SG11201808788PA - Liquid delivery system - Google Patents

Liquid delivery system

Info

Publication number
SG11201808788PA
SG11201808788PA SG11201808788PA SG11201808788PA SG11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA
Authority
SG
Singapore
Prior art keywords
laurelview
international
california
fremont
fluid
Prior art date
Application number
SG11201808788PA
Inventor
Chris Melcer
Philip Ryan Barros
Haruyuki Kubota
Randolph Treur
Todd Cushman
Greg Patrick Mulligan
Original Assignee
Ichor Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ichor Systems Inc filed Critical Ichor Systems Inc
Publication of SG11201808788PA publication Critical patent/SG11201808788PA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L43/00—Bends; Siphons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization -, MD IIIII01101010 11111 010111110111010111111111111101101111111111110111111 International Bureau .. .... ..Yejd (10) International Publication Number (43) International Publication Date ..... .....1 WO 2017/176815 Al 12 October 2017(12.10.2017) WIPO I PCT (51) International Patent Classification: (72) Inventors: MELCER, Chris; 3185 Laurelview Ct, Fre- HO1L 21/67 (2006.01) mont, California 94538 (US). BARROS, Philip Ryan; 3185 Laurelview Ct, Fremont, California 94538 (US). (21) International Application Number: KUBOTA, Haruyuki; 3185 Laurelview Ct, Fremont, Cali- PCT/US2017/026022 fornia 94538 (US). TREUR, Randolph; 3185 Laurelview (22) International Filing Date: Ct, Fremont, California 94538 (US). CUSHMAN, Todd; 4 April 2017 (04.04.2017) 3185 Laurelview Ct, Fremont, California 94538 (US). MULLIGAN, Greg Patrick; 3185 Laurelview Ct, Fre- (25) Filing Language: English mont, California 94538 (US). (26) Publication Language: English (74) Agent: GRINER, David; 651 N. US Hwy 183, Suite 335- (30) Priority Data: 118, Leander, Texas 78641 (US). 62/318,202 4 April 2016 (04.04.2016) US (81) Designated States (unless otherwise indicated, for every (71) Applicant: ICHOR SYSTEMS, INC. [US/US]; 200-C kind of national protection available): AE, AG, AL, AM, Parker Drive, Suite 600, Austin, Texas 78728 (US). AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, — RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, = TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. [Continued on next page] (54) Title: LIQUID DELIVERY SYSTEM = 210 216 (57) : A modular system for enabling a distribution of liquid chemicals comprising a substrate block that includes at least two ports formed in a first major surface of the block and a fluid passageway extending between the two ports. The fluid pathway is preferably a smooth, seamless path where the entire volume of the flu- = 200-Th l 21, 215 . 4 215 id pathway is directly in line with the desired flu- id flow so that fluid flow completely sweeps the entire flow passageway and there are no dead — r _ 213 21 I = 21 4,, volumes or areas of entrapment in said fluid pas- 6 sageway. A substrate block can be formed from a fluoropolymer using a novel composition and manufacturing process. A sealing assembly is = 21 _ 212 . 211 provided that uses a combination of a replaceable insert-type seal with a tongue and groove seal formed into the modular components. — . 215 216 21 216 .-1 16 21. 17 as 14 ir) 15 .-1 GC ,tD IN FIG. 2 .-1 IN .-1 0 ei O WO 2017/176815 Al MIDEDIM111101111111111111111111111111111111111111111111111111111111111110111111111111 (84) Designated States (unless otherwise indicated, for every Published: kind of regional protection available): ARIPO (BW, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, GH, SZ, RU, — with international search report (Art. 21(3)) before the expiration of the time limit for amending the TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, DE, LT, SE, GA, claims and to be republished in the event amendments (Rule 48.2(h)) of receipt of GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
SG11201808788PA 2016-04-04 2017-04-04 Liquid delivery system SG11201808788PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662318202P 2016-04-04 2016-04-04
PCT/US2017/026022 WO2017176815A1 (en) 2016-04-04 2017-04-04 Liquid delivery system

Publications (1)

Publication Number Publication Date
SG11201808788PA true SG11201808788PA (en) 2018-11-29

Family

ID=60000702

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10202012083YA SG10202012083YA (en) 2016-04-04 2017-04-04 Liquid delivery system
SG11201808788PA SG11201808788PA (en) 2016-04-04 2017-04-04 Liquid delivery system

