KR920007133A - 표면 장착중에 균열을 방지하기 위한 집적 회로 디바이스 및 그 방법 - Google Patents

표면 장착중에 균열을 방지하기 위한 집적 회로 디바이스 및 그 방법 Download PDF

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Publication number
KR920007133A
KR920007133A KR1019910016546A KR910016546A KR920007133A KR 920007133 A KR920007133 A KR 920007133A KR 1019910016546 A KR1019910016546 A KR 1019910016546A KR 910016546 A KR910016546 A KR 910016546A KR 920007133 A KR920007133 A KR 920007133A
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South Korea
Prior art keywords
chip
semiconductor
lead
lead frame
integrated circuit
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KR1019910016546A
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English (en)
Inventor
지. 하이넨 캐서린
Original Assignee
엔. 라이스 머레트
텍사스 인스트루먼트츠 인코포레이티드
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Publication of KR920007133A publication Critical patent/KR920007133A/ko

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    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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Abstract

내용 없음

Description

표면 장착중에 균열을 방지하기 위한 집적 회로 디바이스 및 그 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 전형적인 집적회로 디바이스 패키지를 도시한 단면도,
제2도는 리드 프레임, 접착 테이프 및 반도체 칩을 나타낸 리드오버 칩 중앙 본드 디바이스의 분해 사시도,
제2a도는 반도체 칩의 접속 상태를 나타낸 리드 오버 칩 중앙본드 디바이스의 정면도.
제2b도는 와이어 본드 접속을 나타낸 리드 오버 칩 중앙본드 디바이스의 정면도.
제2c도는 봉입 몰드 화합물이 투명한 리드 오버 칩 중앙본드 디바이스의 정면도.
제2d도는 완성될 리드 오버 칩 중앙본드 패키지의 측면도.
제2e도는 완성된 리드 오버 칩 중앙본드 집적 회로 패키지를 부분적으로 절취하여 도시한 사시도.
제3도는 봉입물질의 균일 상태를 나타낸 LOC 패키지의 단면도.
제4도는 반도체 칩의 비활성 면상의 아미노프로필트리에톡시실란 코팅을 나타낸 LOC 패키지의 단면도.

Claims (9)

  1. 리드 오버 칩 리드 프레임을 장착시키기에 적합한 반도체 집적 회로 칩에 있어서, 리드 오버 칩 리드 프레임에 부착된 활성 면과 비활성 배면을 포함하는 집적 회로 칩 및 집적 회로 칩의 비활성 배면상의 아미노프로필트리에톡시실란 코팅막을 포함하는 것을 특징으로 하는 반도체 집적 회로 칩.
  2. 제1항에 있어서, 상기 아미노프로필트리에톡시실란 코팅막의 두께가 1미크론 이하인 것을 특징으로 하는 반도체 집적 회로 칩.
  3. 활성면 및 배면을 갖고 있는 반도체 회로 칩, 상기 반도체 칩을 지지하고 외부 접속부를 제공하며, 한 단부에 의해 반도체 칩에 접속된 리드 핑거를 포함하는 리드 프레임 및 반도체 칩, 리드 프레임, 봉입물을 거쳐 연장하는 리드 핑거의 다른 단부들을 봉입시키는 봉입물을 포함하고, 상기 반도체 칩이 봉입물에 대한 접착력을 촉진시키기 위해 배면상에 아미노프로필트리에톡시실란층을 포함하는 것을 특징으로 하는 반도체 패키지 디바이스.
  4. 제3항에 있어서, 상기 아미노프로필트리에톡시실란층의 두께가 1미크론 까지인 것을 특징으로 하는 반도체 패키지 디바이스.
  5. 제4항에 있어서, 상기 봉입물이 플라스틱인 것을 특징으로 하는 반도체 패키지 디바이스.
  6. 제5항에 있어서, 사기 리드 프레임이 리드 오버 칩 리드 프레임인 것을 특징으로 하는 반도체 패키지 디바이스.
  7. 제5항에 있어서, 상기 리드 프레임이 탭팩 테이프인 것을 특징으로 하는 반도체 패키지 디바이스.
  8. 제5항에 있어서, 상기 리드 프레임이 플립 칩 리드 프레임인 것을 특징으로 하는 반도체 패키지 디바이스.
  9. 인쇄 회로 기판의 표면 장착중에 패키지 균열에 저항력이 있는 반도체 패키지 디바이스를 제조하는 방법에 있어서, 반도체 칩의 활성 측면을 리드 오버 칩 리드 프레임에 접속시키는 단계, 아미노프로필트리에톡시실란막을 반도체 칩의 비활성 측면에 제공하는 단계 및 인쇄 회로 기판에 표면 장착되는 패키지 디바이스를 형성하기 위한 형태로 플라스틱으로 반도체 및 리드 오버 칩 리드 프레임을 패키징시키는 단계를 포함하는 것을 특징으로 하는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
KR1019910016546A 1990-09-24 1991-09-20 표면 장착중에 균열을 방지하기 위한 집적 회로 디바이스 및 그 방법 KR920007133A (ko)

