SG10201802767VA - Liquid supplying device and liquid supplying method - Google Patents
Liquid supplying device and liquid supplying methodInfo
- Publication number
- SG10201802767VA SG10201802767VA SG10201802767VA SG10201802767VA SG10201802767VA SG 10201802767V A SG10201802767V A SG 10201802767VA SG 10201802767V A SG10201802767V A SG 10201802767VA SG 10201802767V A SG10201802767V A SG 10201802767VA SG 10201802767V A SG10201802767V A SG 10201802767VA
- Authority
- SG
- Singapore
- Prior art keywords
- liquid
- liquid supplying
- flow rate
- supplying device
- rate control
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0091—For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/50—Pressure control
- F15B2211/505—Pressure control characterised by the type of pressure control means
- F15B2211/50554—Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure downstream of the pressure control means, e.g. pressure reducing valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/50—Pressure control
- F15B2211/57—Control of a differential pressure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
LIQUID SUPPLYING DEVICE AND LIQUID SUPPLYING METHOD The present invention provides a liquid supplying device that can determine whether a CLC can be used appropriately. A liquid supplying device for supplying a liquid from a liquid source to a cleaning device is provided. The liquid supplying device includes a flow rate control device that measures a flow rate of a liquid from the liquid source and controls the flow rate based on the measured value, an IN-side pressure gauge provided between the liquid source and the flow rate control device and an OUT-side pressure gauge provided between the flow rate control device and the cleaning device. Selected Drawings: Fig. 2
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017073791A JP6486986B2 (en) | 2017-04-03 | 2017-04-03 | Liquid supply apparatus and liquid supply method |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201802767VA true SG10201802767VA (en) | 2018-11-29 |
Family
ID=63672448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201802767VA SG10201802767VA (en) | 2017-04-03 | 2018-04-03 | Liquid supplying device and liquid supplying method |
Country Status (6)
Country | Link |
---|---|
US (2) | US10343192B2 (en) |
JP (1) | JP6486986B2 (en) |
KR (2) | KR102513025B1 (en) |
CN (1) | CN108695203A (en) |
SG (1) | SG10201802767VA (en) |
TW (2) | TWI781890B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7326003B2 (en) * | 2019-04-09 | 2023-08-15 | 株式会社荏原製作所 | Liquid supply device, cleaning unit, substrate processing device |
AT526426B1 (en) * | 2023-01-26 | 2024-03-15 | Siconnex Customized Solutions Gmbh | Treatment device and method for treating semiconductor objects |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5331364A (en) | 1992-07-20 | 1994-07-19 | Thatcher Chemical Company | Apparatus for diluting and mixing chemicals and automatically feeding the diluted chemicals to a photographic processor on demand |
US5950645A (en) * | 1993-10-20 | 1999-09-14 | Verteq, Inc. | Semiconductor wafer cleaning system |
US6152162A (en) * | 1998-10-08 | 2000-11-28 | Mott Metallurgical Corporation | Fluid flow controlling |
US6280300B1 (en) * | 1998-11-25 | 2001-08-28 | Ebara Corporation | Filter apparatus |
JP4127346B2 (en) | 1999-08-20 | 2008-07-30 | 株式会社荏原製作所 | Polishing apparatus and method |
TW541230B (en) * | 2000-10-06 | 2003-07-11 | Ebara Corp | Method for supplying slurry to polishing apparatus |
US7216656B2 (en) * | 2000-12-28 | 2007-05-15 | Yoshiharu Yamamoto | Semiconductor substrate cleansing apparatus |
US6767877B2 (en) * | 2001-04-06 | 2004-07-27 | Akrion, Llc | Method and system for chemical injection in silicon wafer processing |
CN1602538A (en) | 2001-11-13 | 2005-03-30 | Fsi国际公司 | Advanced process control for immersion processing |
JP2004111668A (en) | 2002-09-19 | 2004-04-08 | Citizen Watch Co Ltd | Method and apparatus for processing substrate |
