KR20090130038A - 기판 반송장치 - Google Patents

기판 반송장치 Download PDF

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Publication number
KR20090130038A
KR20090130038A KR1020097021163A KR20097021163A KR20090130038A KR 20090130038 A KR20090130038 A KR 20090130038A KR 1020097021163 A KR1020097021163 A KR 1020097021163A KR 20097021163 A KR20097021163 A KR 20097021163A KR 20090130038 A KR20090130038 A KR 20090130038A
Authority
KR
South Korea
Prior art keywords
substrate
conveyor
support
board
transfer
Prior art date
Application number
KR1020097021163A
Other languages
English (en)
Korean (ko)
Inventor
겐스케 히라타
요시유키 와다
Original Assignee
가부시키가이샤 아이에이치아이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아이에이치아이 filed Critical 가부시키가이샤 아이에이치아이
Publication of KR20090130038A publication Critical patent/KR20090130038A/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
KR1020097021163A 2007-04-11 2008-02-04 기판 반송장치 KR20090130038A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007103757A JP5152469B2 (ja) 2007-04-11 2007-04-11 基板搬送装置
JPJP-P-2007-103757 2007-04-11

Publications (1)

Publication Number Publication Date
KR20090130038A true KR20090130038A (ko) 2009-12-17

Family

ID=39863612

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097021163A KR20090130038A (ko) 2007-04-11 2008-02-04 기판 반송장치

Country Status (5)

Country Link
JP (1) JP5152469B2 (ja)
KR (1) KR20090130038A (ja)
CN (1) CN101616855A (ja)
TW (1) TW200844027A (ja)
WO (1) WO2008126454A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101172764B1 (ko) 2009-10-08 2012-08-09 로체 시스템즈(주) 기판 처리장치 및 이를 운용하는 기판 이송방법
CN102280397A (zh) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 一种晶圆输送分配装置及其方法
JP5224612B2 (ja) * 2010-09-09 2013-07-03 東京エレクトロン株式会社 基板受渡装置及び基板受渡方法
CN102602695A (zh) * 2011-01-25 2012-07-25 佶新科技股份有限公司 基板输送分类装置
KR101824571B1 (ko) 2011-04-21 2018-03-15 주식회사 포틱스 기판 이송 장치
TWI467687B (zh) * 2011-11-29 2015-01-01 Tera Automation Corp Ltd Glass substrate transfer device
CN102514971A (zh) * 2011-12-08 2012-06-27 深圳市鑫联达包装机械有限公司 一种能够连续传送纸张的传输系统及其传输方法
CN103183233A (zh) * 2011-12-29 2013-07-03 黄正栋 基板输送装置
KR101651253B1 (ko) * 2014-05-29 2016-08-26 주식회사 탑 엔지니어링 스크라이브 장치용 이송 밸트 및 이를 갖는 스크라이브 장치
JP6456177B2 (ja) * 2015-02-12 2019-01-23 株式会社ディスコ ウェーハ処理システム
CN105661603B (zh) * 2015-12-26 2017-11-03 河南勃达微波装备股份有限公司 一种枣片玻璃连续自动进出装置及方法
JP2023511627A (ja) * 2020-01-27 2023-03-20 コーニング インコーポレイテッド インライン工程でガラス基板のエッジトリミングを行うための方法および装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01140831U (ja) * 1988-03-22 1989-09-27
JP4052826B2 (ja) * 2001-10-22 2008-02-27 株式会社日立ハイテクノロジーズ マスクと露光対象基板との搬送に兼用できる搬送アーム及びそれを備えた露光装置

Also Published As

Publication number Publication date
CN101616855A (zh) 2009-12-30
JP2008260605A (ja) 2008-10-30
TW200844027A (en) 2008-11-16
JP5152469B2 (ja) 2013-02-27
WO2008126454A1 (ja) 2008-10-23

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A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application