KR970030687A - 박판수납용기 - Google Patents

박판수납용기 Download PDF

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Publication number
KR970030687A
KR970030687A KR1019960054361A KR19960054361A KR970030687A KR 970030687 A KR970030687 A KR 970030687A KR 1019960054361 A KR1019960054361 A KR 1019960054361A KR 19960054361 A KR19960054361 A KR 19960054361A KR 970030687 A KR970030687 A KR 970030687A
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KR
South Korea
Prior art keywords
opening
container body
thin plate
storage container
plate storage
Prior art date
Application number
KR1019960054361A
Other languages
English (en)
Other versions
KR100414874B1 (ko
Inventor
에지마 카즈토시
효부 유기히로
Original Assignee
레이지로 모리
스미토모 시틱스 가부시끼가이샤
타께요시 카끼자끼
가부시끼가이샤 카끼자끼 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29816195A external-priority patent/JPH09139421A/ja
Priority claimed from JP25453796A external-priority patent/JP3172681B2/ja
Application filed by 레이지로 모리, 스미토모 시틱스 가부시끼가이샤, 타께요시 카끼자끼, 가부시끼가이샤 카끼자끼 세이사꾸쇼 filed Critical 레이지로 모리
Publication of KR970030687A publication Critical patent/KR970030687A/ko
Application granted granted Critical
Publication of KR100414874B1 publication Critical patent/KR100414874B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

다수의 반도체 웨이퍼(12)를 내부에 수납 지지하는 용기본체(13)와, 용기본체(13)내에 반도체 웨이퍼(12)를 수납한 상태에서 입구를 덮어 내부를 깨끗한 상태로 유지하는 뚜껑(14)와, 용기본체(13)와 뚜껑(14)와의 사이에 장착되는 개스킷을 구비한 캐리어박스이다. 용기본체(13) 등에 개구(26)을 설치하고, 이 개구(26)에 착달가능하게 필터(27)을 장착한다. 필터(27)은 캐리어박스(11) 내외에서 먼지 등을 제거하면서 기체의 통과를 허용하여 내압을 조정한다. 개구(26)와 필터(27)에서 내압조정기구(25)를 구성한다. 또한, 개스킷(36)에 기체의 통과를 허용하여 내외의 기압을 일치시킴과 동시에 먼지 등의 통과를 제한하는 기능을 구비하여도 좋다. 이상과 같이 하여, 가장 적절한 내압조정을 함과 동시에 재사용 및 재활용 처리를 용이하게 한다.

Description

박판수납용기
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
도 1은 제 1실시형태에 있어서의 캐리어 박스의 전체구성을 도시한 분해사시도.

Claims (3)

  1. 다수의 박판을 내부에 수납 지지하는 용기본체와 이 용기본체내에 박판을 수납한 상태에서 입구를 덮어 내부를 깨끗한 상태로 유지하는 뚜껑을 구비한 박판수납용기에 있어서, 상기 용기본체 또는 뚜껑 또는 그들의 경계에 설치되어 내외측을 연통하게 연결하고 기체의 출입을 허용하여 내부의 기압을 조정하는 개구와, 이 개구에 착탈가능하게 장착되고 먼지 등을 제거하여 기체의 용이한 통과를 허용하는 필터로 구성되는 내압조정기구를 구비한 것을 특징으로 하는 박판수납용기.
  2. 제 1항에 기재된 박판수납용기에 있어서, 상기 필터가 상기 개구에 감합하는 통체와, 이 통체의 한쪽에 설치되어 통체가 상기 개구에 감합된 상태에서 개구의 연부의 일측면에 기밀하게 접하는 플랜지와, 상기 통체의 다른 한쪽에 설치되어 통체가 상기 개구에 감합된 상태에서 상기 플랜지와 상호 겹쳐서 개구의 연부를 양측에서 사이에 끼워 지지하여 통체를 개구에 고정 지지하는 계지조와, 상기 통체내에 장착되어 먼지 등을 제거하고 용이한 통과를 허용하는 여과재로 구성된 것을 특징으로 하는 박판수납용기.
  3. 다수의 박판을 내부에 수납지지하는 용기본체와, 이 용기본체내에 박판을 수납한 상태에서 입구를 덮어 내부를 깨끗한 상태로 유지하는 뚜껑과, 상기 용기본체와 뚜껑의 사이에 장착되는 개스킷을 구비한 박판수납용기에 있어서, 상기 개스킷이 내외측 사이에서 기체의 통과를 허용하여 내부기압을 외부기압과 일치시킴과 동시에 먼지 등의 통과를 제한하는 기능을 구비한 것을 특징으로 하는 박판수납용기.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960054361A 1995-11-16 1996-11-15 박판수납용기 KR100414874B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP7-298161 1995-11-16
JP29816195A JPH09139421A (ja) 1995-11-16 1995-11-16 内圧調整機構付き薄板収納容器
JP25453796A JP3172681B2 (ja) 1996-09-26 1996-09-26 薄板収納容器
JP8-254537 1996-09-26

