JP2922453B2 - Gas supply integrated unit - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas supply integrated unit used in an industrial manufacturing apparatus such as a semiconductor manufacturing apparatus, and more particularly to a gas supply integrated unit in which components are compactly integrated.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor manufacturing process, a corrosive gas has been used for etching of a photoresist process or the like. Photoresist processing (photoresist coating, exposure,
Development and etching) are repeated a plurality of times in the semiconductor manufacturing process while changing the type of corrosive gas. In an actual semiconductor manufacturing process, a gas supply device that supplies a plurality of types of corrosive gases as needed is used. I have. The gas supply device for supplying this gas includes a mass flow controller for accurately measuring the flow rate, and an on-off valve and a purge valve provided before and after the mass flow controller to prevent supply gas such as corrosive gas from remaining in the mass flow controller. A gas supply integrated unit including a valve and the like is connected and configured.

FIG. 7 is a perspective view showing a conventional gas supply integrated unit, and FIG. 8 is a pneumatic circuit diagram showing a flow path of a gas supply apparatus having the gas supply integrated unit connected thereto. is there. The gas supply device 51 shown in FIG. 8 is connected to a supply gas pipeline 52 communicating with a vacuum chamber (not shown) where etching is performed. In one vacuum chamber, since a complicated process is etched by switching and using a plurality of types of corrosive gases, in this conventional example, seven types of corrosive gases (Fa to Fg) are stored in one vacuum chamber. Is connected to a gas supply device 51 in which seven gas supply integrated units 50 are connected in series.

As shown in FIG. 8, a gas supply integrated unit 50 constituting a gas supply device 51 includes a manual valve 55 for manually supplying or shutting off a supply gas, a regulator 56 for adjusting a gas pressure of the supply gas, A pressure gauge 57 for monitoring the pressure of the supply gas and a filter 58 for removing impurities mixed in the supply gas are connected in series, and further, in order to prevent supply gas such as corrosive gas from remaining in the mass flow controller 60, Before and after that, the inlet open / close valve 59,
An outlet opening / closing valve 61 is provided and connected in series.

[0005] A purge valve 62 for supplying nitrogen gas as a replacement gas for removing supply gases (Fa to Fg) remaining in the mass flow controller 60 is provided.
It is connected via a check valve 63 to a purge gas common flow path 72 branched from a nitrogen gas pipe 71 provided with a purge switching valve 70. Here, the reason why the check valve 63 is mounted on the pipe is to prevent supply gas such as corrosive gas from flowing into the purge gas common flow path 72. This is because when the corrosive gas flows into the purge gas common flow channel 72, the inside of the purge gas common flow channel 72 is corroded, and particles may be generated.

On the other hand, in the gas supply integrated unit 50 having such a configuration, each unit is arranged side by side as shown in FIG. 7 (only two units are shown in the figure for convenience), and a gas supply device is formed. I have. It should be noted that the gas supply integrated unit 50 of FIG.
9, the mass flow controller 60 and the purge valve 62,
Only the check valve 63 is shown. In the gas supply integrated unit 50, the inlet opening / closing valve 59 and the purge valve 62 are fixed to the upper part of the block 81 having the flow path by bolts,
The mass flow controller 60 is fixed to blocks 82 and 82 which are connected to the block 81 and also have channels formed therein. A purge block 83 is fixedly provided on the side of the block 81, and a check valve 63 is connected to a purge pipe 84 extending therefrom, and a purge gas common flow path 7 is provided.
2 are connected.

FIG. 9 shows a layout of an etching apparatus provided with four vacuum chambers. Four vacuum chambers 92A, 92B, 92C, and 92D are provided around a robot 91 installed at the center.
Further, two transfer devices 93 for supplying an unetched wafer or the like to the vacuum chambers 92A and collecting the processed wafer are provided. Here, each vacuum chamber 92A, 92B, 92C, 9
Since the gas supply device 51 is required for 2D, four gas boxes 94A, 94B, 94C, 94D provided with the gas supply device 51 are provided as shown in the figure, and each of them is provided with a vacuum chamber 92A, 92B, 92C. , 92D.

[0008]

However, the conventional gas supply integrated unit 50 having such a configuration has the following problems. First, in the above-described conventional gas supply integrated unit 50, a purge block 83 is provided to supply a purge gas to a pipe of a block 81 in which a purge valve 62 is fixedly provided. It is connected via a pipe 84. However, since the purge block 83 needs to be provided on the side of the block 81, the check valve 63 is disposed off the line where the filter 58, the purge valve 62 and the mass flow controller 60 are arranged. For this reason, the width of the gas supply integrated unit 50 is increased, and the gas supply device 51 in which a plurality of the units are arranged side by side is enlarged.

