as described above. The said maintenance means is comprised by what draws the said 1st fluid supply / exhaust part and the 2nd fluid supply / exhaust part, and exhibits the drawing function for acquiring the said joining state. The connection structure of the integrated panel and fluid device as described in 1. The maintaining means includes an outward flange formed at at least one end of the first fluid supply / exhaust port and the second fluid supply / exhaust port, and a through-hole formed in the outward flange. And a bolt that is screwed into a nut portion provided on the other of the first fluid supply / exhaust port portion and the second fluid supply / discharge port portion through the through hole,
The first fluid supply / exhaust port portion and the second fluid supply / exhaust port portion are configured to be attracted to each other via the plurality of gaskets by screwing and tightening the bolt to the nut portion. Item 4. A connection structure between the integrated panel and the fluidic device according to Item 3. A cylindrical nut provided with a female screw portion that can be screwed into a male screw portion formed on an outer peripheral portion of one of the first fluid supply / discharge port portion and the first fluid supply / discharge port portion; , So as to interfere with the outward flange formed at the other end of the first fluid supply / exhaust port and the second fluid supply / discharge port in the axial direction of the first and second fluid supply / discharge ports. A split ring that is externally fitted to one of the other ends of the first fluid supply / exhaust port and the second fluid supply / discharge port;
An inward flange having an opening that allows passage of the outward flange and that interferes with the split ring in the axial direction is formed at one end of the cylindrical nut,
The first fluid supply / exhaust port portion and the second fluid supply / discharge port portion are configured to be attracted to each other via the plurality of gaskets by a tightening operation of the cylindrical nut to the male screw portion. A connection structure between the integrated panel according to claim 3 and a fluidic device.

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