Publications (2)

Publication Number Publication Date
KR970030687A true KR970030687A (ko) 1997-06-26
KR100414874B1 KR100414874B1 (ko) 2004-04-13

Family

ID=26541721

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960054361A KR100414874B1 (ko) 1995-11-16 1996-11-15 박판수납용기

Country Status (4)

Country Link
US (3) US5873468A (ko)
EP (2) EP0774774A3 (ko)
KR (1) KR100414874B1 (ko)
TW (1) TW312035B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100545427B1 (ko) * 1997-09-01 2006-07-25 신-에쓰 한도타이 가부시키가이샤 수송용기

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5873468A (en) * 1995-11-16 1999-02-23 Sumitomo Sitix Corporation Thin-plate supporting container with filter means
US6090176A (en) * 1997-03-18 2000-07-18 Kabushiki Kaisha Toshiba Sample transferring method and sample transfer supporting apparatus
US6474474B2 (en) * 1998-02-06 2002-11-05 Sumitomo Metal Industries, Ltd. Sheet support container
US6319297B1 (en) * 1998-03-27 2001-11-20 Asyst Technologies, Inc. Modular SMIF pod breather, adsorbent, and purge cartridges
JP3280305B2 (ja) * 1998-04-13 2002-05-13 信越半導体株式会社 精密基板輸送容器
US6871741B2 (en) * 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
US5992638A (en) * 1998-11-11 1999-11-30 Empak, Inc. Advanced wafer shipper
JP2000289795A (ja) * 1999-04-06 2000-10-17 Kakizaki Mamufacuturing Co Ltd 薄板収納・輸送容器
JP3916342B2 (ja) * 1999-04-20 2007-05-16 信越ポリマー株式会社 基板収納容器
JP3556519B2 (ja) * 1999-04-30 2004-08-18 信越ポリマー株式会社 基板収納容器の識別構造及び基板収納容器の識別方法
US6306191B1 (en) * 1999-11-12 2001-10-23 Millipore Corporation Sanitary seal design and vent using such seal
US6875282B2 (en) * 2001-05-17 2005-04-05 Ebara Corporation Substrate transport container
US6758339B2 (en) * 2001-07-12 2004-07-06 Entegris, Inc. Thin wafer carrier
US6615994B2 (en) * 2001-09-18 2003-09-09 Intel Corporation Wafer boat
JP4354818B2 (ja) * 2001-11-14 2009-10-28 インテグリス・インコーポレーテッド ウェハ・コンテナ用のウェハ・エンクロージャ密封装置
US6644477B2 (en) * 2002-02-26 2003-11-11 Entegris, Inc. Wafer container cushion system
US6976586B2 (en) * 2002-05-10 2005-12-20 Asm America, Inc. Delicate product packaging system
EP1548820B1 (en) * 2002-09-11 2010-12-15 Shin-Etsu Polymer Co., Ltd. Substrate-storing container
JP4174557B2 (ja) * 2002-10-17 2008-11-05 ゴールド工業株式会社 ウエハ等精密基板収容容器
JP4133407B2 (ja) 2003-02-13 2008-08-13 ミライアル株式会社 薄板収納容器
TWI283621B (en) * 2002-12-02 2007-07-11 Miraial Co Ltd Thin plate storage container
TWI286674B (en) * 2002-12-27 2007-09-11 Asml Netherlands Bv Container for a mask, method of transferring lithographic masks therein and method of scanning a mask in a container
KR100490594B1 (ko) * 2003-02-18 2005-05-19 삼성전자주식회사 피 보관체의 안정적인 보관을 위한 보관 방법 및 보관함및 스토커를 포함하는 보관 장치
TW200420477A (en) * 2003-04-11 2004-10-16 Toppoly Optoelectronics Corp Liquid crystal panel carrier
JP4049046B2 (ja) * 2003-07-30 2008-02-20 豊田合成株式会社 収容装置の開閉機構
JP4062231B2 (ja) * 2003-10-16 2008-03-19 トヨタ自動車株式会社 内燃機関の排気浄化装置
US7077270B2 (en) * 2004-03-10 2006-07-18 Miraial Co., Ltd. Thin plate storage container with seal and cover fixing means
US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
DE102004063912B4 (de) * 2004-04-22 2007-09-20 Siltronic Ag Verfahren zum versandfertigen Verpacken von Halbleiterscheiben
TW200606084A (en) * 2004-08-10 2006-02-16 Power Geode Technology Co Ltd Storage box for FOSB (front opening shipping box)
TWM276316U (en) * 2004-08-17 2005-09-21 Tzu-Lung Fu Device having a function of absorbing gas
US20060065571A1 (en) * 2004-09-27 2006-03-30 Tim Hsiao Wafer shipping box and wafer transportation method
US20080257779A1 (en) * 2004-09-29 2008-10-23 Hoya Corporation Supporting Member For Thin-Film-Coated Boards, Storage Container For Thin-Film-Coated Boards, Mask-Blank-Storing Body, Transfer-Mask-Storing Body, and Method For Transporting Thin-Film-Coated Boards
JP4634772B2 (ja) * 2004-10-14 2011-02-16 ミライアル株式会社 収納容器
US7528936B2 (en) * 2005-02-27 2009-05-05 Entegris, Inc. Substrate container with pressure equalization
TWI298185B (en) * 2006-01-25 2008-06-21 Promos Technologies Inc Wafer-transferring pod capable of monitoring process environment
JP4809714B2 (ja) * 2006-05-12 2011-11-09 ミライアル株式会社 薄板収納容器
US20080254377A1 (en) * 2006-12-19 2008-10-16 Chen Chien-Ta Metal photomask pod and filter device thereof
CN101663423B (zh) * 2007-02-28 2012-03-28 恩特格里公司 基片容器的清洗系统
JP2008294274A (ja) * 2007-05-25 2008-12-04 Nec Electronics Corp ウェハ移送容器、その緩衝支持部材
TWM330970U (en) * 2007-11-01 2008-04-21 Gudeng Prec Industral Co Ltd Semiconductor elements storage apparatus and reticle storage apparatus
TWM337832U (en) * 2007-11-15 2008-08-01 Gudeng Prec Industral Co Ltd Storage apparatus and filter apparatus therein
TWM331514U (en) * 2007-11-15 2008-05-01 Gudeng Prec Industral Co Ltd Storage apparatus for storing semiconductor element or reticle
TW200929357A (en) * 2007-12-20 2009-07-01 Gudeng Prec Industral Co Ltd Gas filling apparatus
TWI379171B (en) * 2007-12-27 2012-12-11 Gudeng Prec Industral Co Ltd Gas filling apparatus
TWM336219U (en) * 2008-01-31 2008-07-11 Gudeng Prec Industral Co Ltd Gas filling apparatus and gas filling port thereof
TWI331123B (en) * 2008-03-06 2010-10-01 Gudeng Prec Ind Co Ltd Reticle pod and method for keeping reticle clean and dry
JP6114193B2 (ja) * 2010-10-20 2017-04-12 インテグリス・インコーポレーテッド ドア・ガイドおよびシールを備えたウェーハ容器
US9117863B1 (en) * 2013-05-16 2015-08-25 Seagate Technology Llc Cassette configurations to support platters having different diameters
DE202014103799U1 (de) * 2014-08-15 2015-11-17 Carsten Böttcher Transport- und/oder Lagergestell und Anordnung eines Transport- und/oder Lagergestells an einer Bodenplatte
KR102249316B1 (ko) * 2014-08-18 2021-05-07 삼성전자주식회사 웨이퍼 캐리어
KR102382330B1 (ko) 2016-04-07 2022-04-01 신에쓰 가가꾸 고교 가부시끼가이샤 포토마스크 블랭크스 기판 수납 용기, 포토마스크 블랭크스 기판의 보관 방법, 및 포토마스크 블랭크스 기판의 수송 방법
DE112018001612T5 (de) * 2017-03-27 2020-01-16 Shin-Etsu Polymer Co., Ltd. Substratlagerungsbehälter
TWI698608B (zh) * 2018-01-11 2020-07-11 家登精密工業股份有限公司 快拆式氣閥及應用其之基板容器

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3092249A (en) * 1961-03-30 1963-06-04 Chapman Harold Eric Containers or packages
US3425193A (en) * 1967-03-15 1969-02-04 Arthur F Emmerson Sealed journal box with breather
US4609103A (en) * 1984-08-27 1986-09-02 Texas Instruments Incorporated Semiconductor slice cassette carrier
JPS61172085A (ja) * 1985-01-25 1986-08-02 Matsushita Electric Works Ltd 測距型物体検知装置
JPS61172086A (ja) * 1985-01-25 1986-08-02 Matsushita Electric Works Ltd 超音波検知器
JPS61196536A (ja) * 1985-02-25 1986-08-30 Sumitomo Electric Ind Ltd 半導体デバイス材料とそれを用いた半導体デバイスの製造方法
JPH0249721Y2 (ko) * 1985-04-12 1990-12-27
JPH0220835Y2 (ko) * 1985-04-12 1990-06-06
JPH019172Y2 (ko) * 1985-05-29 1989-03-13
US4666479A (en) * 1985-07-18 1987-05-19 Tensho Electric Industrial Co., Ltd. Semiconductor wafer container
US4738905A (en) * 1986-12-03 1988-04-19 International Fuel Cells Corporation Manifold seal structure for fuel cell stack
JPS63178958A (ja) * 1986-12-27 1988-07-23 キヤノン株式会社 防塵容器
JPS6451058A (en) * 1987-08-24 1989-02-27 Gokou Kosan Kk Preparation of devil's tongue jelly steak
JPS6451580U (ko) * 1987-09-28 1989-03-30
JPH0249721U (ko) 1988-09-29 1990-04-06
US4896590A (en) * 1989-03-22 1990-01-30 Pullman Leasing Company Railroad hopper car vent
JPH02249721A (ja) * 1989-03-23 1990-10-05 Daikyo Webasto Co Ltd サンルーフ装置
US5469963A (en) * 1992-04-08 1995-11-28 Asyst Technologies, Inc. Sealable transportable container having improved liner
US5353949A (en) * 1992-09-21 1994-10-11 Pall Corporation Vent filter assembly
JP2946450B2 (ja) * 1993-04-27 1999-09-06 コマツ電子金属株式会社 半導体ウェーハ包装容器
JP3347824B2 (ja) * 1993-06-30 2002-11-20 株式会社シゲミ 核磁気共鳴装置用試料管の製造方法
DE4344659C1 (de) * 1993-12-24 1995-05-04 Haewa Programmgehaeuse & Kompo Filterlüfter zum Anbau an spritzwassergeschützte Gehäuse oder Schaltschränke
US5472086A (en) * 1994-03-11 1995-12-05 Holliday; James E. Enclosed sealable purgible semiconductor wafer holder
US5476176A (en) * 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
US5482161A (en) * 1994-05-24 1996-01-09 Fluoroware, Inc. Mechanical interface wafer container
US5740845A (en) * 1995-07-07 1998-04-21 Asyst Technologies Sealable, transportable container having a breather assembly
US5873468A (en) * 1995-11-16 1999-02-23 Sumitomo Sitix Corporation Thin-plate supporting container with filter means

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100545427B1 (ko) * 1997-09-01 2006-07-25 신-에쓰 한도타이 가부시키가이샤 수송용기

Also Published As

Publication number Publication date
TW312035B (ko) 1997-08-01
EP0774774A2 (en) 1997-05-21
US5873468A (en) 1999-02-23
EP1255282A3 (en) 2010-10-27
US6105781A (en) 2000-08-22
US6032802A (en) 2000-03-07
KR100414874B1 (ko) 2004-04-13
EP1255282A2 (en) 2002-11-06
EP0774774A3 (en) 1998-05-06

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