JP4406292B2 (en) * | 2004-01-20 | 2010-01-27 | 株式会社フジキン | Water hammerless opening method of fluid passage and water hammerless opening device using the same |
US20060188412A1 (en) * | 2005-02-24 | 2006-08-24 | Dainippon Screen Mfg.Co., Ltd. | Substrate treating apparatus and method |
JP2007141926A (en) | 2005-11-15 | 2007-06-07 | Sony Corp | Substrate processor and substrate processing method |
US7849505B2 (en) | 2006-08-17 | 2010-12-07 | At&T Intellectual Property I, Lp | System and method of selecting a virtual private network access server |
JP2008078322A (en) * | 2006-09-20 | 2008-04-03 | Sony Corp | Method and device for treating semiconductor wafer |
JP5079401B2 (en) * | 2007-06-25 | 2012-11-21 | サーパス工業株式会社 | Pressure sensor, differential pressure type flow meter and flow controller |
JP5236231B2 (en) | 2007-08-29 | 2013-07-17 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
KR100904452B1 (en) | 2007-12-06 | 2009-06-24 | 세메스 주식회사 | Ozonated water mixture supply apparatus and method, and facility for treating subtrate with the apparatus |
JP5043696B2 (en) | 2008-01-21 | 2012-10-10 | 東京エレクトロン株式会社 | Processing liquid mixing apparatus, substrate processing apparatus, processing liquid mixing method, and storage medium |
JP5379621B2 (en) | 2009-09-17 | 2013-12-25 | 大日本スクリーン製造株式会社 | Inspection recipe automatic generation apparatus, inspection recipe automatic generation program, and recording medium recording the same |
JP5646956B2 (en) | 2010-11-04 | 2014-12-24 | 東京エレクトロン株式会社 | Liquid flow control device, liquid flow control method, and storage medium |
JP6005334B2 (en) * | 2010-12-24 | 2016-10-12 | 株式会社堀場エステック | Material gas control system |
US8805591B2 (en) * | 2011-01-18 | 2014-08-12 | Flow Control Industries, Inc. | Pressure compensated flow rate controller with BTU meter |
CN103518165B (en) * | 2011-05-10 | 2016-06-08 | 株式会社富士金 | Pressure flow-rate controller with flow monitor |
JP2013138062A (en) * | 2011-12-28 | 2013-07-11 | Jet Co Ltd | Chemical mixer |
JP6212253B2 (en) | 2012-11-15 | 2017-10-11 | 株式会社荏原製作所 | Substrate cleaning apparatus and substrate cleaning method |
JP6378555B2 (en) * | 2014-06-26 | 2018-08-22 | 株式会社荏原製作所 | Cleaning unit |
JP6339954B2 (en) * | 2014-06-09 | 2018-06-06 | 株式会社荏原製作所 | Cleaning chemical supply apparatus, cleaning chemical supply method, and cleaning unit |
US10340159B2 (en) * | 2014-06-09 | 2019-07-02 | Ebara Corporation | Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit |
KR101943238B1 (en) * | 2014-09-16 | 2019-01-28 | 오르가노 코포레이션 | Diluted liquid production method and diluted liquid production device |
US10500691B2 (en) * | 2016-08-29 | 2019-12-10 | Ebara Corporation | Substrate processing apparatus and substrate processing method |
-
2017
- 2017-04-03 JP JP2017073791A patent/JP6486986B2/en active Active
-
2018
- 2018-03-28 TW TW111108004A patent/TWI781890B/en active
- 2018-03-28 TW TW107110701A patent/TWI760466B/en active
- 2018-03-29 CN CN201810281777.8A patent/CN108695203A/en active Pending
- 2018-04-02 US US15/942,734 patent/US10343192B2/en active Active
- 2018-04-02 KR KR1020180038207A patent/KR102513025B1/en active IP Right Grant
- 2018-04-03 SG SG10201802767VA patent/SG10201802767VA/en unknown
-
2019
- 2019-05-22 US US16/419,525 patent/US10926301B2/en active Active
-
2023
- 2023-03-17 KR KR1020230035226A patent/KR102555758B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
TWI760466B (en) | 2022-04-11 |
KR102555758B1 (en) | 2023-07-17 |
TW201842563A (en) | 2018-12-01 |
KR20180112705A (en) | 2018-10-12 |
JP2018181883A (en) | 2018-11-15 |
TWI781890B (en) | 2022-10-21 |
CN108695203A (en) | 2018-10-23 |
JP6486986B2 (en) | 2019-03-20 |
TW202226424A (en) | 2022-07-01 |
US20190270125A1 (en) | 2019-09-05 |
KR20230047971A (en) | 2023-04-10 |
US10343192B2 (en) | 2019-07-09 |
US20180281026A1 (en) | 2018-10-04 |
US10926301B2 (en) | 2021-02-23 |
KR102513025B1 (en) | 2023-03-22 |
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