This disturbs the work or the like if it is disposed near the vacuum chambers 92A. On the other hand, if the gas supply devices are collectively disposed as gas boxes 94A as shown in FIG. Vacuum chamber 92A
The pipes 95A, 95B, 95C, and 95D up to ... have been lengthened, causing a problem that the time required for stabilizing the flow rate is long. Depending on the type of gas to be supplied, some of the gases are liquefied at room temperature. In some cases, it is necessary to keep warm. In that case,
If the pipes 95A from the gas boxes 94A to the vacuum chambers 92A are long, the entire heated pipes take up space, reduce the working space, and may not be able to maintain heat sufficiently to adversely affect etching.

Next, in the above-described conventional gas supply integrated unit 50, the joints such as the check valve 63 and the purge pipe 84 are connected by welding from the purge gas common flow path 72 to the purge block 83. I have. However, when the welding connection is performed in this manner, the gas supply integrated unit 50 itself deals with corrosive gas and the like, so that there is a problem that the welded portion is corroded and particles are generated.

In view of the above, the present invention has been made to solve the above-mentioned problems, and to provide a compact gas supply integrated unit which can be installed in a narrow floor space.
It is another object of the present invention to provide a gas supply integrated unit that prevents generation of particles due to welding.

[0012]

According to the present invention, there is provided a gas supply integrated unit comprising: a filter for removing impurities mixed in a supply gas; an on-off valve for adjusting a flow of the supply gas flowing through a flow path; A mass flow controller, a purge valve for supplying a purge gas for removing a supply gas remaining in the mass flow controller, and a check valve for preventing a supply gas from flowing into a purge gas supply side. A flow path through which the supply gas and the purge gas flow is formed, and an attachment portion for fixing the filter, the on-off valve, the mass flow controller, the purge valve, and the check valve on the flow path is provided. It is characterized by having a fixed block provided.

Further, the gas supply integrated unit of the present invention comprises:
The fixed block, the filter, the on-off valve,
It is desirable that attachment parts for fixing the purge valve, the check valve, and the mass flow controller be provided in the same direction. Further, in the gas supply integrated unit of the present invention, the fixing block may be configured such that an attaching portion for fixing the filter, the on-off valve, the purge valve, the check valve, and the mass flow controller is fixed. It is desirable to be provided on the line.

[0014] The gas supply integrated unit of the present invention having the above-mentioned structure is characterized in that a supply gas or a purge gas is fixed to a fixing portion of the fixed block so as to be located on the flow passage formed in the fixed block and the flow passage; The flow through the on-off valve, the mass flow controller, the purge valve, and the check valve allows the unit itself to be compact, and there is no need to connect piping or the like by welding, The generation of particles due to welding can be prevented. In the gas supply integrated unit of the present invention, the filter, the on-off valve, the purge valve, the check valve, and the mass flow controller are fixed to the fixed block in the same direction, so that the unit itself is compact. be able to. Further, the gas supply integrated unit of the present invention includes a filter, an on-off valve, a purge valve, a check valve,
Since the mass flow controller and the mass flow controller are fixed on the fixed block in a straight line, the unit itself can be made compact.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, an embodiment of a gas supply integrated unit according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a gas supply integrated unit of the present embodiment, and FIG. 2 is a partially sectional perspective view showing the gas supply integrated unit. The gas supply integrated unit 1 of the present embodiment changes the type of corrosive gas in the semiconductor manufacturing process in the same manner as the above-described conventional example,
It is used in a gas supply device that supplies the plurality of types of corrosive gases as needed. Therefore, the gas supply integrated unit 1 also includes a filter 2 for removing impurities mixed in the supply gas F which is a corrosive gas, a main valve 3 for shutting off the flow of the supply gas F, and a mass flow for accurately measuring the flow rate. The controller 4, a purge valve 5 for supplying a nitrogen gas (hereinafter, referred to as “purge gas”) P as a replacement gas for removing the supply gas F remaining in the mass flow controller 4, and a supply gas such as a corrosive gas A configuration is provided with a check valve 6 for preventing F from flowing into the common side of the purge gas.

