KR20260037110A - 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 - Google Patents

땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법

Info

Publication number
KR20260037110A
KR20260037110A KR1020267003340A KR20267003340A KR20260037110A KR 20260037110 A KR20260037110 A KR 20260037110A KR 1020267003340 A KR1020267003340 A KR 1020267003340A KR 20267003340 A KR20267003340 A KR 20267003340A KR 20260037110 A KR20260037110 A KR 20260037110A
Authority
KR
South Korea
Prior art keywords
solder
particles
electrode
concave portion
solder particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020267003340A
Other languages
English (en)
Korean (ko)
Inventor
구니히코 아카이
마사유키 미야지
준이치 가케하타
요시노리 에지리
Original Assignee
가부시끼가이샤 레조낙
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시끼가이샤 레조낙 filed Critical 가부시끼가이샤 레조낙
Publication of KR20260037110A publication Critical patent/KR20260037110A/ko
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor
    • B23K3/087Soldering or brazing jigs, fixtures or clamping means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016Soldering of electronic components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3465Application of solder
    • H05K3/3478Application of solder preforms; Transferring prefabricated solder patterns
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01Manufacture or treatment
    • H10W70/05Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/093Connecting or disconnecting other interconnections thereto or therefrom, e.g. connecting bond wires or bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/011Apparatus therefor
    • H10W72/0112Apparatus for manufacturing bump connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/012Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0104Tools for processing; Objects used during processing for patterning or coating
    • H05K2203/0113Female die used for patterning or transferring, e.g. temporary substrate having recessed pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03Metal processing
    • H05K2203/0338Transferring metal or conductive material other than a circuit pattern, e.g. bump, solder, printed component
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/04Soldering or other types of metallurgic bonding
    • H05K2203/041Solder preforms in the shape of solder balls
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/04Soldering or other types of metallurgic bonding
    • H05K2203/0425Solder powder or solder coated metal powder
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3489Composition of fluxes; Application thereof; Other processes of activating the contact surfaces
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
KR1020267003340A 2019-12-27 2020-12-15 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 Pending KR20260037110A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2019-238418 2019-12-27
JP2019238418 2019-12-27
KR1020227023759A KR102924379B1 (ko) 2019-12-27 2020-12-15 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법
PCT/JP2020/046763 WO2021131905A1 (ja) 2019-12-27 2020-12-15 はんだバンプ形成用部材、はんだバンプ形成用部材の製造方法、及びはんだバンプ付き電極基板の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020227023759A Division KR102924379B1 (ko) 2019-12-27 2020-12-15 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법

Publications (1)

Publication Number Publication Date
KR20260037110A true KR20260037110A (ko) 2026-03-17

Family

ID=76576072

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020267003340A Pending KR20260037110A (ko) 2019-12-27 2020-12-15 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법
KR1020227023759A Active KR102924379B1 (ko) 2019-12-27 2020-12-15 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020227023759A Active KR102924379B1 (ko) 2019-12-27 2020-12-15 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법

Country Status (6)

