SG11201907543XA - Joint and fluid control device - Google Patents

Joint and fluid control device

Info

Publication number
SG11201907543XA
SG11201907543XA SG11201907543XA SG11201907543XA SG11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA
Authority
SG
Singapore
Prior art keywords
block
joint
control device
fluid control
passage
Prior art date
Application number
SG11201907543XA
Inventor
Yusuke Shibata
Kazuhiro Fujine
Hidehiro Doya
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11201907543XA publication Critical patent/SG11201907543XA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F16L41/025—Branch units, e.g. made in one piece, welded, riveted with rectangular cross-section
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/105—Three-way check or safety valves with two or more closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F16L41/03—Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L47/00—Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics
    • F16L47/26—Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics for branching pipes; for joining pipes to walls; Adaptors therefor
    • F16L47/28—Joining pipes to walls or to other pipes, the axis of the joined pipe being perpendicular to the wall or to the axis of the other pipe
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Abstract

JOINT AND FLUID CONTROL DEVICE The purpose of the present invention is to provide a joint and a fluid control device that can be easily changed in size when modifying a gas line or the like. This joint includes: a first block , a second block 22, and a single pipe section 23 connecting the first block 21 and the second block 22, and has a first gas passage (a first passage 27, a second passage 31) and a second gas passage (a third passage 32). The first gas passage is formed so that a first inlet part 27A open at a first surface 24 of the first block 21, the single pipe section 23, and a second outlet part 31B open at a fourth surface 28 of the second block 22 communicate with each other; the second gas passage is formed so that a third inlet part 32A open at the fourth surface 28 of the second block 22 and a third outlet part 32B communicate with each other; and the second outlet part 31B is disposed between the third inlet part 32A and the third outlet part 32B. [FIG 2] 15
SG11201907543XA 2017-03-15 2018-03-06 Joint and fluid control device SG11201907543XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017050482 2017-03-15
PCT/JP2018/008452 WO2018168559A1 (en) 2017-03-15 2018-03-06 Joint and fluid control device

Publications (1)

Publication Number Publication Date
SG11201907543XA true SG11201907543XA (en) 2019-09-27

Family

ID=63522128

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201907543XA SG11201907543XA (en) 2017-03-15 2018-03-06 Joint and fluid control device

Country Status (8)

Country Link
US (1) US11493162B2 (en)
JP (1) JP7061808B2 (en)
KR (1) KR20190116372A (en)
CN (1) CN110234924B (en)
IL (1) IL268542A (en)
SG (1) SG11201907543XA (en)
TW (1) TWI669460B (en)
WO (1) WO2018168559A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190075100A (en) * 2016-10-24 2019-06-28 가부시키가이샤 후지킨 FLUID CONTROL APPARATUS AND METHOD OF MANUFACTURING PRODUCT USING THE SAME
JP2022529263A (en) * 2019-04-15 2022-06-20 ラム リサーチ コーポレーション Modular component system for gas delivery
JP7372664B2 (en) 2019-09-30 2023-11-01 株式会社フジキン Fitting block assembly and fluid control device
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
CN114183615A (en) * 2021-12-01 2022-03-15 江苏天毅冷镦股份有限公司 Cold heading brazing combined type multi-way metal joint and manufacturing process thereof

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US5178191A (en) * 1990-09-05 1993-01-12 Newmatic Controls Inc. Modular pneumatic control systems
JP2922453B2 (en) * 1996-01-05 1999-07-26 シーケーディ株式会社 Gas supply integrated unit
JP4022696B2 (en) * 1996-11-20 2007-12-19 忠弘 大見 Circuit breaker
JP3737869B2 (en) * 1997-05-13 2006-01-25 シーケーディ株式会社 Process gas supply unit
US6152175A (en) * 1997-06-06 2000-11-28 Ckd Corporation Process gas supply unit
JP3766760B2 (en) * 1999-02-19 2006-04-19 シーケーディ株式会社 Valve unit
US6125887A (en) * 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
JP2002349797A (en) 2001-05-23 2002-12-04 Fujikin Inc Fluid control device
WO2003001093A1 (en) * 2001-06-21 2003-01-03 Asahi Organic Chemicals Industry Co., Ltd. Manifold valve
EP1543544A2 (en) 2002-08-27 2005-06-22 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
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US7048008B2 (en) * 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2006083959A (en) * 2004-09-16 2006-03-30 Fujikin Inc Joint member with sensor
JP4780555B2 (en) * 2005-09-12 2011-09-28 株式会社フジキン Fluid control device
JP4818835B2 (en) * 2006-07-04 2011-11-16 東京エレクトロン株式会社 Gas supply unit
JP2008210982A (en) * 2007-02-26 2008-09-11 Tokyo Electron Ltd Gas feeding system and gas feeding integrative unit of semiconductor manufacturing apparatus
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
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JP6147113B2 (en) * 2013-06-27 2017-06-14 株式会社フジキン Fitting for fluid control device and fluid control device
TWI650499B (en) * 2013-12-05 2019-02-11 Ｃｋｄ股份有限公司 Flow path block and fluid supply control device
WO2018180373A1 (en) * 2017-03-29 2018-10-04 株式会社フジキン Conversion joint, integrated fluid supply device having conversion joint, and fluid part mounting method

Also Published As

Publication number Publication date
CN110234924A (en) 2019-09-13
TWI669460B (en) 2019-08-21
KR20190116372A (en) 2019-10-14
US20190390811A1 (en) 2019-12-26
JPWO2018168559A1 (en) 2020-01-16
IL268542A (en) 2019-10-31
TW201835475A (en) 2018-10-01
US11493162B2 (en) 2022-11-08
CN110234924B (en) 2021-06-25
JP7061808B2 (en) 2022-05-02
WO2018168559A1 (en) 2018-09-20

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