KR960002616A - 기판표면 처리장치 및 기판표면 처리방법 - Google Patents

기판표면 처리장치 및 기판표면 처리방법 Download PDF

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KR960002616A
KR960002616A KR1019950016644A KR19950016644A KR960002616A KR 960002616 A KR960002616 A KR 960002616A KR 1019950016644 A KR1019950016644 A KR 1019950016644A KR 19950016644 A KR19950016644 A KR 19950016644A KR 960002616 A KR960002616 A KR 960002616A
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conveying
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substrate
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야스히코 오오하시
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이시다 아키라
다이닛뽕스크린 세이조오 가부시키가이샤
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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Abstract

전공정에서 반송되어온 반송용카셋트가 로더부에 반송된다. 이 반송용카셋트에는 복수매의 처리전 기판이 소정의 수납피치로 수납되어 있다. 로더부에는 빈처리용카셋트가 대기하고 있다. 이 처리용카셋트는 본 장치에서의 표면처리를 행하는데 최적의 수납피치(반송용카셋트의 수납피치에 의존하지 않는 수납피치)로 복수매의 기판을 수납할 수가 있다. 로더부에서는 로더부기판이송로보트가 각 카셋트의 수납피치의 차를 흡수하면서 반송용카셋트에서 빈 처리용카셋트에의 처리전기판의 이송을 행한다. 처리전기판의 이송이 끝난후의 반송용카셋트는 반송용카셋트버퍼부를 거쳐 온로더부에 반송한다. 한편 처리전기판이수납된 처리용카셋트는 소정의 반송경로를 따라 각 처리조에서 세정·건조처리가 행하여진 후 언로더부에 반송된다. 언로더부에는 언로더부기판 이송로보트가 각 카셋트의 수납피치의 차를 흡수하면서 처리용 카셋트에서 빈 반송용 카셋트에의 처리가 끝난 기판의 이송을 행한다. 처리가 끝난 기판의 이송에 끝난 빈 처리용카셋트는 처리용카셋트 버퍼부를 거쳐 로더부로 반송되어 대기한다. 한편 처리가 끝난 기판이 수납된 반송용카셋트는 본 장치에 반출되어 다음 공정으로 반송된다.

Description

기판표면 처리장치 및 기판표면 처리방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1실시예에 관한 기판 표면처리장치의 외관을 나타내는 사시도이고,
제2도는 제1실시예 장치 내의 구성을 나타내는 평면도이고,
제3A도, 제3B도, 제3C도는 반송용 카셋트의 구성을 나타내는 도면이고,
제4A도, 제4B도, 제4C도는 처리용 카셋트의 구성을 나타내는 도면이고,
제5도는 제1실시예 장치의 로더부·언로더부 부근의 개략구성을 나타내는 도면이고,
제6도는 로더부 기판 이송로보트의 구성을 나타내는 도면이고,
제7도는 기판의 이송 순서를 설명하기 위한 도면이고,
제8도는 자세전환 로보트의 구성과 처리카셋트를 Y방향으로 반송하는 표면처리 로보트의 구성을 나타내는 도면이고,
제9도는 처리용카셋트를 X방향으로 반송하는 표면처리 로보트의 구성을 나타내는 도면이고,
제10도는 반송용카셋트 반송로보트의 구성을 나타내는 도면이고,
제11도는 기판 이송 로보트의 변형예의 구성을 나타내는 도면이다.

Claims (7)

