KR20100063093A - 유전체 막 경화 방법 - Google Patents

유전체 막 경화 방법 Download PDF

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Publication number
KR20100063093A
KR20100063093A KR1020107006708A KR20107006708A KR20100063093A KR 20100063093 A KR20100063093 A KR 20100063093A KR 1020107006708 A KR1020107006708 A KR 1020107006708A KR 20107006708 A KR20107006708 A KR 20107006708A KR 20100063093 A KR20100063093 A KR 20100063093A
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South Korea
Prior art keywords
dielectric film
curing
low
exposing
substrate
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KR1020107006708A
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English (en)
Korean (ko)
Inventor
준준 리우
도렐 아이 토마
에릭 엠 리
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도쿄엘렉트론가부시키가이샤
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Publication of KR20100063093A publication Critical patent/KR20100063093A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/08—Planarisation of organic insulating materials

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  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1020107006708A 2007-09-13 2008-09-12 유전체 막 경화 방법 Ceased KR20100063093A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/854,937 US20090075491A1 (en) 2007-09-13 2007-09-13 Method for curing a dielectric film
US11/854,937 2007-09-13

Publications (1)

Publication Number Publication Date
KR20100063093A true KR20100063093A (ko) 2010-06-10

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KR1020107006708A Ceased KR20100063093A (ko) 2007-09-13 2008-09-12 유전체 막 경화 방법

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US (1) US20090075491A1 (https=)
JP (1) JP2011502343A (https=)
KR (1) KR20100063093A (https=)
CN (1) CN101816059B (https=)
TW (1) TWI431689B (https=)
WO (1) WO2009036249A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200083309A (ko) * 2018-12-28 2020-07-08 주식회사 케이엠디피 웨이퍼 경화 장치 및 이를 구비한 웨이퍼 경화 시스템

Families Citing this family (373)

* Cited by examiner, † Cited by third party
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