KR940008130A - 반도체 장치 및 그 제조 방법 - Google Patents
반도체 장치 및 그 제조 방법 Download PDFInfo
- Publication number
- KR940008130A KR940008130A KR1019920022398A KR920022398A KR940008130A KR 940008130 A KR940008130 A KR 940008130A KR 1019920022398 A KR1019920022398 A KR 1019920022398A KR 920022398 A KR920022398 A KR 920022398A KR 940008130 A KR940008130 A KR 940008130A
- Authority
- KR
- South Korea
- Prior art keywords
- region
- semiconductor device
- buried layer
- substrate
- conductive form
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 claims 5
- 230000003071 parasitic effect Effects 0.000 abstract 2
- 230000005669 field effect Effects 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8248—Combination of bipolar and field-effect technology
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1083—Substrate region of field-effect devices of field-effect transistors with insulated gate with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/732—Vertical transistors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/01—Bipolar transistors-ion implantation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/011—Bipolar transistors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/136—Resistors
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
반도체 장치 및 그 제조 방법 n형 및 p형 전도성이 수직 적층된 영역(50 또는 74)이 반도체 장치 및 주변 웰 영역 사이의 기생 커패시턴스를 감소하기 위하여 바이폴라(48) 및 전계효과(72) 트랜지스터 주위에 형성된다. 역바이어스하에서는 수직 적층된 영역(50 또는 74)의 일부가 완전히 공핍되어 반도체 장치 및 웰 영역 사이의 기생 커패시턴스가 감소하게 된다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도 내지 제7도는 본 발명의 일실시예에 따른 과정 단계의 단면도.
Claims (3)
- 제1전도성 형태의 기판(12), 기판(12)내에 있는 제2전도성 형태의 매몰층(14), 매몰층(14)으로부터 측면으로 옵셋된 제1전도성 형태의 제1영역(16/22), 매몰층(14) 및 제1영역(16/22) 사이에 있는 제2전도성 형태의 제2영역(20), 매몰층(14) 및 제2영역(20) 을 뒤덮고 있는 제1전도성 형태의 제3영역(18), 제3영역(18)의 일부내에 있는 베이스 영역(32), 베이스 영역(32)을 뒤덮고 있는 에미터 영역(46)과, 제3영역(18)으로 확장되어 매몰층(14)에 전기적으로 결합되어 있는 컬렉터 접촉영역(26)을 구비하는 반도체 장치.
- 컬렉터 접촉 영역(26)을 갖는 바이폴라 트랜지스터(48)와 저항(40)을 구비하며 상기 저항(40)은 제1단자(42) 및 제2단자(44)를 가지며 저항(40)의 제2단자(44)는 컬렉터 접촉영역(26)의 일부와 밀접한 관계가 있는 것을 특징으로 하는 반도체 장치.
- 제1전도성 형태의 기판(12), 기판(12)내에 있는 제2전도성 형태의 매몰층(14), 기판(12)을 뒤덮고 있는 제1전도성 형태의 도핑된 영역(18), 도핑된 영역(18)의 일부내에 있는 베이스 영역(32), 상부 표면(36)과 하부표면(38)을 가지며 상부 표면(36)은 베이스 영역(32)에 인접하며 하부 표면(38)은 매몰층(14)에 인접하고 있고 도핑된 영역(18)내에 있는 제2전도성 형태의 컬렉터 영역(34), 베이스 영역(32)을 뒤덮고 있는 에미터 영역(46)과 도핑된 영역(18)으로 확장되고 제 1매몰층(14)에 전기전으로 결합되어 있는 컬렉터 접촉 영역(26)을 구비하고 있는 반도체 장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/939,342 US5504363A (en) | 1992-09-02 | 1992-09-02 | Semiconductor device |
US939,342 | 1992-09-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940008130A true KR940008130A (ko) | 1994-04-28 |
KR100263790B1 KR100263790B1 (ko) | 2000-08-16 |
Family
ID=25473007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920022398A KR100263790B1 (ko) | 1992-09-02 | 1992-11-26 | 반도체 장치 및 그 제조방법 |
Country Status (5)
Country | Link |
---|---|
US (2) | US5504363A (ko) |
EP (1) | EP0603437A1 (ko) |
JP (1) | JPH06112217A (ko) |
KR (1) | KR100263790B1 (ko) |
SG (1) | SG85053A1 (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3326990B2 (ja) * | 1994-09-26 | 2002-09-24 | ソニー株式会社 | バイポーラトランジスタ及びその製造方法 |
KR100448085B1 (ko) * | 1997-05-21 | 2004-12-03 | 삼성전자주식회사 | 패드의기생캐패시턴스감소형반도체장치 |
US6323538B1 (en) | 1999-01-12 | 2001-11-27 | Matsushita Electric Industrial Co., Ltd. | Bipolar transistor and method for fabricating the same |
DE10151203A1 (de) * | 2001-10-17 | 2003-08-07 | Infineon Technologies Ag | Halbleiterstruktur mit verringerter kapazitiver Kopplung zwischen Bauelementen |
DE10151132A1 (de) * | 2001-10-17 | 2003-05-08 | Infineon Technologies Ag | Halbleiterstruktur mit einem von dem Substrat kapazitiv entkoppelten Bauelementen |
KR100674987B1 (ko) | 2005-08-09 | 2007-01-29 | 삼성전자주식회사 | 벌크 웨이퍼 기판에 형성된 트랜지스터의 구동 방법 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
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GB1262502A (en) * | 1968-02-05 | 1972-02-02 | Western Electric Co | Improvements in or relating to semiconductor devices and methods of making them |
BE758683A (fr) * | 1969-11-10 | 1971-05-10 | Ibm | Procede de fabrication d'un dispositif monolithique auto-isolant et structure de transistor a socle |
US3654530A (en) * | 1970-06-22 | 1972-04-04 | Ibm | Integrated clamping circuit |
US3631309A (en) * | 1970-07-23 | 1971-12-28 | Semiconductor Elect Memories | Integrated circuit bipolar memory cell |
NL166156C (nl) * | 1971-05-22 | 1981-06-15 | Philips Nv | Halfgeleiderinrichting bevattende ten minste een op een halfgeleidersubstraatlichaam aangebrachte halfge- leiderlaag met ten minste een isolatiezone, welke een in de halfgeleiderlaag verzonken isolatielaag uit door plaatselijke thermische oxydatie van het half- geleidermateriaal van de halfgeleiderlaag gevormd isolerend materiaal bevat en een werkwijze voor het vervaardigen daarvan. |
DE2137976C3 (de) * | 1971-07-29 | 1978-08-31 | Ibm Deutschland Gmbh, 7000 Stuttgart | Monolithischer Speicher und Verfahren zur Herstellung |
US3945032A (en) * | 1972-05-30 | 1976-03-16 | Ferranti Limited | Semiconductor integrated circuit device having a conductive plane and a diffused network of conductive tracks |
SE361232B (ko) * | 1972-11-09 | 1973-10-22 | Ericsson Telefon Ab L M | |
US3933528A (en) * | 1974-07-02 | 1976-01-20 | Texas Instruments Incorporated | Process for fabricating integrated circuits utilizing ion implantation |
SU773793A1 (ru) * | 1977-11-02 | 1980-10-23 | Предприятие П/Я -6429 | Способ изготовлени полупроводниковых интегральных бипол рных схем |
JPS55138267A (en) * | 1979-04-12 | 1980-10-28 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor integrated circuit containing resistance element |
JPS5829628B2 (ja) * | 1979-11-22 | 1983-06-23 | 富士通株式会社 | 半導体記憶装置 |
US4416055A (en) * | 1981-12-04 | 1983-11-22 | Gte Laboratories Incorporated | Method of fabricating a monolithic integrated circuit structure |
US5218228A (en) * | 1987-08-07 | 1993-06-08 | Siliconix Inc. | High voltage MOS transistors with reduced parasitic current gain |
US4868135A (en) * | 1988-12-21 | 1989-09-19 | International Business Machines Corporation | Method for manufacturing a Bi-CMOS device |
US5227654A (en) * | 1989-05-17 | 1993-07-13 | Kabushiki Kaisha Toshiba | Semiconductor device with improved collector structure |
US5206182A (en) * | 1989-06-08 | 1993-04-27 | United Technologies Corporation | Trench isolation process |
JP2611450B2 (ja) * | 1989-08-30 | 1997-05-21 | 日本電気株式会社 | 半導体集積回路及びその製造方法 |
JPH07109860B2 (ja) * | 1990-01-19 | 1995-11-22 | 株式会社東芝 | 電荷転送デバイスを含む半導体装置およびその製造方法 |
US5045483A (en) * | 1990-04-02 | 1991-09-03 | National Semiconductor Corporation | Self-aligned silicided base bipolar transistor and resistor and method of fabrication |
JPH04239760A (ja) * | 1991-01-22 | 1992-08-27 | Sharp Corp | 半導体装置の製造法 |
US5316964A (en) * | 1991-05-31 | 1994-05-31 | Linear Technology Corporation | Method of forming integrated circuits with diffused resistors in isolation regions |
US5158900A (en) * | 1991-10-18 | 1992-10-27 | Hewlett-Packard Company | Method of separately fabricating a base/emitter structure of a BiCMOS device |
JP2551353B2 (ja) * | 1993-10-07 | 1996-11-06 | 日本電気株式会社 | 半導体装置及びその製造方法 |
-
1992
- 1992-09-02 US US07/939,342 patent/US5504363A/en not_active Expired - Fee Related
- 1992-11-26 KR KR1019920022398A patent/KR100263790B1/ko not_active IP Right Cessation
- 1992-12-22 SG SG9602290A patent/SG85053A1/en unknown
- 1992-12-22 EP EP92311718A patent/EP0603437A1/en not_active Withdrawn
- 1992-12-25 JP JP4358054A patent/JPH06112217A/ja active Pending
-
1995
- 1995-05-22 US US08/446,397 patent/US5624854A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100263790B1 (ko) | 2000-08-16 |
US5624854A (en) | 1997-04-29 |
JPH06112217A (ja) | 1994-04-22 |
EP0603437A1 (en) | 1994-06-29 |
US5504363A (en) | 1996-04-02 |
SG85053A1 (en) | 2001-12-19 |
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