MY147729A - Polishing composition and method utilizing abrasive particles treated with an aminosilane - Google Patents

Polishing composition and method utilizing abrasive particles treated with an aminosilane

Info

Publication number
MY147729A
MY147729A MYPI2010001235A MYPI20101235A MY147729A MY 147729 A MY147729 A MY 147729A MY PI2010001235 A MYPI2010001235 A MY PI2010001235A MY PI20101235 A MYPI20101235 A MY PI20101235A MY 147729 A MY147729 A MY 147729A
Authority
MY
Malaysia
Prior art keywords
abrasive particles
polishing composition
aminosilane
method utilizing
particles treated
Prior art date
Application number
MYPI2010001235A
Other languages
English (en)
Inventor
Dysard Jeffrey
Anjur Sriram
Grumbine Steven
White Daniela
Ward William
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of MY147729A publication Critical patent/MY147729A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/06—Planarisation of inorganic insulating materials
    • H10P95/062—Planarisation of inorganic insulating materials involving a dielectric removal step

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
MYPI2010001235A 2007-09-21 2008-09-19 Polishing composition and method utilizing abrasive particles treated with an aminosilane MY147729A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US97434007P 2007-09-21 2007-09-21

Publications (1)

Publication Number Publication Date
MY147729A true MY147729A (en) 2013-01-15

Family

ID=40472131

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2010001235A MY147729A (en) 2007-09-21 2008-09-19 Polishing composition and method utilizing abrasive particles treated with an aminosilane

Country Status (9)

Country Link
US (1) US7994057B2 (enExample)
EP (1) EP2197972B1 (enExample)
JP (1) JP5519507B2 (enExample)
KR (1) KR101232585B1 (enExample)
CN (1) CN101802125B (enExample)
IL (1) IL203477A (enExample)
MY (1) MY147729A (enExample)
TW (1) TWI428436B (enExample)
WO (1) WO2009042072A2 (enExample)

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Also Published As

Publication number Publication date
US20090081871A1 (en) 2009-03-26
CN101802125B (zh) 2013-11-06
WO2009042072A2 (en) 2009-04-02
TWI428436B (zh) 2014-03-01
WO2009042072A3 (en) 2009-06-18
EP2197972A4 (en) 2011-06-01
EP2197972B1 (en) 2020-04-01
EP2197972A2 (en) 2010-06-23
JP5519507B2 (ja) 2014-06-11
IL203477A (en) 2013-03-24
CN101802125A (zh) 2010-08-11
JP2010541203A (ja) 2010-12-24
KR101232585B1 (ko) 2013-02-12
US7994057B2 (en) 2011-08-09
TW200918658A (en) 2009-05-01
KR20100074207A (ko) 2010-07-01

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