SG11201808788PA - Liquid delivery system - Google Patents

Liquid delivery system

Info

Publication number
SG11201808788PA
SG11201808788PA SG11201808788PA SG11201808788PA SG11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA SG 11201808788P A SG11201808788P A SG 11201808788PA
Authority
SG
Singapore
Prior art keywords
laurelview
international
california
fremont
fluid
Prior art date
Application number
SG11201808788PA
Other languages
English (en)
Inventor
Chris Melcer
Philip Ryan Barros
Haruyuki Kubota
Randolph Treur
Todd Cushman
Greg Patrick Mulligan
Original Assignee
Ichor Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ichor Systems Inc filed Critical Ichor Systems Inc
Publication of SG11201808788PA publication Critical patent/SG11201808788PA/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L43/00—Bends; Siphons
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Measuring Volume Flow (AREA)
  • Medicinal Preparation (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Gasket Seals (AREA)
SG11201808788PA 2016-04-04 2017-04-04 Liquid delivery system SG11201808788PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662318202P 2016-04-04 2016-04-04
PCT/US2017/026022 WO2017176815A1 (en) 2016-04-04 2017-04-04 Liquid delivery system

Publications (1)

Publication Number Publication Date
SG11201808788PA true SG11201808788PA (en) 2018-11-29

Family

ID=60000702

Family Applications (2)

Application Number Title Priority Date Filing Date
SG11201808788PA SG11201808788PA (en) 2016-04-04 2017-04-04 Liquid delivery system
SG10202012083YA SG10202012083YA (en) 2016-04-04 2017-04-04 Liquid delivery system

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10202012083YA SG10202012083YA (en) 2016-04-04 2017-04-04 Liquid delivery system

Country Status (7)

Country Link
US (5) US11158521B2 (enExample)
JP (3) JP2019518175A (enExample)
KR (1) KR20180136468A (enExample)
CN (1) CN109564885A (enExample)
MY (2) MY194459A (enExample)
SG (2) SG11201808788PA (enExample)
WO (1) WO2017176815A1 (enExample)

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EP4154305A4 (en) * 2020-05-19 2024-06-05 Ichor Systems, Inc. SEAL INSERTION TOOL FOR A FLUID DISPENSING MODULE AND METHOD FOR INSTALLING A SEAL IN A FLUID DISPENSING MODULE
JP1701019S (enExample) 2020-12-28 2021-11-29
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US12183597B2 (en) 2021-11-24 2024-12-31 Ichor Systems, Inc. Fluid delivery system
TWI906923B (zh) * 2023-06-30 2025-12-01 美商艾克爾系統公司 流體輸送系統
US12500094B2 (en) * 2023-09-01 2025-12-16 Applied Materials, Inc. Modular fluid delivery assembly
JP7543585B1 (ja) * 2024-03-13 2024-09-02 イハラサイエンス株式会社 ガスケット、及び、継手構造

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Also Published As

Publication number Publication date
CN109564885A (zh) 2019-04-02
JP2025090697A (ja) 2025-06-17
US11158521B2 (en) 2021-10-26
US11990354B2 (en) 2024-05-21
US11158522B2 (en) 2021-10-26
US20220384217A1 (en) 2022-12-01
US12062553B2 (en) 2024-08-13
SG10202012083YA (en) 2021-01-28
MY194459A (en) 2022-11-30
JP2022046791A (ja) 2022-03-23
WO2017176815A1 (en) 2017-10-12
JP7671258B2 (ja) 2025-05-01
US20220028705A1 (en) 2022-01-27
US20210159093A1 (en) 2021-05-27
KR20180136468A (ko) 2018-12-24
US20240274444A1 (en) 2024-08-15
US20210193487A1 (en) 2021-06-24
JP2019518175A (ja) 2019-06-27
MY208092A (en) 2025-04-15

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