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10202012083YA SG10202012083YA (en) 2016-04-04 2017-04-04 Liquid delivery system

Country Status (7)

Country Link
US (4) US11158521B2 (en)
JP (2) JP2019518175A (en)
KR (1) KR20180136468A (en)
CN (1) CN109564885A (en)
MY (1) MY194459A (en)
SG (2) SG10202012083YA (en)
WO (1) WO2017176815A1 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10202012083YA (en) 2016-04-04 2021-01-28 Ichor Systems Inc Liquid delivery system
CN111587333B (en) * 2018-02-23 2022-10-21 日本皮拉工业株式会社 Mounting structure for mounting sealing gasket to block
JP6905948B2 (en) * 2018-03-13 2021-07-21 日本ピラー工業株式会社 Gasket mounting structure on the block and gasket
JP6847888B2 (en) 2018-03-28 2021-03-24 日本ピラー工業株式会社 Gasket mounting structure
JP6858155B2 (en) * 2018-03-30 2021-04-14 日本ピラー工業株式会社 Flow path joint structure
US20210054932A1 (en) 2018-03-30 2021-02-25 Nippon Pillar Packing Co., Ltd. Gasket and flow passage connector structure
WO2020214616A1 (en) * 2019-04-15 2020-10-22 Lam Research Corporation Modular-component system for gas delivery
JP7396933B2 (en) 2020-03-03 2023-12-12 日本ピラー工業株式会社 flow path unit
JP1697127S (en) 2020-12-28 2021-10-18
JP1701103S (en) 2020-12-28 2021-11-29
JP1716682S (en) 2020-12-28 2022-06-06 Fluid block
JP1701019S (en) 2020-12-28 2021-11-29
JP1697125S (en) 2020-12-28 2021-10-18
JP1697126S (en) 2020-12-28 2021-10-18
JP1701102S (en) 2020-12-28 2021-11-29
CN113390275B (en) * 2021-05-20 2022-12-16 延安家安能源科技有限公司 Tube-fin heat exchanger
RU2769077C1 (en) * 2021-06-11 2022-03-28 Компания Домидо Лимитед Self-centering insert sealing element
US20230162993A1 (en) * 2021-11-24 2023-05-25 Ichor Systems, Inc. Fluid delivery system

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2046155A (en) * 1933-02-15 1936-06-30 Fred C Fantz Return bend
JPH07504481A (en) * 1992-03-12 1995-05-18 ベクター・インターナショナルリミテッド Seal rings and joints
CA2127957A1 (en) 1993-09-29 1995-03-30 Gerald A. Babuder Clamped flange fitting and assembly
US5839765A (en) * 1996-11-01 1998-11-24 Cooper Cameron Corporation Metal seal ring for tubular joint
JP3965512B2 (en) * 1998-03-31 2007-08-29 株式会社フジキン Gasket retainer used in fluid coupling and fluid coupling
WO1999064771A1 (en) * 1998-06-12 1999-12-16 Hollingshead J Gregory Unified modular chemical delivery blocks
JP4200245B2 (en) * 1998-11-11 2008-12-24 株式会社フジキン Fluid coupling
JP4156184B2 (en) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー Integrated gas control device
US6450507B2 (en) * 2001-02-01 2002-09-17 Abb Vetco Gray Inc. Water ingress seal for tapered seals
JP2003322127A (en) * 2002-04-26 2003-11-14 Fujikin Inc Fluid coupling
US6907904B2 (en) * 2003-03-03 2005-06-21 Redwood Microsystems, Inc. Fluid delivery system and mounting panel therefor
US20050242519A1 (en) * 2004-04-29 2005-11-03 Koleilat Bashir M Wedge seal
US20060011246A1 (en) * 2004-07-09 2006-01-19 Leys John A Fluid flow control system and method
JP2006084002A (en) * 2004-09-17 2006-03-30 Ckd Corp Channel block
JP4465254B2 (en) * 2004-11-05 2010-05-19 日本ピラー工業株式会社 Connection structure between integrated panel and fluidic device
TW200613670A (en) * 2004-09-22 2006-05-01 Nippon Pillar Packing Connection structure for integration panel and fluid device
US7581764B2 (en) * 2004-11-30 2009-09-01 Ckd Corporation Connection seal structure for fluidic device
JP4644477B2 (en) 2004-11-30 2011-03-02 日本ピラー工業株式会社 Gasket for fluid
JP4653551B2 (en) 2005-04-28 2011-03-16 シーケーディ株式会社 Chemical valve mounting method
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP4393472B2 (en) * 2006-04-26 2010-01-06 日本ピラー工業株式会社 Connection structure between fluid devices
KR101386845B1 (en) * 2006-07-14 2014-04-17 엔테그리스, 아이엔씨. Valve manifold assembly
JP5183935B2 (en) * 2007-02-26 2013-04-17 Ｃｋｄ株式会社 Manufacturing method of flow path block
US7798388B2 (en) * 2007-05-31 2010-09-21 Applied Materials, Inc. Method of diffusion bonding a fluid flow apparatus
JP5127304B2 (en) * 2007-05-31 2013-01-23 株式会社フジキン Fluid control device
WO2009059326A2 (en) 2007-11-02 2009-05-07 Entegris, Inc. Integral face seal
CN102804335B (en) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 Limit velocity and/or high temperature fluid send matrix
US8336573B2 (en) * 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
NO332742B1 (en) * 2010-09-22 2013-01-02 Vetco Gray Scandinavia As pipe couplings
US20150176744A1 (en) * 2013-12-20 2015-06-25 Onesubsea Ip Uk Limited Gasket
JP5883907B1 (en) 2014-09-30 2016-03-15 日本ピラー工業株式会社 Resin pipe fittings
US10704712B1 (en) * 2015-12-17 2020-07-07 Cameron International Corporation External pressure CX gasket
SG10202012083YA (en) 2016-04-04 2021-01-28 Ichor Systems Inc Liquid delivery system
JP6905948B2 (en) 2018-03-13 2021-07-21 日本ピラー工業株式会社 Gasket mounting structure on the block and gasket
JP6847888B2 (en) 2018-03-28 2021-03-24 日本ピラー工業株式会社 Gasket mounting structure

Also Published As

Publication number Publication date
US11158522B2 (en) 2021-10-26
MY194459A (en) 2022-11-30
US20220384217A1 (en) 2022-12-01
CN109564885A (en) 2019-04-02
US20210193487A1 (en) 2021-06-24
SG10202012083YA (en) 2021-01-28
WO2017176815A1 (en) 2017-10-12
JP2022046791A (en) 2022-03-23
US11158521B2 (en) 2021-10-26
US20210159093A1 (en) 2021-05-27
KR20180136468A (en) 2018-12-24
JP2019518175A (en) 2019-06-27
US20220028705A1 (en) 2022-01-27

Similar Documents

Publication Publication Date Title
SG11201808788PA (en) Liquid delivery system
SG11202000314YA (en) System to control swab off while running a packer device
SG11201811527VA (en) Horizontal interface for fluid supply cartridge having digital fluid level sensor
SG11201910027YA (en) Bispecific antibody against ox40 and ctla-4
SG11201803897QA (en) Pressure control device, dispenser comprising said pressure control device and method of manufacturing
SG11201811342RA (en) Cartridge assembly
SG11201407669QA (en) Methods for improving safety of blood-brain barrier transport
SG11201908787WA (en) Novel bispecific antigen binding molecules capable of specific binding to cd40 and to fap
SG11201909955XA (en) Formulations of anti-lag3 antibodies and co-formulations of anti-lag3 antibodies and anti-pd-1 antibodies
SG11201803983UA (en) Transformable tagging compositions, methods, and processes incorporating same
SG11201901020RA (en) Anti-siglec-7 antibodies for the treatment of cancer
SG11201809016QA (en) Selective interfacial mitigation of graphene defects
SG11201900501RA (en) Cannabis composition
SG11201907364WA (en) Anti-tryptase antibodies, compositions thereof, and uses thereof
SG11201810168UA (en) Curtain wall
SG11201907216WA (en) Adjustable flow nozzle system
SG11201407784UA (en) Engineered botulinum neurotoxin
SG11201807881VA (en) Compositions and methods for making antibodies based on use of an expression-enhancing locus
SG11201908784TA (en) Improved antigen binding receptor formats
SG11202000333UA (en) Bicyclic ketone compounds and methods of use thereof
SG11201807885PA (en) Compositions and methods for making antibodies based on use of expression-enhancing loci
SG11201407641SA (en) Shunt tube connection and distribution assembly and method
SG11201806363RA (en) Fitting having tabbed retainer and observation apertures
SG11201807194SA (en) Apparatus for dispersing particles in a fluid and method
SG11201807382RA (en) A single- or multiple component composition for producing a hydrogel