CN109564885A - 液体输送系统 - Google Patents

液体输送系统 Download PDF

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Publication number
CN109564885A
CN109564885A CN201780032906.3A CN201780032906A CN109564885A CN 109564885 A CN109564885 A CN 109564885A CN 201780032906 A CN201780032906 A CN 201780032906A CN 109564885 A CN109564885 A CN 109564885A
Authority
CN
China
Prior art keywords
substrate
liquid
delivery system
fluid
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780032906.3A
Other languages
English (en)
Chinese (zh)
Inventor
C·梅尔采尔
P·R·巴罗斯
H·久保田
R·特勒
T·库什曼
G·P·马利根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ichor Systems Inc
Original Assignee
Ichor Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ichor Systems Inc filed Critical Ichor Systems Inc
Publication of CN109564885A publication Critical patent/CN109564885A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
    • F16J15/106—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure homogeneous
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L43/00—Bends; Siphons
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Pipeline Systems (AREA)
  • Measuring Volume Flow (AREA)
  • Medicinal Preparation (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Gasket Seals (AREA)
CN201780032906.3A 2016-04-04 2017-04-04 液体输送系统 Pending CN109564885A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662318202P 2016-04-04 2016-04-04
US62/318,202 2016-04-04
PCT/US2017/026022 WO2017176815A1 (en) 2016-04-04 2017-04-04 Liquid delivery system

Publications (1)

Publication Number Publication Date
CN109564885A true CN109564885A (zh) 2019-04-02

Family

ID=60000702

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780032906.3A Pending CN109564885A (zh) 2016-04-04 2017-04-04 液体输送系统

Country Status (7)

Country Link
US (5) US11158521B2 (enExample)
JP (3) JP2019518175A (enExample)
KR (1) KR20180136468A (enExample)
CN (1) CN109564885A (enExample)
MY (2) MY194459A (enExample)
SG (2) SG11201808788PA (enExample)
WO (1) WO2017176815A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113390275A (zh) * 2021-05-20 2021-09-14 司志伟 一种管翅式换热器
TWI900569B (zh) * 2020-05-19 2025-10-11 美商艾克爾系統公司 將密封安裝入流體輸送模組的方法
US12589474B2 (en) 2020-05-12 2026-03-31 Ichor Systems, Inc. Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module

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MY194459A (en) 2016-04-04 2022-11-30 Ichor Systems Inc Fluid delivery system
KR102588410B1 (ko) * 2018-02-23 2023-10-13 니폰 필라고교 가부시키가이샤 블록에의 개스킷의 장착 구조
JP6905948B2 (ja) * 2018-03-13 2021-07-21 日本ピラー工業株式会社 ブロックへのガスケットの装着構造およびガスケット
JP6847888B2 (ja) * 2018-03-28 2021-03-24 日本ピラー工業株式会社 ガスケットの装着構造
JP6858155B2 (ja) * 2018-03-30 2021-04-14 日本ピラー工業株式会社 流路継手構造
CN111954773B (zh) 2018-03-30 2022-12-30 日本皮拉工业株式会社 垫圈及流路接头构造
KR102798978B1 (ko) * 2019-04-15 2025-04-21 램 리써치 코포레이션 가스 전달을 위한 모듈형 컴포넌트 시스템
JP7396933B2 (ja) 2020-03-03 2023-12-12 日本ピラー工業株式会社 流路ユニット
JP1701019S (enExample) 2020-12-28 2021-11-29
JP1697127S (enExample) 2020-12-28 2021-10-18
JP1697126S (enExample) 2020-12-28 2021-10-18
JP1701102S (enExample) 2020-12-28 2021-11-29
JP1697125S (enExample) 2020-12-28 2021-10-18
JP1701103S (enExample) 2020-12-28 2021-11-29
JP1716682S (ja) 2020-12-28 2022-06-06 流体用ブロック
GB202106015D0 (en) * 2021-04-27 2021-06-09 Sub Drill Supply Ltd Gasket apparatus and method of forming
RU2769077C1 (ru) * 2021-06-11 2022-03-28 Компания Домидо Лимитед Самоцентрирующийся вставной уплотнительный элемент
US12183597B2 (en) 2021-11-24 2024-12-31 Ichor Systems, Inc. Fluid delivery system
TWI906923B (zh) * 2023-06-30 2025-12-01 美商艾克爾系統公司 流體輸送系統
US12500094B2 (en) * 2023-09-01 2025-12-16 Applied Materials, Inc. Modular fluid delivery assembly
JP7543585B1 (ja) * 2024-03-13 2024-09-02 イハラサイエンス株式会社 ガスケット、及び、継手構造

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US6546961B2 (en) * 2000-08-01 2003-04-15 Kitz Sct Corporation Integrated gas control device
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12589474B2 (en) 2020-05-12 2026-03-31 Ichor Systems, Inc. Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid delivery module
TWI900569B (zh) * 2020-05-19 2025-10-11 美商艾克爾系統公司 將密封安裝入流體輸送模組的方法
CN113390275A (zh) * 2021-05-20 2021-09-14 司志伟 一种管翅式换热器

Also Published As

Publication number Publication date
SG11201808788PA (en) 2018-11-29
JP2025090697A (ja) 2025-06-17
US11158521B2 (en) 2021-10-26
US11990354B2 (en) 2024-05-21
US11158522B2 (en) 2021-10-26
US20220384217A1 (en) 2022-12-01
US12062553B2 (en) 2024-08-13
SG10202012083YA (en) 2021-01-28
MY194459A (en) 2022-11-30
JP2022046791A (ja) 2022-03-23
WO2017176815A1 (en) 2017-10-12
JP7671258B2 (ja) 2025-05-01
US20220028705A1 (en) 2022-01-27
US20210159093A1 (en) 2021-05-27
KR20180136468A (ko) 2018-12-24
US20240274444A1 (en) 2024-08-15
US20210193487A1 (en) 2021-06-24
JP2019518175A (ja) 2019-06-27
MY208092A (en) 2025-04-15

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