  1. 카셋트에 수납된 복수매의 기판에 대하여 표면처리를 행하는 기판표면처리장치로서, 복수매의 기판을 소정의 피치로 수납하는 반송용카셋트가 얹혀지는 반송용카셋트 이송부와, 상기 반송용카셋트와는 다른 피치로 복수매의 기판을 수납하는 처리용카셋트가 얹혀지는 처리용카셋트 이송부와, 상기 반송용카셋트 이송부의 반송용카셋트와, 상기 처리용카셋트 이송부의 처리용카셋트와의 사이에서 각 카셋트의 수납피치로 각 기판이 수납되어 복수매의 기판 이송을 행하는 기판이송수단과, 상기 처리용카셋트에 수납된 복수매의 기판에 대하여 표면처리를 행하는 표면처리부와를 포함하고, 상기 기판 이송수단에 의한 상기 반송용카셋트에서 상기 처리용카셋트로의 기판의 이송에 의하여 표면처리전의 복수매의 기판이 수납된 처리용카셋트를 상기 처리용카셋트 이송부에서 상기 표면처리부를 거쳐 상기 처리용카셋트 이송부에 반송하는 표면처리용 반송수단.
  2. 제1항에 있어서, 상기 기판이송수단은, 상기 반송용카셋트 또는 상기 처리용카셋트에 수납된 기판은 1매씩 수평방향으로 인출함과 동시에 상기 인출된 기판을 상기 처리용카셋트 또는 상기 반송용카셋트에 수평방향으로 삽입하는 기판인출 및 삽입수단과, 상기 기판인출 및 삽입수단을 수직방향으로 변위시키는 수직방향 변위수단을 구비하는 기판표면처리장치.
  3. 제1항에 있어서, 상기 반송용카셋트 이송부는 반송용카셋트 로더이송부와 반송용카셋트 언로더이송부로 구성되고, 상기 처리용카셋트 이송부는, 처리용카셋트 로더이송부와, 처리용카셋트 언로더이송부로 구성되며, 상기기판 이송수단은, 상기반송용카셋트로더 이송부의 반송용카셋트에 수납된 표면처리전의 복수매의 기판을 상기 처리용카셋트의 수납피치로 상기 처리용카셋트 로더이송부의 빈 처리용카셋트에 이송하는 로더부 기판 이송수단과, 상기 처리용카셋트 언로더이송부의 처리용카셋트에 수납된 표면처리가 끝난 복수매의 기판을 상기 반송용카셋트의 수납피치로 상기 반송용카셋트 언로더이송부의 빈 반송용카셋트에 이송하는 언로더부 기판 이송수단으로 구성되고, 상기 표면처리용 반송수단은, 상기로더부 기판이송수단에 의한 기판의 이송에 의하여 표면처리전의 복수매의 기판이 수납된 처리용카셋트를 상기 처리용 카셋트로더 이송부에서 상기 표면처리부를 거쳐 상기 처리용카셋트 언로더 이송부에 반송하도록 구성된 기판표면처리장치.
  4. 제3항에 있어서, 상기 기판 표면처리장치의 밖과 상기 반송용카셋트 이송부와의 사이에서 복수매의 기판이 수납된 상기 반송용카셋트의 송출을 행하는 반송용카셋트송출부를 설치하며, 상기 반송용카셋트 송출부는 상기 기판표면처리장치의 밖과 상기 반송용카셋트로더 이송부와의 사이에서 표면처리전의 복수매의 기판이 수납된 반송용카셋트를 송출하는 반송용카셋트 로더 송출부와, 상기 기판표면처리장치의 밖과 상기 반송용카셋트 언로더 이송부와의 사이에서 표면처리가 끝난 복수매의 기판이 수납된 반송용카셋트를 송출하는 반송용카 셋트 언로더 송출부는 포함하는 기판표면처리장치.
  5. 제4항에 있어서, 상기 표면처리용 반송수단은, 반송방향이 도중에서 반송된 반송경로를 가지며, 또 이 반송경로를 따라 상기 반송용카셋트로더 송출부 상기 반송용카셋트로더 이송부, 상기 로더부기판 이송수단, 상기 처리용카셋트 로더이송부, 상기 표면처리부, 상기 처리용카셋트 언로더 이송부, 상기 언로더부판 이송수단, 상기 반송용카셋트 언로더 이송부, 상기 반송용카셋트 언로더 송출부가 배열설치되어 있는 기판표면처리장치.
  6. 제3항에 있어서, 상기 반송용카셋트로더 이송부와 상기 반송용카셋트언로더 이송부와의 사이에 설치한 빈 반송용카셋트를 대기시켜 두기 위한 반송용카셋트버퍼부와, 상기 로더부기판이송수단에 의한 기판의 이송이 끝난후의 빈 반송용카셋트를 상기 반송용카셋트로더 이송부에서 상기 반송용카셋트 버퍼부를 거쳐 상기 반송용카셋트 언로더 이송부에 반송하는 반송용카셋트 반송수단을 구비하는 기판표면처리장치.
  7. 제6항에 있어서, 상기 반송용카셋트는 버퍼부는 상기 반송용카셋트로더 이송부와 상기 반송용카셋트 언로더 이송부와의 사이에 배열된 복수개의 재치대는 포함하며, 상기 반송용카셋트 반송수단에 의한 빈 반송용카셋트의 반송은 상기 반송용카셋트 언로더 이송부의 사용상황(반송용 카셋트의 재치상태)에 따라 빈 반송용카셋트가 상기 각 재치대상을 상기 반송용카셋트 언로더 이송부 방향으로 차례로 보내지도록 한 기판표면처리장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950016644A 1994-06-27 1995-06-21 기판표면 처리장치 및 기판표면 처리방법 KR0168192B1 (ko)

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