JP2019518175A - 液体送達システム - Google Patents

液体送達システム Download PDF

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Publication number
JP2019518175A
JP2019518175A JP2018552053A JP2018552053A JP2019518175A JP 2019518175 A JP2019518175 A JP 2019518175A JP 2018552053 A JP2018552053 A JP 2018552053A JP 2018552053 A JP2018552053 A JP 2018552053A JP 2019518175 A JP2019518175 A JP 2019518175A
Authority
JP
Japan
Prior art keywords
substrate
port
liquid
delivery system
seal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018552053A
Other languages
English (en)
Japanese (ja)
Inventor
クリス・メルセル
フィリップ・リャン・バロス
ハルユキ・クボタ
ランドルフ・トゥルール
トッド・クシュマン
グレッグ・パトリック・マリガン
Original Assignee
アイコール・システムズ・インク
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アイコール・システムズ・インク filed Critical アイコール・システムズ・インク
Publication of JP2019518175A publication Critical patent/JP2019518175A/ja
Priority to JP2022004686A priority Critical patent/JP7671258B2/ja
Priority to JP2025037238A priority patent/JP2025090697A/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L43/00—Bends; Siphons
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Measuring Volume Flow (AREA)
  • Medicinal Preparation (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Gasket Seals (AREA)
JP2018552053A 2016-04-04 2017-04-04 液体送達システム Pending JP2019518175A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022004686A JP7671258B2 (ja) 2016-04-04 2022-01-14 液体送達システム
JP2025037238A JP2025090697A (ja) 2016-04-04 2025-03-10 液体送達システム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201662318202P 2016-04-04 2016-04-04
PCT/US2017/026022 WO2017176815A1 (en) 2016-04-04 2017-04-04 Liquid delivery system

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2021004646A Division JP7128306B2 (ja) 2021-01-15 2021-01-15 液体送達システム
JP2022004686A Division JP7671258B2 (ja) 2016-04-04 2022-01-14 液体送達システム

Publications (1)

Publication Number Publication Date
JP2019518175A true JP2019518175A (ja) 2019-06-27

Family

ID=60000702

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2018552053A Pending JP2019518175A (ja) 2016-04-04 2017-04-04 液体送達システム
JP2022004686A Active JP7671258B2 (ja) 2016-04-04 2022-01-14 液体送達システム
JP2025037238A Pending JP2025090697A (ja) 2016-04-04 2025-03-10 液体送達システム

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2022004686A Active JP7671258B2 (ja) 2016-04-04 2022-01-14 液体送達システム
JP2025037238A Pending JP2025090697A (ja) 2016-04-04 2025-03-10 液体送達システム

Country Status (7)

Country Link
US (5) US11158521B2 (enExample)
JP (3) JP2019518175A (enExample)
KR (1) KR20180136468A (enExample)
CN (1) CN109564885A (enExample)
MY (2) MY194459A (enExample)
SG (2) SG11201808788PA (enExample)
WO (1) WO2017176815A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021176854A1 (ja) 2020-03-03 2021-09-10 日本ピラー工業株式会社 流路ユニット