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US07/586,821 US5227661A (en) 1990-09-24 1990-09-24 Integrated circuit device having an aminopropyltriethoxysilane coating
US586,821 1990-09-24

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Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0576708A1 (de) * 1992-07-01 1994-01-05 Siemens Aktiengesellschaft Integrierter Schaltkreis mit Leiterrahmen
KR950005269B1 (ko) * 1992-07-29 1995-05-22 삼성전자주식회사 반도체 패키지 구조 및 제조방법
US5331200A (en) * 1992-09-30 1994-07-19 Texas Instruments Incorporated Lead-on-chip inner lead bonding lead frame method and apparatus
US5567655A (en) * 1993-05-05 1996-10-22 Lsi Logic Corporation Method for forming interior bond pads having zig-zag linear arrangement
JPH0794539A (ja) * 1993-09-20 1995-04-07 Fujitsu Ltd 半導体装置
JP3534347B2 (ja) * 1993-11-04 2004-06-07 日東電工株式会社 半導体素子の製造方法,ウエハ貼付用粘着シート
US6236107B1 (en) * 1994-04-29 2001-05-22 Texas Instruments Incorporated Encapsulate resin LOC package and method of fabrication
US5429992A (en) * 1994-05-25 1995-07-04 Texas Instruments Incorporated Lead frame structure for IC devices with strengthened encapsulation adhesion
US5554569A (en) * 1994-06-06 1996-09-10 Motorola, Inc. Method and apparatus for improving interfacial adhesion between a polymer and a metal
US6066514A (en) * 1996-10-18 2000-05-23 Micron Technology, Inc. Adhesion enhanced semiconductor die for mold compound packaging
US5583372A (en) * 1994-09-14 1996-12-10 Micron Technology, Inc. Adhesion enhanced semiconductor die for mold compound packaging
US5923538A (en) * 1994-10-17 1999-07-13 Lsi Logic Corporation Support member for mounting a microelectronic circuit package
US5545921A (en) * 1994-11-04 1996-08-13 International Business Machines, Corporation Personalized area leadframe coining or half etching for reduced mechanical stress at device edge
US5811875A (en) * 1995-06-29 1998-09-22 Samsung Electronics Co., Ltd. Lead frames including extended tie-bars, and semiconductor chip packages using same
KR0167297B1 (ko) * 1995-12-18 1998-12-15 문정환 엘.오.씨 패키지 및 그 제조방법
US6007920A (en) * 1996-01-22 1999-12-28 Texas Instruments Japan, Ltd. Wafer dicing/bonding sheet and process for producing semiconductor device
US6277225B1 (en) 1996-03-13 2001-08-21 Micron Technology, Inc. Stress reduction feature for LOC lead frame
US5717246A (en) * 1996-07-29 1998-02-10 Micron Technology, Inc. Hybrid frame with lead-lock tape
US6426484B1 (en) 1996-09-10 2002-07-30 Micron Technology, Inc. Circuit and method for heating an adhesive to package or rework a semiconductor die
US5938956A (en) 1996-09-10 1999-08-17 Micron Technology, Inc. Circuit and method for heating an adhesive to package or rework a semiconductor die
US5811883A (en) * 1996-09-30 1998-09-22 Intel Corporation Design for flip chip joint pad/LGA pad
US5776799A (en) * 1996-11-08 1998-07-07 Samsung Electronics Co., Ltd. Lead-on-chip type semiconductor chip package using an adhesive deposited on chip active surfaces at a wafer level and method for manufacturing same
US6355881B1 (en) 1997-05-05 2002-03-12 Brant P. Braeges Means for sealing an electronic or optical component within an enclosure housing
US5923081A (en) * 1997-05-15 1999-07-13 Micron Technology, Inc. Compression layer on the leadframe to reduce stress defects
US5780923A (en) 1997-06-10 1998-07-14 Micron Technology, Inc. Modified bus bar with Kapton™ tape or insulative material on LOC packaged part
US6580157B2 (en) * 1997-06-10 2003-06-17 Micron Technology, Inc. Assembly and method for modified bus bar with Kapton™ tape or insulative material in LOC packaged part
US5986209A (en) 1997-07-09 1999-11-16 Micron Technology, Inc. Package stack via bottom leaded plastic (BLP) packaging
AU1310399A (en) 1997-11-05 1999-05-24 Robert A. Martin Chip housing, methods of making same and methods for mounting chips therein
US6124150A (en) * 1998-08-20 2000-09-26 Micron Technology, Inc. Transverse hybrid LOC package
JP2000124235A (ja) * 1998-10-16 2000-04-28 Oki Electric Ind Co Ltd 樹脂封止半導体装置
US6852567B1 (en) 1999-05-31 2005-02-08 Infineon Technologies A.G. Method of assembling a semiconductor device package
US6387732B1 (en) 1999-06-18 2002-05-14 Micron Technology, Inc. Methods of attaching a semiconductor chip to a leadframe with a footprint of about the same size as the chip and packages formed thereby
US6875640B1 (en) * 2000-06-08 2005-04-05 Micron Technology, Inc. Stereolithographic methods for forming a protective layer on a semiconductor device substrate and substrates including protective layers so formed
US20070117114A1 (en) * 2005-07-07 2007-05-24 Quanta Biosciences, Inc. Compositions and methods for increasing amplification efficiency
CN100446230C (zh) * 2006-01-25 2008-12-24 矽品精密工业股份有限公司 半导体封装结构及其制法
CN100446231C (zh) * 2006-01-25 2008-12-24 矽品精密工业股份有限公司 半导体封装结构及其制法
US8450148B2 (en) 2006-12-14 2013-05-28 Infineon Technologies, Ag Molding compound adhesion for map-molded flip-chip

