KR20260037110A - 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 - Google Patents
땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법Info
- Publication number
- KR20260037110A KR20260037110A KR1020267003340A KR20267003340A KR20260037110A KR 20260037110 A KR20260037110 A KR 20260037110A KR 1020267003340 A KR1020267003340 A KR 1020267003340A KR 20267003340 A KR20267003340 A KR 20267003340A KR 20260037110 A KR20260037110 A KR 20260037110A
- Authority
- KR
- South Korea
- Prior art keywords
- solder
- particles
- electrode
- concave portion
- solder particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/087—Soldering or brazing jigs, fixtures or clamping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Soldering of electronic components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3465—Application of solder
- H05K3/3478—Application of solder preforms; Transferring prefabricated solder patterns
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/01—Manufacture or treatment
- H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
- H10W70/093—Connecting or disconnecting other interconnections thereto or therefrom, e.g. connecting bond wires or bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/011—Apparatus therefor
- H10W72/0112—Apparatus for manufacturing bump connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0113—Female die used for patterning or transferring, e.g. temporary substrate having recessed pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0338—Transferring metal or conductive material other than a circuit pattern, e.g. bump, solder, printed component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/041—Solder preforms in the shape of solder balls
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/0425—Solder powder or solder coated metal powder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3489—Composition of fluxes; Application thereof; Other processes of activating the contact surfaces
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2019-238418 | 2019-12-27 | ||
| JP2019238418 | 2019-12-27 | ||
| KR1020227023759A KR102924379B1 (ko) | 2019-12-27 | 2020-12-15 | 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 |
| PCT/JP2020/046763 WO2021131905A1 (ja) | 2019-12-27 | 2020-12-15 | はんだバンプ形成用部材、はんだバンプ形成用部材の製造方法、及びはんだバンプ付き電極基板の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020227023759A Division KR102924379B1 (ko) | 2019-12-27 | 2020-12-15 | 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20260037110A true KR20260037110A (ko) | 2026-03-17 |
Family
ID=76576072
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020267003340A Pending KR20260037110A (ko) | 2019-12-27 | 2020-12-15 | 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 |
| KR1020227023759A Active KR102924379B1 (ko) | 2019-12-27 | 2020-12-15 | 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020227023759A Active KR102924379B1 (ko) | 2019-12-27 | 2020-12-15 | 땜납 범프 형성용 부재, 땜납 범프 형성용 부재의 제조 방법, 및 땜납 범프 부착 전극 기판의 제조 방법 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US12246398B2 (https=) |
| EP (1) | EP4084051A4 (https=) |