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY194459A (en) 2016-04-04 2022-11-30 Ichor Systems Inc Fluid delivery system
KR102588410B1 (ko) * 2018-02-23 2023-10-13 니폰 필라고교 가부시키가이샤 블록에의 개스킷의 장착 구조
JP6905948B2 (ja) * 2018-03-13 2021-07-21 日本ピラー工業株式会社 ブロックへのガスケットの装着構造およびガスケット
JP6847888B2 (ja) * 2018-03-28 2021-03-24 日本ピラー工業株式会社 ガスケットの装着構造
JP6858155B2 (ja) * 2018-03-30 2021-04-14 日本ピラー工業株式会社 流路継手構造
CN111954773B (zh) 2018-03-30 2022-12-30 日本皮拉工业株式会社 垫圈及流路接头构造
KR102798978B1 (ko) * 2019-04-15 2025-04-21 램 리써치 코포레이션 가스 전달을 위한 모듈형 컴포넌트 시스템
US12589474B2 (en) 2020-05-12 2026-03-31 Ichor Systems, Inc. Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
EP4154305A4 (en) * 2020-05-19 2024-06-05 Ichor Systems, Inc. SEAL INSERTION TOOL FOR A FLUID DISPENSING MODULE AND METHOD FOR INSTALLING A SEAL IN A FLUID DISPENSING MODULE
JP1701019S (enExample) 2020-12-28 2021-11-29
JP1697127S (enExample) 2020-12-28 2021-10-18
JP1697126S (enExample) 2020-12-28 2021-10-18
JP1701102S (enExample) 2020-12-28 2021-11-29
JP1697125S (enExample) 2020-12-28 2021-10-18
JP1701103S (enExample) 2020-12-28 2021-11-29
JP1716682S (ja) 2020-12-28 2022-06-06 流体用ブロック
GB202106015D0 (en) * 2021-04-27 2021-06-09 Sub Drill Supply Ltd Gasket apparatus and method of forming
CN113390275B (zh) * 2021-05-20 2022-12-16 延安家安能源科技有限公司 一种管翅式换热器
RU2769077C1 (ru) * 2021-06-11 2022-03-28 Компания Домидо Лимитед Самоцентрирующийся вставной уплотнительный элемент
US12183597B2 (en) 2021-11-24 2024-12-31 Ichor Systems, Inc. Fluid delivery system
TWI906923B (zh) * 2023-06-30 2025-12-01 美商艾克爾系統公司 流體輸送系統
US12500094B2 (en) * 2023-09-01 2025-12-16 Applied Materials, Inc. Modular fluid delivery assembly
JP7543585B1 (ja) * 2024-03-13 2024-09-02 イハラサイエンス株式会社 ガスケット、及び、継手構造

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048299A (ja) * 2000-08-01 2002-02-15 Benkan Corp 集積化ガス制御装置