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE31967E (en) * 1975-07-07 1985-08-13 National Semiconductor Corporation Gang bonding interconnect tape for semiconductive devices and method of making same
US4040874A (en) * 1975-08-04 1977-08-09 General Electric Company Semiconductor element having a polymeric protective coating and glass coating overlay
US4395527A (en) * 1978-05-17 1983-07-26 M & T Chemicals Inc. Siloxane-containing polymers
US4238528A (en) * 1978-06-26 1980-12-09 International Business Machines Corporation Polyimide coating process and material
US4230754A (en) * 1978-11-07 1980-10-28 Sprague Electric Company Bonding electronic component to molded package
US4499149A (en) * 1980-12-15 1985-02-12 M&T Chemicals Inc. Siloxane-containing polymers
US4480009A (en) * 1980-12-15 1984-10-30 M&T Chemicals Inc. Siloxane-containing polymers
US4477828A (en) * 1982-10-12 1984-10-16 Scherer Jeremy D Microcircuit package and sealing method
US4862245A (en) * 1985-04-18 1989-08-29 International Business Machines Corporation Package semiconductor chip
US4908086A (en) * 1985-06-24 1990-03-13 National Semiconductor Corporation Low-cost semiconductor device package process
US4732858A (en) * 1986-09-17 1988-03-22 Brewer Science, Inc. Adhesion promoting product and process for treating an integrated circuit substrate
KR880014671A (ko) * 1987-05-27 1988-12-24 미다 가쓰시게 수지로 충진된 반도체 장치
US5026667A (en) * 1987-12-29 1991-06-25 Analog Devices, Incorporated Producing integrated circuit chips with reduced stress effects
US4985751A (en) * 1988-09-13 1991-01-15 Shin-Etsu Chemical Co., Ltd. Resin-encapsulated semiconductor devices
US4916519A (en) * 1989-05-30 1990-04-10 International Business Machines Corporation Semiconductor package
US5164815A (en) * 1989-12-22 1992-11-17 Texas Instruments Incorporated Integrated circuit device and method to prevent cracking during surface mount

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