Country Link
US (2) US12246398B2 (https=)
EP (1) EP4084051A4 (https=)
JP (2) JP7661892B2 (https=)
KR (2) KR20260037110A (https=)
CN (1) CN115053330A (https=)
WO (1) WO2021131905A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4084051A4 (en) * 2019-12-27 2023-08-02 Resonac Corporation SOLDER BALL FORMING ELEMENT, METHOD OF MAKING A SOLDER BALL FORMING MEMBER AND METHOD OF MAKING AN ELECTRODE SUBSTRATE WITH A SOLDER BALL
JP7765730B2 (ja) * 2021-12-08 2025-11-07 富士電機株式会社 シート状はんだ
JP2023111125A (ja) * 2022-01-31 2023-08-10 株式会社レゾナック はんだバンプ付き電極基板の製造方法
JP7819555B2 (ja) * 2022-03-29 2026-02-25 株式会社レゾナック はんだバンプ形成用部材
CN119384768A (zh) 2022-09-26 2025-01-28 株式会社 Lg新能源 电池单体和制造该电池单体的接合装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004080024A (ja) 2002-08-02 2004-03-11 Senju Metal Ind Co Ltd はんだボール配置シート、その製造方法およびはんだバンプ形成方法
WO2006043377A1 (ja) 2004-10-19 2006-04-27 Senju Metal Industry Co., Ltd. はんだバンプ形成用シートとその製造方法
JP2017157626A (ja) 2016-02-29 2017-09-07 三菱マテリアル株式会社 はんだバンプの形成方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3207506B2 (ja) 1991-08-28 2001-09-10 株式会社日立製作所 電子回路装置の製造方法
JP2917595B2 (ja) * 1991-07-19 1999-07-12 松下電器産業株式会社 金属ボールの形成方法
US5643831A (en) * 1994-01-20 1997-07-01 Fujitsu Limited Process for forming solder balls on a plate having apertures using solder paste and transferring the solder balls to semiconductor device
US6025258A (en) * 1994-01-20 2000-02-15 Fujitsu Limited Method for fabricating solder bumps by forming solder balls with a solder ball forming member
JPH07249631A (ja) 1994-01-20 1995-09-26 Fujitsu Ltd はんだバンプ及びはんだボールの製造方法及び半導体装置の製造方法
TW250620B (en) * 1994-05-31 1995-07-01 At & T Corp Method for interconnecting an electronic device using a transferable soldercarrying medium
KR100192766B1 (ko) * 1995-07-05 1999-06-15 황인길 솔더볼을 입출력 단자로 사용하는 볼그리드 어레이 반도체 패키지의 솔더볼 평탄화 방법 및 그 기판구조
JP2798011B2 (ja) * 1995-07-10 1998-09-17 日本電気株式会社 半田ボール
JPH1013007A (ja) * 1996-03-29 1998-01-16 Ngk Spark Plug Co Ltd 半田バンプを有する配線基板及びその製造方法及び平坦化治具
JP3315871B2 (ja) 1996-09-03 2002-08-19 日本特殊陶業株式会社 半田バンプを有する配線基板及びその製造方法
US6656750B1 (en) * 1999-04-29 2003-12-02 International Business Machines Corporation Method for testing chips on flat solder bumps
US6245595B1 (en) * 1999-07-22 2001-06-12 National Semiconductor Corporation Techniques for wafer level molding of underfill encapsulant
EP1074844A3 (en) * 1999-08-03 2003-08-06 Lucent Technologies Inc. Testing integrated circuits
US7156361B1 (en) * 1999-09-02 2007-01-02 Micron Technology, Inc. Method and apparatus for forming metal contacts on a substrate
JP3872318B2 (ja) * 2001-08-17 2007-01-24 松下電器産業株式会社 半田バンプ形成方法および半田バンプ接合構造
JP4458835B2 (ja) * 2003-12-15 2010-04-28 東レエンジニアリング株式会社 半田バンプの形成方法及びその装置
JP4729963B2 (ja) * 2005-04-15 2011-07-20 パナソニック株式会社 電子部品接続用突起電極とそれを用いた電子部品実装体およびそれらの製造方法
KR101408730B1 (ko) * 2008-01-07 2014-06-17 세메스 주식회사 솔더 범프들을 형성하기 위한 템플릿 및 이의 제조 방법
JP5118574B2 (ja) 2008-08-07 2013-01-16 三井金属鉱業株式会社 はんだ粉及びはんだペースト
TWI462676B (zh) * 2009-02-13 2014-11-21 千住金屬工業股份有限公司 The solder bumps for the circuit substrate are formed using the transfer sheet
KR101678749B1 (ko) * 2011-10-26 2016-12-06 히타치가세이가부시끼가이샤 리플로우 필름, 땜납 범프 형성 방법, 땜납 접합의 형성 방법 및 반도체 장치
JP5889160B2 (ja) * 2012-10-17 2016-03-22 三菱電機株式会社 電子機器の製造方法
JP6009350B2 (ja) * 2012-12-28 2016-10-19 花王株式会社 電子部品が接合した回路基板の製造方法
GB2523983A (en) * 2013-12-17 2015-09-16 Conpart As Bonded assemblies with pre-deposited polymer balls on demarcated areas and methods of forming such bonded assemblies
CN104465424A (zh) * 2014-12-12 2015-03-25 南通富士通微电子股份有限公司 一种金属凸点制作方法
KR102398451B1 (ko) * 2015-01-13 2022-05-16 데쿠세리아루즈 가부시키가이샤 범프 형성용 필름, 반도체 장치 및 그의 제조 방법 및 접속 구조체
JP2019029135A (ja) * 2017-07-27 2019-02-21 日立化成株式会社 異方性導電フィルム及びその製造方法、並びに接続構造体及びその製造方法
CN111417488A (zh) 2017-12-22 2020-07-14 积水化学工业株式会社 焊锡粒子、导电材料、焊锡粒子的保管方法、导电材料的保管方法、导电材料的制造方法、连接结构体及连接结构体的制造方法
WO2020004512A1 (ja) * 2018-06-26 2020-01-02 日立化成株式会社 はんだペースト
WO2020004510A1 (ja) * 2018-06-26 2020-01-02 日立化成株式会社 異方性導電フィルム及びその製造方法並びに接続構造体の製造方法
CN112543693A (zh) * 2018-06-26 2021-03-23 昭和电工材料株式会社 焊料粒子
TWI886097B (zh) * 2018-06-26 2025-06-11 日商力森諾科股份有限公司 焊料粒及焊料粒的製造方法
EP4084051A4 (en) * 2019-12-27 2023-08-02 Resonac Corporation SOLDER BALL FORMING ELEMENT, METHOD OF MAKING A SOLDER BALL FORMING MEMBER AND METHOD OF MAKING AN ELECTRODE SUBSTRATE WITH A SOLDER BALL