| JP (2) | JP7661892B2 (https=) |
| KR (2) | KR20260037110A (https=) |
| CN (1) | CN115053330A (https=) |
| WO (1) | WO2021131905A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4084051A4 (en) * | 2019-12-27 | 2023-08-02 | Resonac Corporation | SOLDER BALL FORMING ELEMENT, METHOD OF MAKING A SOLDER BALL FORMING MEMBER AND METHOD OF MAKING AN ELECTRODE SUBSTRATE WITH A SOLDER BALL |
| JP7765730B2 (ja) * | 2021-12-08 | 2025-11-07 | 富士電機株式会社 | シート状はんだ |
| JP2023111125A (ja) * | 2022-01-31 | 2023-08-10 | 株式会社レゾナック | はんだバンプ付き電極基板の製造方法 |
| JP7819555B2 (ja) * | 2022-03-29 | 2026-02-25 | 株式会社レゾナック | はんだバンプ形成用部材 |
| CN119384768A (zh) | 2022-09-26 | 2025-01-28 | 株式会社 Lg新能源 | 电池单体和制造该电池单体的接合装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004080024A (ja) | 2002-08-02 | 2004-03-11 | Senju Metal Ind Co Ltd | はんだボール配置シート、その製造方法およびはんだバンプ形成方法 |
| WO2006043377A1 (ja) | 2004-10-19 | 2006-04-27 | Senju Metal Industry Co., Ltd. | はんだバンプ形成用シートとその製造方法 |
| JP2017157626A (ja) | 2016-02-29 | 2017-09-07 | 三菱マテリアル株式会社 | はんだバンプの形成方法 |
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| JP3207506B2 (ja) | 1991-08-28 | 2001-09-10 | 株式会社日立製作所 | 電子回路装置の製造方法 |
| JP2917595B2 (ja) * | 1991-07-19 | 1999-07-12 | 松下電器産業株式会社 | 金属ボールの形成方法 |
| US5643831A (en) * | 1994-01-20 | 1997-07-01 | Fujitsu Limited | Process for forming solder balls on a plate having apertures using solder paste and transferring the solder balls to semiconductor device |
| US6025258A (en) * | 1994-01-20 | 2000-02-15 | Fujitsu Limited | Method for fabricating solder bumps by forming solder balls with a solder ball forming member |
| JPH07249631A (ja) | 1994-01-20 | 1995-09-26 | Fujitsu Ltd | はんだバンプ及びはんだボールの製造方法及び半導体装置の製造方法 |
| TW250620B (en) * | 1994-05-31 | 1995-07-01 | At & T Corp | Method for interconnecting an electronic device using a transferable soldercarrying medium |
| KR100192766B1 (ko) * | 1995-07-05 | 1999-06-15 | 황인길 | 솔더볼을 입출력 단자로 사용하는 볼그리드 어레이 반도체 패키지의 솔더볼 평탄화 방법 및 그 기판구조 |
| JP2798011B2 (ja) * | 1995-07-10 | 1998-09-17 | 日本電気株式会社 | 半田ボール |
| JPH1013007A (ja) * | 1996-03-29 | 1998-01-16 | Ngk Spark Plug Co Ltd | 半田バンプを有する配線基板及びその製造方法及び平坦化治具 |
| JP3315871B2 (ja) | 1996-09-03 | 2002-08-19 | 日本特殊陶業株式会社 | 半田バンプを有する配線基板及びその製造方法 |
| US6656750B1 (en) * | 1999-04-29 | 2003-12-02 | International Business Machines Corporation | Method for testing chips on flat solder bumps |
| US6245595B1 (en) * | 1999-07-22 | 2001-06-12 | National Semiconductor Corporation | Techniques for wafer level molding of underfill encapsulant |
| EP1074844A3 (en) * | 1999-08-03 | 2003-08-06 | Lucent Technologies Inc. | Testing integrated circuits |
| US7156361B1 (en) * | 1999-09-02 | 2007-01-02 | Micron Technology, Inc. | Method and apparatus for forming metal contacts on a substrate |
| JP3872318B2 (ja) * | 2001-08-17 | 2007-01-24 | 松下電器産業株式会社 | 半田バンプ形成方法および半田バンプ接合構造 |
| JP4458835B2 (ja) * | 2003-12-15 | 2010-04-28 | 東レエンジニアリング株式会社 | 半田バンプの形成方法及びその装置 |
| JP4729963B2 (ja) * | 2005-04-15 | 2011-07-20 | パナソニック株式会社 | 電子部品接続用突起電極とそれを用いた電子部品実装体およびそれらの製造方法 |
| KR101408730B1 (ko) * | 2008-01-07 | 2014-06-17 | 세메스 주식회사 | 솔더 범프들을 형성하기 위한 템플릿 및 이의 제조 방법 |
