KR930023244A - 가반식(可搬式)밀폐 컨테이너용 가스 퍼지 유니트 - Google Patents

가반식(可搬式)밀폐 컨테이너용 가스 퍼지 유니트 Download PDF

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Publication number
KR930023244A
KR930023244A KR1019930008745A KR930008745A KR930023244A KR 930023244 A KR930023244 A KR 930023244A KR 1019930008745 A KR1019930008745 A KR 1019930008745A KR 930008745 A KR930008745 A KR 930008745A KR 930023244 A KR930023244 A KR 930023244A
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KR
South Korea
Prior art keywords
container
opening
sealed container
box
purge unit
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KR1019930008745A
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English (en)
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KR100298764B1 (ko
Inventor
히또시 기와노
뎃베이 야미시다
마사나오 무라다
쓰요시 다나까
데루야 모리따
이스이 오꾸노
미쓰히로 하야시
아키오 나까무라
Original Assignee
스즈끼 아끼오
신꼬덴끼 가부시끼가이샤
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Publication of KR930023244A publication Critical patent/KR930023244A/ko
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Publication of KR100298764B1 publication Critical patent/KR100298764B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L5/00—Gas handling apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

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  • Clinical Laboratory Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ventilation (AREA)

Abstract

클린룸 내의 임의의 장소에 간편하게 배설할수 있는 가반식(可搬式)밀폐 컨테이너용 가스 퍼지 유니트를 제공하는 것을 목적으로 한다,
개구(42)를 가지며, 당해 개구의 주변부가 밀폐 컨테이너(10)를 재치한 컨테이너 대부(臺部) (43)인 퍼지박스(40)와, 가스원에 접속된 급기구와, 배기구와 상기 개구를 박스 내부측에서 밀폐가 가능하며, 또한 상기 컨테이너의 뚜껑(20)이 구비된 자물쇠 기구의 해정(解錠)ㆍ시정(施錠)을 하는 승강부(46)와를 구비하는 것을 특징으로 한다.

Description

가반식(可搬式)밀폐 컨테이너용 가스 퍼지 유니트
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1실시예를 표시한 종단면도, 제2도는 가반식 밀폐 컨테이너의 자물쇠(衰)기구를 설명하기 위한 단면도.

Claims (2)

  1. 개구를 기지며, 당해 개구의 주변부가 밀폐 컨테이너를 재치한 컨테이너대부(帶剖)인 퍼지박스와 가스원에 접속되는 급기구와, 배기구,그리소고 상기 개구를 박스 내부측에서 밀폐가 가능하며 또한 상기 컨테이너의 뚜껑이 구비된 자물쇠 기구의 해정(解停),시정(施政)을 하는 승강부와를 구비하는 것을 특징으로 하는 가반식 밀폐 컨테니너용 가스퍼지유니트.
  2. 제1항네 있어서, 급기구와 배기구가 대부 개구의 벽면 주변면 또는 박스의 주위 벽면에 개구되고, 가스퍼지때에 컨테이너의 뚜껑은 해정됨과 동시에 승강부와 함께 하강하여, 퍼지박스와 컨테이너 내부가 연통되는 것을 특징으로 하는 가반식 밀페 컨테이너용 가스퍼지유니트.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930008745A 1992-05-21 1993-05-21 가반식 밀폐 컨테이너용 가스퍼지 유니트 KR100298764B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP92-128850 1992-05-21
JP12885092A JP3277550B2 (ja) 1992-05-21 1992-05-21 可搬式密閉コンテナ用ガスパージユニット

Publications (2)

Publication Number Publication Date
KR930023244A true KR930023244A (ko) 1993-12-18
KR100298764B1 KR100298764B1 (ko) 2001-11-30

Family

ID=14994928

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930008745A KR100298764B1 (ko) 1992-05-21 1993-05-21 가반식 밀폐 컨테이너용 가스퍼지 유니트

Country Status (5)

Country Link
US (1) US5433574A (ko)
JP (1) JP3277550B2 (ko)
KR (1) KR100298764B1 (ko)
FR (1) FR2692170B1 (ko)
TW (1) TW214613B (ko)

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JP2850279B2 (ja) * 1994-02-22 1999-01-27 ティーディーケイ株式会社 クリーン搬送方法及び装置
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US5740845A (en) * 1995-07-07 1998-04-21 Asyst Technologies Sealable, transportable container having a breather assembly
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US5980195A (en) * 1996-04-24 1999-11-09 Tokyo Electron, Ltd. Positioning apparatus for substrates to be processed
JP2787914B2 (ja) * 1996-06-27 1998-08-20 日本電気株式会社 半導体ウェーハの保管方法及び保管容器
US5879458A (en) 1996-09-13 1999-03-09 Semifab Incorporated Molecular contamination control system
US5957292A (en) * 1997-08-01 1999-09-28 Fluoroware, Inc. Wafer enclosure with door
WO1999012190A2 (en) * 1997-09-03 1999-03-11 Novus Corporation Sealed capsule opening and unloading system
JP3656701B2 (ja) * 1998-03-23 2005-06-08 東京エレクトロン株式会社 処理装置
US6261044B1 (en) * 1998-08-06 2001-07-17 Asyst Technologies, Inc. Pod to port door retention and evacuation system
US6427096B1 (en) * 1999-02-12 2002-07-30 Honeywell International Inc. Processing tool interface apparatus for use in manufacturing environment
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JP3769417B2 (ja) * 1999-06-30 2006-04-26 株式会社東芝 基板収納容器
JP4027837B2 (ja) 2003-04-28 2007-12-26 Ｔｄｋ株式会社 パージ装置およびパージ方法
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JP4012190B2 (ja) 2004-10-26 2007-11-21 Ｔｄｋ株式会社 密閉容器の蓋開閉システム及び開閉方法
TWI475627B (zh) 2007-05-17 2015-03-01 Brooks Automation Inc 基板運送機、基板處理裝置和系統、於基板處理期間降低基板之微粒污染的方法，及使運送機與處理機結合之方法
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Also Published As

Publication number Publication date
KR100298764B1 (ko) 2001-11-30
FR2692170B1 (fr) 1995-01-06
TW214613B (en) 1993-10-11
FR2692170A1 (fr) 1993-12-17
US5433574A (en) 1995-07-18
JP3277550B2 (ja) 2002-04-22
JPH05326667A (ja) 1993-12-10

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