A filter block 15 for fixing the filter 2 and a main valve 3 as shown in FIG.
And a first block 11 for fixing the purge valve 5;
The mass flow controller 4 and the second block 12 for fixing the check valve 6 are integrated to form a fixed block which is a feature of the gas supply integrated unit 1 of the present embodiment. Here, the first block 11 has a rectangular parallelepiped block body, is fitted with a filter block 15 and a gasket 14, and is airtightly integrated so that the supply gas F does not leak.

FIG. 3 is a sectional view taken along the line AA of FIG.
As shown in the figure, a gas flow path described later is formed in the second block 12, and female screws 13, 13... For fixing to the first block 11 by bolts are cut. Gaskets 14, 14 are fitted at the joints of the gas flow paths of the first block 11 and the second block 12 so as to be airtightly integrated so that the supply gas F and the purge gas P do not leak. .

Further, on the upper surface of the first block 11, mounting portions 11a and 11b for the main valve 3 and the purge valve 5 are formed in the longitudinal direction. On the upper surface of the second block 12,
The mounting portion 12a of the check valve 6 is formed so as to be located on a straight line with the mounting portions 11a and 11b of the first block 11,
Further, on the flange portion of the second block 12, as shown in FIG. 2, there are formed mounting portions 11a, 11b and a mounting portion 12b for fixing the mass flow controller 4 so as to be located in line with the mounting portion 12a. I have. Similarly, the filter block 15 is also provided with a mounting portion 15a for mounting the filter 2 on its upper surface.

Therefore, the filter 2, the main valve 3, the purge valve 5, the check valve 6, and the mass flow controller 4 attached to the filter block 15, the fixed block consisting of the first block 11 and the second block 12, are shown in FIG.
As shown in FIG. 2, one line is arranged on a straight line and arranged in the same direction. The filter 2, the main valve 3, the purge valve 5, the check valve 6, and the mass flow controller 4 are all mounted with bolts from above.

Next, the gas supply integrated unit 1
A filter block 15 to which each of the components is attached;
A series of flow paths are formed in the first block 11 and the second block 12. First, the filter block 15 includes a filter input flow path 17a that communicates the supply gas F from the gas supply block 16 to the input port of the filter 2,
A filter output flow path 17b communicating with the output port is formed.

The first block 11 is provided with a main valve input passage 18a for communicating the filter output passage 17b with the valve chamber of the main valve 3 formed in the mounting portion 11a. Further, a valve seat 3a of the main valve 3 is formed in the mounting portion 11a, and a mass flow valve input passage 18b communicating with a valve hole of the valve seat 3a is formed. A purge valve output flow path 18c of the purge valve 5 connected to the main valve 3 joins the mass flow valve input flow path 18b. The purge valve output flow path 18c is
b. It communicates with the valve chamber formed. Also, the first
The block 11 has a purge valve input flow path 18d which communicates with a valve hole of a valve seat 5a of the purge valve 5 formed in the valve chamber.
Are formed.

Further, the second block 12 has a mass flow valve input passage 19a and a check valve output flow which communicate with the mass flow valve input passage 18b and the purge valve input passage 18d formed in the first block 11, respectively. A path 19b is formed. In addition, this second block 12 includes FIG.
A purge gas supply block 20 for supplying the purge gas P is fixedly provided as shown in FIG. 3, and a check valve input flow path 19c for supplying the purge gas P to the check valve 6 is provided in a flange portion thereof as shown in FIG. Are formed.

Next, the structure of the check valve 6 will be described. However, as for the other mass flow controllers 4 and the like, those which are generally used are used, and detailed description thereof will be omitted. 4 and 5 are cross-sectional views showing the check valve. FIG. 4 shows a state when the valve is closed, and FIG. 5 shows a state when the valve is opened. The check valve 6 has a valve formed in a lid 31 that is directly fixed to the second block 12. The lid 31 has a hollow cylindrical shape having an opening at one end as shown in the figure, and includes a cylindrical gas input cover 32 having a through hole 32a formed in the lateral direction, and a valve. A cylindrical valve body 33 is integrally and coaxially inserted. The gas input cover 32 and the valve body 33 are not fixed,
The structure is such that it can be easily disassembled by removing the lid 31.