| JP5118574B2 (ja) | 2008-08-07 | 2013-01-16 | 三井金属鉱業株式会社 | はんだ粉及びはんだペースト |
| TWI462676B (zh) * | 2009-02-13 | 2014-11-21 | 千住金屬工業股份有限公司 | The solder bumps for the circuit substrate are formed using the transfer sheet |
| KR101678749B1 (ko) * | 2011-10-26 | 2016-12-06 | 히타치가세이가부시끼가이샤 | 리플로우 필름, 땜납 범프 형성 방법, 땜납 접합의 형성 방법 및 반도체 장치 |
| JP5889160B2 (ja) * | 2012-10-17 | 2016-03-22 | 三菱電機株式会社 | 電子機器の製造方法 |
| JP6009350B2 (ja) * | 2012-12-28 | 2016-10-19 | 花王株式会社 | 電子部品が接合した回路基板の製造方法 |
| GB2523983A (en) * | 2013-12-17 | 2015-09-16 | Conpart As | Bonded assemblies with pre-deposited polymer balls on demarcated areas and methods of forming such bonded assemblies |
| CN104465424A (zh) * | 2014-12-12 | 2015-03-25 | 南通富士通微电子股份有限公司 | 一种金属凸点制作方法 |
| KR102398451B1 (ko) * | 2015-01-13 | 2022-05-16 | 데쿠세리아루즈 가부시키가이샤 | 범프 형성용 필름, 반도체 장치 및 그의 제조 방법 및 접속 구조체 |
| JP2019029135A (ja) * | 2017-07-27 | 2019-02-21 | 日立化成株式会社 | 異方性導電フィルム及びその製造方法、並びに接続構造体及びその製造方法 |
| CN111417488A (zh) | 2017-12-22 | 2020-07-14 | 积水化学工业株式会社 | 焊锡粒子、导电材料、焊锡粒子的保管方法、导电材料的保管方法、导电材料的制造方法、连接结构体及连接结构体的制造方法 |
| WO2020004512A1 (ja) * | 2018-06-26 | 2020-01-02 | 日立化成株式会社 | はんだペースト |
| WO2020004510A1 (ja) * | 2018-06-26 | 2020-01-02 | 日立化成株式会社 | 異方性導電フィルム及びその製造方法並びに接続構造体の製造方法 |
| CN112543693A (zh) * | 2018-06-26 | 2021-03-23 | 昭和电工材料株式会社 | 焊料粒子 |
| TWI886097B (zh) * | 2018-06-26 | 2025-06-11 | 日商力森諾科股份有限公司 | 焊料粒及焊料粒的製造方法 |
| EP4084051A4 (en) * | 2019-12-27 | 2023-08-02 | Resonac Corporation | SOLDER BALL FORMING ELEMENT, METHOD OF MAKING A SOLDER BALL FORMING MEMBER AND METHOD OF MAKING AN ELECTRODE SUBSTRATE WITH A SOLDER BALL |
-
2020
- 2020-12-15 EP EP20907474.9A patent/EP4084051A4/en active Pending
- 2020-12-15 JP JP2021567304A patent/JP7661892B2/ja active Active
- 2020-12-15 KR KR1020267003340A patent/KR20260037110A/ko active Pending
- 2020-12-15 US US17/788,527 patent/US12246398B2/en active Active
- 2020-12-15 CN CN202080094145.6A patent/CN115053330A/zh active Pending
- 2020-12-15 WO PCT/JP2020/046763 patent/WO2021131905A1/ja not_active Ceased
- 2020-12-15 KR KR1020227023759A patent/KR102924379B1/ko active Active
-
2025
- 2025-02-06 US US19/047,083 patent/US20250205799A1/en active Pending
- 2025-04-02 JP JP2025060971A patent/JP2025092692A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004080024A (ja) | 2002-08-02 | 2004-03-11 | Senju Metal Ind Co Ltd | はんだボール配置シート、その製造方法およびはんだバンプ形成方法 |
| WO2006043377A1 (ja) | 2004-10-19 | 2006-04-27 | Senju Metal Industry Co., Ltd. | はんだバンプ形成用シートとその製造方法 |
| JP2017157626A (ja) | 2016-02-29 | 2017-09-07 | 三菱マテリアル株式会社 | はんだバンプの形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115053330A (zh) | 2022-09-13 |
| EP4084051A4 (en) | 2023-08-02 |
| JPWO2021131905A1 (https=) | 2021-07-01 |
| US20230042727A1 (en) | 2023-02-09 |
| US12246398B2 (en) | 2025-03-11 |
| KR20220121832A (ko) | 2022-09-01 |
| JP7661892B2 (ja) | 2025-04-15 |
| WO2021131905A1 (ja) | 2021-07-01 |
| KR102924379B1 (ko) | 2026-02-05 |
| JP2025092692A (ja) | 2025-06-19 |
| US20250205799A1 (en) | 2025-06-26 |
| EP4084051A1 (en) | 2022-11-02 |
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