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2046155A (en) * 1933-02-15 1936-06-30 Fred C Fantz Return bend
JPS5947593A (ja) 1982-09-09 1984-03-17 株式会社技研製作所 マニホ−ルドの製造法
EP0630457B1 (en) 1992-03-12 1997-08-06 Vector International Limited Seal ring and joint
CA2127957A1 (en) 1993-09-29 1995-03-30 Gerald A. Babuder Clamped flange fitting and assembly
JPH09264440A (ja) 1996-03-28 1997-10-07 Borusuku:Kk 方向切換バルブ装置
US5839765A (en) * 1996-11-01 1998-11-24 Cooper Cameron Corporation Metal seal ring for tubular joint
JP3965512B2 (ja) 1998-03-31 2007-08-29 株式会社フジキン 流体継手および流体継手において使用されるガスケット保持用リテーナ
DE69906067T2 (de) * 1998-06-12 2004-03-04 Hollingshead, J. Gregory, Austin Modulare blöcke zur zufuhr von chemikalien
JP4200245B2 (ja) 1998-11-11 2008-12-24 株式会社フジキン 流体継手
US6450507B2 (en) * 2001-02-01 2002-09-17 Abb Vetco Gray Inc. Water ingress seal for tapered seals
JP2005326005A (ja) 2001-02-02 2005-11-24 Mitsubishi Heavy Ind Ltd ロジックプレート
JP2003322127A (ja) 2002-04-26 2003-11-14 Fujikin Inc 流体継手
US6907904B2 (en) * 2003-03-03 2005-06-21 Redwood Microsystems, Inc. Fluid delivery system and mounting panel therefor
JP3780277B2 (ja) 2003-11-06 2006-05-31 シーケーディ株式会社 流体用機器の接続部シール構造
JP2007139196A (ja) 2004-01-27 2007-06-07 Ckd Corp 流路ブロック
JP4312088B2 (ja) 2004-01-27 2009-08-12 シーケーディ株式会社 流路ブロック
US20050242519A1 (en) 2004-04-29 2005-11-03 Koleilat Bashir M Wedge seal
US20060011246A1 (en) 2004-07-09 2006-01-19 Leys John A Fluid flow control system and method
JP2006022926A (ja) 2004-07-09 2006-01-26 Ckd Corp 集積弁用下部ブロック
JP2006084002A (ja) 2004-09-17 2006-03-30 Ckd Corp 流路ブロック
JP4465254B2 (ja) * 2004-11-05 2010-05-19 日本ピラー工業株式会社 集積パネルと流体デバイスとの接続構造
TW200613670A (en) * 2004-09-22 2006-05-01 Nippon Pillar Packing Connection structure for integration panel and fluid device
JP4644477B2 (ja) 2004-11-30 2011-03-02 日本ピラー工業株式会社 流体用ガスケット
WO2006059362A1 (ja) 2004-11-30 2006-06-08 Ckd Corporation 流体用機器の接続部シール構造
JP4653551B2 (ja) 2005-04-28 2011-03-16 シーケーディ株式会社 薬液弁取付方法
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP4437553B2 (ja) 2005-06-14 2010-03-24 シーケーディ株式会社 マニホールドブロック及びそれを用いたバルブユニット
JP4393472B2 (ja) * 2006-04-26 2010-01-06 日本ピラー工業株式会社 流体デバイスどうしの接続構造
AT506019B1 (de) * 2006-07-14 2011-12-15 Entegris Inc Ventilträgerbaugruppe
JP4856494B2 (ja) 2006-08-08 2012-01-18 株式会社陽和 平板流路及びその製造方法
JP5049078B2 (ja) 2006-09-29 2012-10-17 ニチアス株式会社 多層チューブ
JP5183935B2 (ja) * 2007-02-26 2013-04-17 Ｃｋｄ株式会社 流路ブロックの製造方法
JP2008210982A (ja) 2007-02-26 2008-09-11 Tokyo Electron Ltd 半導体製造装置のガス供給システム及びガス供給集積ユニット
US7798388B2 (en) * 2007-05-31 2010-09-21 Applied Materials, Inc. Method of diffusion bonding a fluid flow apparatus
JP5127304B2 (ja) * 2007-05-31 2013-01-23 株式会社フジキン 流体制御装置
JP2011503449A (ja) 2007-11-02 2011-01-27 インテグリス・インコーポレーテッド Ｏリングが不要なシール連結部
JP4968202B2 (ja) 2008-07-10 2012-07-04 株式会社デンソー 射出成形金型のマニホールド装置および射出成形方法
JP4995853B2 (ja) 2009-03-04 2012-08-08 シーケーディ株式会社 マニホールドバルブ
CN102804335B (zh) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
US8336573B2 (en) 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
NO332742B1 (no) 2010-09-22 2013-01-02 Vetco Gray Scandinavia As Rorkobling
JP5277278B2 (ja) 2011-03-29 2013-08-28 株式会社フジキン 流体制御装置用継手
JP2015078928A (ja) 2013-10-17 2015-04-23 キヤノン株式会社 流路デバイスおよびその製造方法
US20150176744A1 (en) 2013-12-20 2015-06-25 Onesubsea Ip Uk Limited Gasket
JP5883907B1 (ja) 2014-09-30 2016-03-15 日本ピラー工業株式会社 樹脂製管継手
JP5923578B2 (ja) 2014-09-30 2016-05-24 日本ピラー工業株式会社 樹脂製管継手
US10704712B1 (en) * 2015-12-17 2020-07-07 Cameron International Corporation External pressure CX gasket
MY194459A (en) 2016-04-04 2022-11-30 Ichor Systems Inc Fluid delivery system
JP6905948B2 (ja) 2018-03-13 2021-07-21 日本ピラー工業株式会社 ブロックへのガスケットの装着構造およびガスケット
JP6847888B2 (ja) 2018-03-28 2021-03-24 日本ピラー工業株式会社 ガスケットの装着構造

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048299A (ja) * 2000-08-01 2002-02-15 Benkan Corp 集積化ガス制御装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021176854A1 (ja) 2020-03-03 2021-09-10 日本ピラー工業株式会社 流路ユニット
KR20220143018A (ko) 2020-03-03 2022-10-24 니폰 필라고교 가부시키가이샤 유로 유닛
US12158208B2 (en) 2020-03-03 2024-12-03 Nippon Pillar Packing Co., Ltd. Flow passage unit

Also Published As

Publication number Publication date
CN109564885A (zh) 2019-04-02
SG11201808788PA (en) 2018-11-29
JP2025090697A (ja) 2025-06-17
US11158521B2 (en) 2021-10-26
US11990354B2 (en) 2024-05-21
US11158522B2 (en) 2021-10-26
US20220384217A1 (en) 2022-12-01
US12062553B2 (en) 2024-08-13
SG10202012083YA (en) 2021-01-28
MY194459A (en) 2022-11-30
JP2022046791A (ja) 2022-03-23
WO2017176815A1 (en) 2017-10-12
JP7671258B2 (ja) 2025-05-01
US20220028705A1 (en) 2022-01-27
US20210159093A1 (en) 2021-05-27
KR20180136468A (ko) 2018-12-24
US20240274444A1 (en) 2024-08-15
US20210193487A1 (en) 2021-06-24
MY208092A (en) 2025-04-15

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