A rubber valve seat 34 is mounted between the gas input cover 32 and the valve body 33. A hollow cylindrical piston 3 having a valve body 35 is provided in a hollow portion of the valve body 33.
6 is slidably fitted. This piston 36
A through hole 36a is formed at the upper end side to which the valve body 35 is engaged, and the lower end is open. A return spring 37, which is a coil spring, is attached to the hollow portion 36b of the piston 36 from the opened lower end. The return spring 37 is
The upper end is abutted against the step portion of the piston 36, and is contracted so that the lower end contacts the mounting portion 12 a of the second block 12 at the time of mounting. Therefore, the return spring 37 is connected to the valve 3
The piston 36 is biased in a direction in which the piston 5 contacts the valve seat 34. In the check valve 6 having such a configuration, as shown in FIG.
A purge gas supply flow path is formed by communicating with the flow path space 38 surrounded by the valve body 33 and the check valve output flow path 19b at the lower end of the valve body 33.

Next, the operation of the gas supply integrated unit 1 according to the present embodiment having the above configuration will be described. When the valve is opened by a manual valve (not shown), the gas supply block 1
6 and is input to the filter 2 from the filter input flow path 17a. The impurities mixed in the supply gas are removed and flow out to the filter output flow path 17b. Then, the supply gas F flowing out to the filter output flow path 17b is supplied to the first block 11
Flows from the main valve input flow path 18a to the main valve 3, flows through the mass flow valve input flow paths 18b and 19a by opening the valve, and flows into the mass flow controller 4.

On the other hand, when the purge gas P, which is a replacement gas for removing the supply gas F remaining in the mass flow controller 4, is supplied to the purge gas supply block 20, the check gas is supplied from the check valve input flow path 19c to the check valve 6c. Flows into The purge gas P flowing into the check valve 6 from the check valve input flow path 19c flows into the gas input cover 32 from the through hole 32a through the flow path space 38, and the gas pressure of the purge gas P in FIG. The valve body 35 is lowered together with the piston 36 against the urging force of the return spring 37 as shown in FIG. And valve element 3
When 5 is separated from the valve seat 34, the purge gas P further flows into the valve body 33, flows from the through hole 36a to the hollow portion 36b of the piston 36, and flows out to the check valve output flow path 19b of the second block 12.

The supply gas F is supplied to the check valve output flow path 1
When the gas flows from 9b into the check valve 6, the supply gas F does not flow into the supply side of the purge gas P because the valve body 35 is in contact with the valve seat 34. The purge gas P flowing out of the check valve 6 is supplied to the check valve output flow path 19.
b and flow through the purge valve input flow path 18 d and flow into the purge valve 5. Therefore, by opening the valve of the purge valve 5, the purge gas P flows out to the purge valve output flow path 18c, flows into the mass flow valve input flow path 18b, flows through the mass flow valve input flow path 19a, and flows into the mass flow controller 4. The feed gas F, which is a corrosive gas remaining therein, is replaced and eliminated. On the other hand, the supply gas F that has flowed into the mass flow controller 4 is supplied to a vacuum chamber (not shown) where etching is performed afterwards through a predetermined pipe, where the wafer is etched.

The configuration and operation of the gas supply integrated unit according to an embodiment of the present invention have been described above.
According to the gas supply integrated unit 1 of the present embodiment, the following effects can be obtained. The configuration in which the main valve 3 and the mass flow controller 4 are attached to the fixed block in which the filter block 15, the first block 11, and the second block 12 are integrated can make the gas supply integrated unit compact.

In particular, by arranging the fixed block in the same direction and on a straight line, the components such as the main valve 3 and the mass flow controller 4 constituting the gas supply integrated unit 1 can be integrated into one line. Thus, the gas supply device having the gas supply integrated unit 1 arranged side by side could be made compact. The downsizing of the gas supply device can greatly reduce the floor occupied area, thereby eliminating the problem of hindering the work, and disposing the gas supply device in the immediate vicinity of the vacuum chamber 51. And gas can be supplied at a stable flow rate.

On the other hand, the filter block 15, the first block 11, and the second
Since the bolts are attached to the block 12 from above, the components such as the check valve 6 can be easily removed, and the maintainability has been greatly improved. In addition, since the check valve 6 is assembled only by fixing the cover 31 with bolts 41 as shown in FIG. 6, parts such as the return spring 37 can be easily replaced.

Further, in the gas supply integrated unit of the present embodiment, the gas flow passages 17a, 17b, 18a, 18b, 18c18d, 19 are provided in a fixed block in which the filter block 15, the first block 11, and the second block 12 are integrated.
Since a, 19b and 19c were formed, it was not necessary to connect the pipes by welding as in the conventional case. Therefore, generation of particles due to corrosion of the welding by the corrosive gas could be prevented.