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004080024A (ja) 2002-08-02 2004-03-11 Senju Metal Ind Co Ltd はんだボール配置シート、その製造方法およびはんだバンプ形成方法
WO2006043377A1 (ja) 2004-10-19 2006-04-27 Senju Metal Industry Co., Ltd. はんだバンプ形成用シートとその製造方法
JP2017157626A (ja) 2016-02-29 2017-09-07 三菱マテリアル株式会社 はんだバンプの形成方法

Also Published As

Publication number Publication date
CN115053330A (zh) 2022-09-13
EP4084051A4 (en) 2023-08-02
JPWO2021131905A1 (https=) 2021-07-01
US20230042727A1 (en) 2023-02-09
US12246398B2 (en) 2025-03-11
KR20220121832A (ko) 2022-09-01
JP7661892B2 (ja) 2025-04-15
WO2021131905A1 (ja) 2021-07-01
KR102924379B1 (ko) 2026-02-05
JP2025092692A (ja) 2025-06-19
US20250205799A1 (en) 2025-06-26
EP4084051A1 (en) 2022-11-02

Similar Documents

Publication Publication Date Title
KR102924379B1 (ko) 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법
JP7452418B2 (ja) 異方性導電フィルム及びその製造方法並びに接続構造体の製造方法
CN102413643A (zh) 焊球搭载方法及焊球搭载装置
JP2025092693A (ja) はんだバンプ形成用部材、はんだバンプ形成用部材の製造方法、及びはんだバンプ付き電極基板の製造方法
CN101459090B (zh) 在电子基板表面上形成焊料突起的方法
JP7841437B2 (ja) はんだバンプ付き部材の製造方法、及びはんだバンプ形成用部材
JP7480789B2 (ja) 接続構造体及び接続構造体の製造方法
KR20130100441A (ko) 복합구조의 범프를 사용하여 이루어지는 플립칩 패키지의 제조방법 및 이에 의해 제조된 플립칩 패키지
JP7400465B2 (ja) コアシェル型はんだ粒子、コアシェル型はんだ粒子の製造方法、異方性導電フィルム、及び異方性導電フィルムの製造方法
JP2023111125A (ja) はんだバンプ付き電極基板の製造方法
JP2021108309A (ja) はんだバンプ形成フィルム、及びはんだバンプ付き電極基板の製造方法
JP2021108347A (ja) 接続構造体の製造方法
JP2004327942A (ja) 導電性ボール配列用マスク

Legal Events

Date Code Title Description
A16 Divisional, continuation or continuation in part application filed

Free format text: ST27 STATUS EVENT CODE: A-0-1-A10-A16-DIV-PA0104 (AS PROVIDED BY THE NATIONAL OFFICE)

PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A16-div-PA0104

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

Q12 Application published

Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE)