TWI298185B - Wafer-transferring pod capable of monitoring process environment - Google Patents

Wafer-transferring pod capable of monitoring process environment Download PDF

Info

Publication number
TWI298185B
TWI298185B TW95102791A TW95102791A TWI298185B TW I298185 B TWI298185 B TW I298185B TW 95102791 A TW95102791 A TW 95102791A TW 95102791 A TW95102791 A TW 95102791A TW I298185 B TWI298185 B TW I298185B
Authority
TW
Taiwan
Prior art keywords
wafer
monitoring process
process environment
pod capable
transferring
Prior art date
Application number
TW95102791A
Other versions
TW200729381A (en
Inventor
Ya Ling Po
Ting Sing Wang
Original Assignee
Promos Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Promos Technologies Inc filed Critical Promos Technologies Inc
Priority to TW95102791A priority Critical patent/TWI298185B/en
Publication of TW200729381A publication Critical patent/TW200729381A/en
Application granted granted Critical
Publication of TWI298185B publication Critical patent/TWI298185B/en

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67389Closed carriers characterised by atmosphere control
    • H01L21/67393Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
TW95102791A 2006-01-25 2006-01-25 Wafer-transferring pod capable of monitoring process environment TWI298185B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95102791A TWI298185B (en) 2006-01-25 2006-01-25 Wafer-transferring pod capable of monitoring process environment

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW95102791A TWI298185B (en) 2006-01-25 2006-01-25 Wafer-transferring pod capable of monitoring process environment
US11/401,835 US20070170090A1 (en) 2006-01-25 2006-04-12 Wafer-transferring pod capable of monitoring processing environment

Publications (2)

Publication Number Publication Date
TW200729381A TW200729381A (en) 2007-08-01
TWI298185B true TWI298185B (en) 2008-06-21

Family

ID=38284474

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95102791A TWI298185B (en) 2006-01-25 2006-01-25 Wafer-transferring pod capable of monitoring process environment

Country Status (2)

Country Link
US (1) US20070170090A1 (en)
TW (1) TWI298185B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2542564A1 (en) * 2003-11-12 2005-05-26 E.I. Du Pont De Nemours And Company Delta-15 desaturases suitable for altering levels of polyunsaturated fatty acids in oilseed plants and oleaginous yeast
WO2019055543A1 (en) * 2017-09-12 2019-03-21 Bedford Systems Llc Secondary insertion feature for assembled package

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5066597A (en) * 1989-04-10 1991-11-19 Massachusetts Institute Of Technology Apparatus for infectious radioactive waste
US5047348A (en) * 1989-04-10 1991-09-10 Massachusetts Institute Of Technology Apparatus for housing radioactive items during incubation
US5469963A (en) * 1992-04-08 1995-11-28 Asyst Technologies, Inc. Sealable transportable container having improved liner
US5346518A (en) * 1993-03-23 1994-09-13 International Business Machines Corporation Vapor drain system
US5873468A (en) * 1995-11-16 1999-02-23 Sumitomo Sitix Corporation Thin-plate supporting container with filter means
US5810062A (en) * 1996-07-12 1998-09-22 Asyst Technologies, Inc. Two stage valve for charging and/or vacuum relief of pods
US6187182B1 (en) * 1998-07-31 2001-02-13 Semifab Incorporated Filter cartridge assembly for a gas purging system
EP1555689B1 (en) * 2002-10-25 2010-05-19 Shin-Etsu Polymer Co., Ltd. Substrate storage container
JP2004185662A (en) * 2002-11-29 2004-07-02 Agilent Technologies Japan Ltd Blower for inspection device, and inspection device housing provided with the same
US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway

Also Published As

Publication number Publication date
US20070170090A1 (en) 2007-07-26
TW200729381A (en) 2007-08-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees