KR930000881B1 - 세라믹 다층 회로판 및 반도체 모듈 - Google Patents
세라믹 다층 회로판 및 반도체 모듈 Download PDFInfo
- Publication number
- KR930000881B1 KR930000881B1 KR1019870005624A KR870005624A KR930000881B1 KR 930000881 B1 KR930000881 B1 KR 930000881B1 KR 1019870005624 A KR1019870005624 A KR 1019870005624A KR 870005624 A KR870005624 A KR 870005624A KR 930000881 B1 KR930000881 B1 KR 930000881B1
- Authority
- KR
- South Korea
- Prior art keywords
- ceramic
- thermal expansion
- expansion coefficient
- layer
- circuit board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
- C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
- C03C3/066—Glass compositions containing silica with less than 40% silica by weight containing boron containing zinc
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
- C03C3/093—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium containing zinc or zirconium
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/69—Insulating materials thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/401—Package configurations characterised by multiple insulating or insulated package substrates, interposers or RDLs
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49158—Manufacturing circuit on or in base with molding of insulated base
- Y10T29/4916—Simultaneous circuit manufacturing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Compositions Of Oxide Ceramics (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP86-130136 | 1986-06-06 | ||
| JP61130136A JPS62287658A (ja) | 1986-06-06 | 1986-06-06 | セラミックス多層回路板 |
| JP130136 | 1986-06-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR880001052A KR880001052A (ko) | 1988-03-31 |
| KR930000881B1 true KR930000881B1 (ko) | 1993-02-08 |
Family
ID=15026818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019870005624A Expired - Fee Related KR930000881B1 (ko) | 1986-06-06 | 1987-06-03 | 세라믹 다층 회로판 및 반도체 모듈 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US4821142A (https=) |
| JP (1) | JPS62287658A (https=) |
| KR (1) | KR930000881B1 (https=) |
| CN (1) | CN1005241B (https=) |
Families Citing this family (62)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01248593A (ja) * | 1988-03-30 | 1989-10-04 | Ngk Insulators Ltd | セラミック多層配線基板 |
| DE3823469A1 (de) * | 1988-07-11 | 1990-01-18 | Bodenseewerk Geraetetech | Filteranordnung |
| US4943845A (en) * | 1988-08-02 | 1990-07-24 | Northern Telecom Limited | Thick film packages with common wafer aperture placement |
| JPH0268992A (ja) * | 1988-09-02 | 1990-03-08 | Nec Corp | 多層配線基板 |
| EP0441180B1 (en) * | 1989-01-09 | 1999-07-07 | Mitsubishi Denki Kabushiki Kaisha | Integrated circuits containing microwave circuits |
| US5136271A (en) * | 1989-01-09 | 1992-08-04 | Mitsubishi Denki Kabushiki Kaisha | Microwave integrated circuit mountings |
| US5080958A (en) * | 1989-08-01 | 1992-01-14 | E. I. Du Pont De Nemours And Company | Multilayer interconnects |
| US5077451A (en) * | 1990-01-17 | 1991-12-31 | Aptix Corporation | Custom tooled printed circuit board |
| US5055973A (en) * | 1990-01-17 | 1991-10-08 | Aptix Corporation | Custom tooled printed circuit board |
| US5132648A (en) * | 1990-06-08 | 1992-07-21 | Rockwell International Corporation | Large array MMIC feedthrough |
| JP3021586B2 (ja) * | 1990-09-17 | 2000-03-15 | 富士通株式会社 | 低誘電率セラミック基板とグリーンシートの製造方法 |
| JP2906282B2 (ja) * | 1990-09-20 | 1999-06-14 | 富士通株式会社 | ガラスセラミック・グリーンシートと多層基板、及び、その製造方法 |
| US5379191A (en) * | 1991-02-26 | 1995-01-03 | Microelectronics And Computer Technology Corporation | Compact adapter package providing peripheral to area translation for an integrated circuit chip |
| JPH04314394A (ja) * | 1991-04-12 | 1992-11-05 | Fujitsu Ltd | ガラスセラミック回路基板とその製造方法 |
| EP0585376A4 (en) * | 1991-05-23 | 1994-06-08 | Motorola Inc | Integrated circuit chip carrier |
| EP0518701A3 (en) * | 1991-06-14 | 1993-04-21 | Aptix Corporation | Field programmable circuit module |
| JP2610375B2 (ja) * | 1992-02-27 | 1997-05-14 | 富士通株式会社 | 多層セラミック基板の製造方法 |
| US5483421A (en) * | 1992-03-09 | 1996-01-09 | International Business Machines Corporation | IC chip attachment |
| US5313366A (en) * | 1992-08-12 | 1994-05-17 | International Business Machines Corporation | Direct chip attach module (DCAM) |
| US5925444A (en) | 1992-12-09 | 1999-07-20 | Hitachi, Ltd. | Organic binder for shaping ceramic, its production method and product employing the same |
| US5785789A (en) * | 1993-03-18 | 1998-07-28 | Digital Equipment Corporation | Low dielectric constant microsphere filled layers for multilayer electrical structures |
| US5617131A (en) * | 1993-10-28 | 1997-04-01 | Kyocera Corporation | Image device having a spacer with image arrays disposed in holes thereof |
| US5548486A (en) * | 1994-01-21 | 1996-08-20 | International Business Machines Corporation | Pinned module |
| US5808351A (en) * | 1994-02-08 | 1998-09-15 | Prolinx Labs Corporation | Programmable/reprogramable structure using fuses and antifuses |
| US5726482A (en) * | 1994-02-08 | 1998-03-10 | Prolinx Labs Corporation | Device-under-test card for a burn-in board |
| US5537108A (en) * | 1994-02-08 | 1996-07-16 | Prolinx Labs Corporation | Method and structure for programming fuses |
| US5834824A (en) * | 1994-02-08 | 1998-11-10 | Prolinx Labs Corporation | Use of conductive particles in a nonconductive body as an integrated circuit antifuse |
| US5813881A (en) * | 1994-02-08 | 1998-09-29 | Prolinx Labs Corporation | Programmable cable and cable adapter using fuses and antifuses |
| US5572409A (en) * | 1994-02-08 | 1996-11-05 | Prolinx Labs Corporation | Apparatus including a programmable socket adapter for coupling an electronic component to a component socket on a printed circuit board |
| US5917229A (en) * | 1994-02-08 | 1999-06-29 | Prolinx Labs Corporation | Programmable/reprogrammable printed circuit board using fuse and/or antifuse as interconnect |
| US5489465A (en) * | 1994-06-03 | 1996-02-06 | International Business Machines Corporation | Edge seal technology for low dielectric/porous substrate processing |
| EP0697725B1 (en) * | 1994-08-19 | 2002-11-20 | Hitachi, Ltd. | Ceramic composition for circuit substrat and its fabrication |
| WO1996009645A1 (en) | 1994-09-20 | 1996-03-28 | Hitachi, Ltd. | Semiconductor device and its mounting structure |
| US6423571B2 (en) | 1994-09-20 | 2002-07-23 | Hitachi, Ltd. | Method of making a semiconductor device having a stress relieving mechanism |
| US5962815A (en) * | 1995-01-18 | 1999-10-05 | Prolinx Labs Corporation | Antifuse interconnect between two conducting layers of a printed circuit board |
| US5878483A (en) * | 1995-06-01 | 1999-03-09 | International Business Machines Corporation | Hammer for forming bulges in an array of compliant pin blanks |
| JP3330468B2 (ja) * | 1995-06-30 | 2002-09-30 | 富士通株式会社 | 配線基板及び半導体装置 |
| US5906042A (en) * | 1995-10-04 | 1999-05-25 | Prolinx Labs Corporation | Method and structure to interconnect traces of two conductive layers in a printed circuit board |
| US5767575A (en) * | 1995-10-17 | 1998-06-16 | Prolinx Labs Corporation | Ball grid array structure and method for packaging an integrated circuit chip |
| US5872338A (en) * | 1996-04-10 | 1999-02-16 | Prolinx Labs Corporation | Multilayer board having insulating isolation rings |
| DE19646369B4 (de) * | 1996-11-09 | 2008-07-31 | Robert Bosch Gmbh | Keramische Mehrlagenschaltung und Verfahren zu ihrer Herstellung |
| US6034427A (en) * | 1998-01-28 | 2000-03-07 | Prolinx Labs Corporation | Ball grid array structure and method for packaging an integrated circuit chip |
| US6081026A (en) * | 1998-11-13 | 2000-06-27 | Fujitsu Limited | High density signal interposer with power and ground wrap |
| US6239485B1 (en) | 1998-11-13 | 2001-05-29 | Fujitsu Limited | Reduced cross-talk noise high density signal interposer with power and ground wrap |
| US6430058B1 (en) * | 1999-12-02 | 2002-08-06 | Intel Corporation | Integrated circuit package |
| US6413849B1 (en) | 1999-12-28 | 2002-07-02 | Intel Corporation | Integrated circuit package with surface mounted pins on an organic substrate and method of fabrication therefor |
| JP3407716B2 (ja) * | 2000-06-08 | 2003-05-19 | 株式会社村田製作所 | 複合積層電子部品 |
| JP3785903B2 (ja) * | 2000-07-21 | 2006-06-14 | 株式会社村田製作所 | 多層基板及びその製造方法 |
| US6399892B1 (en) | 2000-09-19 | 2002-06-04 | International Business Machines Corporation | CTE compensated chip interposer |
| JP3669255B2 (ja) * | 2000-09-19 | 2005-07-06 | 株式会社村田製作所 | セラミック多層基板の製造方法および未焼成セラミック積層体 |
| US6726996B2 (en) | 2001-05-16 | 2004-04-27 | International Business Machines Corporation | Laminated diffusion barrier |
| US7005106B2 (en) * | 2001-08-30 | 2006-02-28 | Sumida Corporation | Lead-free solder alloy and electronic components using it |
| DE10234364B4 (de) * | 2002-07-27 | 2007-12-27 | Robert Bosch Gmbh | Glas-Keramik-Verbundwerkstoff, dessen Verwendung als keramische Folie, Schichtverbund oder Mikrohybrid und Verfahren zu dessen Herstellung |
| US7135767B2 (en) * | 2003-07-29 | 2006-11-14 | Agilent Technologies, Inc. | Integrated circuit substrate material and method |
| EP2026642B1 (en) * | 2006-06-02 | 2017-12-27 | Murata Manufacturing Co. Ltd. | Multilayer ceramic substrate, method for producing the same and electronic component |
| CN101402514B (zh) * | 2007-10-03 | 2011-09-07 | 日立金属株式会社 | 氧化物接合用焊料合金和使用了它的氧化物接合体 |
| US9125301B2 (en) * | 2011-10-18 | 2015-09-01 | Integrated Microwave Corporation | Integral heater assembly and method for carrier or host board of electronic package assembly |
| CN102548197B (zh) * | 2012-01-30 | 2016-08-03 | 华为技术有限公司 | 一种高速印制电路板 |
| CN102869207B (zh) * | 2012-09-24 | 2014-08-13 | 胜宏科技(惠州)股份有限公司 | 一种多层led混合材料线路板的层压方法 |
| TW201641461A (zh) * | 2015-04-28 | 2016-12-01 | 賀利氏貴金屬北美康舍霍肯有限責任公司 | 介電物帶組合物 |
| JP2024148356A (ja) * | 2023-04-05 | 2024-10-18 | イビデン株式会社 | 配線基板 |
| CN120698801B (zh) * | 2025-08-27 | 2025-11-18 | 军瓷电子材料河北有限公司 | 一种低介电损耗氮化铝陶瓷基板及其制备方法 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL232500A (https=) * | 1957-10-22 | |||
| US4109377A (en) * | 1976-02-03 | 1978-08-29 | International Business Machines Corporation | Method for preparing a multilayer ceramic |
| US4374391A (en) * | 1980-09-24 | 1983-02-15 | Bell Telephone Laboratories, Incorporated | Device fabrication procedure |
| JPS5789212A (en) * | 1980-11-25 | 1982-06-03 | Tdk Electronics Co Ltd | Composite ceramic electronic material |
| JPS599992A (ja) * | 1982-07-08 | 1984-01-19 | 株式会社日立製作所 | 多層配線基板の製造方法 |
| JPS5911700A (ja) * | 1982-07-12 | 1984-01-21 | 株式会社日立製作所 | セラミツク多層配線回路板 |
| JPS5922399A (ja) * | 1982-07-29 | 1984-02-04 | ソニー株式会社 | プリント基板収納装置 |
| JPS5983985A (ja) * | 1982-10-30 | 1984-05-15 | 松下電工株式会社 | 発泡セラミツク板の製造方法 |
| JPS59107596A (ja) * | 1982-12-13 | 1984-06-21 | 株式会社日立製作所 | セラミツク多層配線回路板 |
| JPS59151443A (ja) * | 1983-02-17 | 1984-08-29 | Fujitsu Ltd | 半導体装置 |
| JPS6028296A (ja) * | 1983-07-27 | 1985-02-13 | 株式会社日立製作所 | セラミツク多層配線回路板 |
| JPS60136294A (ja) * | 1983-12-23 | 1985-07-19 | 株式会社日立製作所 | セラミック多層配線回路板 |
| US4650923A (en) * | 1984-06-01 | 1987-03-17 | Narumi China Corporation | Ceramic article having a high moisture proof |
| JPS6156493A (ja) * | 1984-08-28 | 1986-03-22 | 日本電気株式会社 | 多層回路基板の電源配線構造 |
| JPS6183674A (ja) * | 1984-10-01 | 1986-04-28 | 株式会社日立製作所 | セラミツク配線基板及びその製造方法 |
| JPH0634452B2 (ja) * | 1985-08-05 | 1994-05-02 | 株式会社日立製作所 | セラミツクス回路基板 |
| JPS6273799A (ja) * | 1985-09-27 | 1987-04-04 | 日本電気株式会社 | 多層セラミツク配線基板 |
| JPS62136865A (ja) * | 1985-12-11 | 1987-06-19 | Hitachi Ltd | モジユ−ル実装構造 |
| US5024883A (en) * | 1986-10-30 | 1991-06-18 | Olin Corporation | Electronic packaging of components incorporating a ceramic-glass-metal composite |
| JPH06183674A (ja) * | 1992-12-21 | 1994-07-05 | Toshiba Corp | エレベータ |
-
1986
- 1986-06-06 JP JP61130136A patent/JPS62287658A/ja active Granted
-
1987
- 1987-06-03 KR KR1019870005624A patent/KR930000881B1/ko not_active Expired - Fee Related
- 1987-06-04 US US07/058,255 patent/US4821142A/en not_active Ceased
- 1987-06-05 CN CN87104031.XA patent/CN1005241B/zh not_active Expired
-
1991
- 1991-04-10 US US07/683,199 patent/USRE34887E/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR880001052A (ko) | 1988-03-31 |
| JPH0543316B2 (https=) | 1993-07-01 |
| USRE34887E (en) | 1995-03-28 |
| US4821142A (en) | 1989-04-11 |
| CN1005241B (zh) | 1989-09-20 |
| JPS62287658A (ja) | 1987-12-14 |
| CN87104031A (zh) | 1987-12-16 |
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