The present invention is not limited to the above embodiment, and various changes can be made without departing from the gist of the present invention. For example, in the above embodiment,
Although the check valve 6 has a poppet structure using the return spring 37, a check valve using a diaphragm receiving pressure due to the gas pressure of the supply gas F using a diaphragm may be used. According to the poppet structure, if the pressure is balanced by the return spring 37, the valve 3
5 causes a vibration and a pulsating flow,
There is an advantage that generation of particles due to rubbing of the sliding portion is eliminated. Also, for example, without arranging each component as in the above embodiment,
While the check valve 6 is attached to the filter block 15, the filter 2, a pressure sensor, a valve, or the like may be attached to the second block 12 as necessary.

[0033]

According to the present invention, there is provided a fixed block in which a flow path for a supply gas and a purge gas is formed and on which a filter, an on-off valve, a mass flow controller, a purge valve, and a check valve are fixedly mounted. Therefore, it is possible to provide a compact gas supply integrated unit that can be arranged in a narrow floor space and to provide a gas supply integrated unit that prevents generation of particles due to welding. became.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a gas supply integrated unit according to the present invention.

FIG. 2 is a partial cross-sectional view showing one embodiment of a gas supply integrated unit according to the present invention.

FIG. 3 is a cross-sectional view showing a check valve and a fixed block according to one embodiment.

FIG. 4 is a cross-sectional view showing a check valve closed state according to one embodiment;

FIG. 5 is a cross-sectional view showing an open state of the check valve according to the embodiment;

FIG. 6 is a partial cross-sectional view showing one embodiment of a gas supply integrated unit according to the present invention.

FIG. 7 is a perspective view showing a conventional gas supply integrated unit.

FIG. 8 is a pneumatic circuit diagram illustrating a flow path of a gas supply device provided with a series of gas supply integrated units.

FIG. 9 is an arrangement view showing an etching apparatus provided with four vacuum chambers.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Gas supply integrated unit 2 Filter 3 Main valve 4 Mass flow controller 5 Purge valve 6 Check valve 11 1st block 12 2nd block 15 Filter block 18a, 18b, 18c18d, 19a, 19b, 19
c flow path

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁶ , DB name) F17D 1/00-1/075 F17C 13/04 301 F17D 5/00 H01L 21/02

Claims (3)

(57) [Claims] And 1. A closing to regulate the flow of feed gas flowing through the flow path valve, a mass flow controller for controlling the flow rate of feed gas, purge for supplying a purge gas to eliminate the feed gas remaining in the mass flow controller In a gas supply integrated unit including a valve and a check valve for preventing a supply gas from flowing into a purge gas supply side, a flow path through which the supply gas and the purge gas flow is formed.
And the on-off valve and the purge valve are fixed on the flow path.
An opening / closing valve fixing block having a mounting portion for mounting on the upper surface, and a flow path through which the supply gas and the purge gas flow are formed.
A mounting portion for fixing the check valve on the flow path.
A check valve fixing block provided on the upper surface, the check valve fixing block and the on- off valve fixing block,
Are connected side by side to each other . 2. A method for removing impurities mixed in a supply gas.
A filter and an opening to regulate the flow of supply gas through the flow path
Mass flow control for closing valves and controlling the flow rate of supply gas
And the supply remaining in the mass flow controller
A purge valve for supplying a purge gas for eliminating gas;
In the gas supply integrated unit having: a flow path through which the supply gas and the purge gas flow are formed.
And the on-off valve and the purge valve are fixed on the flow path.
An opening / closing valve fixing block having an attachment portion for mounting on the upper surface, and a flow path through which the supply gas flows are formed.
A filter with a mounting part on the upper surface for fixing the filter
A filter fixing block and the on- off valve fixing block.
Are connected side by side to each other . 3. The gas supply integrated unit according to claim 1 , wherein a filter for removing impurities mixed in the supply gas, and a flow path through which the supply gas and the purge gas flow are formed.
And the on-off valve and the purge valve are fixed on the flow path.
Off valve fixed block having a mounting portion of the order on the upper surface, a flow passage in which the feed gas flows is formed, prior to the flow path
A filter with a mounting part on the upper surface for fixing the filter
A filter fixing block and the on- off valve fixing block.
Are connected side by side to each other .